激光跟踪仪测角误差补偿

由于激光跟踪仪的角度测量精度直接影响仪器的测量精度,本文提出了用自准直仪结合多面棱体对跟踪仪金属圆光栅测角误差进行离散标定的方法。研究了基于谐波分析的误差补偿方法,取金属柱面圆光栅测角误差中幅值较大且相位基本不变的谐波分量建立了补偿模型,避免了最小二乘法不收敛的问题。分析了标定测角误差的不确定度,结果显示：水平测角精度补偿前后分别为1.60"和0.90",俯仰测角精度补偿前后分别为4.89"和0.91",精度分别提高了44%和81%,从角秒级提高到了亚角秒级。结果表明,提出的方法可为激光跟踪仪水平和俯仰轴系提供测角误差补偿,对类似测角系统的误差补偿也有参考价值。     

中子衍射应力谱仪的垂直聚焦单色器的优化设计

本文应用蒙特卡罗模拟程序MCSTAS对中子衍射应力谱仪的垂直聚焦单色器利用单晶Ge（511）进行聚焦的情况进行了优化计算,得到垂直聚焦单色器的高度和单晶片间的倾角等参数的最佳值;同时对比分析了垂直聚焦单色器与平板单色器两种情况下样品处的中子注量率。最后讨论了单色器起飞角对谱仪分辨率产生的影响。     

飞秒激光跟踪仪光轴与竖轴同轴度的标定

考虑飞秒激光跟踪仪仪器轴系的几何误差会影响仪器的指向精度并最终影响坐标测量精度,本文研究了激光光轴与竖轴的几何误差对仪器测量精度的影响。提出了激光光轴与竖轴的同轴度标定方法,以降低其不重合带来的跟踪测量误差。首先,基于几何光学原理建立了光轴与竖轴的几何误差模型,分别分析了光轴与竖轴的倾斜与平移误差对仪器测角精度的影响。然后,针对设计的仪器提出了基于旋转成像原理的光轴与竖轴同轴度的检测方法,并设计了一套同轴度检测装置。最后,基于该检测装置,通过调节两组双光楔完成了激光光轴与竖轴的倾斜与平移误差的标定。结果显示,经标定校准后激光光轴与竖轴的角度误差为3.4″;平移误差为26.1μm,得到的结果为仪器后续建立误差补偿模型奠定了基础。     

Fundamental uncertainty analysis of flowrate measurement using the ultrasonic Doppler velocity profile method

The present paper describes a fundamental uncertainty analysis for a flowrate measurement in a pipe using an ultrasonic Doppler velocity profile method and an evaluation of the estimated uncertainty by an actual flow calibration. The uncertainties are estimated for internal factors originating from the measurement equipment; UVP provided by Met-Flow sa. and external factors depending on on-site measurements, such as the inclination angle of the ultrasonic transducer. The relative expanded uncertainty due to internal factors is estimated to be 0.34% with a coverage factor of 2. The relative external uncertainty including external factors is estimated to be from 0.42% to 2.13% depends on the inclination angle of the transducer. The results of the actual flow calibration under the same condition as the uncertainty analysis are within the range of uncertainty considering the internal factors.     

A novel technique for calibration of polygon angles with non-integer subdivision of indexing table

