Non-contact temperature measurement of silicon wafers based on the combined use of transmittance and radiance

We propose a non-contact temperature measurement method that combines the temperature dependence of transmittance below 600 °C and radiation thermometry above 600 °C. The combined method uses a polarization technique and the Brewster angle between air and a dielectric film such as SiO₂ or Si₃N₄ grown on silicon wafers. A prominent feature of this method is that both measurements of transmittance and radiance are performed with the same geometrical arrangement.For a semitransparent wafer, the measurement of p-polarized transmittance at the wavelengths of 1.1, 1.2 and 1.3 μm enables temperature measurement in the range from room temperature to 600 °C. For an opaque wafer above 600 °C, the p-polarized radiation thermometry at the wavelength of 4.5 μm allows the temperature measurement without the emissivity problem. The combined method with the use of transmittance and radiance is valid in the entire temperature range irrespective of variations of film thickness and resistivity.     

Wear behavior of electroless Ni–P–B4C composite coatings

In this research, the wear of electroless Ni–P and Ni–P–B₄C composite coatings was reviewed. Auto catalytic reduction of Ni in nickel sulfate and sodium hypophosphate bath including suspended B₄C particles with different concentration was used to create composite coatings with 12, 18, 25 and 33 vol.% of B₄C particles. Coatings 35 μm thick were heat treated at 400 °C for one hour in an argon atmosphere and the wear resistance and friction coefficient of heat-treated samples were determined by block-on-ring tests. All wear tests were carried out at 24 °C, 35% moisture, 0.164 m/s sliding speed and about 1000 m sliding distance. Graphs show that an electroless Ni–P–B₄C composite coating with 25 vol.% of B₄C had the best wear resistance against a CK45 steel counterface.     

Wear characteristics of Cr3C2–NiCr and WC–Co coatings deposited by LPG fueled HVOF

Wear behavior of the HVOF deposited Cr₃C₂–NiCr and WC–Co coatings on Fe-base steels were evaluated by the pin-on-disc mechanism. The constant normal load applied to the pin was 49 N and sliding distance was 4500 m with velocity of 1 m/s, at ambient temperature and humidity. The specific wear rate of WC–Co coating was 3 mm³/N m and Cr₃C₂–NiCr coating was 5.3 mm³/N m. SEM/EDAX and XRD techniques were used to analyze the worn out surface and wear debris. The Fe₂O₃ was identified as the major phase in the wear debris. The wear mechanism is mild adhesive wear in nature.     

Dual-band pyrometry for emissivity and temperature measurements of gray surfaces at ambient temperature: The effect of pyrometer and background temperature uncertainties

A dual-band pyrometry model for target temperature (240–360 K) and emissivity measurement was developed, in which two pyrometers with different spectral bands are surrounded by an enclosure at a given background temperature. Nine equal-power spectral bands were selected for the pyrometers from wavelengths between 8 and 14 μm. The Monte Carlo method was used to compute the dual-band measurement uncertainties of temperature and emissivity caused by the propagation of the uncertainties associated with the temperatures of the two pyrometers and the temperature of the background. It was found that the rate of decrease of dual-band measurement uncertainties with increasing difference between target and background temperatures decreases with increasing target temperature. Considering the uncertainty of the background temperature, it was found that dual-band measurement uncertainties are virtually not affected by the background temperature uncertainty when the background temperature is lower than the target temperature, and dual-band measurement uncertainties increase significantly with increasing background temperature uncertainty when the background temperature is higher than the target temperature.     

