Parallel-kinematics XYZ MEMS part 2: Fabrication and experimental characterization

This paper, the second of a set of two papers addressing parallel-kinematics MEMS stages for spatial translation, deals with fabrication, characterization and control of such devices. Double device layer SOI (silicon-on-insulator) substrates are used, providing three layers (two device layers and the handle) into which the elements of the stage can be mapped. Using the mechanism concept, realization scheme, and kinematic and dynamic models developed in the first paper of this set, this paper provides a detailed approach to fabricating these devices. The stages fabricated have a workspace cube of roughly 20 μm on the side, an in-plane stiffness of 96 N/m, and an out-of-plane stiffness of 166 N/m. Further, it characterizes the performance of the individual actuating and sensing elements, configures feedback controllers for each actuated joint, and assesses and verifies the stage’s designed performance. Finally, it demonstrates full 3-axis, closed-loop positioning of a MEMS stage.     

Optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope

This paper describes the optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope (TDFM). The nano-precision stage is required to move a specimen dish within a horizontal region of 1 μm × 1 μm and with a resolution of 0.3 nm. The design objective was to maximise positional accuracy during high speed actuation. This was achieved by minimising out-of-plane distortions and vibrations during actuation. Optimal performance was achieved through maximising out-of-plane stiffness through shape and material selection as well optimisation of the anchoring system. Several shape parameters were optimised including the shape of flexural beams and the shape of the dish holder. Physical prototype testing was an essential part of the design process to confirm the accuracy of modelling and also to reveal issues with manufacturing tolerances. An overall resonant frequency of 6 kHz was achieved allowing for a closed loop-control frequency of 1.73 kHz for precise horizontal motion control. This resonance represented a 12-fold increase from the original 500 Hz of a commercially available positioning stage. Experimental maximum out-of-plane distortions below the first resonance frequency were reduced from 0.3 μm for the first prototype to less than 0.05 μm for the final practical prototype.     

Miniaturized liquid film sensor (MLFS) for two phase flow measurements in square microchannels with high spatial resolution

Two miniaturized liquid film sensors (MLFS) based on electrical conductance measurement have been developed and tested. The sensors are non-intrusive and produced with materials and technologies fully compatible and integrable with standard microfluidics. They consist of a line of 20 electrodes with a purpose-designed shape, flush against the wall, covering a total length of 5.00 and 6.68 mm. The governing electronics achieve 10 kHz of time resolution. The electrode spacing of the two sensors is 230 μm and 330 μm, which allows measurements of liquid films up to 150 μm and 400 μm for sensors MLFS_A and MLFS_B, respectively. The sensor characteristics were obtained by imposing static liquid films of known thickness on top of the actual sensor. Further dynamic measurements of concurrent air-water flow in a horizontal microchannel were performed. The line of electrodes is placed across the flow direction with an angle of 3.53° from the direction of flow, allowing for a spatial resolution perpendicular to the flow of 14.2 μm for sensor MLFS_A and 20.5 μm for sensor MLFS_B. The high time and spatial resolution allows for fast and accurate detection of the presence of bubbles, and even measurement of film thickness and bubble velocity. Further information, such as the bubble shape, can be gathered based on the shape of the liquid layer underneath the bubble, which is particularly important for heat transfer studies in microchannels.     

Thermopower detection of single nanowire using a MEMS device

We present a MEMS-based device on a silicon nitride membrane in order to measure the thermoelectric properties of a single nanowire. A temperature gradient along a nanowire was generated by a nanoheater, and the temperature was measured by Pt thermometers. A thermal simulation using a finite element method was conducted to analyze the temperature distribution over the MEMS device. The validity of the MEMS device was established by testing the Pt nanowires which had different symmetry configurations. From the test results of Pt nanowires, a convincing temperature calibration method was proposed and applied to an actual case of Bi₂Te₃ nanowire. We measured a Seebeck coefficient of −53 μV/K and electrical conductivity of 2.23 × 10⁵ S/m for a single Bi₂Te₃ nanowire with a diameter of 70 nm at 300 K. Our solid design for thermoelectric measurements based on a membrane structure enables the fast and high-yield characterization of one-dimensional nanostructures.     

