Diagonal in space of coordinate measuring machine verification using an optical-comb pulsed interferometer with a ball-lens target

This paper presents a new optical method of coordinate measuring machine (CMM) verification. The proposed system based on a single-mode fiber optical-comb pulsed interferometer with a ball lens of refractive index 2 employed as the target. The target can be used for absolute-length measurements in all directions. The laser source is an optical frequency comb, whose repetition rate is stabilized by a rubidium frequency standard. The measurement range is confirmed to be up to 10 m. The diagonals of a CMM are easier to verify by the proposed method than by the conventional artifact test method. The measurement uncertainty of the proposed method is also smaller than that of the conventional method because the proposed measurement system is less affected by air temperature; it achieves an uncertainty of approximately 7 μm for measuring lengths of 10 m. The experimental results show that the measurement accuracy depends on noise in the interference fringe, which arises from airflow fluctuations and mechanical vibrations.     

Verification of the positioning accuracy of industrial coordinate measuring machine using optical-comb pulsed interferometer with a rough metal ball target

An optical-comb pulsed interferometer was developed for the positioning measurements of the industrial coordinate measuring machine (CMM); a rough metal ball was used as the target of the single-mode optical fiber interferometer. The measurement system is connected through a single-mode fiber more than 100 m long. It is used to connect a laser source from the 10th floor of a building to the proposed measuring system inside a CMM room in the basement of the building. The repetition frequency of a general optical comb is transferred to 1 GHz by an optical fiber-type Fabry–Pérot etalon. Then, a compact absolute position-measuring system is realized for practical non-contact use with a high accuracy of measurement. The measurement uncertainty is approximately 0.6 μm with a confidence level of 95%.     

High-accuracy displacement metrology and control using a dual Fabry-Perot cavity with an optical frequency comb generator

A displacement metrology and control system using an optical frequency comb generator and a dual Fabry-Perot cavity is developed with sub-nm accuracy. The optical frequency comb generator has expanded the displacement measurement range and the dual cavity system has suppressed the environmental fluctuation. We evaluated the absolute uncertainty of the developed displacement measurement system to be approximately 190 pm for the displacement of 14 μm and the accurate displacement control using a phase-locked loop was demonstrated with a resolution of approximately 24 pm.     

A signal interpolation method for Fabry–Perot interferometer utilized in mechanical vibration measurement

In this investigation, a self-developed signal processing method for Fabry–Perot interferometer is proposed which can be utilized for high-speed dynamic displacement measurements, e.g. mechanical vibration measurements. The lookup table (LUT) integrated with the interference intensity equation has been employed for the interpolation processing of interference signals. With the aid of this method, the interpolation error has been reduced by 40% in comparison with that resulting from the commercial sinusoidal signal processing module. By operations of Fast Fourier Transform (FFT), the displacement measurement distribution can be converted into the frequency spectrum diagram. The interpolation resolution of the proposed interferometric displacement measurement system is about 0.1 nm. Experimental results demonstrate that this interferometer system is available for measuring frequencies till 2 kHz where its corresponding amplitude is 0.15 μm.     

A motorized 5 m tape comparator for traceable measurements of tapes and rules

A motorized 5 m tape comparator was constructed in TUBITAK UME for calibration of tapes and rules up to 5 m length in one set-up and further lengths in multiple set-ups. The system is a practical development and provides a cost effective solution for calibration of tapes in which the highest grade’s accuracy requirement in OIML R35-1 e.g. is 600 μm for 5 m length and 1100 μm for 10 m length. It is mainly composed of 6 m rail system, mechanical parts, optical units and an integrated 6 m incremental linear encoder as a reference measurement axis for traceable measurements. The rails are kinematically located on a heavy marble construction and a motorized carriage, which employs a camera for probing of the scales on the tapes, is moved along the rails during the measurement. The image of the scale taken by the camera is viewed on the monitor screen together with the running software. The operator can perform the probing process by simply moving the carriage over the measured scales (tapes or rules) using a joystick. The carriage movement is measured by the incremental linear encoder previously calibrated by a laser interferometer and the software automatically takes the measurement results from the incremental linear encoder, applies correction values previously defined and determines the length of the tapes and rules as well as deviations from nominal lengths. The estimated expanded uncertainty of the steel tape measurement is U = 54 μm in one set-up (for 5 m length) and U = 77 μm in two set-ups (for 10 m length) at the confidence level of approximately 95%. Uncertainty budget for calibration of the device itself and for calibration of the test tapes are explained in detail. The results of extensive experimental work and analysis are provided by demonstrating application of science and technology of measurement and instrumentation. Investigations for long term stability of the system are given with the reported test results for the years of 2003-2011 and participated intercomparison results to validate the device scientifically are illustrated.     