Erosion-oxidation of uncoated,aluminized and chromized-aluminized 9Cr–1Mo steels under fluidized-bed conditions at 550–700 °C

Protective coatings, deposited mainly by thermal spraying and diffusion techniques, are considered a solution to extend the lifetime of many components in the energy production sector, such as heat exchangers. In this paper, some results are presented for uncoated, aluminized and chromized-aluminized 9Cr–1Mo steel, subjected to air and to impacts by 200 μm silica particles at angles of 30° and 90° and speeds of 7.0–9.2 m s^?1 at 550 –700 °C, in a laboratory fluidized-bed rig, to determine whether or not aluminized and chromized-aluminized diffusion coatings could protect the steel under such conditions. Erosion-oxidation damage was characterized by measurement of the mean thickness changes using a micrometer and examination of worn surfaces by scanning electron microscopy.Under most conditions, the coatings provided some protection to the substrate: under 30° impacts, up to 650 °C, and under 90° impacts, at 700 °C, both coatings were effective, whereas under 90° impacts, up to 650 °C, only the chromized-aluminized coating gave significant protection. However, for 30° at 700 °C, the oxide scale on the substrate was protective and the coatings were not needed. Explanations for these observations are presented in this paper, in terms of interactions between the erosion and oxidation processes for the materials.     

Sliding wear behavior of hardfacing alloys in a pressurized water environment

In this study, sliding wear behavior of newly developed Fe-base Co-free hardfacing alloy (Fe–Cr–C–Si) was investigated and compared to that of Stellite 6 and Fe-base NOREM 02 in the temperatures ranging from 300 to 575 K under a contact stress of 103 MPa (15 ksi) in pressurized water. The weight loss of Fe–Cr–C–Si was equivalent to that of Stellite 6 over all temperatures range in 100-cycle wear test. The weight loss of Fe–Cr–C–Si 1000-cycle wear test increased almost linearly with increasing temperature up to 575 K. The weight loss of NOREM 02 was nearly equivalent to that of Stellite 6 below 475 K, however, galling occurred above 475 K in 100-cycle wear test. It was also found that the lubrication effect of pressurized water on the sliding wear behavior of the alloys was negligible under the present test conditions.     

Artificial neural network modeling of thin layer drying behavior of municipal sewage sludge

The back-propagation (BP) and generalized regression neural network models (GRNN) were investigated to predict the thin layer drying behavior in municipal sewage sludge during hot air forced convection. The accuracy of the BP model to predict the moisture content of the sewage sludge thin layer during hot air forced convective drying was far higher than that of the GRNN model. The GRNN models could automatically determine the best smoothing parameters, which were 0.6 and 0.3 for predicting the moisture content and average temperature, respectively. The model type for predicting the average temperature of the sewage sludge thin layer was selected for different sample groups by comparing their MSE values or R² values. The GRNN model was suitable for predicting the average temperature corresponding to the sample groups at hot air velocity of 0.6 m/s, and drying temperatures of 100 °C, 160 °C; hot air velocity of 1.4 m/s, and drying temperatures of 130 °C, 140 °C; hot air velocity of 2.0 m/s, and drying temperatures of 150 °C, 160 °C. The average temperature for the other sample groups was best predicted by the BP model.     

Study of TiAlSiN coatings post-treated with N and C + N ion implantations. Part 2: The tribological analysis

Ion implantation has found to be an effective approach to modify surface properties of materials. The present research investigates the effect of (1) nitrogen (N), and (2) carbon subsequently with nitrogen (C + N) implantations on the mechanical and tribological properties of the titanium–aluminium–silicon–nitride (Ti–Al–Si–N) coatings. Superhard TiAlSiN coatings produced by magnetron sputtering, of approximately 2.5 μm thickness, were post-treated by implantations of N or C + N at an energy level of 50 keV. The dose range was between 5 × 10¹⁶ and 1 × 10¹⁸ ions cm^?2. After implantation, the tribological performance of the coatings was investigated by a ball-on-disk tribometer against WC–6 wt.%Co ball under dry condition in ambient air. The wear performance of the samples was examined by a variety of characterization techniques, such as secondary electron microscopy (SEM), 3D profilometry, atomic force microscopy (AFM), and micro-Raman. The results showed that the wear performance of the samples depended strongly on the implanted elements and doses. There was slight improvement on the samples implanted with N whereas significant improvement was found on the C + N implantations. Particularly, the friction coefficient of the sample with 5 × 10¹⁷ C⁺ cm^?2 and 5 × 10¹⁷ N⁺ cm^?2 could reach 0.1. In addition, the specific wear rate of the sample was extremely low (0.85 × 10^?7 mm³/Nm), which was nearly two orders of magnitude below that of the un-implanted coating. The speculation of the mechanical and tribological analyses of the samples indicates that the improvement of the N implanted and C + N implanted TiAlSiN samples could be due to a combined effect of improved hardness, plus enhanced adhesive and cohesive strength. In addition, the improved performance of the C + N implanted samples could be explained by the formation of lubricating implanted-layer, which existed mostly in sp² C–C and C–N forms. The formation of such implanted layer could lead to a change of wear mode from strong abrasive wear to mostly adhesive wear, and result in a drop of friction coefficient and wear rate.     

