氧压与ZnO薄膜发光特性的关系研究

在不同的环境氧压下用脉冲激光沉积方法在Si(111)衬底上生长了ZnO薄膜,以325 nm He-Cd激光器为激发源获得了薄膜的荧光光谱以研究其发光特性,用X射线衍射仪(XRD)和原子力显微镜(AFM)研究了薄膜的晶体结构和表面形貌,结果表明氧压在20 Pa和50Pa之间制备的ZnO薄膜具有良好的紫外发光特性和较好的晶体质量.分析了ZnO薄膜的发光机理,认为薄膜紫外峰源自自由激子复合发光,绿光峰的发光机制与锌位氧OZn关系密切,氧空位是蓝光发射的重要原因.     

氧分压对PLD法生长Si(111)基ZnO薄膜性能的影响

在不同氧分压下用脉冲激光沉积(PLD)法在n型硅(111)衬底上生长ZnO薄膜。通过对其进行XRD、傅里叶红外吸收(FTIR)和光致发光谱(PL)的测量,研究了氧分压对PLD法制备的ZnO薄膜的结晶质量和发光性质的影响。XRD显示,氧分压为6.50Pa时可以得到结晶质量最佳的ZnO薄膜。PL谱显示,当氧分压由0.13Pa上升至6.50Pa时,位于380nm附近的主发光峰的强度最大。当氧分压进一步上升至13.00Pa时,主发光峰减弱,与氧空位有关的发光峰消失,显示出ZnO薄膜的PL谱和氧分压的大小密切相关。     

Cu掺杂ZnO薄膜的结构及发光特性

采用溶胶-凝胶旋涂法在玻璃衬底上制备了不同Cu掺杂量的ZnO薄膜。用显微镜和X射线衍射(XRD)研究了Cu掺杂对ZnO薄膜形貌和微结构的影响。结果表明,制备得到的ZnO薄膜具有应变小和c轴择优取向。室温下测量了样品Zn1-xCuxO的光致发光(PL)谱,发现所有样品的PL谱中均观察到435nm左右的蓝光发光带,发光带强度与Cu的掺杂量有关;当x=0.06时,Zn1-xCuxO薄膜的PL谱中出现了较强的蓝光发射。分析了掺杂量对发光性能的影响,并对样品的发光机制进行了探讨,推断出蓝光峰来源于电子由导带底到锌空位(VZn)能级的跃迁及锌填隙(Zni)能级到价带顶的跃迁,它们可通过改变Cu的掺杂量予以控制。     

飞秒激光辐照ZnO晶体

利用飞秒激光对ZnO晶体进行辐照,对辐照前后的晶体样品进行发光光谱及拉曼光谱检测.辐照后发光光谱的某些发光峰强度有明显增强,但未产生新的发光峰,表明没有新的缺陷结构产生,但晶体内锌空位、间隙位锌、间隙位缺陷浓度增加.拉曼光谱结果表明,辐照后ZnO晶体未产生相变,但随着辐照激光功率的增大,拉曼峰327 cm-1,437 cm-1强度明显减弱,表明在飞秒激光辐照作用下氧化锌的结晶程度下降.但574 cm-1峰值却随着辐照功率的增大而变大,分析表明该拉曼峰很可能是由于晶体内间隙位缺陷所致.同时实验过程中观察到飞秒激光倍频光产生.     

氧分压对ZnO薄膜结构与光学性能的影响

采用直流磁控溅射法在不同氧分压下制备了ZnO薄膜.用原子力显微镜(AFM)、X射线衍射(XRD)仪、荧光分光光度计、紫外-可见分光光度计对样品进行检测.实验表明,氧分压对ZnO薄膜的结构与光学性能影响很大.在样品的光致发光谱中,均只发现了520 nm附近的绿色发光峰,该峰随着氧分压的增大而增强.不同氧分压制备的ZnO薄膜中,氧分压为0.25Pa的样品结晶性能最好,透过率最高.     

PLD方法在CVD金刚石膜上生长ZnO薄膜及其特性研究

采用脉冲激光沉积(PLD)技术,在(110)和(100)织构金刚石膜上成功制备出高度c-轴取向的ZnO薄膜,然后在纯氮气氛条件下对ZnO薄膜进行退火处理.作为比较,也在(100)Si上生长的ZnO薄膜进行了相同的处理.通过测量X射线衍射(XRD)谱和光致发光(PL)谱,研究了不同衬底性质和退火对薄膜结构和发光特性的影响.实验结果表明,在(100)织构金刚石上的ZnO膜具有最好的结晶质量,其半高宽只有0.2°.退火之后近紫外发光峰明显减弱的同时,绿色发光峰得到增强.这里归结为氮气退火后氧空位的增加,这点从退火后的XPS谱中可以得到进一步的确认.     

