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248nm深紫外光刻胶   总被引:11,自引:3,他引:11  
本文从化学增幅技术的产生,深紫外248nm胶主体树脂及PAG发展历程、溶解抑制剂、存在的工艺问题及解决途径多个方面综述了深紫外248nm胶的发展与进步.  相似文献   

3.
本文按传统光化学反应型和化学增幅型两种类型对近10年水溶性光致抗蚀剂的发展状况做了分类总结,并重点介绍了成像反应原理和各体系的优缺点.  相似文献   

4.
综述了近十年来DUV抗蚀剂体系的进展 ,特别对DUV区化学增幅抗蚀剂的矩阵树脂、产酸源、阻溶剂作了详细的阐述。并指出 ,通过改进感光高分子的结构与组成 ,可以获得性质优良的抗蚀剂  相似文献   

5.
193—nm光刻中的光致抗蚀剂   总被引:2,自引:0,他引:2  
当今世界处于信息时代,电子信息产业日新月异地飞速发展着,计算机的影响已遍及每一个经济领域和人们生活的每一个方面.微电子技术作为新技术革命的主角,已成为衡量一个国家经济实力和科技进步的重要标志[1,2].微电子技术的不断发展得益于半导体与集成技术的不断提高,光刻技术和光致抗蚀剂是微电子技术中的核心技术和关键材料.大规模集成电路的集成度以三年增长四倍的速度发展着[3~7].集成度的不断提高,不仅意味着最小器件尺寸的变小,也意味着高速、高可靠、低能耗和低成本.由于光刻工艺的极限分辨率R正比于曝光波长λ,反比于棱镜的孔径N…  相似文献   

6.
ArF激光光致抗蚀剂的研究进展   总被引:2,自引:0,他引:2  
本对近10年来有关ArF激光(193nm)光致抗蚀剂的研究开发情况进行了调研,对193nm光致抗蚀剂组成物的各个组分进行了归纳综述。从本可以看出,利用193nm成像技术可以刻画线幅很细(<0.13μm)的图像,能适应信息技术的发展对于光致抗蚀剂高分辨率的要求。但若想将193nm成像技术在实践中推广应用,还有诸多问题需待研究解决。  相似文献   

7.
聚羟基苯乙烯在光致抗蚀剂中的应用及其合成   总被引:1,自引:0,他引:1  
主要综述了聚羟基苯乙烯用作深紫外光致抗蚀剂主体成膜树脂的发展历程、应用现状以及一些最新的研究进展,并简要介绍了聚羟基苯乙烯的单体衍生物及其聚合物的制备方法。  相似文献   

8.
冯波  艾照全  朱超  宋梦瑶 《粘接》2015,(2):78-81,86
光刻胶是集成电路和分立器件的基础工艺材料,主体成膜树脂是光刻胶的重要组分之一,不同的成膜树脂对光刻胶的性能有不同影响。主要综述了光刻胶的分类,影响光刻胶成膜树脂性能的因素,成膜树脂的发展,及光刻胶的主要技术参数。  相似文献   

9.
LCD正型光致抗蚀剂感光树脂的研制   总被引:1,自引:0,他引:1  
喻小琦 《广东化工》2006,33(6):58-59
本文研究了液晶显示器件(LCD)正型光致抗蚀剂用感光树脂(PAC)所需接枝母体和2,1,5-重氮萘醌磺酰氯(NDQ)对正型光致抗蚀剂应用性能的影响。结果表明:不同的接枝母体,对正型光致抗蚀剂的分辨率、抗碱性、感光速度有一定影响;NDQ导入率的提高,导致PAC的抑溶效应增大;PAC与NDQ混合使用在特定条件下可以提高正型光致抗蚀剂的感光速度。  相似文献   

10.
《河南化工》2007,24(11):54-54
中科院广州化学有限公司纤维素化学重点实验室和电子聚合物重点实验室科技人员经过技术攻关,日前完成了可应用于PCB(Printed Circuit Board)感光胶配方的水性成膜树脂GX68的生产工艺放大,形成200kg/d的生产能力。[第一段]  相似文献   

11.
从主体树脂的结构设计、单体的合成工艺、主体树脂的合成工艺、光致产酸剂的评价、配方研究等多个方面论述了193nm光刻胶的研制工艺,合成出了多种适用的单体及多种结构的主体树脂,进行了大量的配方研究,筛选出了最佳配方.研制出的样品经美国SEMATECH实验室应用评价其最佳分辨率为0.1μm,最小曝光量为26mJ/cm^2,不但具有优异的分辨率和光敏性,而且还具有良好的粘附性和抗干法腐蚀性.  相似文献   

12.
ULSI用193nm光刻胶的研究进展   总被引:5,自引:0,他引:5  
郑金红  黄志齐  文武 《精细化工》2005,22(5):348-353
从193nm光刻胶的各个组分,如:主体树脂、光致产酸剂、溶解抑制剂、碱性添加剂以及存在的问题和解决途径等多个方面综述了193nm深紫外光刻胶的发展与现状。  相似文献   

