Design and analysis of a polymeric photo-thermal microactuator

This paper presents the modeling, simulation and characterization of a photo-thermally actuated bent-beam microactuator. The microactuator consists of a single polymeric layer (SU-8) fabricated with conventional photolithography techniques. The principle of operation is based on the thermal expansion of the bent-beams that absorb the required heat by laser illumination. This provides an effective non-contact actuation mechanism by laser beam focusing. A theoretical model of the microactuator is derived and verified by finite element simulations and experiments. The experiments show that a bent-beam actuator with 800 m long, 40 m wide, 100 m thick and 6° bent arms achieves a tip displacement of 16 m with an incident laser beam of 50 mW power while keeping the maximum temperature less than 125 °C. This study merges the advantages of photo-thermal actuation with practicality of polymeric materials. To verify the effectiveness of the proposed microactuator mechanism, a microgripper with bent-beam actuator was fabricated and characterized. It has been demonstrated that the opening of the gripping fingers can be increased from 20 to 50 m for a microgripper with 1000 m long fingers with an incident laser power of 50 mW. This polymeric microgripper with photo-thermal actuation provides a way of gentle grasping with electrical isolation, high repeatability and low temperature operation that is particularly crucial for biomanipulation applications. The polymeric photo-thermal actuator described in this study expands the practical applications of microactuators/microgrippers which are critical tools in bioMEMS devices.