尺蠖式压电陶瓷驱动电源设计

为了满足尺蠖式压电陶瓷驱动器的控制需要,设计了相应的驱动电源。DSP是控制器,通过网口接收上位机的控制命令,通过异步总线与FPGA进行数据通信,FPGA操作4路D/A生成4路满足相应时序要求的波形,波形经过精密运放前级放大和由分立元器件搭建的功率放大,输出到尺蠖式压电陶瓷驱动器的电源输入端。测试和试验表明,电源带宽高,纹波小,阶跃响应特性和动态特性良好,能够精确的控制尺蠖式压电陶瓷驱动器微位移定位,可以应用在精密工程技术领域中。     

新型压电驱动机电耦合动力学系统分析与建模

为了准确描述压电陶瓷驱动器中存在的复杂非线性滞回动力学特性,采用分层建模原理,建立了驱动器中底层压电叠堆的非线性滞回子模型。将该底层子模型与驱动器中上层弹性和运动部件的子模型进行集成,导出了一种具有仿射形式的新型机电耦合非线性集总参数ECNLP模型。通过时域的仿真与实验对比验证和频域的动力学分析表明,该模型不仅能够准确、合理的刻画压电叠堆中的非线性滞回动、静态特性,而且充分考虑了驱动器中弹性和运动部件的动力学特性,为以后压电陶瓷驱动器控制系统的设计提供了一种新的建模方法。     

一种新型三自由度微定位新方法

设计了一种基于压电陶瓷的三维微定位系统,通过12个空间分布的压电陶瓷微驱动器及4个工作平台的配合,实现X、Y、Z向的精密位姿控制.阐述了微定位原理、建立了载物台位姿与压电陶瓷微驱动器伸缩量之间的关系,介绍了系统误差来源以及微定位装置的构造.该研究可望为一些高科技领域的微进给提供实用新技术.     

压电陶瓷驱动器动态驱动电源设计

针对大位移压电陶瓷驱动器的特点,设计了一种可动态应用的驱动电源,并给出了详细的电路原理图.对驱动电源的性能试验表明,在输入为正弦波、三角波和方波等动态信号时,该驱动电源可以很好的跟随输入信号的变化,显示出优异的动态性能.对压电陶瓷驱动器的驱动试验表明,该驱动电源具有较强的带负载能力,可满足大位移压电陶瓷驱动器的动态驱动...     

高压低纹波纳米驱动器

针对压电陶瓷进行了纳米级驱动技术的研究,优化了传统的直流放大式驱动技术的系统特性。深度分析了以压电陶瓷为驱动元件的纳米级微位移驱动技术的特性,实现了以下两方面的突破:在设计基于压电陶瓷元件实现纳米精度定位的研究中,设计出了数控压电陶瓷驱动器;深入研究了压电陶瓷容性元件特性后设计出电压恒流源式驱动电路,同时在电路中引入负反馈,稳定了驱动器的输出。通过大量实验证明,该设计很好地解决了压电陶瓷驱动高精度、快响应的难点,具有很高的实用价值。     

国际新闻

Heason发布超小型陶瓷伺服电机目录 近日，20页的目录涵盖了Nanomotion的陶瓷伺服电机、压电子系统和用于小型化聚焦／变焦、快门／过滤器和平移／俯仰控制的驱动器。目录有PDF格式的电子文档或印刷版本，涵盖了配有基于ASIC驱动器和控制电子的线性和旋转陶瓷电机，其中极为紧凑的尺寸、静音操作、非磁性和低EMI／RFI水平对于纳米精度伺服控制来说是基本特征。     

基于压电驱动技术的细胞微量注射装置

提出了用压电陶瓷在通电下产生的微小变形的原理来设计压电驱动器,利用微位移压电驱动器来完成细胞微量注射微动平台的定位和注射,并且将微动平台和由电机带动的细胞微载台来构成细胞药物微量注射的机械结构与控制系统。压电式细胞微量注射装置的定位和注射动作全部由压电驱动器来完成,和目前国内外的细胞微量注射装置相比主要特点是定位精度和注射精度都比较高。     

大容性负载双极性高压功率放大器设计

设计了一种适合压电陶瓷驱动器等大容性负载动态应用的双极性高压功率放大器,它基于误差放大式原理,采用高压集成运放(PA89)驱动多组并联功率放大级的电路结构,在实现双极性高电压输出的同时具有很强的电流驱动能力.该放大器驱动等效电容为2.5μF的压电陶瓷驱动器时,能实现单端到地-500～+500V高压输出,电压增益40dB...     