Mechanical and tribological properties of sputtered Mo–Se–C coatings

Transition metal dichalcogenides belong to the more developed class of materials for solid lubrication. However, the main limitation of these materials is the detrimental effect of air humidity causing an increase in the friction. In previous works, molybdenum diselenide has been shown to be a promising coating retaining low friction even in very humid environment. In this study, Mo–Se–C films were deposited by sputtering from a C target with pellets of MoSe₂. Besides the evaluation of the chemical composition, the structure, the morphology, the hardness and the cohesion/adhesion, special attention was paid to the tribological characterization.The C content varied from 29 to 68 at.% which led to a progressive increase of the Se/Mo ratio. As a typical trend, the hardness increases with increasing C content. The coatings were tested at room temperature with different air humidity levels and at temperatures up to 500 °C on a pin-on-disc tribometer. The friction coefficient of Mo–Se–C coatings increased with air humidity from ～0.04 to ～0.12, while it was as low as 0.02 at temperature range 100–250 °C. The coatings were very sensitive to the elevated temperature being worn out at 300 °C due to adhesion problems at coating–titanium interface.     

Effect of heat treatment on the structure,cavitation erosion and erosion–corrosion behavior of Fe-based amorphous coatings

In this study, high-velocity oxygen-fuel sprayed amorphous coatings have been heat treated at various temperatures to form microstructures with crystalline phases. The structure, micro-hardness, cavitation erosion resistance and erosion–corrosion resistance of these coatings are compared. Crystalline phases are discovered in the coatings after heat treatments at 650 °C and 750 °C. The coating heat treated at 750 °C exhibits the poorest cavitation erosion resistance in 3.5 wt% NaCl solution among all coatings due to the degraded corrosion resistance. However, the hardness of the crystallized coating can reach 1000 Hv and the erosion–corrosion resistance of the heat treated coating is better than the untreated one.     

Analysis of load-speed sensitivity of friction composites based on various synthetic graphites

The frictional response of a multi-component phenolic-based friction material is highly complex under a set of variable loads and speeds. The present paper discusses the sensitivity of friction coefficient (μ) of friction composites containing synthetic graphite with different particle sizes (with similar crystallinity range) to braking pressure and sliding speed. The friction studies were carried out on a sub scale brake-test-rig, following 4 loads × 3 speeds experimental design. The best combination of performance properties was observed for the composite containing synthetic graphite with an average particle size of 410 μm. Other particle sizes which resulted in good performance were 38 and 169 μm. Very fine particle sizes were not beneficial for desired combination of performance properties. Regression analysis of μ following an orthogonal L₉(3 × 3) experimental design method revealed that the first order influences of sliding speed and braking pressure were significant. When all the combinatorial influences of braking pressure and sliding speed are taken into account together their simultaneous effects would be most effective in the range of graphite particle size ～80–250 μm.     