Improved machine tool linear axis calibration through continuous motion data capture

Machine tool calibration is becoming recognised as an important part of the manufacturing process. The current international standards for machine tool linear axes calibration support the use of quasi-static calibration techniques. These techniques can be time consuming but more importantly a compromise in quality due to the practical restriction on the spatial resolution of target positions on the axis under test. Continuous motion calibration techniques have the potential to dramatically increase calibration quality. Through taking several measurement values per second while the axis under test is in motion, it is possible to measure in far greater detail. Furthermore, since machine tools normally operate in dynamic mode, the calibration data can be more representative if it is captured while the machine is in motion. The drawback to measuring the axis while in motion is the potential increase in measurement uncertainty. In the following paper, different methods of continuous motion calibration are discussed. A time-based continuous motion solution is proposed as well as a novel optimisation and correlation algorithm to accurately fuse the data taken from quasi-static and continuous motion measurements. The measurement method allows for minimal quasi-static measurements to be taken while using a continuous motion measurement to enhance the calibration process with virtually no additional time constraints. The proposed method does not require any additional machine interfacing, making it a more readily accessible solution for widespread machine tool use than other techniques which require hardware links to the CNC. The result of which means a shorter calibration routine and enhanced results. The quasi-static and continuous motion measurements showed correlation to within 1 μm at the quasi-static measurement targets. An error of 13 μm was detailed on the continuous motion, but was missed using the standard test. On a larger, less accurate machine, the quasi-static and continuous motion measurements were on average within 3 μm of each other however, showed a standard deviation of 4 μm which is less than 1% of the overall error. Finally, a high frequency cyclic error was detected in the continuous motion measurement but was missed in the quasi-static measurement.     

A long-stroke 3D contact scanning probe for micro/nano coordinate measuring machine

This paper presents a long-stroke contact scanning probe with high precision and low stiffness for micro/nano coordinate measuring machines (micro/nano CMMs). The displacements of the probe tip in 3D are detected by two plane mirrors supported by an elastic mechanism, which is comprised of a tungsten stylus, a floating plate and two orthogonal Z-shaped leaf springs fixed to the outer case. A Michelson interferometer is used to detect the vertical displacement of the mirror mounted on the center of the floating plate. An autocollimator based two dimensional angle sensor is used to detect the tilt of the other plane mirror located at the end of the arm of the floating plate. The stiffness and the dynamic properties are investigated by simulation. The optimal structural parameters of the probe are obtained based on the force-motion model and the constrained conditions of stiffness, measurement range and horizontal size. The results of the performance tests show that the probe has a contact force gradient within 0.5 mN/μm, a measuring range of (±20 μm), (±20 μm), and 20 μm, respectively, in X, Y and Z directions, and a measurement standard deviation of 30 nm. The feasibility of the probe has preliminarily been verified by testing the curved surface of a convex lens.     

Optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope

This paper describes the optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope (TDFM). The nano-precision stage is required to move a specimen dish within a horizontal region of 1 μm × 1 μm and with a resolution of 0.3 nm. The design objective was to maximise positional accuracy during high speed actuation. This was achieved by minimising out-of-plane distortions and vibrations during actuation. Optimal performance was achieved through maximising out-of-plane stiffness through shape and material selection as well optimisation of the anchoring system. Several shape parameters were optimised including the shape of flexural beams and the shape of the dish holder. Physical prototype testing was an essential part of the design process to confirm the accuracy of modelling and also to reveal issues with manufacturing tolerances. An overall resonant frequency of 6 kHz was achieved allowing for a closed loop-control frequency of 1.73 kHz for precise horizontal motion control. This resonance represented a 12-fold increase from the original 500 Hz of a commercially available positioning stage. Experimental maximum out-of-plane distortions below the first resonance frequency were reduced from 0.3 μm for the first prototype to less than 0.05 μm for the final practical prototype.     

International comparison of volume measurement for a 1 kg silicon sphere between KRISS and NMIJ

1 kg single-crystal silicon spheres are presently used as primary density standards in many countries. The absolute density of the spheres is determined from the measurements of their mass and volume in conformity with the definitions of the SI base units. Since the mass of the spheres is almost 1 kg, a mass comparison with the prototype of the kilogram can be performed with very low uncertainty. Absolute volume measurements for the spheres therefore have a crucial role in realizing a reliable density traceability system. To confirm the reliability of the volume measurement, the volume of a silicon sphere was measured independently using optical interferometers at the Korea Research Institute of Standards and Science (KRISS, Korea) and the National Metrology Institute of Japan (NMIJ, Japan). An optical interferometer with an etalon scanning system was used at KRISS. On the other hand, an optical interferometer with an optical frequency scanning system was used at NMIJ. The volume was measured at 20 °C and 0 Pa, and the results are in agreement with each other within their uncertainties. Details of the two interferometers and the comparison results are described.     