13.
介绍了聚四氟乙烯悬浮树脂柱塞挤出成型的原理,叙述了挤出成型加工的工艺方法及设备.  相似文献   

14.
用熔融预聚法对二苯甲烷双马来酰亚胺(BDM,即BMI)/二烯丙基双酚A(DABPA)和双酚A二氰酸酯(BCE)/溴化环氧树脂(BCE)各二元体系分别预聚再热混,制成溶解性、稳定性和反应性、粘接性好的多元共聚树脂。经阶梯式固化,并通过FTIR、DSC、DMA、TGA和SEM等手段测试了固化树脂的性能。结果表明,该树脂的玻璃化温度(Tg)为230.7℃,耐热指数(Z)为197℃,热膨胀系数(CTE)为7.0104×10-5/℃,介电常数ε为3.61,介电损耗tanδ(1MHz)为0.007,弯曲强度为131.83MPa,冲击强度25.0kJ/m2,氧指数为31,吸水率为0.44%。此耐热性、介电性能和力学性能等综合性能优异的阻燃型树脂适合做刚性覆铜板(CCL)和先进复合材料的高性能基体树脂。  相似文献   

15.
Poly(ethylene terephthalate) waste was depolymerised in the presence of tetraethylene glycol and manganese acetate as a catalyst, so as to produce oligomers. An epoxy resin was then prepared by the reaction of these oligomers with epichlorohydrin in presence of NaOH as a catalyst. New diacrylate and dimethacrylate vinylester resins were then synthesized by reaction of the terminal epoxy groups with acrylic and methacrylic acid in the presence of triphenyl phosphite as a catalyst. The chemical structures of the resulting vinyl ester resins were confirmed by 1HNMR. The vinyl ester resins were used as crosslinking agents for unsaturated polyester resin diluted with styrene, using free radical initiator and accelerator. The curing behaviour of the unsaturated polyester resin, vinyl ester resins and styrene was evaluated at temperatures from 25 to 55 C. The compression properties of the cured resins, having different vinyl ester contents and different cure temperatures, were evaluated. Increasing the cure temperature and the vinyl ester content led to a pronounced improvement in the compression strength and Young’s modulus.  相似文献   

16.
王成军 《中国塑料》2010,24(6):62-66
以聚酰胺66(PA66)、聚苯硫醚(PPS) 及65Mn钢板为主要原料,制备了一系列不同配比的金属基复合材料,并对这些材料进行不同条件下的摩擦学性能试验,最后通过结合强度试验来分析材料间的结合强度。结果表明,复合材料的摩擦因数及磨损速率随着聚酰胺66的增加而降低;同种材料的摩擦系数及磨损速率随着载荷和对摩速度的增加而先增大后减小;结合强度试验表明金属基复合材料的结合强度随着聚苯硫醚的增加而逐渐增大。  相似文献   

17.
A natural plasticizer with multifunctional groups, similar in structure to phthalates, cardanol derivatives glycidyl ether (CGE) was synthesized from cardanol by a two‐step modification process and characterized by FT‐IR, 1HNMR, and 13CNMR. The resulting product was incorporated to PVC (CGE/PVC), and plasticizing effect was compared with PVC incorporated with two kinds of commercial phthalate ester plasticizers bis (2‐ethylhexyl) benzene‐1,4‐dicarboxylate (DOTP) and diisononyl phthalate (DINP). Dynamic mechanical analysis and mechanical properties testing of the plasticized PVC samples were performed in order to evaluate their flexibility, compatibility, and plasticizing efficiency. SEM was employed to produce fractured surface morphology. Thermogravimetric analysis and discoloration tests were used to characterize the thermal stabilities. Dynamic stability analysis was used to test the processability of formulations. Compared with DOTP and DINP plasticized samples, CGE/PVC has a maximum decrease of 9.27% in glass transition temperature (Tg), a maximum increase of 17.6% in the elongation at break, and a maximum increase of 31.59°C and 25.31 min in 50% weight loss (T50) and dynamic stability time, respectively. The obtained CGE also has slightly lower volatility resistance and higher exudation resistance than that of DOTP and DINP. © 2015 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2015 , 132, 42465.  相似文献   

18.
Various hydrogel systems have been developed as biomaterial inks for bioprinting, including natural and synthetic polymers. However, the available biomaterial inks, which allow printability, cell viability, and user-defined customization, remains limited. Incorporation of biological extracellular matrix materials into tunable synthetic polymers can merge the benefits of both systems towards versatile materials for biofabrication. The aim of this study was to develop novel, cell compatible dual-component biomaterial inks and bioinks based on poly(vinyl alcohol) (PVA) and solubilized decellularized cartilage matrix (SDCM) hydrogels that can be utilized for cartilage bioprinting. In a first approach, PVA was modified with amine groups (PVA-A), and mixed with SDCM. The printability of the PVA-A/SDCM formulations cross-linked by genipin was evaluated. On the second approach, the PVA was functionalized with cis-5-norbornene-endo-2,3-dicarboxylic anhydride (PVA-Nb) to allow an ultrafast light-curing thiol-ene cross-linking. Comprehensive experiments were conducted to evaluate the influence of the SDCM ratio in mechanical properties, water uptake, swelling, cell viability, and printability of the PVA-based formulations. The studies performed with the PVA-A/SDCM formulations cross-linked by genipin showed printability, but poor shape retention due to slow cross-linking kinetics. On the other hand, the PVA-Nb/SDCM showed good printability. The results showed that incorporation of SDCM into PVA-Nb reduces the compression modulus, enhance cell viability, and bioprintability and modulate the swelling ratio of the resulted hydrogels. Results indicated that PVA-Nb hydrogels containing SDCM could be considered as versatile bioinks for cartilage bioprinting.  相似文献   

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