共查询到19条相似文献,搜索用时 78 毫秒
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用TiH_2方法对ZrO_2陶瓷和铜的接合技术进行了试验研究,试验结果获得了较好的粘接,对其接合机理也进行了较为系统的分析,初步确定,接合机理为Ti的化学反应和形成反应层所致。 相似文献
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采用高温熔融法在1 350℃制备了CaO-R2O-SiO2玻璃粉料,系统研究了Al2O3的添加量对CaO-R2O-SiO2/ZrO2基LTCC玻璃/陶瓷材料结构与性能的影响规律。研究结果表明,适量添加Al2O3可促进主晶相生长,提高材料结构稳定性,使其具有良好的力学电学性能。当Al2O3添加质量分数达7.5%时,850℃下可制得抗弯强度为183 MPa、相对介电常数为7.19、介电损耗为0.22%、电阻率5×1 013?·cm的CaO-R2O-SiO2/ZrO2基LTCC玻璃/陶瓷材料。 相似文献
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溶胶-凝胶工艺ZrO2涂层工程陶瓷的界面结合机制 总被引:1,自引:0,他引:1
《电子显微学报》2001,20(3):213-216
采用无机盐先驱体,溶胶-凝胶工艺在SG4工程陶瓷基体上成功制备了ZrO 相似文献
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采用超高真空电子束蒸发法制备了用于全耗尽SOI场效应晶体管(MOSFET)中作为高k栅介质的ZrO2 薄膜.X射线光电子能谱(XPS)分析结果显示:ZrO2 薄膜成分均一,为完全氧化的ZrO2 ,其中Zr∶O =1∶2 2 ,锆氧原子比偏高可能是由于吸附了空气中O2 等杂质.扩展电阻法(SRP)和剖面透射电镜(XTEM)都表征出6 0 0℃退火样品清晰的ZrO2 /topSi/BO/Sisub的结构,其中ZrO2 /topSi界面陡直,没有界面产物生成.选区电子衍射显示薄膜在6 0 0℃快速退火后仍基本呈非晶态.研究了上述MOSOS结构的高频C V性能,得到ZrO2 薄膜的等效氧化物厚度EOT =9 3nm ,相对介电常数ε≈2 1, 相似文献
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蒋幼良 《固体电子学研究与进展》1992,12(4):368-373
用电子束蒸发MoNb的方法,制备了MoNb/SiO_2接触界面。用俄歇电子能谱(AES)测定该界面热处理前后各元素组分随深度的分布。从AES分析中发现:随着热处理温度的上升,MoNb/SiO_2界面中Mo,O渐渐出现再分布峰,形成Mo,O的富集区;Nb的富集区始终为平坦分布,并没有出现Nb的再分布峰。界面宽度由低温的1.5nm变到600℃的15nm;同时还发现600℃时界面呈现电阻性。这一异常现象是由于Mo在SiO_2界面中热稳定性差所导致的。 相似文献
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AlGaN/GaN界面特性研究进展 总被引:2,自引:0,他引:2
GaN是一种宽禁带半导体材料,由于具有优越的热稳定性和化学稳定性,使这种材料和与其相关的器件可以工作在高温和恶劣的环境中,并可用于大功率微波器件。本文主要介绍AlGaN/GaN有关界面特性,该特性反映了纵向纳米尺度下的能带特性;从AlGaN/GaNHEMT设计出发,给出了材料性质和结构参数对AlGaN/GaN异质结二维电子气特性影响的研究结果;讨论了AlGaN/GaN界面2DEG载流子的输运性质;分析了材料缺陷对AlGaN/GaN界面2DEG性质的影响;指出了有待研究的问题和方向。 相似文献
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The effect of the different re-oxidation annealing (ROA) processes on the SiO2/SiC interface charac- teristics has been investigated. With different annealing processes, the flat band voltage, effective dielectric charge density and interface trap density are obtained from the capacitance-voltage curves. It is found that the lowest interface trap density is obtained by the wet-oxidation annealing process at 1050 ℃ for 30 min, while a large num- ber of effective dielectric charges are generated. The components at the SiO2/SiC interface are analyzed by X-ray photoelectron spectroscopy (XPS) testing. It is found that the effective dielectric charges are generated due to the existence of the C and H atoms in the wet-oxidation annealing process. 相似文献
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Zinc oxide (ZnO) nanograin and nanorod films were prepared by magnetron sputter deposition and an aqueous solution growth
method. Their surface wettability was studied in relation to their surface morphologies. While the surfaces of both films
were hydrophobic, the nanorod films exhibited higher surface hydrophobicity. A superhydrophobic surface was obtained on a
ZnO nanorod film with a water contact angle of 151 deg. Results have shown that their surface wettability was influenced by
the morphology of ZnO nanostructures, including the grain size, the length, and density of nanorods. Both types of ZnO films
showed switchable wettability under ultraviolet irradiation and dark storage. 相似文献
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Eunae ChoSeungwu Han 《Microelectronic Engineering》2011,88(12):3407-3410
Using first-principles calculations, we study the electronic structures of Pt/HfO2 interface in the presence of oxygen vacancy. The energetics and charge transfer are examined when the oxygen vacancy is at various distances from the interface. It is found that the oxygen vacancy is strongly attracted to the interface and the charge transfer decreases monotonically as the vacancy moves away from the interface, albeit the amount of charge transfer is small. The charge transfer results in the decrease of the effective work function of Pt, consistent with the vacancy mechanism to explain the shift in the flat-band voltage. 相似文献
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微合金化对Sn-9Zn基无铅钎料润湿性能的影响 总被引:7,自引:2,他引:7
熔炼制备了纯的以及含微量Al、Mg、Ti、Bi、重稀土Y、混合轻稀土RE和一种富P非金属活性组元NM的Sn-9Zn基合金,通过测量这些合金以及商用Sn-37Pb焊料在铜基板上的铺展面积比较了它们对铜的润湿性能。结果表明Al、Ti和 Mg不利于提高合金在铜上的润湿性或附着力;Y的改善作用不大;而Bi、RE和NM则能明显改善Sn-9Zn合金对铜的润湿性。在此基础上进一步研究了RE和NM含量对Sn-9Zn润湿性能的影响。以铺展面积衡量,本研究所达到的最佳改善效果使Sn-9Zn合金对铜的润湿性由Sn-37Pb焊料润湿性水平的45.4%提高到了70.3%。 相似文献