Application of Monte Carlo simulation for estimation of uncertainty of four-point roundness measurements of rolls

Large-scale rotors in the paper and steel industry are called rolls. Rolls are reground at regular intervals and roundness measurements are made throughout the machining process. Measurement systems for roundness and diameter variation of large rolls (diameter <2000 mm) are available on the market, and generally use two to four sensors and a roundness measurement algorithm. These methods are intended to separate roundness of the rotor from its movement. The hybrid four-point method has improved accuracy, even for harmonic component amplitudes. For reliable measurement results, every measurement should be traceable with an estimation of measurement uncertainty. In this paper, the Monte-Carlo method is used for uncertainty evaluation of the harmonic components of the measured roundness profile under typical industrial conditions. According to the evaluation, the standard uncertainties for the harmonic amplitudes with the hybrid method are below 0.5 μm for the even harmonics and from 1.5 μm to 2.5 μm for the odd harmonics, when the standard uncertainty for the four probes is 0.3 μm each. The standard uncertainty for roundness deviation is 3.3 μm.     

Non-contact temperature measurement of silicon wafers based on the combined use of transmittance and radiance

We propose a non-contact temperature measurement method that combines the temperature dependence of transmittance below 600 °C and radiation thermometry above 600 °C. The combined method uses a polarization technique and the Brewster angle between air and a dielectric film such as SiO₂ or Si₃N₄ grown on silicon wafers. A prominent feature of this method is that both measurements of transmittance and radiance are performed with the same geometrical arrangement.For a semitransparent wafer, the measurement of p-polarized transmittance at the wavelengths of 1.1, 1.2 and 1.3 μm enables temperature measurement in the range from room temperature to 600 °C. For an opaque wafer above 600 °C, the p-polarized radiation thermometry at the wavelength of 4.5 μm allows the temperature measurement without the emissivity problem. The combined method with the use of transmittance and radiance is valid in the entire temperature range irrespective of variations of film thickness and resistivity.     

Large-scale accelerator alignment using an inclinometer

A precise inclinometer (Talyvel 4) was adopted for evaluating aligning straightness of the first 71 m of the KEK electron/positron injector linear accelerator (linac). The straightness could be evaluated with a standard deviation of less than 49 μm. It is in good agreement with those obtained using a conventional alignment telescope and our laser-based alignment system.Error estimation based on the rules of error propagation shows that shape evaluation with a standard deviation of 0.3 mm for a distance of 500 m can be achieved using the proposed method. It indicates that this method is suitable for evaluating straightness of several hundred meters of linacs with sub-millimeter of accuracy.     

Study on the evaluation of cylinder’s global sizes

In ISO 14405-1, the global sizes, such as least-squares diameter, minimum circumscribed diameter and maximum inscribed diameter are defined. The diameters above can be measured by using cylindrical coordinate measuring method like the circular section measuring method of cylindricity error. The determination method of the least-squares diameter was firstly given based on the cylindrical measuring system, and the optimization models of the minimum circumscribed diameter and the maximum inscribed diameter were built, respectively. The corresponding objective functions were unified as “minimax” expressions. For the four axis parameters of the cylinder with the minimum circumscribed diameter or the maximum inscribed diameter, the searching ranges of cylinder’s axis parameters for their optimal solutions were defined numerically. Thereafter, the genetic, steepest decent and BFGS-0.618 algorithms were introduced, and the optimization evaluation algorithms of two kinds of diameters mentioned above were given. Based on many cylinders’ profiles obtained by the circular section measuring method on a measuring instrument of cylinder’s global sizes which was developed by Zhongyuan University of Technology, Zhengzhou, China. The accuracy, efficiency and suitability of three optimization algorithms were investigated through the evaluation of a lot of the minimum circumscribed diameters and the maximum inscribed diameters. The measurement uncertainty of the global sizes for the cylindrical specimen was analyzed, and the measurement uncertainties of the sizes in the radial and z directions are ±0.95 μm and ±0.5 μm, respectively. The total measurement uncertainties of the global sizes of the cylindrical specimens with the specifications of ϕ10 × 120 mm and ϕ100 × 300 mm are ±3.8 μm and ±5.7 μm, respectively. The investigation results showed that for the evaluation of the globe sizes, any one of three algorithms above is not absolutely prior to the other two algorithms while considering both evaluation accuracy and efficiency, and the difference of their evaluation results do not exceed 0.5 μm. On the other hand, many points between the maximum value and the least value do not affect the evaluation results in optimization process. For improving the evaluation efficiency, by de-selecting those points while considering the characteristic parameter was also studied based on the statistic method and experiment. Coefficient t should be less than 0.3 to ensure the evaluation accuracy. This research may be useful for developing the next generation measurement instrument for the global sizes and the way forward for the digital manufacturing.     

