飞秒激光刻蚀对纳米金刚石薄膜表面微观特性的影响

利用飞秒激光对纳米金刚石涂层进行刻蚀试验,通过改变激光的重复频率,输出功率以及焦点扫描速度,研究不同的激光加工参数对金刚石涂层烧蚀结果的影响。利用白光干涉仪器、SEM、拉曼光谱仪研究了飞秒激光刻蚀后涂层表面微观粗糙度、微观形貌以及碳相结构变化。采用面积推算法计算出扫描速度1 mm/s,有效脉冲数为90时的烧蚀阈值。结果表明：金刚石涂层表面飞秒激光诱导的条纹状结构周期（LIPSS）接近飞秒激光波长,改变飞秒激光重复频率对涂层表面形貌修饰影响不大;由于烧蚀饱和作用,飞秒激光功率增加至80 mW过程中涂层表面微观粗糙度持续减小随后维持在325 nm左右;激光扫描速度的增大可使LIPSS特征消失,当扫描速度增加至1.4 mm/s后,涂层表面微观粗糙度不再继续降低而是随着速度的增大而增大。激光诱导的金刚石涂层表面石墨化程度越高,涂层表面微观粗糙度则越低;当有效脉冲数为90时纳米金刚石薄膜的飞秒激光烧蚀阈值为0.138 J/cm²。     

Cu箔集流体飞秒激光深刻蚀织构化及其对锂离子电池性能的影响

目的 使用飞秒激光在Cu箔表面深刻蚀织构化,制备微纳沟槽结构,提高锂离子电池Si电极循环稳定性。方法 系统研究激光能量密度、单位点有效脉冲数对厚度为9 μm的Cu箔的表面形貌和微纳结构的影响规律,根据结果设计不同沟槽密度和沟槽深度的Cu箔,并组装成Si电极锂离子半电池,通过循环测试及循环后电极形貌揭示其稳定性提升的内在机理。结果 最佳的激光能量密度为3.18 J/cm²,此时改变单位点有效脉冲数和扫描间距可有效控制刻蚀沟槽的密度和深度。Si电极的循环稳定性随着Cu箔表面沟槽密度和沟槽深度的增加而逐渐提升,当沟槽密度为75%、沟槽深度为6 μm时,循环300圈后剩余的容量高达911 mA.h/g,保持率为89%,电极形貌相对最完整、稳定。结论 刻蚀表面纳米结构增加了电极层与集流体之间的黏结强度;微米沟槽结构进一步保护了电极层,缓解了体积膨胀效应。采用Cu箔集流体深刻蚀显著改善了Si电极的剥离和开裂现象,实现了其电化学性能的提升。     

飞秒激光烧蚀铝片的热弛豫效应模拟与实验研究

研究了在不同能量密度的单脉冲飞秒激光下烧蚀铝片的过程。通过分析基于双温模型有限差分法所模拟出的数据图,并结合飞秒激光烧蚀实验的结果,从而研究不同激光能量密度与铝片烧蚀之间的联系。研究表明：飞秒激光能量密度与飞秒激光烧蚀的关联,而实验所测的结果进一步表明了提升飞秒激光能量密度对加工铝材料的加工效率以及加工质量的影响。通过研究和实验结果能够得出随着飞秒激光能量密度的增加,飞秒激光烧蚀期间铝材料的热弛豫过程将加长,烧蚀强度也将有所增加,同时铝材料加工后得出形貌质量也将有所提高,这个结论对于飞秒激光烧蚀金属材料的研究具有一定的意义。     

激光能量密度对原位生长碳化硅晶须形态的影响

以激光为热源,以SiC纳米颗粒材料为前驱体,进行了激光照射下SiC纳米颗粒原位生长晶须的试验,利用SEM对晶须形态进行了分析,分析结果表明激光能量密度是SiC晶须形态变化的主要因素,激光能量密度较小时,晶须形态常为圆锥状、短棒状、丝状,能量密度较大时晶须形貌常见于网状,团簇状等.在样品的不同照射区域,晶须的形态各不相同.     