Design and application of fiber Bragg grating (FBG) geophone for higher sensitivity and wider frequency range

The fiber Bragg grating geophone sensor with higher sensitivity and wider frequency range was reported. The methods to increase the sensitivity of the FBG cantilever sensor were presented. The acceleration sensitivity of the optimized FBG geophone is 220 pm/g, and the resonant frequency can reach to 295 Hz. The experiments show that the FBG geophone system has the minimum detectable acceleration of 1 mm/s². Some factual application examples of using this fiber Bragg grating geophone monitoring system for micro seismic monitoring in coal mine were presented.     

Quasi-constant rotational stiffness characteristic for cross-spring pivots in high precision measurement of unbalance moment

This paper proposes a design method for cross-spring pivots with quasi-constant rotational stiffness in the field of unbalanced moment measurement. To achieve high precision measurement of unbalance moment, the relationship between instrument sensitivity and the rotational stiffness of the cross-spring pivot is revealed. In order to eliminate the impacts of payload changes on instrument sensitivity, the relationship between geometric parameters and the rotational stiffness of the pivot is studied. Further, cross-spring pivots with quasi-constant rotational stiffness are designed as the rotation unit of a static balancing instrument, while the center shift of pivot takes the minimum value. Certain amount of unbalance moments is measured by the instrument. Experimental studies of the instrument show that the maximum measurement errors of unbalance moments 0.162 g mm, 0.319 g mm and 1.300 g mm are 0.068 g mm, 0.086 g mm and 0.053 g mm, respectively, when the payload ranges from 0 g to 7000 g. The instrument can achieve a relatively high precision measurement and the instrument sensitivity is almost not affected by the changes of payloads. The effectiveness of the method and the stiffness property of the pivot are verified by the experiments. So this kind of pivot has good prospects in unbalance moment measurement.     

A piezoelectric motor for precision positioning applications

This study presents a novel precise piezoelectric motor capable of operating in either an AC drive mode or DC drive mode. In the AC drive mode, the motor acts as an ultrasonic motor which is driven by two orthogonal mechanical vibration modes to generate elliptical motion at the stator to push the slider into motion. In the DC drive mode, stick-slip friction between the stator and slider is used to drive the motor step-by-step. The experimental results show that the AC drive mode can drive the motor at a high moving speed, while the DC drive mode can simply drive the motor with a nanoscale resolution. In our experiments, a prototype motor is fabricated and its actions are measured. The results demonstrate that in the AC drive mode, the piezoelectric motor can achieve a 106 mm/s speed without a mechanical load and a 34 mm/s speed with 340 g of mechanical load when applying two sine waves with a drive of 11.3 V at 38.5 kHz. Meanwhile, in a DC driving mode, the motor is capable of performing precision positioning with a displacement resolution of 6 nm when driving at 100 Hz.     

Analysis of load-speed sensitivity of friction composites based on various synthetic graphites

The frictional response of a multi-component phenolic-based friction material is highly complex under a set of variable loads and speeds. The present paper discusses the sensitivity of friction coefficient (μ) of friction composites containing synthetic graphite with different particle sizes (with similar crystallinity range) to braking pressure and sliding speed. The friction studies were carried out on a sub scale brake-test-rig, following 4 loads × 3 speeds experimental design. The best combination of performance properties was observed for the composite containing synthetic graphite with an average particle size of 410 μm. Other particle sizes which resulted in good performance were 38 and 169 μm. Very fine particle sizes were not beneficial for desired combination of performance properties. Regression analysis of μ following an orthogonal L₉(3 × 3) experimental design method revealed that the first order influences of sliding speed and braking pressure were significant. When all the combinatorial influences of braking pressure and sliding speed are taken into account together their simultaneous effects would be most effective in the range of graphite particle size ～80–250 μm.     

