A high-speed 64K CMOS RAM with bipolar sense amplifiers

A TTL-compatible 64K static RAM with CMOS-bipolar circuitry has been developed using a 1.2-/spl mu/m MoSi gate n-well CMOS-bipolar technology. Address access time is typically 28 ns, with 225 mW active power and 100 nW standby power. A CMOS six-transistor memory cell is used. The cell size is 18/spl times/20 /spl mu/m, and the chip size is 5.95/spl times/6.84 mm. The n-p-n transistors are used in the sense amplifiers, voltage regulators, and level clamping circuits. The bipolar sense amplifiers reduce the detectable bit line swing, thus improving the worst-case bit line delay time and the sensing delay time. In order to reduce the word line delay, the MoSi layer, which has 5 /spl Omega//sheet resistivity, was used for the gate material. The n-well CMOS process is based on a scaled CMOS process, and collector-isolated n-p-n transistors and CMOS are integrated simultaneously without adding any extra process steps and without causing any degradation of CMOS characteristics. The n-p-n transistor has a 2-GHz cutoff frequency at 1 mA collector current.     

A low power resistive load 64 kbit CMOS RAM

A fully asynchronous 8K word/spl times/8 bit CMOS static RAM with high resistive load cells is described. For fabricating the RAM, an advanced double polysilicon 2 /spl mu/m CMOS technology has been developed. Internally clocked dynamic peripheral circuits with address transition detectors are implemented to achieve high speed and low power simultaneously. A new CMOS fault-tolerant circuit technology is also introduced for improving fabrication yield without sacrificing operating speed or standby power. The resulting cell size and die size are 15/spl times/19 /spl mu/m and 4.87/spl times/7.22 mm, respectively. The RAM offers, typically, 70 ns access time, 15 mW operating power, and 10 /spl mu/W standby power.     

A CMOS/SOS 4K static RAM

Discusses high density CMOS/SOS technology used to develop a fully static 4096-bit RAM with a five-transistor storage cell. Selection of a five-transistor memory cell has reduced the access to the flip-flop storage element to a single word line transistor and bit line. The word line transistor must be able to prevent data altering currents from entering the memory cell at all times except for the write operation. The write operation is enhanced by reducing the bias voltage across the memory cell, thereby making the current needed to alter the cell smaller. Through the use of a 5 /spl mu/m design rule, the memory cell occupies 2913 /spl mu/m/SUP 2/. The 4096-bit static CMOS/SOS RAM contains 22553 transistors in 20 mm/SUP 2/. Organised as 1024 4-bit words, the RAM has a read cycle time of 350 ns and standby power dissipation of 50 /spl mu/W at V/SUB cc/=5 V and temperature of 27/spl deg/C.     

HMOS-CMOS-a low-power high-performance technology

HMOS-CMOS, a new high-performance bulk CMOS technology, is described. This technology builds on HMOS II, and features high resistivity p-substrate, diffused n-well and scaled n- and p-channel devices of 2-/spl mu/m channel length and 400-/spl Aring/ gate oxide thickness. The aggressive scaling of n and p devices results in 350-ps minimum gate delay and 0.04-pJ power delay product. HMOS-CMOS is a single poly technology suitable for microprocessor and static RAM applications. A 4K static RAM test vehicle is described featuring fully CMOS six-transistor memory cell, a chip size of 19600 mil/SUP 2/, 75 /spl mu/W standby power, data retention down to a V/SUB cc/ voltage of 1.5 V and a minimum chip select and address access time of 25 ns.     

A 35-ns 128K/spl times/8 CMOS SRAM

A 128 K/spl times/8-b CMOS SRAM with TTL input/output levels and a typical address access time of 35 ns is described. A novel data transfer circuit with dual threshold level is utilized to obtain improved noise immunity. A divided-word-line architecture and an automatic power reduction function are utilized to achieve a low operational power of 10 mW at 1 MHz, and 100 mW at 10 MHz. A novel fabrication technology, including improved LOCOS and highly stable polysilicon loads, was introduced to achieve a compact memory cell which measures 6.4/spl times/11.5 /spl mu/m/SUP 2/. Typical standby current is 2 /spl mu/A. The RAM was fabricated with 1.0-/spl mu/m design rules, double-level polysilicon, and double-level aluminum CMOS technology. The chip size of the RAM is 8/spl times/13.65 mm/SUP 2/.     

