A compact tri‐band microwave resonator for ethanol gas detection

This article presents the design, simulation, fabrication, and testing of a compact two‐port microwave resonator coated with nanomaterials for ethanol gas sensing applications. The proposed gas sensor consists of a transmission line loaded with three triangular split ring resonators for ethanol detection at three frequency bands viz. 2.2, 4.6, and 6.3 GHz. The transmission line has all‐pass characteristics in which band gaps are introduced using three split ring resonators. The TiO₂ and ZnO nanorods are used as sensitive layers for the proposed sensing application. The nanorods, which are grown on a glass substrate of thickness 1 mm, are loaded on to the two‐port microwave resonator making the device sensitive to ethanol. The microwave behavior of the sensor is analyzed using the scattering parameters. The absorption of the ethanol gas causes frequency detuning which is used to analyze the presence of ethanol and its concentration. From the experiments, it is understood that there is an increase in the frequency shift with an increase in the concentration of ethanol gas. The sensing device with ZnO as a sensitive layer showed a higher average sensitivity of 2.35 compared to TiO₂ whose average sensitivity is 1.29.     

Selective gas sensing response from different loading of Ag in sol-gel mesoporous titania powders

Bare and Ag loaded TiO₂ (0.05, 0.5, and 5.0 mol% Ag) powders prepared by sol-gel process have been used for the detection of ethanol, LPG, acetone and toluene gases. These materials were well characterized by X-ray powder diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), high-resolution TEM (HRTEM), X-ray photoelectron spectroscopy (XPS) and Brunauer-Emmett-Teller (BET) specific surface area analysis techniques. Specific surface area increased with increasing Ag loading in these mesoporous materials. A thorough TEM/HRTEM investigation with X-ray maps of the modified particles shows the extent of TiO₂ surface coverage by Ag nanoparticles. From the comparative study of the sensor response of Ag-TiO₂ powders for various gases, it is observed that each Ag loading resulted in the highest response towards a particular gas or in other words, every gas responded best towards a particular Ag loading of the sensor material, i.e. 0.05 mol% Ag-TiO₂ sensor showed highest response towards ethanol, 0.5 mol% Ag-TiO₂ sensor showed best response towards toluene, whereas, bare TiO₂ proved to be the best sensor for both acetone and LPG gases. This establishes that Ag loading is not required for detection of acetone and LPG gases. On the basis of detailed materials characterization, a mechanism for the gas sensing response of each analyte has been discussed.     

A selective room temperature formaldehyde gas sensor using TiO2 nanotube arrays

A new gas sensor using TiO₂ nanotube arrays was fabricated and explored for formaldehyde detection at room temperature. Highly ordered vertically grown TiO₂ nanotube arrays were synthesized by using the conventional electrochemical anodization process. The sensor using the fabricated nanotube arrays as the sensing elements demonstrated a good response to different concentrations of formaldehyde from 10 to 50 ppm and a very good selectivity over other reducing gas species such as ethanol and ammonia at room temperature. While the exact sensing mechanism is unclear, some possibilities are briefly discussed.     

Solid-state potentiometric SO2 sensor combining NASICON with V2O5-doped TiO2 electrode

A compact tubular sensor based on NASICON (sodium super ionic conductor) and V₂O₅-doped TiO₂ sensing electrode was designed for the detection of SO₂. In order to reduce the size of the sensor, a thick-film of NASICON was formed on the outer surface of a small Al₂O₃ tube; furthermore, a thin layer of V₂O₅-doped TiO₂ with nanometer size was attached on the NASICON as a sensing electrode. This paper investigated the influence of V₂O₅ doping and sintering temperature on the characteristics of the sensor. The sensor attached with 5 wt% V₂O₅-doped TiO₂ sintered at 600 °C exhibited excellent sensing properties to 1–50 ppm SO₂ in air at 200–400 °C. The EMF value of the sensor was almost proportional to the logarithm of SO₂ concentration and the sensitivity (slope) was −78 mV/decade at 300 °C. It was also seen that the sensor showed a good selectivity to SO₂ against NO, NO₂, CH₄, CO, NH₃ and CO₂. Moreover, the sensor had speedy response kinetics to SO₂ too, the 90% response time to 50 ppm SO₂ was 10 s, and the recovery time was 35 s. On the basis of XPS analysis for the SO₂-adsorbed sensing electrode, a sensing mechanism involving the mixed potential at the sensing electrode was proposed.     