ZnO及其缺陷电子结构对光谱特性的影响

利用全势LMTO(FP-LMTO)理论计算方法,对ZnO中的某些缔合缺陷(如氧空位和锌填隙、锌填隙和锌空位及锌的氧反位缺陷)的电子结构进行了计算.根据本文和以前的计算结果,得到了ZnO中几种本征点缺陷对应的缺陷态能级位置.利用得到的理论计算结果,我们分析了ZnO的吸收和发射光谱可能产生的机制,并讨论了ZnO与缺陷电子结构对它们的影响.     

应力对ZnO/Si异质结构的光致发光的影响

研究了ZnO薄膜中应力对发光的影响.实验样品为ZnO体单晶、在Si基片上直接生长的ZnO薄膜以及通过SiC过渡层在Si基片上生长的ZnO薄膜.测量了这三种样品的X射线衍射图形、喇曼光谱和光致发光光谱.由X射线衍射图形可以看出,由于SiC过渡层缓解了ZnO与Si之间的晶格失配,使得通过SiC过渡层在Si上生长的ZnO薄膜的结晶质量好于直接在Si上生长的ZnO薄膜的质量.进一步通过喇曼谱测量发现,与ZnO体单晶相比,直接在Si上生长的ZnO薄膜的E2(high)峰红移1.9cm-1,根据喇曼谱峰位移与应力的关系可以推出薄膜中存在0.4GPa的张应力;而通过SiC过渡层在Si上生长的ZnO薄膜的E2(high)峰红移0.9cm-1,对应着0.2GPa的张应力.对照X射线衍射图形的结果可以看出,薄膜中张应力的大小与薄膜的结晶质量密切相关,表明张应力来源于外延层和基片间的晶格失配,晶格失配越大,外延层中产生的张应力越大.有无SiC过渡层的两种薄膜样品的PL光谱中都存在紫外和绿光两种谱带,随样品热处理时氧气分压增加,两种样品都出现绿光增强的相似的变化规律,但有SiC过渡层的样品的变化幅度较小.这一结果说明,绿色发光中心与薄膜的质量,也就是与薄膜中存在的张应力大小有关.在以往研究中得出的非故意掺杂ZnO薄膜的绿色发光中心来源于氧反位缺陷(Ozn),文中研究的结果正好可以解释氧反位缺陷形成的原因.由于薄膜中存在张应力,使得样品的能量升高,其结果必然会产生缺陷来释放张应力,以便降低系统能量.而氧离子半径大于锌离子半径,氧替位锌有利于释放张应力,也就是说,在存在张应力的情况下,Ozn的形成能降低.这一结果进一步证明Si上生长的ZnO薄膜中的绿色发光中心与氧反位缺陷有关.     

Effect of Lattice Mismatch on Luminescence of ZnO/Si Hetero-Structure

研究了ZnO薄膜中应力对发光的影响.实验样品为ZnO体单晶、在Si基片上直接生长的ZnO薄膜以及通过SiC过渡层在Si基片上生长的ZnO薄膜.测量了这三种样品的X射线衍射图形、喇曼光谱和光致发光光谱.由X射线衍射图形可以看出,由于SiC过渡层缓解了ZnO与Si之间的晶格失配,使得通过SiC过渡层在Si上生长的ZnO薄膜的结晶质量好于直接在Si上生长的ZnO薄膜的质量.进一步通过喇曼谱测量发现,与ZnO体单晶相比,直接在Si上生长的ZnO薄膜的E2(high)峰红移1.9cm-1,根据喇曼谱峰位移与应力的关系可以推出薄膜中存在0.4GPa的张应力;而通过SiC过渡层在Si上生长的ZnO薄膜的E2(high)峰红移0.9cm-1,对应着0.2GPa的张应力.对照X射线衍射图形的结果可以看出,薄膜中张应力的大小与薄膜的结晶质量密切相关,表明张应力来源于外延层和基片间的晶格失配,晶格失配越大,外延层中产生的张应力越大.有无SiC过渡层的两种薄膜样品的PL光谱中都存在紫外和绿光两种谱带,随样品热处理时氧气分压增加,两种样品都出现绿光增强的相似的变化规律,但有SiC过渡层的样品的变化幅度较小.这一结果说明,绿色发光中心与薄膜的质量,也就是与薄膜中存在的张应力大小有关.在以往研究中得出的非故意掺杂ZnO薄膜的绿色发光中心来源于氧反位缺陷(Ozn),文中研究的结果正好可以解释氧反位缺陷形成的原因.由于薄膜中存在张应力,使得样品的能量升高,其结果必然会产生缺陷来释放张应力,以便降低系统能量.而氧离子半径大于锌离子半径,氧替位锌有利于释放张应力,也就是说,在存在张应力的情况下,Ozn的形成能降低.这一结果进一步证明Si上生长的ZnO薄膜中的绿色发光中心与氧反位缺陷有关.     