Polygons are basic angle standards for angle measurement, particularly used for calibration of rotary angular indexing, and for measuring equipment such as dividing heads and tables. A main application in daily life is in bar-code readers. Calibration of such angle standards is required for traceability and at the highest accuracy it is a responsibility of national metrology institutes. In order to investigate uncertainty parameters on polygon calibration and to establish the capabilities of national metrology institutes, intercomparision measurements in the name of EUROMET project 371 “angle calibration on precision polygons” between 12 European countries have been carried out. Two precise polygons with 7 and 24 faces have been calibrated by the participants. Difficulties arose for precise calibration of seven-sided polygon for those institutes, which do not have a high-resolution angle comparator or two autocollimators. UME, the National Metrology Institute of Turkey, has applied an alternative technique for precise calibration of seven-sided polygon without using high-resolution angle comparators (i.e., indexing tables or angle dividers) or two autocollimators. The technique is based on the circle closure principle. The pitch and cumulative angles of the polygon are extracted from the angle measurement between some polygon faces (such as one and four (1/4), analogous 2/5, 3/6, 4/7, 5/1, 6/2 and 7/3) the angle of which can be generated close enough by the indexing table. This means that the polygon can be regarded as unfolded in seven 3-pitch angle intervals of 3×360°/7≈154°17′, making up 1080° in total. The method gives the differences between these seven intervals; with the closure condition (the sum must be zero) this gives all absolute angles. A full uncertainty evaluation is given that is based on the model function which relates the measured values to the polygon angles. For the calibration actually carried out, this yielded an uncertainty of 0.24″. Within this uncertainty the measured polygon angles corresponded very well with the reference values of the intercomparison. The method is of use for laboratories which do not have a high-resolution angle comparator (i.e., an indexing table or angle divider) or two autocollimators for the calibration of such angle standards.     

卫星光学仪器辐射交互定标方法的应用和发展

卫星遥感器的在轨交互定标是保证仪器数据记录的可靠性、连续性和一致性的核心方案,配合高精度的在轨参考基准仪器可使定标精度达到2%左右。本文介绍了交互定标技术的相关概念和意义,强调该技术是修正仪器间辐射定标相对偏差的重要手段。指出了交互定标的前提条件及现存难点。总结了交互定标实现流程,包括数据收集、匹配、筛选、处理,基准确定,精度分析等,分析了影响交互定标精度的各种因素。叙述了当前卫星光学遥感器交互定标的各类方法及其使用条件,总结了不同应用条件下所适用的各交互定标方法的定标精度。最后结合当前交互定标的国际合作活动,分析展望了未来光学遥感器在轨可溯源SI定标方法的前景趋势和难点问题。     

扭矩测量仪现场校准方法的探讨

通过分析扭矩测量仪的量值传递现状,从测试和校准两种情况,探讨分析了扭矩测量仪现场校准的方法以及测量结果不确定度的评定方法,确保扭矩测量仪现场校准的准确与可靠。     

基于激光扫描的足部三维测量仪设计

个性化鞋楦设计是社会发展的必然趋势,足部测量仪的研制成为了一个重要课题.提出了个性化足部扫描测量仪的设计方法,介绍了仪器的测量原理以及标定方法,设计出控制系统、光学系统、移动平台和图像采集模块来实现快速足部扫描.经过自行开发的软件控制系统执行图像提取与数据分析,即可在短时间内重建出所测量的足部轮廓.最后,对足部进行了实际扫描,该过程可在10s之内完成,测量误差小于0.5%.得到了很好的结果,满足工业设计的要求.     

成像光谱仪辐射定标影响量的测量链与不确定度

分析了成像光谱仪遥感观测数据中包含的地物光谱特征、仪器参数和大气传输特性等的信息结构。研究了成像光谱仪辐射定标的物理过程和测量链,应用1993年国际标准化组织(ISO)颁布的《测量不确定度表示指南》,分析了辐射定标11项影响量的测量不确定度和合成标准不确定度。遥感辐射定标的绝对精度就是不确定度。辐射定标需要辐射标准、积分球光源、光谱辐射计以及遥感器上设置星上定标装置等专用设备和技术,并经过多级测量链的测试过程才能完成。光谱辐照度标准的不确定度在3%~5%,辐射定标中其它影响量的测量不确定度限制在1%~2%,成像光谱仪辐射定标的绝对精度才能达到5%~8%,这需要相当好的仪器设备和光辐射测试技术。     

Stylus-laser surface calibration system

A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser interferometer is mounted on the traversing unit of the stylus instrument to calibrate the instrument in the horizontal direction. The calibration uncertainty (±2δ) for SRM 2075 is ±1.2% for roughness calibrations ((R_a = 1 μm), and ±0.06% for spatial wavelength calibrations (S_m = 800 μm).     

