硅表面太赫兹抗反射亚波长结构设计

亚波长结构是特征尺寸小于工作波长的连续阵列浮雕结构,可看成是一层折射率均匀的介质层,仅存在零级的透射和反射衍射。基于等效介质理论和严格耦合波理论介绍了亚波长抗反射结构。为提高111μm波长太赫兹辐射(2.7THz)的透过率,在硅表面设计了亚波长抗反射结构。该结构的透射率和反射率由其浮雕结构的周期、高度和占空比确定。利用等效介质理论和严格耦合波理论对其结构参数进行了优化设计。当周期为27μm、高度为13μm、占空比为0.75时,得到了99.05%的太赫兹辐射透过率。     

泡沫的中远红外消光性能研究

采用Bruker OPAG33傅里叶变换红外遥测光谱仪,针对3～5 μm和8～14 μm波段泡沫的消光性能进行研究,测定了透过率光谱图,并计算得到消光系数-波长关系图.发现泡沫浓度Cm≈11.94g·m-3时,关心波段的透过率低于20%的时间均超过20min,尤其以3.85μm附近透过率最低;在3～5 μm波段的消光系数和随时间变化的幅度比8～14 μm波段大.分析认为泡沫体系中的表面活性剂材料和大量水分的本征吸收,及泡沫的特殊多面体结构是对光波产生强烈衰减的主要原因,光线的透射光强随光线穿过泡沫液膜界面的次数成指数衰减.因此认为泡沫是一种比较有潜力的宽波段无源光电干扰介质.     

ZnS红外窗口的电磁屏蔽设计及试验验证

通过理论计算分析了金属网栅的电磁屏蔽特性与红外透过率之间的关系,发现金属网栅的电学特性与光学特性是相背离的。为满足镀金属网栅后光学镜片的透过率降幅小于等于5%、屏蔽效能大于30 dB (频率范围为14 kHz～18 GHz)的要求,首先通过理论计算选用线宽为10 μm、周期单元的长度和宽度均为500 μm、膜层厚度为1 μm的金属网栅(Ni-Ag)。然后采用直流磁控溅射镀制技术在直径为100 mm的硫化锌基片表面成膜。经过曝光、显影、坚膜、腐蚀、剥离等工艺,获得了镀Ni-Ag频率选择表面(Frequency Selective Surface, FSS)网栅的红外窗口样片。最后对红外窗口样片进行了透过率和屏蔽效能测试。测试结果满足设计要求。该计算数据可用于预估光学窗口的电磁屏蔽性能,为后续的设计工作提供参考。     

基于辐射定标的某型红外光纤传像束双波段透过率测定

由于目前国内尚没有针对红外光纤传像束的波段透过率测试的规范标准和设备。提出了一种考虑光纤孔径角和光纤芯径的热像仪定标方法和某型光纤传像束的双波段透过率测试方法。通过在冷屏两端分别设置直径为8 mm和62 μm的两个光阑孔,确保定标条件和所测光纤的孔径角和光纤芯径相同;再通过在光路中插入波段滤光片来选择需要定标的波段。建立了基于最小二乘的红外热像仪定标模型,并采用该方法进行了定标实验。根据定标结果,测量了某型光纤传像束的红外光纤在2.0 μm～2.6 μm波段和3.4 μm～4.8 μm波段的透过率,其平均透过率大于70%。     

一种工作于太赫兹频段的石墨烯天线

为克服金属材料在太赫兹频段的工艺不足,利用石墨烯在该频段的特性,设计了一款工作于1.0 THz的石墨烯贴片天线。根据随机相位近似(RPA)的石墨烯表面电导率模型,研究了面电导率与频率(太赫兹波段)以及化学势的变化关系,确定了石墨烯材料的物理参数。该天线结构由石墨烯贴片,聚酰亚胺衬底和地板组成。利用HFSS软件优化,其尺寸仅为220 μm×140 μm×9 μm。石墨烯贴片天线工作频段为0.98~1.02 THz,-10 dB相对阻抗带宽为4.0 %,最大辐射方向上的增益达7.32 dB。此外,该天线具有尺寸小,轻便,机械性能稳定,结构简单且易集成的特点。     