Evaluation on 3D micro-ground profile accuracy of micro-pyramid-structured Si surface using an adaptive-orientation WLI measurement

According to the aperture of the objectives, surfaces with steep topographies greater than approximate 25° are difficult or unable to measure with white light interferometry. Hence, an adaptive-orientation measurement is proposed by adjusting the incidence angle from 51° to 21°. In this study, a micro-grinding with #3000 diamond wheel V-tip was employed to fabricate the micro-pyramid-structured Si surface with 142 μm in depth and 38 nm in surface roughness. The objective is to evaluate the micro-profile accuracy of micro-ground Si surface. First, the four micro-ground surfaces of micro-pyramid-structured surface were measured along the adaptive orientation with an incidence angle, respectively; then iterative closest point (ICP) matching was used to reconstruct the whole micro-ground surface with four adaptive-orientation measured point clouds; finally, 3D reconstruction error and characterized profile error were investigated. It is shown that the ICP matching with denoising and finishing is valid to register four adaptive-orientation measured point clouds for reconstructing an integrated micro-ground surface. Moreover, a decrease in incidence angle to measured surfaces leads to a decrease in 3D reconstruction error, an increase in valid top-topographic point number and a decrease in characterized profile error. It is confirmed that the adaptive-orientation measurement with 21° incidence angle may enhance 3D reconstruction accuracy by about 35%, valid top-topographic point number by about 3 times and characterized profile accuracy by about 38% against the traditional measurement, respectively. The micro-ground form error of 5.5 μm and the characterized profile error of 6.0 μm may be achieved, respectively, thus the micro-grinding is valid for the precision micro-fabrication of micro-structured surface.     

Straightness evaluation using inclinometers with a pair of offset bars

To evaluate the straightness of large objects, the use of an inclinometer is advantageous because it requires neither straight shape references nor transferring mechanisms. Herein, we consider adopting it for precise (with greater accuracy than 1 mm) evaluation of the straightness of linear particle accelerators (linacs) that are several hundred meters long or longer. In this study, the straightness evaluation of a 206-m-long part of the KEK injector linac was demonstrated using inclinometers with a pair of cantilevers called offset bars. The offset bars were adopted to extend the evaluation length by avoiding obstacles that block the evaluation path. Errors caused by the offset bars can be eliminated by reversal measurement considering the slope angles of the offset bars. The derived straightness corresponded with those derived by an alignment telescope and a laser-based alignment system within several millimeters and partly within several hundred micrometers. The reproducibility of slope angles for an arbitrary measurement point was 15 μrad at standard deviation. This corresponds to a standard deviation of 0.47 mm for straightness, with a total evaluation length of 500 m and measurement intervals of 2 m. The results indicate that our newly devised method is applicable for evaluating the straightness.     

Miniaturized liquid film sensor (MLFS) for two phase flow measurements in square microchannels with high spatial resolution

Two miniaturized liquid film sensors (MLFS) based on electrical conductance measurement have been developed and tested. The sensors are non-intrusive and produced with materials and technologies fully compatible and integrable with standard microfluidics. They consist of a line of 20 electrodes with a purpose-designed shape, flush against the wall, covering a total length of 5.00 and 6.68 mm. The governing electronics achieve 10 kHz of time resolution. The electrode spacing of the two sensors is 230 μm and 330 μm, which allows measurements of liquid films up to 150 μm and 400 μm for sensors MLFS_A and MLFS_B, respectively. The sensor characteristics were obtained by imposing static liquid films of known thickness on top of the actual sensor. Further dynamic measurements of concurrent air-water flow in a horizontal microchannel were performed. The line of electrodes is placed across the flow direction with an angle of 3.53° from the direction of flow, allowing for a spatial resolution perpendicular to the flow of 14.2 μm for sensor MLFS_A and 20.5 μm for sensor MLFS_B. The high time and spatial resolution allows for fast and accurate detection of the presence of bubbles, and even measurement of film thickness and bubble velocity. Further information, such as the bubble shape, can be gathered based on the shape of the liquid layer underneath the bubble, which is particularly important for heat transfer studies in microchannels.     