Synthesis of multiple degrees-of-freedom spatial-motion compliant parallel mechanisms with desired stiffness and dynamics characteristics

This paper presents a new design method to synthesize multiple degrees-of-freedom (DOF) spatial-motion compliant parallel mechanisms (CPMs). Termed as the beam-based structural optimization approach, a novel curved-and-twisted (C-T) beam configuration is used as the basic design module to optimize the design parameters of the CPMs so as to achieve the targeted stiffness and dynamic characteristics. To derive well-defined fitness (objective) functions for the optimization algorithm, a new analytical approach is introduced to normalize the differences in the units, e.g., N/m or N m/rad, etc., for every component within the stiffness matrix. To evaluate the effectiveness of this design method, it was used to synthesize a 3-DOF spatial-motion (θ_x − θ_y − Z) CPM that delivers an optimized stiffness characteristics with a desired natural frequency of 100 Hz. A working prototype was developed and the experimental investigations show that the synthesized 3-DOF CPM can achieved a large workspace of 8°×8°×5.5 mm, high stiffness ratios, i.e., >200 for non-actuating over actuating stiffness, and a measured natural frequency of 84.4 Hz.     

Design and experimental evaluation of a precise and compact tubular ultrasonic motor driven by a single-phase source

A precise and compact tubular ultrasonic motor driven by a single-phase source is proposed and tested in this study. The motor is designed by modeling a motor stator in FEM software. The motor fabricated according to the design is tested experimentally and its working characteristics including speed and torque are measured and presented. The maximum speed and torque of the motor are 59 rpm and 0.28 mN m at 80 V_pp of applied voltage. The proposed motor possesses advantages such as a simple and compact structure with application in the fields of robotics, space, medical devices and high-resolution stages, among others. The proposed motor is a good candidate for applications where accurate control and high resolution at low speed is required.     

Effect of silicon nitride coating thickness on fatigue of silicon microbeams

In this paper, two silicon nitride layers with thickness, 0.2 and 0.4 μm, are coated onto single crystal silicon (SCS) in order to achieve Si₃N₄/Si cantilever microbeams. The effect of LPCVD silicon nitride surface coatings on fatigue properties of SCS cantilever microbeams is investigated. Fatigue testing is conducted at both 40 Hz and 100 Hz. Typical S–N (strain amplitude–fatigue cycle) curves of the beams are achieved and correlated fatigue failure modes are investigated. It is found that thinner Si₃N₄ coating of 0.2 μm results in better fatigue lives of Si₃N₄/Si beams than thicker Si₃N₄ coating of 0.4 μm. Both thinner and thicker coated beams have major fatigue crack planes along {1 1 1} planes; however, thicker coated beams possess specific failure mode of delamination, which is not found in thinner coated beams. Delamination reduces the reinforcing effect of thicker Si₃N₄ coating and leads to its shorter fatigue life. For thicker coated beams, fatigue life at 100 Hz is longer than that at 40 Hz. The mechanism for delamination and the effect of cyclic frequency is investigated, and factors for better fatigue life are proposed.     

Measurement and statistical analysis toward reproducibility validation of AZ4562 cylindrical microlenses obtained by reflow

This paper presents the statistical analysis applied into the shape of microlenses (MLs) for validating the high-reproducibility feature of their fabrication process. The MLs were fabricated with the AZ4562 photoresist, using photolithography and thermal reflow processes. Two types of MLs arrays were produced for statistical analysis purposes: the first with a cross-sectional diameter of 24 μm and the second with a cross-sectional diameter of 30 μm, and both with 5 μm spacing between MLs. In the case of 24 μm diameter arrays, the measurements showed a mean difference in diameter of 2.78 μm with a standard deviation (SD) of 0.22 μm (e.g., 2.78 ± 0.22 μm of SD) before the reflow, and 2.34 ± 0.35 μm of SD after the reflow. For the same arrays, the mean difference in height obtained was, comparatively to the 5.06 μm expected, 0.76 ± 0.10 μm of SD before the reflow and 1.91 ± 0.15 μm of SD after the reflow, respectively. A mean difference in diameter of 2.64 ± 0.41 μm of SD before the reflow, and 1.87 ± 0.34 μm of SD after the reflow was obtained for 30 μm diameter MLs arrays. For these MLs, a mean difference in height of 0.71 ± 0.12 μm of SD before the reflow and 2.24 ± 0.24 μm of SD after the thermal reflow was obtained, in comparison to the 5.06 μm of height expected to obtain. These results validate the requirement for reproducibility and opens good perspectives for applying this fabrication process on high-volume production of MLs arrays.     

