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1.
任科明  周朕 《压电与声光》2015,37(3):522-525
采用溶胶-凝胶法在玻璃衬底上制备了不同Cu掺杂量的ZnO薄膜。用X线衍射仪、原子力显微镜研究Cu掺杂对ZnO(ZnO∶Cu)薄膜的微观结构、表面形貌的影响。结果表明,Cu掺杂并未改变ZnO的纤锌矿结构,但所有样品的衍射峰向大角度偏移,且薄膜的粒径增大,说明薄膜的内在应力使晶格发生了畸变。在ZnO薄膜的透射光谱中,透射率在可见光范围随掺杂量的增加而降低,且吸收边发生红移,可见Cu掺杂减小了带隙宽度。从室温下的光致发光谱来看,Cu掺杂仅改变带边发光峰的位置,未显著改变ZnO薄膜的其他发光峰的位置,但因发光淬灭的原因,发光峰的强度明显降低。  相似文献   

2.
用溶胶-凝胶旋涂法在玻璃衬底上制备了Co,Cu单掺杂及(Co,Cu)共掺杂ZnO薄膜.磁性测量表明,无论是单掺还是共掺的ZnO薄膜都具有室温铁磁性,且Co掺杂和共掺杂ZnO薄膜的磁性相近,而Cu单掺ZnO薄膜磁性稍弱一点.用原子力显微镜和X射线衍射研究了Co,Cu掺杂对ZnO薄膜表面形貌和晶体结构的影响,在薄膜中没有发现第二相和磁性团簇的存在,且所有ZnO薄膜样品都存在(002)择优取向.室温光致发光测量在所有的样品中都观察到447和482 nm附近的蓝光发射,认为是由于氧空位浅施主能级上的电子到价带上的跃迁所导致的.  相似文献   

3.
Cu掺杂ZnO薄膜的结构及发光特性   总被引:1,自引:0,他引:1  
采用溶胶-凝胶旋涂法在玻璃衬底上制备了不同Cu掺杂量的ZnO薄膜。用显微镜和X射线衍射(XRD)研究了Cu掺杂对ZnO薄膜形貌和微结构的影响。结果表明,制备得到的ZnO薄膜具有应变小和c轴择优取向。室温下测量了样品Zn1-xCuxO的光致发光(PL)谱,发现所有样品的PL谱中均观察到435nm左右的蓝光发光带,发光带强度与Cu的掺杂量有关;当x=0.06时,Zn1-xCuxO薄膜的PL谱中出现了较强的蓝光发射。分析了掺杂量对发光性能的影响,并对样品的发光机制进行了探讨,推断出蓝光峰来源于电子由导带底到锌空位(VZn)能级的跃迁及锌填隙(Zni)能级到价带顶的跃迁,它们可通过改变Cu的掺杂量予以控制。  相似文献   

4.
用射频磁控溅射法在玻璃衬底上氩气气氛中制备出(Al,Zr)共掺杂的ZnO透明导电薄膜,研究了不同Zr掺杂浓度和薄膜厚度ZnO薄膜的结构、电学和光学特性。结果表明,在最佳沉积条件下我们制备出了具有(002)单一择优取向的多晶六角纤锌矿结构,电阻率为2.2×10-2Ω.cm,且可见光段(320~800nm)平均透过率达到85%的ZnO透明导电薄膜。在150℃的条件下对(Al,Zr)共掺杂的ZnO薄膜进行1h的退火处理,薄膜电阻率降低至8.4×10-3Ω.cm。Zr杂质的掺入改善了薄膜的可见光透光性。  相似文献   

5.
采用溶胶-凝胶法在玻璃基片上制备了纯ZnO薄膜和高浓度Cu掺杂的Co,Cu共掺ZnO(Zn0.90CoxCu0.1-xO,x=0.01,0.03,0.05)薄膜。扫描电镜观察到无论是纯ZnO还是掺杂ZnO薄膜表面都有均匀分布的颗粒,但是在Cu含量较高时均匀性更好。X射线衍射揭示所有样品都具有纤锌矿结构,但是Cu掺杂量的增加使晶格常数略有减小,而晶粒尺寸却略有增大。XPS测试结果表明样品中Co离子的价态为+2价和+3价,Cu离子的价态为+2价和+1价共存。室温光致发光测量在所有样品中均观察到较强的紫外发光峰、蓝光双峰和较弱的绿光发光峰。  相似文献   