飞秒激光烧蚀铝片的热弛豫效应模拟与实验研究（英文）

研究了在不同能量密度的单脉冲飞秒激光下烧蚀铝片的过程。通过分析基于双温模型有限差分法所模拟出的数据图,并结合飞秒激光烧蚀实验的结果,从而研究不同激光能量密度与铝片烧蚀之间的联系。研究表明:飞秒激光能量密度与飞秒激光烧蚀的关联,而实验所测的结果进一步表明了提升飞秒激光能量密度对加工铝材料的加工效率以及加工质量的影响。通过研究和实验结果能够得出随着飞秒激光能量密度的增加,飞秒激光烧蚀期间铝材料的热弛豫过程将加长,烧蚀强度也将有所增加,同时铝材料加工后得出形貌质量也将有所提高,这个结论对于飞秒激光烧蚀金属材料的研究具有一定的意义。     

飞秒激光烧蚀金箔机理及模拟分析

研究了在不同能量密度的单脉冲飞秒激光下烧蚀金箔的过程。讨论在不同能量密度的飞秒激光烧蚀下对电声相互作用,结合双温模型在有限差分法下模拟出的数据图,从模拟结果中得出能量密度与飞秒激光烧蚀的关联,进一步结合实验结果,分析飞秒激光能量密度是金箔的加工效率以及加工质量的主要因素,从而表明飞秒激光能量密度对于飞秒激光烧蚀材料的研究具有很大意义。     

薄基材过滤片飞秒激光精密加工

利用飞秒激光非热熔性烧蚀的加工特性,以钛箔材质的过滤片零件为加工对象,研究了飞秒激光在钛箔材料微槽结构及外形加工方面的应用,并针对加工需求开发了易氧化薄基材的定位夹具和防氧化技术.试验中通过优化离焦量、加工速度和激光能量等参数,得到了过滤片边缘形貌和底部形貌受激光能量密度的影响规律,最终实现了过滤片零件的精密加工,为薄...     

飞秒激光刻蚀氧化锆表面微纳结构及其润湿与抗菌性能

目的 构筑氧化锆表面微纳结构,提高表面疏水性能。方法 用飞秒激光在氧化锆表面刻蚀网格结构,随后用硬脂酸修饰所得表面,系统研究了激光能量密度、激光扫描速度对氧化锆表面形貌及润湿性的影响,分析不同处理条件下氧化锆的表面形貌和润湿性,通过润湿模型进一步揭示润湿性转变内在机理。进一步通过在饱和大肠杆菌溶液中浸泡的试验,对不同处理条件下氧化锆表面的抗菌性能进行了测试和分析。结果 在9.6 J/cm²的过高能量密度以及10 mm/s的过小扫描速度下会导致氧化锆表面过度烧蚀,破坏表面微结构,不利于提高表面疏水性。发现激光纹理化氧化锆的最佳参数为激光能量密度8.3 J/cm²,扫描速度20 mm/s,制备的微凸起结构为表面覆盖大量纳米结构的周期性锥状阵列,凹槽的平均宽度和平均深度分别为(27.598±1.376)μm和(33.825±0.559)μm,此时表面粗糙度最大为9.556 μm,随着表面粗糙度的增加,微纳复合结构可以截留更多的空气,减少固液接触面积,表面具有最大的水接触角为(163.9±1.5)°,最小的水滚动角为(4.3±0.8)°。平板菌落计数法测定结果显示,此时硬脂酸修饰的激光纹理化氧化锆超疏水表面的抗菌率最高,为(89.1±3.6)%。结论 采用飞秒激光刻蚀结合硬脂酸修饰的方法,通过激光参数优化,可在氧化锆表面产生微纳复合结构,增加其表面粗糙度,从而制备得到疏水甚至超疏水的氧化锆表面,超疏水氧化锆表面截留的空气层对大肠杆菌的黏附具有很好的抑制作用,表现出明显的抗菌性,有望扩展氧化锆在牙科领域的应用。     