An 8K/spl times/8 bit static MOS RAM fabricated by n-MOS/n-well CMOS technology

A 64 kbit fully static MOS RAM which contains about 402500 elements on the chip area of 5.44/spl times/5.80 mm has been designed. The memory cell is a basic cross-coupled flip-flop with four n-MOSFETs and two polysilicon load resistors. The memory cell size is decreased to 16/spl times/19 /spl mu/m (304 /spl mu/m/SUP 2/) by using advanced n-MOS technology with double-level polysilicon films and photolithography of 2 /spl mu/m dimensions. By applying n-well CMOS technology fabricated on a high-resistivity p-type silicon substrate to peripheral circuits of the RAM, high performance characteristics with high speed access times and low power dissipation are obtained. The RAM is designed for single 5 V operation. Address and chip select access times are typically 80 ns. Power dissipation in the active and standby mode is typically 300 and 75 mW, respectively.     

An ultralow power 8K/spl times/8-bit full CMOS RAM with a six-transistor cell

A fully static 8K word by 8 bit CMOS RAM, with a six-transistor CMOS cell structure to achieve an extremely low standby power of less than 50 nW has been developed. A 2 /spl mu/m, double polysilicon CMOS process was utilized to realize a 19/spl times/22 /spl mu/m cell size. Redundance technology with polysilicon laser fuses was also developed for improving fabrication yield with relatively large chip size, i.e. 5.92/spl times/7.49 mm. In addition, for reducing operational power dissipation while maintaining fully static operation from outside on the chip, an internally clocked low-power circuit technology using row address transition detectors was employed, which results in only 15 mW operational power at 1 MHz by cutting off all DC current paths. The RAM offers an 80 ns address access time.     

A 50 ns 4K static DSA MOS RAM

An advanced DSA MOS (DMOS) technology is discussed as it applies to a high-speed 4K bit semiconductor static memory. It uses a polysilicon gate length of 4 /spl mu/m, a gate oxide thickness less than 800 /spl Aring/, and a shallow junction depth (<0.6 /spl mu/m) using conventional photolithographic methods. With these features, the effective channel length of the DSA MOST was reduced to 0.5 /spl mu/m and a smaller junction capacitance was obtained by the use of a high-resistivity (100-200 /spl Omega/.cm) substrate without a substrate bias generator. Combined with the depletion load transistors and selective oxidation processing, a static RAM of 50 ns access time at 630 mW power dissipation, die size of 5.24/spl times/5.36 mm/SUP 2/, and cell size of 53/spl times/62 /spl mu/m/SUP 2/ was obtained.     

16K CMOS/SOS asynchronous static RAM

A new CMOS/SOS `buried-contact' process allows fabrication of dense static memory cells. The technology is applied in a 16K RAM with 1150 /spl mu/m/SUP 2/ (1.78 mil/SUP 2/) cells based on 5 /spl mu/m design rules.     

A subnanosecond 8K-gate CMOS/SOS gate array

An 8370-gate CMOS/SOS gate array has been developed using a Si-gate CMOS/SOS process with two-level metallization. The gate lengths of the transistors are 1.8 and 1.9 /spl mu/m for the n-channel and p-channel, respectively. Subnanosecond typical gate delay times have been obtained. Typical delay times of inverter, two-input NAND, and two-input NOR gates are 0.67, 0.87, and 0.99 ns, respectively, under a typical loading condition (three fan outs and 2 mm first metal). It is shown that ECL speed with CMOS power can be achieved in a system by using the CMOS/SOS gate array. Advantages of the SOS device on speed performance are also discussed.     