Magnet alignment on a common girder: Development of a length artefact for measurement accuracy improvement

The tolerances for the alignment of the magnets on the girders of the proposed particle accelerator of the Brazilian Synchrotron Light Laboratory (LNLS), Sirius, are as small as 40 μm for translations and 0.3 mrad for rotations. The functional axis of the magnets is measured by the vibrating wire technique, which employs conductive wires of diameters of approx. 0.1 mm. Since the alignment has to be performed targeting these magnetic axes, rather than their geometric centrelines, non-contact measuring sensors mounted on a coordinate measuring machine have been chosen to measure the relative deviations between magnets. To better the measurement accuracy for that specific measuring task, to allow interim checks on multiple coordinate measuring systems, and to provide effective traceability to the SI unit of length, a multipurpose geometrical artefact has been devised. The reasoning behind this development and the first measurement results are described in this paper.     

Phase-measuring algorithm to suppress inner reflection of transparent parallel plate in wavelength tuning Fizeau interferometer

Optical thickness variation is a fundamental characteristic of transparent optical devices. When measuring this variation by using a wavelength-tuning Fizeau interferometer, the measurement accuracy depends on the phase-shifting algorithm being used. Therefore, the phase-shifting algorithm should compensate for any errors incurred during the measurement, including the phase-shift error, coupling errors, and bias modulation of intensity. Among these errors, however, the coupling errors between the higher harmonics resulting from the inner reflections of the transparent plate and phase-shift error have not previously been considered. This paper presents a derivation of a 19-sample phase-shifting algorithm that can compensate for the miscalibration and 1st-order nonlinearity of the phase shift, coupling errors, and bias modulation of intensity during wavelength tuning. The characteristics of the 19-sample algorithm were estimated with respect to the Fourier representation in the frequency domain. The phase error of measurements performed using the 19-sample algorithm was discussed and compared with that of measurements obtained using other conventional phase-shifting algorithms. Finally, the optical thickness variation of a fused silica parallel plate was obtained using a wavelength-tuning Fizeau interferometer and the 19-sample algorithm. The measurement accuracy was discussed by comparing the ripples in the crosstalk noise with those calculated using other phase-shifting algorithms. The experimental results indicated that the optical thickness variation measurement accuracy for the fused silica plate was approximately 2 nm.     

Dynamic microwaviness measurements of super smooth disk media used in magnetic hard disk drives

Recent technological advances in magnetic storage suggest the feasibility of extremely high-density magnetic recording up to 1 terabit per square inch (1 Tbit=10¹² bits) areal densities. Modelling indicates that approximately 3 nanometers (nm) of physical head-disk spacing is required for such high recording densities. When the recording slider is flying at such ultra low spacing over a high-speed rotating disk, it is experiencing disturbances from various different sources and of a wide frequency range. These disturbances may cause the recording slider to vibrate significantly, a condition that is known as fly height modulation (FHM), which may result in data loss. A significant source of excitation is from the surface irregularities of the rotating disk and is termed dynamic microwaviness. The term dynamic microwaviness has been introduced recently to differentiate from regular topographical features that are measured statically. In this paper, the procedure for making reliable dynamic microwaviness measurements of disk media used in hard disk drive (HDD) systems is described. Furthermore, such measurements are performed on different super smooth magnetic disks that are intended for extremely high recording densities using non-contact laser vibrometry. The root-cause of the dynamic microwaviness is investigated by measuring disk topographical features under static conditions and the interaction with system dynamics. It is found that dynamic microwaviness is primarily due to topographical features of spatial wavelengths ranging from 58.8 to 250 μm, and secondarily due to system dynamic effects.     

Measurement of highly reflective surface shape using wavelength tuning Fizeau interferometer and polynomial window function

In this study, a 5N − 4 phase shifting algorithm comprising a polynomial window function and a discrete Fourier transform is developed to measure interferometrically the surface shape of a silicon wafer, with suppression of the coupling errors between the higher harmonics and the phase shift error. A new polynomial window function is derived on the basis of the characteristic polynomial theory by locating five multiple roots on the characteristic diagram. The characteristics of the 5N − 4 algorithm are estimated with respect to the Fourier representation in the frequency domain. The phase error of the measurements performed using the 5N − 4 algorithm is discussed and compared with those of measurements obtained using other conventional phase shifting algorithms. Finally, the surface shape of a 4-in. silicon wafer is measured using the 5N − 4 algorithm and a wavelength tuning Fizeau interferometer. The accuracy of the measurement is discussed by comparing the amplitudes of the crosstalk noise calculated by other algorithms. The uncertainty of the entire measurement was 34 nm, better than that of any other conventional phase shifting algorithms.