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为了检测长光程情况或多组分光学镜头逐片装校中的波面,提出一种以会聚光波直接作为干涉测试光源的会聚光移相剪切干涉方法,阐述了基于迈克耳孙干涉仪原理的会聚光横向剪切干涉光路,建立了会聚光横向剪切波面的数学表达式,并与一般横向剪切干涉相比较,分析了剪切量和波面偏移量的特征,且引入移相干涉技术求取剪切波面.结果表明,会聚光横向剪切移相干涉测试,能够实时测试会聚光的波面质量,峰谷值(PV)的重复性为0.022λ,均方根(RMS)值的重复性为0.014λ,并与Zygo干涉仪的测量结果进行了对比,验证会聚光剪切移相干涉的可行性. 相似文献
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为了实现斐索型干涉仪的动态干涉测试,研究了一种采用短相干光源的动态斐索干涉仪。以中心波长为638 nm、带宽为0.1 nm的二极管泵浦固体激光器作为光源,与偏振延迟装置结合得到一对短相干正交线偏振光,通过调节光源模块中两支线偏振光的光程差来匹配斐索干涉腔的长度,从而获取一对光程差为0的相干光束。使用偏振相机采集得到四幅位相依次相差/2的移相干涉图,按照四步移相算法解算相位,恢复待测元件的表面面形。采用光强归一化算法有效地抑制了偏振态误差导致的移相干涉图光强不一致在最终恢复波面中引入的一倍频波纹误差。采用琼斯矢量和琼斯矩阵分析了干涉图对比度与s光和p光光强比值的关系,并分析了1/4波片方位角误差对最终恢复波面的影响。利用该装置和Zygo GPI XP型干涉仪测量了同一块光学平晶,其均方根值相差0.024,峰谷值相差0.026。 相似文献
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移相式激光干涉仪抗振技术的研究进展 总被引:5,自引:0,他引:5
现代移相式激光干涉仪在光学表面检测和光学系统像质评价中得到广泛的应用,但移相干涉术容易受到环境振动的干扰,时域移相的采样准确性受到影响,难以达到高精度测量的目标。为了进行振动环境下的在线测量,必须采用有效的抗振技术,目前具有这种抗振功能的干涉测试技术日益受到重视。从移相干涉图的采集、干涉仪的光学结构、振动的探测与补偿等角度介绍了移相干涉仪抗振技术的研究进展。 相似文献
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苏学红 《电子工业专用设备》1995,24(4):28-31
移相式波面数字干涉仪是国际上八十年代出现的一种最先进的光学检测设备,它采用计算机图象处理技术对干涉图形进行实时动态采样处理,从而实现了光学面形的定量测量和形象化图形显示。本文介绍了我所用QGY—1型激光球面干涉仪改造成的移相式激光波面数字干涉仪,在光刻镜头生产中的应用。 相似文献
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为实现多表面干涉测量中强度叠加干涉信号的分离和相位解调,提出了一种基于频率校正的多表面波长移相干涉测量算法,可实现透明被测件各表面面形的同时重建。波长移相干涉技术可以根据各干涉谐波光程差(optical path difference, OPD)的不同使各表面干涉谐波具有不同的移相值,该差异为各信号分离和相位解调提供了基础。在现有的多表面测量技术中,往往通过被测件的腔长和光学厚度等信息对谐波频率进行粗估,但估计精度较低,且无法应对移相误差。因此,本文通过多点平均和频率校正实现了各干涉谐波频率的精确提取,能够有效消除异常值和加性高斯噪声(additive Gaussian noise, AGN)对频率求解精度的影响,并且仅通过干涉图之间的加权操作便可同时对各谐波相位进行解调,对比分析和实验结果验证了所提出的算法的可靠性。 相似文献
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结合莫尔条纹、傅里叶变换和数字相移技术实现了对单幅干涉条纹图的高精度相位计算和波面重建.首先,用计算机生成与被处理干涉条纹频率相近的数字相移条纹图,与实际干涉条纹图叠加得到相移莫尔条纹图;然后,利用傅里叶变换、双频滤波、傅里叶反变换和相移技术得到干涉条纹图的相位数据;最后利用波面拟合技术重构原干涉条纹图对应的波面形状.研究结果表明,该技术不仅消除了干涉仪硬件相移产生的非线性误差和滤波时的频谱移中误差,高精度获得了单幅干涉条纹图对应的波前,而且简化了系统的机械结构.同时,对环境的要求明显降低,特别适用于生产现场的检测. 相似文献
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利用空域滤波虚光栅叠栅法提取干涉图波面 总被引:1,自引:0,他引:1
虚光栅叠栅条纹法是一种利用单幅干涉图提取波面信息的方法,为了解决叠栅条纹的滤波问题,提出了一种基于高斯函数的空域滤波法。利用高斯函数在空域中对叠栅条纹图进行模糊处理,滤除不需要的高频分量,仅保留包含波面相位信息的低频分量。重点研究了高斯函数滤波窗口的选择和干涉图的载频之间的对应关系。该方法具有计算量小、易于选取滤波窗口的优点。对一光学平面的面形测量结果表明,利用空域滤波虚光栅叠栅法提取的波面[峰谷(PV)值为0.080λ,均方根(RMS)值为0.020λ,λ=632.8nm]与利用Zygo GPI干涉仪的四步移相法得到的波面(PV值为0.079λ,RMS值为0.017λ)相吻合。 相似文献
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利用CCD取代接触式干涉仪的光学放大镜接收干涉条纹,结合8031单片机并通过对干涉条纹移动量的测量,实现了对量块的自动测量。测量中以二级量块做标准量块来对三级量块进行测量。测量结果表明测量误差小于0.1μm。 相似文献
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Thermo-optical properties of cadmium zinc sulfide (CdZnS) nanoparticle colloids are investigated by interferometry technique. The nanoparticle colloids are synthesized by an improved co-precipitation method. Transmission electron microscopy, UV–vis spectrometry and X-ray diffraction analysis are used to characterize the CdZnS nanocrystals. The thermo-optic coefficient of the colloids has been determined using a Fizeau interferometer. For this purpose, the interference patterns are deformed by a photothermal phase shift which is locally induced in the sample by the focused pump laser beam. The change in the refractive index at this region imposes a shift on the phase of the fringe patterns. Fourier analysis performed on the interference patterns allows us to estimate the values of the thermo-optic coefficient and nonlinear refractive index of the sample. It is shown that the CdZnS nanoparticle colloids enhance the absorption of the laser light and induce high rise in the temperature of the sample, which leads to the nonlinear phase shift. 相似文献