1-Mbit virtually static RAM

The 1-Mb RAM utilizes a one-transistor, one-capacitor dynamic memory cell. Since all the refresh-related operations are done on chip, the RAM acts as a virtually static RAM (VSRAM). The refresh operations are merged into the normal operation, called a background refresh, the main feature of the VSRAM. Since the fast operation of the core part of the RAM is crucial to minimize the access-time overhead by the background refresh, 16 divided bit lines and parallel processing techniques are utilized. Novel hot-carrier resistant circuits are applied selectively to bootstrapped nodes for high hot-carrier reliability. N-channel memory cells are embedded in a p-well, which gives a low soft error rate of less than 10 FIT. 1-/spl mu/m NMOSFETs with moderately lightly doped drain structures offer fast 5-V operation with sufficient reliability. An advanced double-level poly-Si and double-level Al twin-well CMOS technology is developed for fast circuit speed and high packing density. The memory cell size is 3.5/spl times/8.4 /spl mu/m/SUP 2/, and the chip size is 5.99/spl times/13.8 mm./SUP 2/. Address access time is typically 62 ns, with 21-mA operating current and 30-/spl mu/A standby current at room temperature.     

A 288K CMOS pseudostatic RAM

A 288-kb pseudostatic RAM with high density and ease of use has been fabricated using polycide-gate n-well CMOS technology. For high speed and low power dissipation, a half-V/SUB cc/ precharging scheme, with CMOS back biased to V/SUB BB/, was used. For easier use, an address transition detector, plus auto-refresh and self-refresh, were adopted. Organized as 32K/spl times/9 bits, the RAM occupies an area of 55 mm/SUP 2/ and has a cell size of 6.8/spl times/13.6 /spl mu/m/SUP 2/, which was achieved using the 2-/spl mu/m design rule. A typical address access time is 125 ns, and the operating current is 60 mA at a 125-ns cycle time. Standby power is 2 mA.     

Characterization of 1.9- and 1.4-nm ultrathin gate oxynitride by oxidation of nitrogen-implanted silicon substrate

For gate oxide thinned down to 1.9 and 1.4 nm, conventional methods of incorporating nitrogen (N) in the gate oxide might become insufficient in stopping boron penetration and obtaining lower tunneling leakage. In this paper, oxynitride gate dielectric grown by oxidation of N-implanted silicon substrate has been studied. The characteristics of ultrathin gate oxynitride with equivalent oxide thickness (EOT) of 1.9 and 1.4 nm grown by this method were analyzed with MOS capacitors under the accumulation conditions and compared with pure gate oxide and gate oxide nitrided by N/sub 2/O annealing. EOT of 1.9- and 1.4-nm oxynitride gate dielectrics grown by this method have strong boron penetration resistance, and reduce gate tunneling leakage current remarkably. High-performance 36-nm gate length CMOS devices and CMOS 32 frequency dividers embedded with 57-stage/201-stage CMOS ring oscillator, respectively, have been fabricated successfully, where the EOT of gate oxynitride grown by this method is 1.4 nm. At power supply voltage V/sub DD/ of 1.5 V drive current Ion of 802 /spl mu/A//spl mu/m for NMOS and -487 /spl mu/A//spl mu/m for PMOS are achieved at off-state leakage I/sub off/ of 3.5 nA//spl mu/m for NMOS and -3.0 nA//spl mu/m for PMOS.     

A 16 DIP, 64 kbit, static MOS-RAM

A 64K/spl times/1 bit fully static MOS-RAM has been fabricated. For the purpose of replacement of 64 kbit dynamic RAM, this static RAM has been designed to be assembled in a standard 300 mil 16 pin DIP. It is the first time address multiplexing has been in static RAMs. The device with multiple addressing and improved row decoder employs a double poly Si layer and a 1.5 /spl mu/m design rule which is achieved by advanced process technology. As a result, the RAM has a 11.0 /spl mu/m/spl times/26.5 /spl mu/m (291.5 /spl mu/m/SUP 2/) cell size and a 3.84 mm/spl times/7.40 mm (28.40 mm/SUP 2/) chip size. The address access time is less than 150 ns with an active power dissipation of 400 mW.     

A 64 Kbit MOS dynamic RAM with novel memory capacitor

A 64 Kbit dynamic RAM is described. The RAM features a novel memory cell using a polysilicon-dielectric-polysilicon (PDP) capacitor. This structure provides performance and density advantages over the conventional approaches. A new sense amplifier configuration is also described in detail. It multiplexes two pairs of bit lines for each sense amplifier. Thus the number of memory cells per bit line is halved. This reduces the length of each bit line, thereby increasing the signal voltage available to the sense amplifier. A compatible dummy cell design is included in the discussion. Using conservative processing (3.5 /spl mu/m device channel length with 700 /spl Aring/ gate oxide thickness) a die size of 3.2 mm/spl times/7.9 mm is achieved. Experimental data are presented in the text.     