Uncertainty budgeting for range calibration

The Guide to the Expression of Uncertainty in Measurement (GUM) established a general procedure to evaluate measurement uncertainty. The Guide covers only the evaluation of a single result or a set of individual results. Modern measuring instruments and procedures operate over a wide range of values. Therefore in practice a calibration procedure is needed that is valid for this range. The procedure should include an evaluation of uncertainty associated with the calibration results and for the subsequent measurements performed with the calibrated instrument. Traditionally regression analysis is used for this purpose. In this paper we will discuss some weaknesses of the regression approach and suggest an alternative. We show that for instruments with a linear response function the regression can be replaced by 2-point calibration. We introduce a limit of the deviation from linearity to address observed deviations from a linear response function of the instrument. To improve an existing instrument with a non-linear response function a combination of the instrument and a correction function can be treated as a virtual linear measuring device and a 2-point calibration can be applied. As an example we use the calibration of a pressure sensor to illustrate the procedure. The approach can be used for instruments and measurement procedures with a linear or non-linear response function.     

Possibilities for minimising uncertainty of dissimilar materials gauge blocks calibration by mechanical comparison

Mechanical comparison calibration of gauge blocks with dissimilar materials at the highest level is not wide spread because bigger national laboratories tend to calibrate non-steel gauge blocks with reference gauge block of like material. For smaller laboratories this is not viable economically due to the high costs of reference gauge block sets. Therefore, steel reference sets are used for calibrating gauge blocks from other materials. Lack of knowledge about material properties is causing a significant rise in calibration uncertainty. In order to improve best measurement capabilities, we have performed extensive research on gauge block material behaviour. For this purpose we have bought sample gauge blocks from all leading producers and evaluated their influences on the uncertainty budget, based on experimental measurements.The uncertainty budget of gauge blocks with dissimilar materials mechanical calibration, as well as the results of analytical and experimental research, is presented in this paper in detail. Significantly smaller uncertainty of gauge block calibration of dissimilar materials is achieved.     

Calibration of step heights and roughness measurements with atomic force microscopes

In this paper we present a method for the vertical calibration of a metrological atomic force microscope (AFM), which can be applied to most AFM systems with distance sensors. A thorough analysis describes the physical z-coordinate of an imaged surface as a function of the observed and uncorrected z-coordinate and the horizontal position. The three most important correction terms in a Taylor expansion of this function are identified and estimated based on series of measurements on a calibrated step height and a flat reference surface. Based on this calibration a number of step heights are calibrated by the AFM with measured values consistent with reference values, where available. Relative standard uncertainty of about 0.5% is achieved for step heights above 200 nm. For step heights below 50 nm, the standard uncertainty is about 0.5 nm. While a calibration of step heights done by AFM and interference microscopy can be compared directly as demonstrated here, this is not straightforward for roughness measurement. To asses this, the exact same area on an important applied surface (a hip joint prosthesis) was measured by both AFM and interference microscopy. Similarities in the images were seen; however, the calculated roughness was significantly different (R_q=3 and 1.5 nm). Applying a low-pass filter with a cut-off wavelength of λ_c=1.5 μm, the appearance of the images and the calculated roughness become almost identical. This strongly suggests that the two methods are consistent, and that the observed differences in shape and roughness in the nanometer range can be explained by the limited lateral resolution of the interference microscope.     