Characterisation and laboratory investigation of a new ultraviolet multi-wavelength measuring system for high-temperature applications

In the framework of the HiTeMS project of the European Metrology Research Pogramme (EMRP) a new multi-wavelength device for measurement of high temperatures in industrial applications was developed at INRIM. The apparatus takes advantage of the ultra-violet operation with working wavelengths from 350 nm up, which reduces the possible errors connected with the multi-wavelength approach. The instrument has been characterised in terms of optical and electronic behaviour and some laboratory trials were carried out to verify the reliability of the multi-wavelength approach. The true temperature of a blackbody source at 1300 °C with optical windows of unknown spectral transmittance interposed has been defined. By applying an approach that allows a result to be accepted when a threshold limit is reached, it was found that, when an acceptable result can be obtained, errors are comprised within less than 1% of the temperature of the source. Three others single-band thermometers, at 508 nm, 650 nm and an IR broadband 0.8–1.1 μm, were also used to the purpose of a comparison. It has been found that, when the multi-wavelength approach is applicable, it provides generally better or in few cases, at worst similar results of corrected single-wavelength thermometers.     

Effects of carbon fiber length on the tribological properties of paper-based friction materials

Four kinds of paper-based friction materials reinforced with carbon fibers of 100, 400, 600 and 800 μm were prepared by paper-making processes. Experimental results showed that the friction materials became porous with fiber length increasing. The friction torque curves were flat except the sample with 100 μm fibers. The wear rate of the sample with 100 μm fibers was only 1.40×10⁻⁵ mm³/J. Tiny debris and fine scratches formed in the worn surface were the reason for excellent wear resistance of friction pairs with 100 μm fibers. The friction pairs with 400, 600 and 800 μm fibers showed typically abrasive wear and fatigue wear.     

Effect of silicon nitride coating thickness on fatigue of silicon microbeams

In this paper, two silicon nitride layers with thickness, 0.2 and 0.4 μm, are coated onto single crystal silicon (SCS) in order to achieve Si₃N₄/Si cantilever microbeams. The effect of LPCVD silicon nitride surface coatings on fatigue properties of SCS cantilever microbeams is investigated. Fatigue testing is conducted at both 40 Hz and 100 Hz. Typical S–N (strain amplitude–fatigue cycle) curves of the beams are achieved and correlated fatigue failure modes are investigated. It is found that thinner Si₃N₄ coating of 0.2 μm results in better fatigue lives of Si₃N₄/Si beams than thicker Si₃N₄ coating of 0.4 μm. Both thinner and thicker coated beams have major fatigue crack planes along {1 1 1} planes; however, thicker coated beams possess specific failure mode of delamination, which is not found in thinner coated beams. Delamination reduces the reinforcing effect of thicker Si₃N₄ coating and leads to its shorter fatigue life. For thicker coated beams, fatigue life at 100 Hz is longer than that at 40 Hz. The mechanism for delamination and the effect of cyclic frequency is investigated, and factors for better fatigue life are proposed.     

Tribological properties of nanostructured DLC coatings deposited by C60 ion beam

The frictional and wear characteristics of nanostructured DLC films were investigated. The coatings were deposited on silicon substrates by irradiation of a mass-separated C₆₀ ion beam with 5 keV of energy and a deposition temperature ranging from 100 to 450 °C. The effects of deposition temperature on the surface morphology, nano-structure, mechanical properties and tribological characteristics of the coatings were assessed. Results showed that deposition temperature strongly affects the nanostructure and surface morphology of the coatings. Coatings deposited at temperatures exceeding 350–400 °C exhibited an increase in surface roughness as well as compressive stress due to the formation of graphite, which led to a significant increase in the friction coefficient and wear rate. Coatings deposited at 300 °C showed the best tribological properties.     

Plastic deformation of 25CrMo4 steel during wear: Effect of the temperature,the normal force,the sliding velocity and the structural state