6.
掺杂及工艺条件对室温制备ZnO∶Al性能的影响   总被引:2,自引:1,他引:1  
采用直流磁控溅射工艺,在室温条件下制备了ZnO∶Al(ZAO)薄膜,研究了Al掺杂量和溅射工艺参数等对ZAO薄膜光电性能的影响.结果表明:Al掺杂量和溅射工艺参数均对薄膜的电阻率有显著影响,在Al掺杂质量分数为3%、溅射功率为100 W以及Ar压强为1.5 Pa的条件下,室温溅射淀积的ZAO薄膜可获得1.4×10-3 Ω*cm的最小电阻率;Al掺杂量和工艺参数对薄膜的透光率均无明显的影响,薄膜的平均透光率在86~90%,但随Al掺杂量和溅射功率的增加,薄膜的截止吸收边均向短波长方向移动.对薄膜优值因子的分析表明,适合采用的Ar压强值在0.6~2.0 Pa.  相似文献   

7.
为了制备结晶质量好的Cu掺杂ZnO薄膜,研究其结构和光学性质,采用脉冲激光沉积方法,在Si衬底上选择不同的衬底温度来制备薄膜.实验成功制得了结晶质量较好的Cu掺杂ZnO薄膜.利用X射线衍射仪、扫描电子显微镜和荧光分光光度计对样品进行了测量和分析.所制备的样品均表现出高度的c轴择优取向,衬底温度为300℃时,薄膜表面形貌均匀致密;在样品的光致发光谱中,发现样品除了在380nm附近出现紫外发光峰外,在460nm附近出现了蓝光发光峰,真正意义上实现了ZnO薄膜的蓝光发射.结果表明,衬底温度对其晶体质量有较大影响.  相似文献   

8.
Al-Zr共掺杂ZnO透明导电薄膜制备及光电性能研究   总被引:2,自引:0,他引:2  
王辉 《光电子.激光》2009,(12):1606-1609
采用直流磁控溅射法,在室温水冷玻璃衬底上制备出Al-Zr共掺杂的ZnO透明导电薄膜。研究结果表明,Ar气压强对Al-Zr共掺杂ZnO透明导电薄膜的结构和电阻率有显著影响。X射线衍射(XRD)表明,Al-Zr共掺杂ZnO透明导电薄膜为六角纤锌矿结构的多晶薄膜,且具有C轴择优取向。扫描电镜(SEM)观察表明,Ar气压强对Al-Zr共掺杂ZnO透明导电薄膜的微观结构影响较大。薄膜的厚度随Ar气压强的增加而变薄,在Ar气压强为2.5Pa时,制备的Al-Zr共掺杂ZnO薄膜电阻率具有最小值1.01×10-3Ω.cm,在可见光区(500~800nm)平均透过率超过93%。  相似文献   

9.
为了制备结晶质量好的Cu掺杂ZnO薄膜,研究其结构和光学性质,采用脉冲激光沉积方法,在Si衬底上选择不同的衬底温度来制备薄膜。实验成功制得了结晶质量较好的Cu掺杂ZnO薄膜。利用X射线衍射仪、扫描电子显微镜和荧光分光光度计对样品进行了测量和分析。所制备的样品均表现出高度的c轴择优取向,衬底温度为300℃时,薄膜表面形貌均匀致密;在样品的光致发光谱中,发现样品除了在380nm附近出现紫外发光峰外,在460nm附近出现了蓝光发光峰,真正意义上实现了ZnO薄膜的蓝光发射。结果表明,衬底温度对其晶体质量有较大影响。  相似文献   

10.
靶材自制ZAO薄膜的制备与光电性能   总被引:2,自引:0,他引:2  
采用传统陶瓷烧结工艺,制得性能良好的Al掺杂ZnO陶瓷靶.以此靶为溅射源,利用射频磁控溅射法制备ZAO薄膜,着重研究了400℃保温2 h重复退火次数对ZAO薄膜的组织结构及光电性能的影响.结果表明,随着重复退火次数的增加,薄膜晶体结构保持不变,薄膜结晶质量提高,但晶格尺寸逐渐变小;同时,随着退火次数增加,样品的平均透光率虽稍下降,但所有样品的透光率仍保持在80%以上,呈现良好的透光性;除经3次重复退火的样品外,退火使其它样品的紫外吸收边从375 nm附近移至360 nm左右;重复退火次数的增加使样品的电阻率先明显降低,再有较大的回升,之后又降低,当重复退火两次时,电阻率降至最低,为8.5×10-4 Ω·cm.对上述现象、结果及机理进行了详细讨论.  相似文献   