等电位测试仪校准方法的探讨

文章首先对等电位测试仪作了简单介绍,然后对等电位测试仪电阻值的校准方法进行了研究,并给出了其测量结果的不确定度。     

Dynamic light scattering in turbid nonergodic media

We here present a new device based on dynamic light scattering (DLS) for measuring kinetics in turbid and nonergodic systems. This flat cell light scattering instrument has been developed in our laboratory and is based on an original flat cell instrument employing cells of varying thickness in order to measure the static structure and dynamics of a system. The smallest cell thickness is 10 microm. To this original instrument, we have integrated the three-dimensional (3D)-DLS technology as well as the echo method, and in comparison with other 3D-DLS instruments, ours show the best performance; the maximum intercept was 0.6 as opposed to 0.15 for regular 3D-DLS devices (recently we reached beta=0.75). This was made possible by using crossed polarization filters for the two laser beams, thereby allowing the scattered light from both laser beams to be decoupled and the intercept to no longer be limited at the theoretical value of 0.25. The maximum weight fraction of the sample that is measurable with such a setup is more than ten times higher than with a standard 3D-DLS setup or with the flat cell instrument without the 3D technology. Consequently, with the 3D-DLS flat cell instrument presented here, it truly becomes possible to investigate turbid systems. Moreover, the echo method was integrated to enable measurements of nonergodic systems. Here, a new mechanical design of the echo-DLS component was necessary due to the different geometries of the flat cell in comparison with that of a standard cylindrical cell. The performance of our echo device was compared to that of our multispeckle instrument, and the results were in good agreement for correlation times up to 30,000 s and more. The main limitation of this instrument in its current version is the maximum scattering angle of about 50 degrees (or 30 degrees if echo is used).     

磁光阱异面空间角度测量及测量不确定度评定

随着空间几何量精密测量技术在装备制造工业的制造与装配过程中应用越来越广泛,角度计量正在从平面角度向空间角度发展。针对磁光阱的异面空间角度进行测量,使用平行平晶作为标准平面引出待测面法向量,并将其空间角度有效的划分成水平投影角和竖直投影角两个平面角度进行测量,保证了空间角度的可溯源性,得到磁光阱各待测面法向量间的空间角度偏差最大值为0.286 0 mrad;然后通过蒙特卡洛法评定该方法的测量不确定度为0.095 9 mrad;最后与三坐标测量机法比对结果中偏差最大值为0.184 2 mrad,在考虑待测面平面度指标为±0.145 4 mrad时,二者的一致性良好。目前该方法已在NIM5铯原子喷泉钟物理真空子系统的研制中进行了应用,证明了该方法能够满足测量的准确度要求。     

Measurement uncertainty and metrological confirmation in quality-oriented organizations

The effect of measurement uncertainty on estimates and decisions performed under a regime of quality control and improvement, is considered in this paper. Standard statistical quality tools are analyzed such as control charts and instrument calibration procedures. Their performance is characterized under the assumption of both normally and uniformly distributed measurement uncertainty. Exact and approximate expressions are derived that allow the design of suitable procedures including the contribution of measurement uncertainty.     

高精度紫外标准探测器的定标

研究了紫外标准探测器定标方法,以便进一步提高紫外波段辐射定标的精度。构建了高精度紫外标准辐射计,并推导了紫外辐射计响应度标准。在定标过程中直接利用高精度标准辐射计进行标准传递,并根据替代法定标原理消除了多项影响因子,使得定标精度大幅提高。最后,利用标准光源及标准探测器定标方法对待测光源辐照度、空间遥感仪器辐照度响应度进行了标定。两种方法定标结果表明:采用标准探测器定标方法可使定标不确定度降低到1.6%,充分证明了紫外标准探测器定标方法的有效性及高精度,实现了紫外探测器定标方法的工程化应用。     

Improved direct comparison calibration of small angle blocks

In the field of dimensional metrology, direct comparison method is used invariantly for the calibration of angle artefacts e.g. angle blocks, polygons, rotary tables. A precision indexing table and an autocollimator are sufficient to perform such calibrations. These instruments are periodically compared against primary reference standard to determine their corrections. These corrections are used in direct comparison calibration. Using this method, we can achieve angle block measurement uncertainty approximately ±0.4″.