弯振复合型螺杆式压电驱动器研究

为了提高压电驱动器的机械输出性能,便于压电驱动器振动能量的传输,研制了一种弯振复合型螺杆式压电驱动器。该驱动器由圆筒和两个弯振夹心式换能器组成,换能器由变幅杆和两组弯振压电陶瓷片组成,且变幅杆和圆筒采用一体结构。对驱动器的工作原理进行了分析,利用有限元法对换能器进行了仿真,实现了换能器两个振动模态特征频率的匹配。对驱动器的基本输出特性进行了测试,测试结果表明该驱动器的螺杆最大输出速度为0.62mm/s,最大输出力为1.8 N。     

叠层型压电驱动器技术及实验研究

叠层型压电陶瓷利用逆压电效应可以得到精确的微位移量.介绍了叠层型压电驱动器的性能特性.并基于正交三角放大原理设计了一种微位移放大机构,使其将叠层型压电微位移器的位移量放大.实验结果表明,驱动器各项指标均达到设计要求,证明了设计理论的正确性.     

High Strain Piezoelectric Multilayer Actuators—A Material Science and Engineering Challenge

Piezoelectric actuators are at an important stage of their development into a large component market. This market pull is for dynamically driven actuators for Diesel injector valves in automobiles. Cost, yield, and reliability are important concerns for the automobile industry. A number of these concerns relate back to basic material science issues in the manufacture of the piezoelectric actuators. This paper discusses material development of the piezoelectric ceramic and new opportunities for higher temperature materials. An important consideration in developing low-fire ceramics is the flux selection for a given system, and these must be selected to limit electrode-ceramic interface reactions in both Ag/Pd and copper-metallized electrode actuators.     

Development of piezoelectric actuators for active X-ray optics

Piezoelectric actuators are widely utilised in adaptive optics to enable mirrors having an actively controlled reflective surface for the purpose of the wavefront correction by reducing the effects of rapidly changing optical distortion. Two new prototype adaptive X-ray optical systems are under development with the aim of approaching the fundamental diffraction limit. One proposed technology is microstructured optical arrays (MOAs) involving two or four piezoelectric strips bonded to a silicon wafer to produce a micro-focused X-ray source for biological applications, and which uses grazing incidence reflection through consecutive aligned arrays of channels obtained using deep silicon etching. Another technology is large scale optics which uses a thin shell mirror bonded with 20?C40 piezoelectric actuators for the next generation of X-ray telescopes with an aim to achieve a resolution greater than that currently available by Chandra (0.5"). PZT-based piezoelectric actuators are being developed in this programme according to the design and implementation of the proposed mirror and array structures. Viscous plastic processing is chosen for the preparation of the materials system, which is subsequently formed and shaped into the suitable configurations. Precise controls on the thickness, surface finish and the curvature are the key factors to delivering satisfactory actuators. Unimorph type piezoelectric actuators have been proposed for the applications and results are presented regarding the fabrication and characterisation of such piezo-actuators, as well as the related design concepts and comparison to modelling work.     

基于电-磁(热)-力转换功能材料的新型执行器研究与应用

形状记忆合金执行器、压电陶瓷执行器和超磁致执行器是电工科学领域中最具有科学意义和应用前景的电工器件。综述了以上3种执行器的应用领域及研究热点,指出了在今后研究中需要解决的关键技术问题。     

Novel Piezoelectric-Based Power Supply for Driving Piezoelectric Actuators Designed for Active Vibration Damping Applications

This paper describes a novel step-up DC-AC piezoelectric-based power supply for driving piezoelectric actuators. Piezoelectric actuators have been demonstrated to be very attractive in applications requiring fast response and high actuation force, such as active damping applications. These actuators are commonly installed in self-powered systems (cars, helicopters, aircrafts, satellites, etc.) with limitation in the battery performance, dimensions and maximum weight. Nevertheless, the required driving electrical AC voltage for these actuators is typically in the range of 100 V to 1000 V, quite far from the 9 to 24 V of common batteries. Thus, the use of heavy, large and EMI-noisy electromagnetic transformers becomes necessary which is a drawback for the compact size required. This paper introduces an alternative system for driving piezoelectric actuators using a novel design of piezoelectric transformer, the Transoner®. The proposed solution allows a reduction in size, weight and magnetic noise generation compared to the classical electromagnetic-based systems. The work represents a completely novel approach to the possibilities of piezoelectric transformers for powering high voltage piezoelectric actuators. The solution offers significant advantages in environments requiring high integration, low weight, and low electromagnetic interferences operated with batteries. A circuit configuration capable of converting a 24 V DC input voltage up to 600 V _pp AC output voltage with frequency and magnitude control is implemented. Experimental results are presented for a standard multilayer piezoelectric actuator driven at 100 V _pp within the range of 10 Hz to 500 Hz.     

