Single element high frequency (<50 MHz) PZT sol gel composite ultrasound transducers

A sol gel composite process has been used to produce lead zirconate titanate coatings in the thickness range of 3 to 100 mum on aluminum substrates. The complex permittivity (epsilon(33)(S )), elastic stiffness (c(33)(D)), and the piezoelectric constant (h(33)) of the coating and the complex elastic stiffness (c(33)(D)) of the substrate have been determined using impedance measurements and a commercially available software program [Piezoelectric Resonance Analysis Program PRAP 2.0, TASI Technical Software, Kingston, Ontario, Canada]. The complex components of the material parameters account for the losses within the film and the substrate. Sol gel composite films on aluminum have a dielectric constant of 220 with an imaginary component of 1% and an electromechanical coupling coefficient of up to 0.24 with an imaginary component of 3%. These films are applied to the fabrication of a high frequency transducers suitable for ultrasound biomicroscopy (UBM). By combining the sol gel composite material with existing transducer fabrication techniques, single-element focusing transducers have been produced that operate in the frequency range of 70 to 160 MHz. Devices have -6-dB bandwidths up to 52% and minimum insertion losses ranging from -47 to -58 dB. Real-time images of phantom materials and ex vivo biological samples are shown.     

Design of efficient, broadband single-element (20-80 MHz) ultrasonic transducers for medical imaging applications

This paper discusses the design, fabrication, and testing of sensitive broadband lithium niobate (LiNbO/sub 3/) single-element ultrasonic transducers in the 20-80 MHz frequency range. Transducers of varying dimensions were built for an f# range of 2.0-3.1. The desired focal depths were achieved by either casting an acoustic lens on the transducer face or press-focusing the piezoelectric into a spherical curvature. For designs that required electrical impedance matching, a low impedance transmission line coaxial cable was used. All transducers were tested in a pulse-echo arrangement, whereby the center frequency, bandwidth, insertion loss, and focal depth were measured. Several transducers were fabricated with center frequencies in the 20-80 MHz range with the measured -6 dB bandwidths and two-way insertion loss values ranging from 57 to 74% and 9.6 to 21.3 dB, respectively. Both transducer focusing techniques proved successful in producing highly sensitive, high-frequency, single-element, ultrasonic-imaging transducers. In vivo and in vitro ultrasonic backscatter microscope (UBM) images of human eyes were obtained with the 50 MHz transducers. The high sensitivity of these devices could possibly allow for an increase in depth of penetration, higher image signal-to-noise ratio (SNR), and improved image contrast at high frequencies when compared to previously reported results.     

Piezoceramics for high-frequency (20 to 100 MHz) single-elementimaging transducers

The performance of transducers operating at high frequencies is greatly influenced by the properties of the piezoelectric materials used in their fabrication. Selection of an appropriate material for a transducer is based on many factors, including material properties, transducer area, and operating frequency. The properties of a number of piezoceramic materials have been experimentally determined by measuring the electrical impedance of air-loaded resonators whose thickness corresponds to resonance frequencies from 10 to 100 MHz. Materials measured include commercially available compositions of lead zirconate titanate (PZT) with relatively high dielectric constants and a modified lead titanate (PT) composition with a much lower dielectric constant. In addition, materials which have been designed or modified to result in improved properties at high frequencies are studied. Conclusions concerning the influence of the microstructure and composition on the frequency dependence of the material properties are made from the calculated properties and microstructural analysis of each material. Issues which affect transducer performance are discussed in relation to the properties. For transducers larger than about 1 mm in diameter, the use of a lower dielectric constant material is shown to result in a better electrical match between the transducer and a standard 50 Ω termination. For transducers whose impedance is close to that of the connecting cables and electrical termination, equivalent circuit model simulations show improved performance without the need for electrical matching networks. Measurements of fabricated transducers show close agreement with the simulations, validating the measurements and showing the performance benefits of electrically matched transducers     

Piezoelectric films for high frequency ultrasonic transducers in biomedical applications

Piezoelectric films have recently attracted considerable attention in the development of various sensor and actuator devices such as nonvolatile memories, tunable microwave circuits and ultrasound transducers. In this paper, an overview of the state of art in piezoelectric films for high frequency transducer applications is presented. Firstly, the basic principles of piezoelectric materials and design considerations for ultrasound transducers will be introduced. Following the review, the current status of the piezoelectric films and recent progress in the development of high frequency ultrasonic transducers will be discussed. Then details for preparation and structure of the materials derived from piezoelectric thick film technologies will be described. Both chemical and physical methods are included in the discussion, namely, the sol-gel approach, aerosol technology and hydrothermal method. The electric and piezoelectric properties of the piezoelectric films, which are very important for transducer applications, such as permittivity and electromechanical coupling factor, are also addressed. Finally, the recent developments in the high frequency transducers and arrays with piezoelectric ZnO and PZT thick film using MEMS technology are presented. In addition, current problems and further direction of the piezoelectric films for very high frequency ultrasound application (up to GHz) are also discussed.     