Optical fiber distributed acoustic sensing based on the self-interference of Rayleigh backscattering

In order to detect the weak underwater acoustic signal, a Distributed Acoustic Sensing (DAS) scheme based on the self-interference of Rayleigh backscattering is presented. Rayleigh backscattered light which contains a phase change induced by acoustic signal along the sensing fiber which is a standard telecom single-mode fiber is split and fed into an imbalance Michelson interferometer. With the self-interference of two Rayleigh backscattered beams, the phase change is amplified theoretically compared with phase-sensitive OTDR. We designed an experiment to prove the scheme, and successfully restored the acoustic information, meanwhile, the DAS system has preliminary realized around the acoustic phase sensitivity of −151 dB (re rad/μPa) at 600 Hz, and the minimum detectable acoustic pressure of 6 Pa in the experiment.     

Design and testing of a long-range,precision fast tool servo system for diamond turning

A long-range, precision fast tool servo (FTS) system was developed that is capable of accurately translating the cutting tool on a diamond turning machine (DTM) with maximum accelerations of 260 m s^?2 and bandwidths of up to 140 Hz. The maximum displacement range of the cutting tool is 2 mm. The FTS utilizes a flexure mechanism driven by a voice coil actuator, a custom linear current amplifier and a laser interferometer feedback system. This paper describes the design of the electromechanical system, controller configuration and cutting tests to evaluate the system. Initially, low disturbance rejection and poor command following degraded the surface finish of machined test parts. Several techniques to add damping to the dynamic system were investigated to improve the generated surface finishes. Electromotive damping was applied inside the voice coil actuator, and two different viscoelastic damping materials were applied to the flexure mechanism. A control strategy consisting of linear and non-linear feedforward controllers and a proportional, integral and derivative (PID) feedback controller was implemented to accommodate the changed system dynamics. The workpieces were analyzed using form and surface inspection instruments to evaluate the overall system performance. A cylindrical part with five lobes cut across the face had a surface finish value between 20 and 30 nm R_a.     

Characteristics of a dynamic atomic force microscopy based on a higher-order resonant silicon cantilever and experiments

In order to improve the sensitivity and scanning speed of the dynamic AFM, a surface scanning method using higher-order resonant cantilever is adopted and investigated based on the higher-order resonance characteristics of the silicon cantilever, and the theoretical analysis and experimental verification on the higher-order resonance characteristics of the corresponding dynamic AFM cantilever are given. In this method, the cantilever is excited to oscillate near to its higher-order resonant frequency which is several times higher than that of the fundamental mode. Then the characteristic changes a lot compared with the first-order resonant cantilever. Because of the changes of the quality factor, amplitude and the mode shape of the cantilever, the higher-order resonant AFM gets higher sensitivity and scanning speed. Based on the home-built tapping-mode AFM experiment system, the resolution and the response time of the first and second order resonance measured by experiment are respectively: 0.83 nm, 0.42 nm; 1265 μs, 573 μs. The higher-order resonance cantilever has higher sensitivity and the dynamic measurement performance of the cantilever is significantly improved from the experimental results. This can be a useful method to develop AFM with high speed and high sensitivity. Besides above, the surface profile of a grating sample and its three-dimensional topography are obtained by the higher-order resonant mode AFM.     

Resonant frequency characterization of MEMS based energy harvesters by harmonic sampling analysis method

This paper presents a new and accurate experimental method based on harmonic distortion analysis to determine the resonant frequency of MEMS devices to be used as energy scavengers or more generally in widespread MEMS-based applications. This technique uses the mechanical–electrical analogy of MEMS variable capacitor acting as a low-pass filter to give access to both resonant frequency and damping factor of the mechanical system through the determination of the filter parameters as the cut-off frequency. Resonant frequencies ranging from 0.8 kHz to 5 kHz of electrostatic actuated MEMS-based harvesters have been measured by this technique with an uncertainty as low as a few parts in 10³ in a good agreement with measurements carried out by using Deep Level Transient Spectroscopy system.     