(Ni、Li)掺杂ZnO薄膜的制备及其性能

采用溶胶-凝胶技术和旋涂的方法,在Si(100)衬底上制备了Ni掺杂和(Ni、Li)共掺的3种ZnO薄膜(Ni0.10Zn0.90O、Ni0.10Li0.05Zn0.85O和Ni0.10Li0.10Zn0.80O)。X射线衍射分析表明,所有薄膜样品均为纤锌矿结构,未发现其他杂相。光致发光研究表明,(Ni、Li)共掺后出现了410nm左右的紫外发光峰,并随Li浓度的增加发光峰变强,该峰与Li杂质能级有关,同时观察到O2-空位引起的610nm和740nm的两个红色发光峰。薄膜中Ni离子为+2价,取代Zn离子的位置。掺杂的ZnO薄膜呈现室温铁磁性,单个Ni原子的饱和磁矩可达到0.210μB,掺入Li或在N2气氛中退火后,都导致单个Ni原子的饱和磁矩降低。铁磁性来源于电子调制的机制。     

氧压对PLD制备掺铜ZnO薄膜光学性质的影响

为了研究生长氧压对ZnO薄膜的结构和光学性质的影响,采用脉冲激光沉积技术,在P-Si〈111〉衬底上制备了不同生长氧压下的掺铜ZnO薄膜.利用X射线衍射仪对样品的结构进行了分析,并用荧光分光光度计对样品的光致发光谱进行了测量.结果表明,所有样品均在2θ=34.3°附近出现ZnO(002)衍射峰,没有发现Cu的衍射峰,在...     

Enhancement of photoluminescence in Sr doped ZnO thin films prepared by spray pyrolysis

Photoluminescence characteristics of strontium doped zinc oxide (ZnO:Sr) thin films grown by spray pyrolysis method were investigated. The ZnO:Sr films were highly transparent having polycrystalline hexagonal wurtzite structure. A redshift of 130 meV in the optical band gap was observed owing to atomic size mismatch induced defect states and increase in the crystallite size in ZnO:Sr films. The enhancement of intensity of violet emission in room temperature photoluminescence by 250% is in correlation with the improved surface morphology at higher concentration of Sr in ZnO:Sr thin film. The observed increment in visible emissions is attributed to Sr induced oxygen vacancy related recombination in ZnO.     

超声喷雾热解法制备ZnO：Eu薄膜

以醋酸锌（Zn（CH3COO）2）、氯化铕（EuCl3）水溶液为前驱体,采用超声喷雾热解（USP）方法在ITO导电玻璃衬底上沉积Eu掺杂ZnO（ZnO：Eu）薄膜。通过扫描电镜（SEM）、X射线衍射（XRD）和光致发光（PL）谱对ZnO：Eu薄膜的形貌、结构和光学性质进行了研究。SEM测试结果表明,超声喷雾热解法制备的...     

溶胶-凝胶法制备Co,Cu共掺杂ZnO薄膜 结构及光学特性

采用溶胶-凝胶法在玻璃基片上制备了纯ZnO薄膜和高浓度Cu掺杂的Co,Cu共掺ZnO(Zn0.90CoxCu0.1-xO,x=0.01,0.03,0.05)薄膜。扫描电镜观察到无论是纯ZnO还是掺杂ZnO薄膜表面都有均匀分布的颗粒,但是在Cu含量较高时均匀性更好。X射线衍射揭示所有样品都具有纤锌矿结构,但是Cu掺杂量的增加使晶格常数略有减小,而晶粒尺寸却略有增大。XPS测试结果表明样品中Co离子的价态为+2价和+3价,Cu离子的价态为+2价和+1价共存。室温光致发光测量在所有样品中均观察到较强的紫外发光峰、蓝光双峰和较弱的绿光发光峰。     

Structural and optical properties of (Al,K)-co-doped ZnO thin films deposited by a sol–gel technique