This article follows a previous study on friction and wear of 25CrMo4 steel [N. Khanafi-Benghalem, K. Loucif, E. Felder, F. Delamare, Influence de la température sur les mécanismes de frottement et d’usure des aciers X12NiCrMoSi25-20 et 25CrMo4 glissant sur du carbure de tungstène, Matériaux et techniques 93 (2005) 347–362]. The aim of our work is to study in more details the process of plastic deformation and the wear rate of this steel in lubricated sliding against cemented tungsten carbide, process observed in the previous work. The considered parameters are the temperature T (from 20 to 200 °C), the normal force P (from 500 to 1500 N), the steel structure (normalised HV 220 and quenched/tempered HV 480 states) and the sliding velocity v (from 0.05 to 0.3 m/s). We measured the friction coefficient and the sample total volume loss. A displacement sensor follows the volume loss evolution during the test; this follow-up is approximate because of the sample plastic flow which leads to the formation of peripheral burrs. All the tests conditions generate a significant plastic deformation of the sample steel, even in the quenched/tempered state: it produces a marked increase of the surface hardness, the work hardened layer being much finer for the quenched/tempered state (15 μm) than for the normalised state (40 μm at 20 °C). For temperatures T ≤ 100 °C in normalised state, the wear follows the Archard's law with an increasing rate with temperature. For T ≥ 120 °C, the wear rate decreases during the test, the global volume of wear being a decreasing function of T. For the quenched/tempered state, the wear rate decreases with the increase of the normal force, this decrease is less than 30% of the normalised state value. The material heating during the wear tests is well correlated with the friction dissipated power, but remains small, except in extreme cases (v maximum, great friction at high temperatures). These results suggest the existence of two wear mechanisms: abrasion by sample debris and burrs emission by plastic flow. The abrasion is probably the dominating mechanism for the tests carried out at the lowest temperatures. The plastic flow becomes a significant component at the highest temperatures. Using a contact model, we discuss to what extent the influence of the temperature and the strain rate on the steel hardness and ductility could explain the temperature and the sliding velocity effect on wear. Other phenomena are probably present: the influence of the steel microstructure and the lubricant on the size and/or the number of particles responsible for abrasion.     

Measurement and statistical analysis toward reproducibility validation of AZ4562 cylindrical microlenses obtained by reflow

This paper presents the statistical analysis applied into the shape of microlenses (MLs) for validating the high-reproducibility feature of their fabrication process. The MLs were fabricated with the AZ4562 photoresist, using photolithography and thermal reflow processes. Two types of MLs arrays were produced for statistical analysis purposes: the first with a cross-sectional diameter of 24 μm and the second with a cross-sectional diameter of 30 μm, and both with 5 μm spacing between MLs. In the case of 24 μm diameter arrays, the measurements showed a mean difference in diameter of 2.78 μm with a standard deviation (SD) of 0.22 μm (e.g., 2.78 ± 0.22 μm of SD) before the reflow, and 2.34 ± 0.35 μm of SD after the reflow. For the same arrays, the mean difference in height obtained was, comparatively to the 5.06 μm expected, 0.76 ± 0.10 μm of SD before the reflow and 1.91 ± 0.15 μm of SD after the reflow, respectively. A mean difference in diameter of 2.64 ± 0.41 μm of SD before the reflow, and 1.87 ± 0.34 μm of SD after the reflow was obtained for 30 μm diameter MLs arrays. For these MLs, a mean difference in height of 0.71 ± 0.12 μm of SD before the reflow and 2.24 ± 0.24 μm of SD after the thermal reflow was obtained, in comparison to the 5.06 μm of height expected to obtain. These results validate the requirement for reproducibility and opens good perspectives for applying this fabrication process on high-volume production of MLs arrays.     

Enhancing electrical conductivity and electrical thermal characteristics of a PEDOT:PSS thin layer by using solvent treatment and adding Ag nanoparticle solution

A method of enhancing the electrical conductivity of 3,4-ethylenedioxythiophene:poly styrene sulfonate (PEDOT:PSS) by combining solvent treatment (adding high polar solvent: 5 wt% ethylene glycol) and adding a small amount of silver (Ag) nanoparticles in a solution was investigated. The main purpose of this was to apply a PEDOT:PSS conductive layer to micro-thermal devices driven by electricity and, for this, to reduce the layer thickness (for low stiffness) while maintaining necessary high electrical conductivity. Layers with thicknesses of less than about 10 μm were examined for electrical conductivity and temperature when electricity was applied. The solvent treated PEDOT:PSS had suitable electrical resistance to generate appropriate temperature properties. The added Ag nanoparticles reduced the electrical resistance by 30–70% over the measured thickness range. The electric conductivity applied with this method was 200–260 Ω⁻¹ cm⁻¹ for thicknesses of 1–2 μm (conductive area: 12 mm × 10 mm) and the generated temperature increase was 20–50 °C at applied voltages of 3–5 V. These characteristics are considered to be suitable to use the conductive layer as a heating element. In addition, the method we used scarcely degraded the transparency of the layer. Measurements of the conductive area in a layer with conductive atomic force microscope (AFM) indicated that the added Ag nanoparticles contributed to increasing the conductive areas and distributing them more uniformly.     