双截止透可见带通滤光片研制

为了实现蓝宝石基底上双截止透可见区的特性(截止带波长为0.3～0.4 μm、0.8～1.1 μm,通带波长为0.4～0.8 μm),初始结构采用双截止膜系,可截止近紫外和近红外,在蓝宝石基底的一侧实现可见光高透的宽通带滤光片,选用TiO2和SiO2分别作为薄膜高、低折射率材料,来实现双波段截止的目的,薄膜的设计层数为42层,总厚度是3.6 μm,采用电子束蒸发物理气相沉积法来实现镀制,并通过分光光度计测试镀制样品的透射率,测试结果显示截止区(0.3～0.385 μm和0.824～1.1 μm),平均截止深度分别达到了0.029 %和0.127 %,通带0.405～0.788 μm波段的平均透过率达到97.68 %,通带半宽度HFWD为398 nm(402～800 nm),有效地抑制了“半波孔”现象出现,并具有双波段截止和高通带透过率的特点。在环境测试中:薄膜的稳定性良好,膜层间匹配度适宜。因此,该双波段截止透可见滤光片可用于某些极端的环境条件中。     

微米铜粉对红外、10.6 μm激光的衰减性能研究

为选择一种能够遮蔽红外与激光的烟幕干扰材料,在烟幕箱中测试了组分配比不同的微米铜粉的红外与10.6 μm激光烟幕透过率,当烟幕浓度为1.0 g·m-3时,1~3 μm,3~5 μm,8~14 μm红外的透过率均小于30%,10.6 μm激光的透过率小于20%,红光铜粉、青红光铜粉和青光铜粉对红外与10.6 μm激光的衰减能力逐渐增强;同时测试了微米铜粉对红外热像仪的干扰效果,浓度为2.0 g·m-3时,青光铜粉能够完全遮蔽红外热像仪。     

一种双阻带红外频率选择表面

为实现中、远红外大气窗口的双波段低红外透过率,设计了由2层不同尺寸圆环单元构成的双屏红外频率选择表面(FSS),仿真结果表明该FSS在3~5?m和8~12?m波段形成两个平均透过率低于5%的阻带。对FSS表面电流分析的结果说明,谐振单元表面感应出的对称分布电流使散射总场增强,形成增强型反射,而不同尺寸的谐振单元具有不同的谐振波长,两层谐振单元共同作用形成了两个阻带。研究了入射角以及介质层属性(厚度、介电常数和损耗角正切)对FSS传输特性的影响,结果表明FSS在两个大气窗口内具有良好的角度稳定性,介质层介电常数对FSS的传输特性有较大影响。     

光泵CH3F气体产生THz波的实验研究

太赫兹(THz)波具有很高的研究价值和广阔的应用前景,实现THz技术广泛应用的关键之一是研制高功率、高能量、高效率、室温运行、可调谐、低成本和便携式的THz光源。光泵气体THz激光器具有功率高,能量大,波长范围广,技术可靠等优点,在透视成像和无损检测等领域成为可靠的THz源。本文对利用横向激励高气压(TEA) CO2激光器9P(20)支线泵浦CH3F气体产生的496 μm THz波进行实验研究,并对影响THz波能量输出的主要因素进行分析讨论。实验中获得的最大THz波脉冲能量为57.14 μJ,输出波长为490 μm。     

掺铥钼酸钆钡晶体1.9μm腔面膜的研制

根据Tm3+∶BaGd2(MoO4)4激光晶体的发光特性,以厚度为1.1 mm的该晶体为基底,选择Ta2O5和SiO2作为高低折射率膜料,通过电子枪蒸镀的物理沉积方式分别在晶体两端面设计并镀制了输入膜系和输出膜系,同时采用霍尔离子源辅助沉积来增强晶体与膜层之间的结合力。镀膜后的晶体输入端面795 nm透过率大于90%,1.9 μm透过率小于0.2%;输出端面795 nm透过率小于10%,1.9 μm透过率等于6.55%。通过采用795 nm波长的半导体激光泵浦镀膜后的晶体,实现了1.9 μm准连续激光输出,结果表明该激光输入输出膜系的镀制满足激光器实验的使用要求。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.