纳秒-飞秒激光复合制备TC4合金高抗反射表面

单一使用皮秒或者飞秒激光器制备抗反射表面已经可以取得很好的结果,但是其加工效率不满足工业生产的需要。提出利用纳秒-飞秒激光复合制备金属高抗反射表面的方法和思路。使用纳秒、飞秒两种激光器对TC4钛合金表面进行刻蚀处理,在金属表面引入微纳米结构,使其在电磁波波长200～2 500 nm间的反射率降低至2%以内并分析作用机理。首先利用纳秒激光在TC4钛合金表面刻蚀槽状结构,该结构在波长200～2 500 nm的最佳平均反射率为5.76%,飞秒激光扫描后,平均反射率降低至3.5%。然后,构造复合结构在槽状结构基础上进一步优化金属表面的抗反射性能,在波长200～2 500 nm的最佳平均反射率为1.87%。最后,制备复合结构,制备中其表面形貌呈现出对齐状和蜂窝状两种微孔排列方式。设计并验证控制激光脉冲起始位置方法,可制备出稳定蜂窝状结构,蜂窝状孔排列的复合结构在波长200～2 500 nm的最佳平均反射率可降低至1.63%。单位面积内蜂窝状复合结构的有效表面占比更大;同时可以附着更多的纳米颗粒,由于纳米粒子的激元共振效应,加之纳米颗粒团尺寸不同,其吸收峰从单一频率拓宽至一个频率带,金属表面的光吸...     

激光辐照碳化硅颗粒原位生成碳化硅纳米纤维的条件与特征

目的通过优化制备碳化硅纳米纤维的工艺及激光工艺参数,获得一种制备碳化硅纳米纤维的新方法。方法利用500 W振镜式光纤激光器,在氩气的保护下,以一定的激光工艺参数辐照预置在镍基板上的纳米碳化硅颗粒,采用扫描电镜(SEM)、能谱仪(EDS)、X射线衍射仪(XRD)和透射电镜(TEM)分别对所得产物的形貌、元素组成、物相以及微观结构进行分析。结果激光工艺参数对所得产物的形貌以及结构有一定的影响,当激光能量密度在7.71～8.75 kJ/cm2之间时,制备出的碳化硅纳米纤维由多晶和非晶结构组成,其直径范围在5～10 nm之间;当激光能量密度为7.92～8.33 kJ/cm2时,样品中除Si C外,还有少量的C元素。结论激光辐照Ni基板上的碳化硅纳米颗粒,在优化的激光工艺参数下,可以制备出形貌良好的纳米纤维,为制备纳米材料提供了一种新途径。     

Effects of femtosecond laser ablation on the surface morphology and microstructure of a bulk TiCuPdZr glass alloy

The effects of femtosecond laser ablation on the surface characteristics and microstructure of a bulk TiCuPdZr glass alloy were investigated. The heat influence zone of femtosecond laser ablated with a laser energy of 100 μJ exhibits a ripple-like feather, while a porous structure appears on the surface of the specimen ablated by a 200 μJ femtosecond laser. The contents of Ti, Zr, and Pd on the ablated surface decrease and that of Cu increases with increasing laser energy. The crystallization process occurs on the glass alloy specimens during femtosecond laser ablation, and the crystallinity of a 100 μJ femtosecond laser-ablated specimen is greater than that of a 200 μJ femtosecond laser-ablated one.     

基于分子动力学研究刚性磨粒划擦铝基材料去除行为

目的 实现材料高效去除,避免亚表层严重滑移,以及改善已划擦区表面形貌质量.方法 基于EAM和Morse混合势函数,采用分子动力学法对刚性磨粒划擦Al材料的去除行为展开研究,分析磨粒尺寸、温度、压深、速度对材料去除行为的影响,并提出飞秒激光辅助加热改善材料塑性去除行为的方法.结果 不同划擦因素变化对Al材料去除、表面形貌...     