Evolution of wear,roughness, and friction of Alloy 600 superalloy surfaces in water-submersed sliding

Self-mated wear and friction of Alloy 600 superalloy was studied in a water-submersed ring-on-rod configuration, loading the side of a 6.35 mm diameter rod across the flat surface of a rotating annular ring of 100 mm outer diameter and 70 mm inner diameter producing two sliding contacts along the ring. Tests were conducted at sliding speeds of 0.178 and 0.330 m/s for sliding distances of 100 m. Normal loads of 51 and 204 N were applied, and initial R_a surface roughnesses of the rings along the sliding direction were either smooth (～0.2 μm) or rough (～7.5 μm). Increased initial ring roughness caused a ～20-fold increase in rod wear at the lighter load, whereas at the heavier load increased initial roughness only caused a ～4-fold increase in wear. At lower initial ring roughness the 4-fold decrease in normal load caused a large (one order-of-magnitude) decrease in rod wear, whereas for rings of higher initial roughness the 4-fold decrease in normal load caused only minor (2-fold or less) decreases in rod wear. Wear during this 100 m sliding distance only experienced a minor effect from the 1.8-fold change in sliding speed, as did friction. In all cases friction coefficient rapidly settled into the range 0.6–0.7, except in the cases of lower load on rings of lower initial roughness where friction coefficient remained above 1 for most of this sliding duration. At this lower load the initial ～0.2 μm rod roughnesses increased to nearly 0.8 μm by the 100 m sliding distance, whereas at the higher load this same sliding distance resulted in roughnesses returning near to the initial 0.2 μm. It was hypothesized more highly loaded cases also went through initial roughening prior to smoothening back to 0.2 μm roughness within the 100 m sliding distance, and given additional sliding the more lightly loaded cases would also experience subsequent smoothening. Increasing sliding distance to 400 m, roughnesses indicated a smoothening back to 0.2 μm level during those lightly loaded tests, with friction coefficient correspondingly dropping from 1 into the 0.6–0.7 range observed in all other cases. Extended sliding to 400 m at light loading against rings of lower initial roughness also allowed a rod wear rate which increased with increased sliding distance to be observed, approaching the same rate observed against initially rough rings within the 100 m sliding distance.     

Experimental characterization of Silicon Drift Detector for X-ray spectrometry: Comparison with theoretical estimation

Reverse saturation current and the ideality factor (η) are the main parameters that affect the performance of a radiation semiconductor detector in different space environmental conditions. We have measured both of these parameters for the Silicon Drift Detector (SDD) used as a radiation detector in the X-ray spectrometry for space borne applications having the active area of 40 mm² and 109 mm² with 450 μm thick silicon. The measured reverse saturation current is compared with the theoretically estimated values using diode equation for various detector operating temperatures and shown that there is a strong dependence of reverse saturation current with ideality factor. Subsequently, using the reverse saturation current ratio method, the slope ratio for small area to the large area SDD is derived and compared with the theoretical slope ratio obtained using the measured ideality factor. It is shown that the slope ratios closely match with the diode equation of the form which has the ideality factor in both the product and exponential terms for these SDDs. The measured spectral energy resolution is ∼150 eV at 5.9 keV for both small and large area SDDs when operated at −40 °C and −65 °C respectively. The noise performance of the spectrometer is also measured in terms of Equivalent Noise Charge (ENC) for various detector operating temperatures and shown that the value of ENC in rms noise electrons is minimal for the pulse shaping time of 3.3 μs.