Thin films of Al-doped ZnO (AZO) and (Al, K)-co-doped ZnO (AKZO) were synthesized by sol–gel spin coating and their structural and optical properties were investigated. All the films had a preferential orientation in which the c-axis was perpendicular to the substrate. The optical bandgap increased after Al doping, but decreased after K doping at a given Al doping concentration. UV emission and a broad visible emission band were observed in photoluminescence (PL) spectra. The intensity of both emission bands decreased after Al and K co-doping. PL excitation (PLE) spectra of the blue emission band indicate that the initial state is possibly the same for all the samples and a similar case occurs for the orange–red emission band. The green emission can be attributed to electronic transitions involving oxygen vacancies. A possible process for the orange–red emission of the thin films is radiative recombination of an electron trapped in a zinc interstitial defect with a hole deeply trapped in interstitial oxygen.     

Surface planarization of ZnO thin film for optoelectronic applications

In this paper, surface morphology and optical properties are investigated to find the optimum microstructure of zinc oxide (ZnO) thin films deposited by radio frequency (RF) magnetron sputtering. To achieve a high transmittance and a low resistivity, we examined various film deposition conditions. The transmittance and surface morphology of ZnO thin films were measured by an ultraviolet (UV)-visible spectrometer and atomic force microscopy (AFM), respectively. In order to improve the surface quality of ZnO thin films, we performed chemical mechanical polishing (CMP) by change of process parameters, and compared the optical properties of polished ZnO thin films. As an experimental result, we were able to obtain good uniformity and improved transmittance efficiency by the CMP technique.     

用MOCVD方法在GaAs衬底上低温生长ZnO薄膜

采用二乙基锌(DEZn)和水(H2O)作为生长源,利用金属有机化学气相沉积(MOCVD)的方法,在100～400℃低温范围内,在GaAs(001)衬底上制备了ZnO薄膜.利用X射线衍射(XRD),室温PL,AFM,SEM研究了薄膜的晶体结构特性、发光特性及表面形貌特性.XRD分析表明ZnO薄膜具有很强的c轴取向,(002)峰的FWHM平均值为0.3°.当生长温度达到400℃时从SEM测量结果可以观察到薄膜表面呈六角状结晶.随着生长温度的升高,薄膜的晶粒尺寸变大,结晶质量得到提高但同时表面变粗糙.室温PL测量显示薄膜在370nm附近有强的近带边发射,没有观测到深能级发射峰.     

Photoluminescence Properties of ZnO Nanorods Synthesized by Different Methods

The photoluminescence properties of ZnO nanorods synthesized by the low-temperature hydrothermal and high-temperature vapor-phase methods are studied. At room temperature, the photoluminescence of ZnO nanorods synthesized by the high-temperature vapor-phase method exhibits only one highintensity ultraviolet peak at a wavelength of 382 nm. At the same time, the luminescence spectra of ZnO nanorod samples grown by the low-temperature hydrothermal method, but with the use of different chemical reagents exhibit, apart from the ultraviolet peak, a violet band or a yellow-orange band at ~401 and ~574 nm, respectively. The violet luminescence band is attributed to defects or zinc vacancy complexes, and the yellow-orange band to defects associated with interstitial oxygen.     

Ion Beam Analysis of Amorphous and Nanocrystalline Group III-V Nitride and ZnO Thin Films

The ion beam analysis (IBA) techniques of Rutherford backscattering spectrometry (RBS), elastic recoil detection analysis (ERDA), nuclear reaction analysis (NRA), and particle-induced x-ray emission (PIXE) have been used to quantitatively determine composition, uniformity, impurity, and elemental depth profiles of major, minor, and trace elements of group III-V nitride and zinc oxide (ZnO) thin films prepared by various growth techniques. The IBA revealed that an amorphous GaN film prepared by ion beam assisted deposition (IBAD) has large variations in film thickness and composition coupled with typically 10–20% oxygen that was found to be essential to stabilize their amorphous structure. The IBA characterization of plasma-assisted molecular beam epitaxy (PAMBE) grown GaN, InN, and InCrN films revealed composition, impurity, and uniformity information of the films. The IBA of ZnO films prepared by radio frequency (RF) sputtering showed that the Zn/O ratio often varied significantly over the film thickness. Hydrogen was found to be a major impurity in the films with around one present in the as-deposited ZnO films. It is clearly shown that the nondestructive, quantitative, and rapid IBA measurements are very useful to develop and optimize growth protocols in respect to film thickness, stoichiometry, and especially in regard to hydrogen and oxygen impurities for group III-V nitride and ZnO thin films prepared by various growth techniques.