Microstructure control of TiO2 nanotubular films for improved VOC sensing

Porous gas sensing films composed of TiO₂ nanotubes were fabricated for the detection of volatile organic compounds (VOCs), such as alcohol and toluene. In order to control the microstructure of TiO₂ nanotubular films, ball-milling treatments were used to shorten the length of TiO₂ nanotubes and to improve the particle packing density of the films without destroying their tubular morphology and crystal structure. The ball-milling treatment successfully modified the porosity of the gas sensing films by inducing more intimate contacts between nanotubes, as confirmed by scanning electron microscopy (SEM) and mercury porosimetry. The sensor using nanotubes after the ball-milling treatment for 3 h exhibited an improved sensor response and selectivity to toluene (50 ppm) at the operating temperature of 500 °C. However, an extensive ball-milling treatment did not enhance the original sensor response, probably owing to a decrease in the porosity of the film. The results obtained indicated the importance of the microstructure control of sensing layers in terms of particle packing density and porosity for detecting large sized organic gas molecules.     

Synthesis and enhanced gas sensing properties of crystalline CeO2/TiO2 core/shell nanorods

Crystalline CeO₂/TiO₂ core/shell nanorods were fabricated by a hydrothermal method and a subsequent annealing process under the hydrogen and air atmosphere. The thickness of the outer shell composed of crystal TiO₂ nanoparticles can be tuned in the range of 5-11 nm. The crystal core/shell nanorods exhibited enhanced gas-sensing properties to ethanol vapor in terms of sensor response and selectivity. The calculated sensor response based on the change of the heterojunction barrier formed at the interface between CeO₂ and TiO₂ is agreed with the experimental results, and thus the change of the heterojunction barrier at different gas atmosphere can be used to explain the enhanced ethanol sensing properties.     

Highly accurate and sensitive surface plasmon resonance sensor based on channel photonic crystal waveguides

A highly sensitive surface plasmon resonance (SPR) sensor based on channel photonic crystal waveguide (PCW) is proposed. The PCW is based on widely used lithographic and nano-fabrication compatible materials like TiO₂ and SiO₂. Gold has been used as a SPR active metal. By rigorously optimizing the different waveguide parameters, we have shown that there is significant transfer of modal power around phase-matching or resonance wavelength which has been utilized to design a compact and highly sensitive sensor for lab on chip. The ultra narrow width (∼765 pm for an interaction length of 10 mm) of surface plasmon resonance curve and sensitivity as high as 7500 nm-RIU⁻¹ will open a new window for bio-chemical sensing applications.     

Preliminary evaluation of the influence of the temperature on the performance of a piezoresistive pressure sensor based on a-SiC film

In order to evaluate the potential of amorphous silicon carbide (a-SiC) films for piezoresistive sensors applications, a pressure sensor has been developed based on this material. The deposition conditions and properties of a-SiC films deposited on thermally oxidized (100) Si substrates by two techniques enhanced by plasma, PECVD (plasma enhanced chemical vapor deposition) and RF magnetron sputtering, are briefly described and compared. Among the SiC films produced, we choose the nitrogen-doped PECVD SiC film to fabricate the piezoresistors of the sensor. The structure of the sensor consists of six a-SiC piezoresistors, configured in Wheatstone bridge, on a SiO₂/Si square diaphragm. The sensor was tested for applied pressure ranging from 0 to 12 psi and supply voltage of 12 V. A preliminary study of the influence of the temperature on the performance of the sensor was performed by experimental measurements and theoretical investigations.     