11.
用真空共蒸发法在室温下制备了ZnTe:Cu多晶薄膜。用XRD表征薄膜结构,刚沉积未掺Cu和适度掺Cu的薄膜为立方结构,高度(111)择优,重掺Cu的为立方和六方混合相。室温时薄膜的形貌和光能隙取决于掺Cu浓度和退火温度,并通过透射光谱的测量计算出光能隙。  相似文献   

12.
Copper (Cu)-doped ZnO thin films were grown on unheated glass substrates at various doping concentrations of Cu (0, 5.1, 6.2 and 7.5 at%) by simultaneous RF and DC magnetron sputtering technique. The influence of Cu atomic concentration on structural, electrical and optical properties of ZnO films was discussed in detail. Elemental composition from EDAX analysis confirmed the presence of Cu as a doping material in ZnO host lattice. XRD patterns show that the films were polycrystalline in nature with (002) as a predominant reflection of ZnO exhibited hexagonal wurtzite structure toward c-axis. From AFM analysis, films displayed needle-like shaped grains throughout the substrate surface. The electrical resistivity was found to be increased with increase of Cu content from 0 to 7.5 at%. Films have shown an average optical transmittance about 80% in the visible region and decreased optical band gap values from 3.2 to 3.01 eV with increasing of Cu doping content from 0 to 7.5 at% respectively. Furthermore, remarkably enhanced photoluminescence (PL) properties have been observed with prominent violet emission band corresponding to 3.06 eV (405 nm) in the visible region through the increase of Cu doping content in ZnO host lattice.  相似文献   

13.
Cu-doped zinc oxide (ZnO:Cu) films were deposited on p-Si (100) substrates using radio-frequency reactive magnetron sputtering. The structure and optical properties of the films were characterized by X-ray diffraction spectroscopy (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), and fluorescence spectroscopy. XRD and SEM results revealed that ZnO:Cu film had a better preferential orientation along the c-axis compared with pure ZnO film. The chemical state of copper and oxygen in ZnO:Cu films was investigated by XPS. The results suggest that the Cu ion has a mixed univalent and bivalent state. The integrated Cu2+/Cu+ intensity ratio increased with the O2 partial pressure. Photoluminescence measurements at room temperature revealed a double peak in the blue regions and a green emission peak. The close relationship between the valence state of Cu ions and the blue–green emission is discussed in detail. A higher photocurrent was observed for ZnO:Cu films under UV illumination. UV photodetectors based on ZnO:Cu films have high sensitivity and fast response and recovery times. Under periodic UV illumination at 380 nm the ZnO:Cu films showed stable photocurrent growth and decay, so the films are potential candidate materials for UV photodetectors.  相似文献   

14.
Cu掺杂对ZnO量子点光致发光的影响   总被引:1,自引:0,他引:1  
徐建萍 《光电子.激光》2010,(11):1593-1596
通过溶液法合成了Cu掺杂ZnO量子点。X射线衍射(XRD)和高分辨电子透射电镜(HRTEM)图像显示Cu掺杂ZnO量子点具有六角纤锌矿结构,晶粒大小为4~5nm。Cu掺杂抑制了ZnO量子点颗粒长大。室温光致发光(PL)谱观察到紫外带边和可见区两个发射峰。随着Cu掺杂浓度的增大,紫外荧光峰位发生缓慢红移,由366nm移到370nm;可见区发射峰位发生蓝移,由525nm移到495nm;同时,两个发射峰强度降低。光谱结果表明:Cu的掺入,一方面抑制表面与O空位有关的缺陷,在495nm出现了与Cu1+有关的发射峰;另一方面,Cu离子掺入ZnO量子点引入一些非辐射中心,降低了自由激子发射。  相似文献   

15.
Copper (Cu) doped zinc oxide (ZnO) thin films were successfully prepared by a simple sol-gel spin coating technique. The effect of Cu doping on the structural, morphology, compositional, microstructural, optical, electrical and H2S gas sensing properties of the films were investigated by using XRD, FESEM, EDS, FTIR, XPS, Raman, HRTEM, and UV–vis techniques. XRD analysis shows that the films are nanocrystalline zinc oxide with the hexagonal wurtzite structure and FESEM result shows a porous structured morphology. The gas response of Cu-doped ZnO thin films was measured by the variation in the electrical resistance of the film, in the absence and presence of H2S gas. The gas response in relation to operating temperature, Cu doping concentration, and the H2S gas concentration has been systematically investigated. The maximum H2S gas response was achieved for 3 at% Cu-doped ZnO thin film for 50 ppm gas concentration, at 250 °C operating temperature.  相似文献   