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Char-Dir Chung Fu-Chuan Hung 《Vehicular Technology, IEEE Transactions on》2002,51(2):283-292
This paper investigates the noncoherent block detection of orthogonal N frequency-shift keying (FSK)-L differential phase shift keying (DPSK) signals transmitted over the additive white Gaussian noise channel, based on the principle of maximum-likelihood (ML) sequence estimation. By virtue of a union bound argument, asymptotic upper bounds for the bit error probability of the developed ML block receiver are derived and verified by simulation. It is analytically shown that the noncoherent NFSK-LDPSK ML block receiver performs comparably with the ideal coherent NFSK-L phase shift keying (PSK) receiver for L = 2 and 4, as the observation block length is large enough. Furthermore, substantial performance improvement can be achieved by the ML block detection of the NFSK-LDPSK signal with L > 2 by increasing the observation block length 相似文献
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研究了一种在平面干涉仪上检测大曲率球面光学零件面形的方法, 将在平面干涉仪上得到的干涉条纹通过图像预处理、快速傅里叶变换(FFT)提取相位、解包裹、泽尼克(Zernike)多项式拟合等处理得到被检球面相对标准平面的面形, 与指定的标准球面相减后, 再一次Zernike多项式拟合得到被检球面相对于指定标准球面的面形, 计算出被检球面的面形误差峰谷(PV)值、均方根(RMS)值及工程上常用的光圈N与局部光圈ΔN, 并模拟出用球面干涉仪或球面样板检测时的干涉条纹, 克服了接触检测的缺点, 为高精度、大曲率半径光学零件表面面形的检测提供了一种适用的方法。 相似文献
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The influence of finite surface recombination velocity on the measurement of minority carrier lifetime has been studied. The method is based on measuring the phase shift between the a.c.-photocurrent of a Schottky contact and the incident light. The limit of spatial resolution has been shown by theoretical calculations to be about one diffusion length. Lifetime profiles have been measured by the use of a mercury capillary contact. 相似文献
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We studied a fiber-optic strain sensor based on interference between LP01-LP02 modes of a circularly symmetric few-mode fiber (FMF). A simple theoretical analysis for predicting the performance characteristics of such a sensor is developed. Fiber elongations producing differential phase shift of 2π (δl2π) between the two modes are measured, which is found to be independent of sensing length of the fiber as predicted by theory. A good agreement between the experimental and theoretical values of δl2π is observed. Theoretical calculations predict that the sensitivity of such a sensor is maximum for fibers with V=4.82 and increases with the increase in the core cladding index difference Δn 相似文献
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Retrodirective array using the heterodyne technique 总被引:1,自引:0,他引:1
A retrodirective array using a single microwave mixer to accomplish conjugate phase shift in each element is described. Reradiated patterns were measured for a four-element array to substantiate the predicted performance. This array has an advantage over the Van Atta array in that the elements are not restricted to being located on a plane surface. It is more efficient than the previously used method of employing two mixers to provide conjugate phase shift because of the reduction in converison loss and LO (local oscillator) power. 相似文献