Characterization and humidity sensing properties of Bi0.5Na0.5TiO3-Bi0.5K0.5TiO3 powder synthesized by metal-organic decomposition

Bi_0.5Na_0.5TiO₃-Bi_0.5K_0.5TiO₃ (BNT-BKT) powder is synthesized by a metal-organic decomposition method and characterized by field-emission scanning electron microscopy (FE-SEM), transmission electron microscopy (TEM), and X-ray diffraction (XRD). A humidity sensor, which is consisted of five pairs of Ag-Pd interdigitated electrodes and an Al₂O₃ ceramic substrate, is fabricated by spin-coating the BNT-BKT powder on the substrate. Good humidity sensing properties such as high response value, short response and recovery times, and small hysteresis are observed in the sensing measurement. The impedance changes more than four orders of magnitude within the whole humidity range from 11% to 95% relative humidity (RH) at 100 Hz. The response time and recovery time are about 20 and 60 s, respectively. The maximum hysteresis is around 4% RH. The results indicate that BNT-BKT powder is of potential applications for fabricating high performance humidity sensors.     

Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics

SnO₂ nanorods were successfully deposited on 3″ Si/SiO₂ wafers by inductively coupled plasma-enhanced chemical vapour deposition (PECVD) and a wafer-level patterning of nanorods layer for miniaturized solid state gas sensor fabrication were performed. Uniform needle-shaped SnO₂ nanorods in situ grown were obtained under catalyst- and high temperature treatment-free growth condition. These nanorods have an average diameter between 5 and 15 nm and a length of 160-300 nm. The SnO₂-nanorods based gas sensors were tested towards NH₃ and CH₃OH and gas sensing tests show remarkable response, showing promising and repeatable results compared with the SnO₂ thin films gas sensors.     

Polyaniline–TiO2 nano-composite-based trimethylamine QCM sensor and its thermal behavior studies

Inorganic/organic composites are very attractive due to synergetic behavior and a wide range of potential use. A polyaniline–TiO₂ nano-composite, obtained by combination of chemical polymerization and a sol–gel method, was deposited on the electrode of quartz crystal to implement a quartz crystal microbalance (QCM) chemical sensor. The morphology of the composite film was studied by scanning electron microscopy (SEM) measurements. The coated quartz crystal and a non-coated quartz crystal were mounted in a sealed chamber, and their frequency difference was monitored. When analyte vapor was injected into the chamber, gas absorption decreased the frequency of the coated quartz crystal and thereby caused an increase of the frequency difference between the two crystals. The frequency difference change response towards trimethylamine was evident and could be recovered by N₂ purgation easily. The calibration curve towards trimethylamine, its long-term stability and selectivity were investigated. The thermal behavior of the sensing characteristics was compared with that of a polyaniline QCM sensor. Fourier transform infrared (FTIR) spectra of polyaniline and polyaniline–TiO₂ nano-composite and QCM data under various conditions were used to study the effect of thermal treatment.     

Detection of ammonia in the ppt range based on a composite optical waveguide pH sensor

An optical waveguide (OWG) pH sensor with two thin guiding layers (composite OWG) was fabricated, and its application to sensing extremely low concentrations of ammonia was demonstrated. The highly sensitive element based on a titanium dioxide (TiO₂) film was deposited onto the surface of a potassium ion (K⁺) exchanged glass OWG by RF sputtering. The surface of the TiO₂ film was coated with a thin film of a pH indicator dye (bromothymol blue, BTB) by spin coating. With optimum thickness of BTB film at about 46 nm and of TiO₂ films at 18–20 nm, this system proved to be an extremely sensitive ammonia sensor. The experimental results of the optimum conditions on BTB and TiO₂ film thicknesses were close to theoretically calculated values. The sensor easily detected 1 parts per trillion (ppt) ammonia reversibly, and had a short response time. The present sensor is also characterized by low cost, simple structure and facile fabrication.     