16.
The present paper reports on a systematic study of the Cu doping effect on the optical, electrical and structural properties of ZnTe:Cu (Cu=0, 6, 8, and 10 at%) thin films. Polycrystalline Cu-doped ZnTe thin films were deposited on glass substrates at room temperature by thermal evaporation. A detailed characterization of the Cu-doped ZnTe films were performed by X-ray diffraction (XRD), Spectrophotometry, Fourier transform infrared spectroscopy (FT-IR) and Raman spectroscopy. XRD of the as-deposited Cu-doped ZnTe films belong to single-phase cubic structure of ZnTe with preferential orientation along (111) planes revealed minor effect of Cu content. The interference pattern in optical transmission spectra was analyzed to determine energy band gap, refractive index, extinction coefficient and thickness of the films. Wemple–DiDomenico and Tauc's relation were used for the determination and comparison of optical band gap values. The formation of ZnTe and Cu-doped ZnTe phase was confirmed by FT-IR. AC conductivity in a frequency range of 0–7 MHz has been studied for investigation of the carriers hoping dynamics in the films. Raman spectra indicated merely typical longitudinal optical (LO) phonon mode of the cubic structure ZnTe thin film at 194 cm−1 because the excitation energy is well above of the optical band-gap of the material and exhibited a blue-shift from 194 to 203 cm−1 with Cu which could be associated to the substitution of Zn atom with Cu at the lattice sites.  相似文献   

17.
Different concentrations of copper-doped zinc oxide thin films were coated on a glass substrate by sol–gel/spin-coating technique. The structural properties of pure and Cu-doped ZnO films were characterized by different techniques, i.e., atomic force microscopy (AFM), photoluminescence and UV–Vis-NIR spectroscopy. The AFM study revealed that pure and doped ZnO films are formed as nano-fibers with a granular structure. The photoluminescence spectra of these films showed a strong ultraviolet emission peak centered at 392 nm and a strong blue emission peak cantered at 450 nm. The optical band gap of the pure and copper-doped ZnO thin films calculated from optical transmission spectra (3.29–3.23 eV) were found to be increasing with increasing copper doping concentration. The refractive index dispersion curve of pure and Cu-doped ZnO film obeyed the single-oscillator model. The optical dispersion parameters such as E o , E d , and \(n_{{\infty }}^{2}\) were calculated. Further, the nonlinear refractive index and nonlinear optical susceptibility were also calculated and interpreted.  相似文献   

18.
Nanoporous thin films of Cd1−xCuxS (0≤x≤0.06) were grown on a heated glass substrate employing a home-made spray pyrolysis technique. The influences of [Cu]/[Cd] and the annealing in the range 300–500 °C on the structural and morphological properties of the films were investigated by X-ray diffraction (XRD), Fourier transformation infrared spectroscopy (FTIR), field emission scanning electron microscope (FE-SEM) and atomic force microscopy (AFM). The influences of Cu doping ratio, solution flow rate, and the deposition time on the optical properties and photocatalytic activity of these films are also reported. The films are of polycrystalline nature and hexagonal structure. Increasing the Cu doping ratio and annealing temperature improve the (1 0 1) preferential orientation. The crystallite size is ranged from 23.82 to 32.11 nm. XRD and FTIR reveal the formation of CdO in the 6% Cu-doped CdS film annealed at 400 °C and in all films annealed at 500 °C. The pure CdS film is of a porous structure and the close-packing and porosity of the films increase with increasing Cu%. Also, the pore diameter can be controlled from 50 to 15 nm with the increase of Cu content. The films showed transmittance below 70%. The optical band gap of the films is decreased from 2.43 to 1.82 eV with increasing Cu% and flow rate/deposition time. Additionally, the refractive indices and dispersion parameters of the films are also affected by the deposition conditions. Cu doping enhanced the films' photostability as well as the photocatalytic removal of methylene blue (MB).  相似文献   

19.
Un-doped and Cu-doped ZnS (ZnS:Cu) thin films were synthesized by Successive Ion Layer Absorption and Reaction (SILAR) method. The UV-visible absorption studies have been used to calculate the band gap values of the fabricated ZnS:Cu thin films. It was observed that by increasing the concentration of Cu2+ ions, the Fermi level moves toward the edge of the valence band of ZnS. Photoluminescence spectra of un-doped and Cu-doped ZnS thin films was recorded under 355 nm. The emission spectrum of samples has a blue emission band at 436 nm. The peak positions of the luminescence showed a red shift as the Cu2+ ion concentration was increased, which indicates that the acceptor level (of Cu2+) is getting close to the valence band of ZnS.  相似文献   

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