Characterization of lead zirconate titanate ceramics for use in miniature high-frequency (20-80 MHz) transducers

The material properties of lead zirconate titanate (PZT) ceramics for operation in the thickness mode at frequencies as high as 80 MHz are reported. Each of the ceramics tested showed a reduction in k (t) with increasing frequency. In a fine-grained PZT, values of k(t) as high as 0.44 were measured at 80 MHz. The effects of grain size were also evident in the measurement of frequency dependent mechanical losses. Experimental and theoretical analysis of a 1 mmx1 mm, 45 MHz PZT transducer verified the validity of the measurements of the properties and demonstrated excellent insertion loss and bandwidth characteristics. The minimum insertion loss of -17.5 dB is in good agreement with theory and is a marked improvement over the performance of polymer devices. Details on the fabrication and testing of high frequency ceramic transducers are described.     

Dual layer matching (20 MHz) piezoelectric transducers with glassand parylene

This study describes a method of applying very thin broadband matching layers to 2 mm diameter 20 MHz transducers. Dual layer acoustic matching between the ceramic and the medium at the front face of the transducer was accomplished by selecting 1/4 wavelength glass layers from a commercial source, epoxying them to the ceramic, and vapor depositing parylene to 1/4 wavelength thickness on the glass. A 8 dB fractional bandwidth of 0.75 and insertion loss of -10 dB was found on the average for these transducers. This method allowed fabricating probes that performed well, were reproducible, provided both a matching and protection coating, and could be fabricated in a practical manner     

25 MHz ultrasonic transducers with lead- free piezoceramic, 1-3 PZT fiber-epoxy composite, and PVDF polymer active elements

This paper presents the fabrication and characterization of single-element ultrasonic transducers whose active elements are made of lead-free piezoceramic, 1-3 PZT/polymer composite and PVDF film. The lead free piezoelectric KNNLT- LS(K_0.44Na_0.52Li_0.04)(Nb_0.84Ta_0.10S_0.06b)O₃ powders and ceramics were prepared under controlled humidity and oxygen flow rate during sintering. Due to its moderate longitudinal piezoelectric charge coefficient (175 pC/N) and k_t of 0.50, the KNN-LT-LS composition may be a good candidate for highfrequency transducer applications. PZT fibers with 25 μm diameter formed by the viscose suspension spinning process were incorporated into epoxy to fabricate 1-3 composites with the averaged k_t = 0.64 and d₃₃ = 400 pC/N. Using KNN-LS-LT ceramic, 1-3 PZT fiber composite, and PVDF film, 3 different unfocused single element transducers with center frequencies of 25 MHz were fabricated. The acoustic characterization of the transducers demonstrated that wideband and low insertion loss could be obtained employing KNN-LS-LT ceramic. The ?6 dB bandwidth and insertion loss were 70% and ?21 dB, respectively. In comparison, the insertion loss of the ceramic transducer was much smaller than those made with 1-3 composite and PVDF film. This was attributed to closer electrical impedance match to 50 Ω and higher thickness coupling coefficient of the ceramic transducer.     

High frequency properties of passive materials for ultrasonic transducers

The acoustic properties of passive materials for ultrasonic transducers have been measured at room temperature in the frequency range from 25 to 65 MHz using ultrasonic spectroscopy. These materials include alumina/EPO-TEK 301 composites and tungsten/EPO-TEK 301 composites. Experimental results showed that the acoustic impedance of the composites monotonically increased with the volume fraction of the particle filler, which is in agreement with the Denavey model. The attenuation, however, peaked between 7 and 9% volume fraction of particle filler. For comparison, several other passive materials were also fabricated and measured. The results suggest that materials that possess a higher attenuation also appear to have a larger velocity dispersion     

A simple viscoelastic model for soft tissues the frequency range 6-20 MHz

In this paper, we present measurements of the shear properties of porcine skeletal muscle, liver, and kidney and a novel model describing them. Following a previously used method, shear mechanical impedances are measured, and complex shear moduli are obtained in the frequency range 6-20 MHz. As indicated in previous results, negative storage moduli are obtained in some measurements, which yield negative shear moduli in traditional linear viscoelastic models such as the Maxwell model, the Voigt model, and the Kelvin model. To resolve this problem, we propose a simple extension of the Voigt model. A mass is introduced into the model to account for the extra phase shift that apparently produces the negative moduli, and the shear stress thereby is related to the inertia of the material. The observed negative storage moduli are predicted by the new model when the relaxation time of the material is large and the working frequency is high. The model is fitted to experimental data to obtain values for material constants.     