基于互补电阻开关的忆阻乘法器设计

现有的忆阻算术逻辑多采用单个忆阻器作为存储单元,在忆阻交叉阵列中易受到漏电流以及设计逻辑电路时逻辑综合复杂度高的影响,导致当前乘法器设计中串行化加法操作的延时和面积开销增加。互补电阻开关具有可重构逻辑电路的运算速度和抑制忆阻交叉阵列中漏电流的性能,是实现忆阻算术逻辑的关键器件。提出一种弱进位依赖的忆阻乘法器。为提升忆阻器的逻辑性能,基于互补电阻开关电路结构,设计两种加法器的优化方案,简化操作步骤。在此基础上,通过改进传统的乘法实现方式,并对进位数据进行拆解,降低运算过程中进位数据之间的依赖性,实现并行化的加法运算。将设计的乘法器映射到混合CMOS/crossbar结构中,乘法计算性能得到大幅提高。在Spice仿真环境下验证所提乘法器的可行性。仿真实验结果表明,与现有的乘法器相比,所提乘法器的延时开销从O(n²)降低为线性级别,同时面积开销降低约70%。     

Novel NO2 gas sensor based on cuprous oxide thin films

In this paper we present the results concerning the characterization of cuprous oxide thin films fabricated by chemical deposition and rapid photothermal processing (RPP) method. The growth kinetic effects and influence of the RPP temperature on the chemical deposited cuprous oxide thin films microstructures were investigated by scanning electron microscopy and energy dispersive X-ray spectrometry. The effect of the electrical resistivity change of Cu₂O thin film layer in the presence of NO₂ is used for gas sensing measurements. Cuprous oxide layers are used as NO₂ gas sensitive material in a novel gas sensor element. It can be shown from experimental results that chemical bath deposition and rapid photothermal processing not only allows green materials preparation but also improves the performance and reliability over conventional methods of the production of sensors for continuous environmental monitoring.     

Synthesis and characterisation of nanosized TiO2-ZrO2 binary system prepared by an aqueous sol-gel process: Physical and sensing properties

Nanostructured TiO₂-ZrO₂ thin films and powders were prepared by a straightforward aqueous particulate sol-gel route. Titanium (IV) isopropoxide and zirconium (IV) acetate hydrate were used as precursors, and hydroxypropyl cellulose was used as a polymeric fugitive agent in order to increase the specific surface area. X-ray diffraction (XRD) and Fourier transform infrared (FTIR) spectroscopy revealed that the powder were crystallised at the low temperature of 500 °C, containing anatase-TiO₂ and tetragonal-ZrO₂ phases. Furthermore, it was found that ZrO₂ retarded the anatase-to-rutile transformation up to 900 °C. The activation energies for crystallite growth of TiO₂ and ZrO₂ components in the binary system were calculated 10.16 and 3.12 kJ/mol, respectively. Transmission electron microscope (TEM) image showed that one of the smallest crystallite sizes was obtained for TiO₂-ZrO₂ binary mixed oxide, being 5 nm at 500 °C. Field emission scanning electron microscope (FESEM) analysis revealed that the deposited thin films had nanostructured morphology with the average grain size of 20 nm at 500 °C and 36 nm at 900 °C. Thin films produced under optimised conditions showed excellent microstructural properties for gas sensing applications. They exhibited a remarkable response towards low concentrations of CO and NO₂ gases at low operating temperature of 150 °C, resulted in an increase of thermal stability of sensing films as well as a decrease in the power consumption. Furthermore, calibration curves revealed that TiO₂-ZrO₂ sensor follows the power law, S = A[gas]^B (where S is sensor response, coefficients A and B are constants and [gas] is gas concentration) for the two types of gases, and it has excellent capability for the detection of low gas concentrations.     