Design and characterization of a real-time,wearable, endosomatic electrodermal system

This paper presents the design and characterization of a compact wearable system for long-term assessment of skin potential response, with the aim of monitoring mental stress in a variety of applications. Literature reports that the expected skin potential has peak-to-peak amplitudes of few millivolts in the frequency band [0.1, 10] Hz. The designed system is characterized by a slightly wider bandwidth of [0.08, 40] Hz, and it is based on a 12-bit ADC working with a sampling rate of 200 Sa/s, which can be increased up to 3.5 kSa/s. Data can be continuously acquired for up to 40 h with a battery of 3.7 V/1800 mAh. A Graphical User Interface was also developed for the host computer in .NET framework. The system, to our knowledge the first example of wearable endosomatic electrodermal activity sensor, joins to several skin conductance wearable measuring systems recently proposed in literature, and opens up opportunities for future comparisons of endosomatic and exosomatic responses in real life.The device is thoroughly characterized in accordance with the state-of-the-art of the metrological research in the field.     

Digital filtering methodology used to reduce scale of measurement effects in roughness parameters for magnetic storage supersmooth hard disks

Roughness of disk media influences the tribological interaction of head-disk interfaces, especially when the intended flying-height is below 5 nm that is required to achieve extremely high-density recording (EHDR). Roughness parameters such as the root-mean-square (RMS) amplitude, however, are influenced by the scale of measurement, such as the scan size. Effects related to scale of measurement such as varying the scan size were investigated and means to reduce such effects were proposed by establishing an “ad hoc” digital filtering procedure. Two types of magnetic disks intended for EHDR were measured by an atomic force microscope (AFM) at various scan dimensions ranging from 0.5 μm × 0.5 μm to 112 μm × 112 μm. The proposed filtering method used the RMS values as a filter design parameter for choosing the appropriate high-pass cutoff wavelength for each scan size. The study revealed the existence of a unique cutoff wavelength that would identify different wavelength regimes and the associated critical scan size in each disk. To substantiate the effectiveness of the proposed filtering method in reducing the scale of measurement effects related to the scan size, other roughness parameters were also calculated subsequent to the filtering procedure. It was found that the proposed filtering scheme effectively reduced the scale of measurement effects in the amplitude parameters (e.g., RMS and the ten-point height variation) and the functional parameters (e.g., material and core void volumes). These parameters exhibited steady-state trends with respect to increasing scan size, indicating reduced scale of measurement effects.     

Enhancing electrical conductivity and electrical thermal characteristics of a PEDOT:PSS thin layer by using solvent treatment and adding Ag nanoparticle solution

A method of enhancing the electrical conductivity of 3,4-ethylenedioxythiophene:poly styrene sulfonate (PEDOT:PSS) by combining solvent treatment (adding high polar solvent: 5 wt% ethylene glycol) and adding a small amount of silver (Ag) nanoparticles in a solution was investigated. The main purpose of this was to apply a PEDOT:PSS conductive layer to micro-thermal devices driven by electricity and, for this, to reduce the layer thickness (for low stiffness) while maintaining necessary high electrical conductivity. Layers with thicknesses of less than about 10 μm were examined for electrical conductivity and temperature when electricity was applied. The solvent treated PEDOT:PSS had suitable electrical resistance to generate appropriate temperature properties. The added Ag nanoparticles reduced the electrical resistance by 30–70% over the measured thickness range. The electric conductivity applied with this method was 200–260 Ω⁻¹ cm⁻¹ for thicknesses of 1–2 μm (conductive area: 12 mm × 10 mm) and the generated temperature increase was 20–50 °C at applied voltages of 3–5 V. These characteristics are considered to be suitable to use the conductive layer as a heating element. In addition, the method we used scarcely degraded the transparency of the layer. Measurements of the conductive area in a layer with conductive atomic force microscope (AFM) indicated that the added Ag nanoparticles contributed to increasing the conductive areas and distributing them more uniformly.