A high speed molybdenum gate MOS RAM

Describes a high speed 16K molybdenum gate (Mo-gate) dynamic MOS RAM using a single transistor cell. New circuit technologies, including a capacitive-coupled sense-refresh amplifier and a dummy sense circuit, enable the achievement of high speed performance in combination with reduced propagation delay in the molybdenum word line due to the low resistivity. The n-channel Mo-gate process was established by developing an evaporation apparatus and by an improved heat treatment to reduce surface charge density. Ultraviolet photolithography for 2 /spl mu/m patterns and HCl oxidation for 400 /spl Aring/ thick gate oxide are used. The 16K word/spl times/1 bit device is fabricated on a 3.2 mm/spl times/4.0 mm chip. Cell size is 16 /spl mu/m/spl times/16 /spl mu/m Access time is less than 65 ns at V/SUB DD/=7 V and V/SUB BB/=-2 V. Power dissipation is 210 mW at 170 ns read-modify-write (RMW) cycle.     

A low power 46 ns 256 kbit CMOS static RAM with dynamic double word line

A fast, low-power 32K/spl times/8-bit CMOS static RAM with a high-resistive polyload 4-transistor cell has been developed utilizing a dynamic double word line (DDWL) scheme. This scheme combines an automatic power down circuitry and double word line structure. The DDWL, together with bit line and sense line equilibration, reduces the core area delay time and operating power to about 1/2 and 1/15 that of a conventional device, respectively. A newly developed fault-tolerant circuitry improves fabrication yield without degrading the access time. As for a fabrication process, an advanced 1.2-/spl mu/m p-well CMOS technology is developed to realize the ULSI RAM, integrating 1,600,000 elements on a 6.68/spl times/8.86 mm/SUP 2/ chip. The RAM offers, typically, 46 ns access time, 10 mW operating power and 30 /spl mu/W standby power.     

An experimental 4-Mbit CMOS DRAM

A 4-Mb dynamic RAM has been designed and fabricated using 1.0-/spl mu/m twin-tub CMOS technology. The memory array consists of trenched n-channel depletion-type capacitor cells in a p-well. Very high /spl alpha/-particle immunity was achieved with this structure. One cell measures 3.0/spl times/5.8 /spl mu/m/SUP 2/ yielding a chip size of 7.84/spl times/17.48 mm/SUP 2/. An on-chip voltage converter circuit was implemented as a mask option to investigate a possible solution to the MOSFET reliability problem caused by hot carriers. An 8-bit parallel test mode was introduced to reduce the RAM test time. Metal mask options provide static-column-mode and fast-age-mode operation. The chip is usable as /spl times/1 or /spl times/4 organizations with a bonding option. Using an external 5-V power supply, the row-address-strobe access time is 80 ns at room temperature. The typical active current is 60 mA at a 220-ns cycle time with a standby current of 0.5 mA.     

A 34-ns 1-Mbit CMOS SRAM using triple polysilicon

A 128-kb word/spl times/8-b CMOS SRAM with an access time of 3 ns and a standby current of 2 /spl mu/A is described. This RAM has been fabricated using triple-polysilicon and single-aluminum CMOS technology with 0.8-/spl mu/m minimum design features. A high-resistive third polysilicon load has been developed to realize a low standby current. In order to obtain a faster access time, a 16-block architecture and a data-output presetting technique combined with address transition detection (ATD) are used. This RAM has a flash-clear function in which logical zeros are written into all memory cells in less than 1 /spl mu/s.     

25-ns 256K/spl times/1/64K/spl times/4 CMOS SRAM's

Through a metal option, a 256K word/spl times/1-bit and a 64K word/spl times/4-bit CMOS SRAM organization has been obtained. A fast access time has been achieved with a short bit-line structure and a data-bus precharging technique which minimize the bit-line and data-bus delay. A feedback-controlled address-transition-detector circuit has been adopted to assure the fast access time in the presence of address skew. A 1.0-/spl mu/m double-polysilicon and single-metal process technology with a polycide gate offers a memory cell size of 90 /spl mu/m/SUP Z/ and a chip size of 47.4 mm/SUP 2/.