Piezoelectric ceramics with high dielectric constants for ultrasonic medical transducers

Complex system ceramics Pb(Sc(1/2)Nb(1/2))O3-Pb(Mg(1/3)Nb(2/3))O3-Pb(Ni(1/2)Nb(1/2))O3-(Pb0.965,Sr0.035) (Zr,Ti)O3 (PSN-PMN-PNN-PSZT abbreviated PSMNZT) have been synthesized by the conventional technique, and dielectric and piezoelectric properties of the ceramics have been investigated for ultrasonic medical transducers. High capacitances of the transducers are desired in order to match the electrical impedance between the transducers and the coaxial cable in array probes. Although piezoelectric ceramics that have high dielectric constants (epsilon33t/epsilon0 > 5000, k'33 < 70%) are produced in many foundries, the dielectric constants are insufficient. However, we have reported that low molecular mass B-site ions in the lead-perovskite structures are important in realizing better dielectric and piezoelectric properties. We focused on the complex system ceramics PSMNZT that consists of light B-site elements. The maximum dielectric constant, epsilon33T/epsilon0 = 7, 200, was confirmed in the ceramics, where k'33 = 69%, d33 = 940 pC/N, and T(c) = 135 degrees C were obtained. Moreover, pulse-echo characteristics were simulated using the Mason model. The PSMNZT ceramic probe showed echo amplitude about 5.5 dB higher than that of the conventional PZT ceramic probe (PZT-5H type). In this paper, the electrical properties of the PSMNZT ceramics and the simulation results for pulse-echo characteristics of the phased-array probes are introduced.     

A simple viscoelastic model for soft tissues in the frequency range 6-20 MHz.

In this paper, we present measurements of the shear properties of porcine skeletal muscle, liver, and kidney and a novel model describing them. Following a previously used method, shear mechanical impedances are measured, and complex shear moduli are obtained in the frequency range 6-20 MHz. As indicated in previous results, negative storage moduli are obtained in some measurements, which yield negative shear moduli in traditional linear viscoelastic models such as the Maxwell model, the Voigt model, and the Kelvin model. To resolve this problem, we propose a simple extension of the Voigt model. A mass is introduced into the model to account for the extra phase shift that apparently produces the negative moduli, and the shear stress thereby is related to the inertia of the material. The observed negative storage moduli are predicted by the new model when the relaxation time of the material is large and the working frequency is high. The model is fitted to experimental data to obtain values for material constants.     

Narrowband impedance matching layer for high efficiency thickness mode ultrasonic transducers

A new matching layer design concept has been proposed for narrowband continuous wave (CW) devices. Analysis has shown that the mechanical impedance of a resonant-type transducer in thickness mode CW operation does not equal its acoustic impedance ρVs but roughly equals ρVs/Q, where ρ is density, Vs is acoustic velocity, and Q is the mechanical quality factor. The value of ρVs/Q is much lower than the acoustic impedance of water for any transducer material, including lead zirconium titanate (PZT), single crystals, or polyvinylidene fluoride (PVDF). With this new approach, the impedance of the matching layer must also be between water and ρVs/Q, but there are few such practical low impedance materials. To realize equivalent low impedance structure, a novel double layer design is presented: a relatively low impedance material (such as polyethylene or polyurethane) on the inside and a relatively high impedance material (such as polyester or metal) on the outside. A high power CW transducer structure was designed and fabricated with PVDF-TrFE (polyvinylidene fluoride trifluoroethylene) to operate at 1.4 MHz     

Radiation impedance and equivalent circuit for piezoelectric ultrasonic composite transducers of vibrational mode-conversion