飞秒激光刻蚀微结构对NaOH水热法制备TiO_2光催化性能的影响

Ti基底三维微纳米结构TiO_2(3D-TiO_2)具有比表面积大、光捕获能力强、电荷传输快、可循环利用的优点,在光催化领域具有重要的研究意义和应用前景。采用飞秒激光刻蚀复合Na OH水热法制造Ti基底3D-TiO_2,并研究飞秒激光刻蚀的微阵列结构对3D-TiO_2光催化性能的影响。采用激光共聚焦显微镜(LSCM)、SEM、TEM、XRD对3DTiO_2进行表征分析,并对3D-TiO_2在紫外光照下进行甲基橙降解性能测试。结果表明,复合方法制备的3D-TiO_2由飞秒激光刻蚀的微阵列和Na OH水热法制备的TiO_2纳米线组成。与采用Na OH水热法直接在平整Ti表面制备的TiO_2纳米线相比,3D-TiO_2的染料吸附能力提升100%,光催化性能提升37%。微阵列结构尺寸对3D-TiO_2的性能具有明显影响,随着微阵列宽度的减小或高度的增加,3D-TiO_2的比表面积增大、入射光反射率降低、光催化性能提高。     

Theoretical and experimental study of energy transportation and accumulation in femtosecond laser ablation on metals

The energy transportation and accumulation effect for femtosecond (fs) laser ablation on metal targets were studied using both theoretical and experimental methods. Using finite difference method, numerical simulation of energy transportation characteristics on copper target ablated by femtosecond laser was performed. Energy accumulation effects on metals of silver and copper ablated by an amplified Ti: sapphire femtosecond laser system were then studied experimentally. The simulated results show that the electrons and lattices have different temperature evolvement characteristics in the ablation stage. The electron temperature increases sharply and reaches the maximum in several femtoseconds while it needs thousands of femtoseconds for lattice to reach the maximum temperature. The experimental results show that uniform laser-induced periodic surface structures (PSS) can be formed with the appropriate pulsed numbers and laser energy density. Electron-phonon coupling coefficient plays an important role in PSS formation in different metals. Surface ripples of Cu are more pronounced than those of Au under the same laser energy density.     

Surface generation mechanism of WC/Co and RB-SiC/Si composites under high spindle speed grinding (HSSG)

The surface generation mechanisms of WC/Co and Reaction-bonded SiC/Si (RB-SiC/Si) composites under high spindle speed grinding (HSSG) were investigated in the present work, compared with quasi-static indentation test. The results showed that surface generation mechanism for WC/Co and RB-SiC/Si varied under both quasi-static indentation and dynamic grinding. Only plastic deformation occurred for WC/Co indicating its higher toughness, while pop-out effect induced by phase transformation in RB-SiC/Si would prompt the chipping at phase boundaries under indentation. Under dynamic grinding, WC/Co underwent plastic deformation, grain dislodgement and WC particles crush, while ductile removal, phase boundaries crack (along the grinding direction) and chipping fracture occurred for RB-SiC/Si with the increase of cutting depth. It was found that the binder in the bulk WC/Co and RB-SiC/Si played a decisive role on the material removal mode, and the mechanics of grain dislodgement for WC/Co and RB-SiC/Si were analyzed based on a geometrical model. Besides, three types of grinding wheel wear appeared, including grit dislodgement, flattening and splintering, which bear an obvious influence on the surface generation.     

Picosecond laser machining of tungsten carbide

Hard materials such as tungsten carbide (WC) are extensively used in cutting tools in high-value manufacturing, and the machining of these materials with sufficient speed and quality is essential to exploit their full potential. Over the last two decades, short (nanosecond (ns)) and ultra-short (picosecond (ps); femtosecond (fs)) pulse laser machining has been evaluated by various researchers and proposed as an alternative to the current state-of-the-art machining techniques for advanced materials like WC, which include mechanical grinding and electrical discharge machining. However, most of the established/existing research on this topic is based on low power lasers, which may not be adopted in industrial production environments due to its low material removal rate. This paper presents the results of a fundamental study, on using a 300 W picosecond laser for the deep machining of tungsten carbide. The influence of various laser parameters on the geometric precision and quality (surface and sub-surface) of the ablated area was analysed, and the ablation mechanism is discussed in detail. Laser pulse frequency and scanning speed have minimal effect on ablation rate at high power levels. The surface roughness of the ablated area increases with the ablation depth. At optimal conditions, no significant thermal defects such as a recast layer, micro crack or heat affected zone were observed, even at a high average power of 300 W. The material removal rate (MRR) seems to be proportional to the average power of the laser, and a removal rate of around 45 mm³ per minute can be achieved at 300 W power level. Edge wall taper appears to be a significant issue that needs to be resolved to enable industrial exploitation of high power ultra-short pulse lasers.     