Thermal stability, electrical conductivity and ammonia sensing studies on p-toluenesulfonic acid doped polyaniline:titanium dioxide (pTSA/Pani:TiO2) nanocomposites

Electrically conductive p-toluenesulfonic acid (pTSA) doped polyaniline (Pani):titanium dioxide (TiO₂) nanocomposites (pTSA/Pani:TiO₂) were prepared by in situ polymerization of aniline with TiO₂ nanoparticles. Thus formed pTSA/Pani:TiO₂ nanocomposites were characterized by Fourier transform infra-red (FTIR) spectroscopy, X-ray diffraction (XRD), scanning electron microscopy (SEM) and thermogravimetric analysis (TGA). The sensitivity of the nanocomposites towards low concentrations of aqueous ammonia was examined and compared with that of the pure Pani. It was found that the resistivity of pTSA doped nanocomposites increases on exposure to ammonia at room temperature. The nanocomposites were found to possess superior ammonia sensing capacity as compared to pure Pani and it showed linear relationship between the responses and the ammonia concentration. The Fourier transform infrared (FTIR) spectroscopy was used to explain the sensing mechanism. A novel mechanism for the interaction process between the sensing material and ammonia has also been proposed.     

Using a TiO2/ZnO double-layer film for improving the sensing performance of ZnO based NO gas sensor

NO gas sensors, based on ZnO thin film (ZnO_film), TiO₂ nanoparticulate film (TiO₂NP), and TiO₂NP/ZnO_film double-layer film, were fabricated, and their sensing characteristics towards NO gas were investigated in this study. The maximal response of a ZnO_film deposited onto a rougher Al₂O₃ substrate, towards NO gas, was higher than that of a ZnO_film deposited on a smoother glass substrate. Although the sensing response of the TiO₂NPs itself towards NO gas was minute, the TiO₂NP/ZnO_film double-layer film showed enhanced response as compared with TiO₂NP or ZnO_film single-layer film. In addition, the sensor response of the TiO₂NP/ZnO_film double-layer film was strongly influenced by the annealing time for the film preparation; the maximum response to NO was enhanced about 6.2 times as the annealing time was increased from 30 min to 2 h. Based on the XPS results, the increase in the transition zone between TiO₂NP and ZnO_film along with the appearance of Ti³⁺ state was noticed when the annealing time was increased. With the high sensitive TiO₂NP/ZnO_film/Al₂O₃ electrode, the limit of detection (S/N = 3) can be achieved at 8.8 ppb. The double-layer TiO₂NP/ZnO_film also showed improved selectivities with respect to NO₂ and CO.     

α-MoO3/TiO2 core/shell nanorods: Controlled-synthesis and low-temperature gas sensing properties

Crystalline α-MoO₃/TiO₂ core/shell nanorods are fabricated by a hydrothermal method and subsequent annealing processes under H₂/Ar flow and in the ambient atmosphere. The shell layer is composed of crystalline TiO₂ particles with a diameter of 2-6 nm, and its thickness can be easily controlled in the range of 15-45 nm. The core/shell nanorods show enhanced sensing properties to ethanol vapor compared to bare α-MoO₃ nanorods. The sensing mechanism is different from that of other one-dimensional metal oxide core/shell nanostructures due to very weak response of TiO₂ nanoparticles to ethanol. The enhanced sensing properties can be explained by the change of type II heterojunction barrier formed at the interface between α-MoO₃ and TiO₂ in the different gas atmosphere. The present results demonstrate a novel sensing mechanism available for gas sensors with high performance.     

Enhanced sensor response of Ni-doped SnO2 hollow spheres

A novel sensing material of Ni-doped SnO₂ hollow spheres was prepared and characterized by X-ray diffraction, X-ray photoelectron spectroscopy, inductively coupled plasma-optical emission spectroscopy and transmission electron microscopy. Gas sensing properties of the sensor fabricated from the as-prepared Ni-doped SnO₂ hollow spheres were systematically investigated and compared with those of pristine SnO₂ hollow spheres. Results showed that the Ni-doped sensor had a good selectivity to higher alcohols such as n-butanol with much higher response, while the undoped sensor exhibited poor response to all the tested gases with poor selectivity. The enhanced sensor performances are probably attributed to the formation of p-n heterojunctions between p-type NiO and n-type SnO₂. It also suggests that the Ni-dopant is a promising substitute for noble metal additives to fabricate sensor materials with a low cost.