Design and analysis of RF MEMS shunt switch for V-band applications

Microsystem Technologies - In this paper, we have designed and simulations of RF MEMS shunt switch. The electro-mechanical and electromagnetic analysis of the switch have been done using COMSOL...     

Design of a packaging-friendly double-topology RF MEMS switch for space applications

Microsystem Technologies - This article presents the results of the research, design and a series of manufacturing steps of an RF-MEMS switch to be used in space communication systems. Design and...     

Multiport RF MEMS switch for satellite payload applications

Microsystem Technologies - Design, fabrication and characterization of a novel RF switch is proposed in this paper. The multiport RF MEMS switch provides a single input multiple output novel...     

Design of a novel step structure RF MEMS switch for K-band applications

Microsystem Technologies - In this paper, we have design a proposed step structure RF MEMS switch for K-band applications. The non-uniform meander structure is implemented for both optimized and...     

Design and analysis of SP4T RF MEMS switch for satellite applications

Microsystem Technologies - In this paper, SP4T (Single Pole four throw) type RF MEMS Switch is designed for Satellite applications. The beam thickness of the switch is varying from...     

Asymmetric RF MEMS resonant switch for high speed switching applications

Microsystem Technologies - Although micro-electro-mechanical switches are beneficial in small sizes, high levels of power handling, compatibility with CMOS process, wide bandwidth and zero power...     

RF MEMS悬臂梁开关的设计与仿真

利用有限元软件HFSS和ANSYS系统研究了串联MEMS开关的微波性能和力学性能与其结构参数之间的关系,并在此基础上优化出悬臂梁开关的几何结构参数,设计了RF MEMS开关,实验表明：在外施电压为10V左右时,悬臂梁的挠度可达3μm左右,5GHz时,回波损耗小于0．2dB,隔离度大于35dB。     

一种平板式MEMSRF射频开关的设计

介绍了一种实用的平板电容式MEMSRF射频开关。研究了外加驱动电压与由此所引起的极板间距和极板受力变化之间的非线性关系,提出了一种有效的基于有限元的设计分析方法,在此基础上设计了相应的MEMS加工工艺流程,并给出了具体的MEMS工艺。     

Design and simulation of RF MEMS shunt capacitive switch with non-uniform meanders for C-band applications

Microsystem Technologies - This paper presents, the design and simulation of RF MEMS shunt capacitive switch. The electromechanical and electromagnetic analysis of the switch has been done using...     

欧姆接触式RF MEMS开关设计与仿真

利用表面微加工工艺设计了一种双悬臂梁支撑的欧姆接触式MEMS开关,开关的材料为Au。通过对开关驱动电压的理论分析得出,悬臂梁的刚度越低,下拉电压就会越小;又因为刚度与悬臂梁厚度的三次方呈比例,所以,降低刚度最有效的办法就是减少梁的厚度。通过对开关的性能仿真发现:开关的闭合电压为44V;触点的接触力为22.45μN;谐振频率为25.5kHz。开关闭合时,触点接触后并非立即稳定,而是要弹跳数次后才趋于稳定,此现象增加了开关从闭合到稳定的时间。驱动电压为50,60 V时开关的弹跳时间分别为174.94,66.84μs,由此可见,通过适当增加电压可有效降低开关时间和由闭合到稳定的时间。     

Correction to: Asymmetric RF MEMS resonant switch for high speed switching applications

Microsystem Technologies - Unfortunately, the affiliation details of the authors have been published incorrectly. The correct details are given below.     

Design of wide range MEMS tunable capacitor for RF applications

The RF applications like voltage controlled oscillators, tunable filters, resonators etc., requires tunable capacitors in their designs. This paper presents the design of wide range MEMS tunable capacitors for RF applications. This design consists of an air suspended bottom plate and a fixed top plate. The top fixed plate and the suspended bottom plate form the tunable capacitor. The capacitance range of this tunable capacitor is from 69.172 to 138.344?nF. This range is wider compared with the conventional MEMS tunable capacitors of tuning ranges in pico Farads. The fabrication process is similar to that of the existing standard integrated circuit fabrication processes, which makes this design suitable for integrated RF applications.     

发展中的RF MEMS开关技术

从驱动方式和机械结构的角度介绍了不同的RF MEMS开关类型,分析了各类MEMS开关的性能及优缺点,分析了MEMS开关在制作和发展中面临的牺牲层技术、封装技术、可靠性问题等关键技术和问题,介绍了MEMS开关的发展现状及其在组件级和系统级的应用,以及对MEMS开关技术的展望。     

Design and performance analysis of hybrid SPDT RF MEMS switch

Microsystem Technologies - This paper presents the design and simulation of Hybrid type RF MEMS switch for satellite communication application. The Hybrid switch beam is having non-uniform meanders...     

Design and of analysis of SPDT Ohmic RF MEMS switch

Microsystem Technologies - This paper reports on the simulation and analysis of Ohmic SPDT (single pole double throw) switch for telecommunication application. A comparative study is performed by...     

低驱动电压k波段电容耦合式RFMEMS开关的设计

设计了一种低驱动电压的电容耦合式射频微机械(RF MEMS)开关.RF MEMS开关采用共面波导传输线,双电极驱动,悬空金属膜采用弹性折叠梁支撑.使用MEMS CAD软件CoventorWare、微波CAD软件HFSS,分别仿真了开关的力学性能和电磁性能,仿真结果表明:开关的驱动电压为2.5V,满足低驱动电压的设计目标;开关开态的插入损耗约为0.23 dB@20 GHz,关态的隔离度约为18.1 dB@20 GHz.最后给出了这种RF MEMS开关的微制造工艺.     

Design and analysis of asymmetric structure capacitive RF MEMS shunt switch

Microsystem Technologies - This paper deals with the study of shunt capacitive RF switches. Comparative study is done on non-uniform designed structures, which are simulated using finite element...     

Design and modeling of a continuously variable piezoelectric RF MEMS switch

A structure for a piezoelectrically actuated capacitive RF MEMS switch that is continuously variable between the ON state and the OFF state has been proposed. The device is based on variable capacitance using a cantilever fixed at both ends that is actuated using a lead zirconate titanate thin film. Because the device is contactless, the reliability issues common in contact-type RF MEMS switches can be avoided. A comprehensive mathematical model has been developed in order to study the performance of the device, and allow for design optimization. Electrical measurements on test structures have been compared with the performance predicted by the model, and the results used to design a prototype RF MEMS switch. The model and simulations indicate the proposed switch structure can provide an insertion loss better than 0.7 dB and an isolation of more than 10 dB between 6 and 14 GHz with an actuation voltage of 22.4 V. The state of the device is continuously variable between the ON state and the OFF state, with a tunable range of capacitance of more than 15\(\times \).     

Performance analysis of series: shunt configuration based RF MEMS switch for satellite communication applications

Microsystem Technologies - In this paper the RF-MEMS switch with series–shunt configuration on a single quartz substrate is presented to achieve high isolation than the individual series or...