Piezoelectricity in cellular electret films

Permanently charged films with a cellular or porous structure represent a new family of polymer electrets. These materials show piezoelectric properties with high piezoelectric constants. The electromechanical response equations of such films are derived for their operation as sensors and as actuators. Experimental results are also presented for cellular polypropylene (pp). In particular, measurements of the direct and inverse piezoelectric constants in the frequency range 0 to 10 kHz and of the variation of these constants across the surface of the films are discussed. These measurements, performed by direct application of stress or by the use of a profilometer, an accelerometer and an interferometer yield a frequency-independent piezoelectric d₃₃ constant of ≲ 220 pC/N. Assuming reasonable charge distributions and charge densities, the calculated piezoelectric constants are in good agreement with the measured values. The theoretical model shows the reciprocity of the piezoelectric constants     

A 3‐DOF Inchworm Using Levitation Caused by Vertical Vibration

We propose a 3‐DOF inchworm‐type microactuator that uses levitation generated by vertical vibration. The vertical vibration is created by a piezoelectric actuator. The inchworm typically consists of thrust elements and clamp elements. The proposed inchworm, however, does not use any clamp elements. Four levitation elements are connected with four thrust elements, which are stacked‐type piezoelectric actuators. The levitation element consists of a mass, a piezoelectric actuator, and a plate. The vertical vibration of the piezoelectric actuator lifts the levitation elements, which eliminates any friction. By controlling the order of the deformation of the horizontal piezoelectric actuators and the vibration of the vertical piezoelectric actuators, the inchworm engages in linear and rotational motion. The levitation height and the linear and rotational displacement of the inchworm were measured. Experimental results demonstrated the feasibility of the proposed 3‐DOF inchworm. The mechanism described in this paper is effective for a precision positioning system in a clean room.     

XYΘ actuators using piezoelectric and electromagnetic actuators

Microactuators with multiple degrees of freedom, which can provide many benefits in precision engineering, are in demand for industrial applications. We propose two new actuators (Y‐type and Δ‐type) which can move in the x, y, and θ directions. They are combinations of piezoelectric and electromagnetic actuators. The proposed actuators realize high resolution via the piezoelectric actuators. We describe the structure and principle of the proposed actuators, and discuss their feasibility. A resolution of 70 nm in the x direction and of 0.5 μrad in the θ direction was obtained with the Y‐type actuator. A resolution of 90 nm in the x direction and of 0.6 μrad in the θ direction was obtained with the Δ‐type actuator. © 2000 Scripta Technica, Electr Eng Jpn, 131(4): 44–51, 2000     

提高蠕动式压电直线驱动器输出力的研究进展

蠕动式压电直线驱动器具有大位移行程和高位移分辨率的特点,但是箝位机构利用静摩擦力输出负载的方式大大限制了系统的进给刚度和输出推力.从箝位机构的结构类型、运动方式以及和新材料新技术的交叉应用等方面,介绍了几种典型尺蠖驱动器的研究进展,为提高系统的输出力,指出了今后的研究方向.     

Analysis of primary-on-slider ultrasonic piezoelectric actuators and experiments on multidegree of motion freedom plane actuator

Recently, various machines and tools have been miniaturized, and with this trend, the size of an actuator becomes a very important factor. An ultrasonic actuator is different from other actuators using electromagnet force in the driving principle. The structures of an ultrasonic piezoelectric actuator is simple. An ultrasonic actuator converts the ultrasonic mechanical energy to mechanical thrust force by a friction force. Based on this idea, various ultrasonic actuators have been proposed and experimentally constructed. In this paper, the basic characteristics of a piezoelectric actuator are analyzed theoretically. The relationship between the thrust force and the weight force is clarified and verified by experiments. Various prototypes of plane ultrasonic piezoelectric actuators are constructed experimentally, and the fundamental characteristics are measured.