激光一次性去除铝合金飞机蒙皮涂层实验与数值研究

目的 研究激光的频率、功率及扫描速度等参数对脉冲激光清洗航空铝合金表面S06-0215油漆涂层的影响,分析脉冲激光清洗的机制,优化工艺参数组合,并设计航空铝合金表面涂层一次性去除方法。方法 以航空铝合金2A12为基材,开展脉冲激光的频率、功率和扫描速度等参数对基材表面涂层烧蚀深度的影响研究,以及烧蚀过程中基材表面最高温度的模拟研究。同时,以表面粗糙度和去除深度为评价指标,对2A12铝合金飞机蒙皮表面涂层进行清洗实验,对采用优化参数清洗后的蒙皮表面进行粗糙度测量、元素含量以及组成成分分析。结果 脉冲激光的扫描速度和频率变大,以烧蚀为主导作用的去除机制逐渐减弱,同时振动机制逐渐增强,并最终转变为主导地位。影响激光去除深度的参数,按权重大小依次为扫描速度、功率、频率。结合模拟与实验结果发现,激光频率125 kHz、功率70 W和速度50 mm/s为表面涂层S06-0215最佳的一次性去除工艺参数组合,此时能量密度大小为1.47 J/cm²,清洗过程中,不损伤2A12铝合金飞机蒙皮基材。通过XRD、SEM以及EDS表征分析表明,氧化膜仅被部分去除。结论 激光清洗铝合金表面...     

Influence of dc bias on amorphous carbon deposited by pulse laser ablation

Amorphous carbon films were deposited on single-crystalline silicon and K9 glass by pulse laser ablation using different negative substrate bias.Scanning electron microscope(SEM) was used to observe morphology of the surface.Thickness and refractive index of the film deposited on K9 glass were measured by ellipsometry.Micro-hardness of films was measured relatively to single crystal silicon.All films deosited on silicon were analyzed by Raman spectra.All spectra were deconvoluted to three peaks.Line-width ratios varied similarly with bias voltage when the laser energy was kept invariant.     

激光抛光表面形貌的误差复映规律

目的探究激光抛光工艺中的表面形貌误差复映规律。方法首先采用纳秒光纤激光对不锈钢表面进行标刻加工制备微结构,再通过纳秒光纤激光对预制微结构的表面进行抛光加工,通过超景深显微镜测量加工后的表面形貌,分析表面形貌随加工参数的变化规律。其中纳秒光纤激光波长为1064 nm,脉宽约200 ns,最大激光功率为20 W。进行标刻时,激光功率设置为18 W,激光脉冲频率为20 kHz,扫描速度500 mm/s,通过多次重复标刻在不锈钢表面标刻出一定深度的凹槽。采用低功率(6、4、2、1、0.2 W)的纳秒激光对预制的局部微结构进行激光抛光处理,抛光过程的扫描线间距设置为10μm,扫描速度设置为200 mm/s,对包含凹槽的2 mm×2 mm的区域进行两次抛光处理。结果经标刻加工的微凹槽周围存在较大的边缘凸起;激光抛光能够有效降低凹槽边缘凸起高度,选择合适的抛光参数可将凹槽边缘凸起高度降低到2μm以下。对于高度大于10μm的边缘凸起,在激光功率大于2 W时,抛光后的边缘凸起高度随激光功率的增大而线性减小;在激光功率小于2 W时,边缘凸起高度随激光功率变化不明显。对于高度小于10μm的边缘凸起,激光抛光存在抛光饱和的现象——凸起高度随激光功率密度变化不明显。结论已有微结构的不锈钢表面经激光抛光会形成残留微结构,从而表现出一定的形状复映规律。经抛光处理后的沟槽边缘凸起的高度随着所使用的激光能量密度的增大而减小,基本服从线性变化规律。