The piezoelectric ultrasonic composite transducer, which can be used in either gas or liquid media, is studied in this paper. The composite transducer is composed of a longitudinal sandwich piezoelectric transducer, a mechanical transformer, and a metal circular plate in flexural vibration. Acoustic radiation is produced by the flexural circular plate, which is excited by the longitudinal sandwich transducer and transformer. Based on the classic flexural theory of plates, the equivalent lumped parameters for a plate in axially symmetric flexural vibration with free boundary conditions are obtained. The radiation impedance of the plate is derived and the relationship between the radiation impedance and the frequency is analyzed. The equivalent circuits for the plate in flexural vibration and the composite transducer are given. The vibrational modes and the harmonic response of the composite piezoelectric transducer are simulated by the numerical method. Based on the theoretical and numerical analysis, two composite piezoelectric ultrasonic transducers are designed and manufactured, their admittance-frequency curves are measured, and the resonance frequency is obtained. The flexural vibrational displacement distribution of the transducer is measured with a laser scanning vibrometer. It is shown that the theoretical results are in good agreement with the measured resonance frequency and the displacement distribution.     

功率超声换能器电声效率及辐射声功率的测量

在高频电功率计方法的基础上,本文提出了一种能够直接测量大功率压电超声换能器在实用状态下的辐射超声功率以及电声效率的新方法。与传统的高频电功率计法相比,本方法避免了介电以及机械损耗功率的测试,简化了测试步骤。     

CCE 92-05 intercomparison of ac-dc voltage transfer standards athigh frequencies (1-50 MHz)

From August 1995 to May 1998, the CCE 92-05 intercomparison of ac-dc voltage transfer standards at high frequencies was carried out. Two travel standards were measured by 15 national standards institutes. The results in the frequency range from 1 to 50 MHz show a good agreement between the majority of participants. The span of the majority of the reported ac-dc differences at 50 MHz is less than 1000 μV/V, which is similar to a previous intercomparison but with a greater number of participants     

A 20 MHz single-element ultrasonic probe using 0.91Pb(Zn(1/3 )Nb(2/3))O(3)-0.09PbTiO(3) single crystal

A 20 MHz single-element ultrasonic probe using 0.91Pb(Zn(1/3 )Nb(2/3))O(3)-0.09PbTiO(3) (PZN-PT 91/9) single crystal has been fabricated. The single crystal of PZN-PT 91/9 orientated to the (001) plane has longitudinal coupling factor of k(33)>90%, which is much larger than the k(33)=70 to 80% of conventional Pb(Zr(1-x),Ti(x))O(3) (PZT) based ceramics. A single crystal of PZN-PT 91/9 without inclusion or crack has been grown with dimensions of about 25x15x5 mm by the self-flux method. Because mechanical strength in the fabrication of disk transducers orientated to the (001) plane was sufficiently strong, under the same conditions as are applied to conventional PZT ceramics, a piston single-element probe with a diameter of 2.0 mm and a frequency of 20 MHz was successfully fabricated. The bandwidth of the PZN-PT 91/9 probe was 13-26 MHz, which was 4 MHz broader than that of the conventional PZT probe.     

International comparison GT-RF 78-1: high attenuation (60 dB, 100dB) at 30 MHz in 50 Ω coaxial line

A worldwide comparison of national standard devices in which high attenuation values (up to 100 dB) at the frequency of 30 MHz have been compared is reported. Eleven national laboratories of metrology from the Netherlands, France, Italy, the United Kingdom, Sweden, Poland, Hungary, Australia, the People's Republic of China, the USSR, and the Federal Republic of Germany participated. The transfer standards were two fixed attenuators with an attenuation of about 60 dB and 100 dB and one switchable attenuator with 100 dB. The maximum difference between any two results is 0.064 dB at an attenuation of 60 dB and 0.125 at 100 dB. For a considerable number of laboratories, the deviation between mean values was not larger than 0.001 dB for a 60-dB attenuation step, and not larger than 0.005 dB for a 100-dB attenuation step     

Focused high frequency needle transducer for ultrasonic imaging and trapping

A miniature focused needle transducer (<1?mm) was fabricated using the press-focusing technique. The measured pulse-echo waveform showed the transducer had center frequency of 57.5 MHz with 54% bandwidth and 14?dB insertion loss. To evaluate the performance of this type of transducer, invitro ultrasonic biomicroscopy imaging on the rabbit eye was obtained. Moreover, a single beam acoustic trapping experiment was performed using this transducer. Trapping of targeted particle size smaller than the ultrasonic wavelength was observed. Potential applications of these devices include minimally invasive measurements of retinal blood flow and single beam acoustic trapping of microparticles.