基于LSTM的矩形纳米光栅AFM图像复原方法

原子力显微镜(AFM)利用探针与待测物之间的交互作用力进行成像,通过获取矩形纳米光栅计量标准器具的高分辨率成像得到相关的几何量参数并进行标定,实现从标准计量器具到工作计量器具的量值传递。在AFM扫描过程中,由于针尖的影响作用,使得扫描所获图像是探针和样品共同作用的结果,而不是样品形貌的真实描述。针对这一现象,本文提出了一种基于长短期记忆网络(LSTM)的AFM图像复原方法,该方法对通过膨胀法获得的仿真图像各扫描行进行训练,进而获得适用于矩形纳米光栅AFM图像复原模型。实验结果表明,针对线宽20 nm,高40 nm的矩形纳米光栅,经过该方法复原后光栅线宽的相对误差为7.40%,相较于传统的复原方法进一步提高了测量准确度。     

用于并行SPM的图像合成技术研究

介绍一种针对并行扫描探针显微镜系统的图像合成算法。利用单探针原子力显微镜(AFM)系统模拟多探针扫描探针显微镜(SPM)并行扫描的图像特征。在图像处理上,将中值滤波器及各种边缘检测算法与成像系统集成在一起,以提高成像质量;同时,依靠原理简单并易于实现的标准化协方差相关法实现相邻探针扫描图像的拼接,采用加权合成算法进行图像的自然融合。实验证明,该算法高效、高精度,合成后的图像与原图相似度达到96%,能够满足并行SPM系统的成像要求。     

基于精确探针模型的AFM图像重构研究

原子力显微镜技术已在纳米成像中得到了普遍应用.但实验表明,AFM图像在水平方向分辨率较低,其中探针针尖形貌是影响扫描图像分辨率的关键因素之一.为了提高AFM扫描图像的分辨率,改善成像质量,一种可行的方法是通过建立探针模型后,重构扫描图像.在已有的探针建模方法中,普遍采用盲建模算法.针对目前盲建模算法中降噪阈值难以优化问题,提出了一种降噪阈值最优估计新方法.该方法可以使盲建模算法更准确地建立扫描方向上的探针形貌轮廓,进而完成3D探针模型.通过应用AFM探针扫描多空铝和标准栅格实验,介绍了探针针尖形貌精确建模的方法.然后使用数学形态学的腐蚀运算对标准栅格的AFM成像进行了重构,验证了上述方法的有效性.实验结果证明,重构后的图像中降低了探针针尖形貌的失真影响,可以显著改善扫描探针显微镜成像的水平分辨率.     

基于数学形态学方法的AFM探针建模研究

AFM扫描图像可被认为是探针针尖的形貌和扫描样品表面形貌的数学形态学卷积结果,需要用反卷积的方法排除扫描图像中探针形貌引起的失真影响。本文在已有基于数学形态学的探针盲建模算法基础上,提出了一种可快速实现特征点优化提取的方法,同时提出了一种可降低最优降噪阈值估计复杂性的基于临界阈值搜索新方法。最后给出了仿真与CNT扫描图像的重构实验结果。实验表明,本文介绍的方法提高了探针建模的计算速度和建模精度,可以对AFM成像质量进行有效的失真修正和改善。     

湿度对液桥中毛细力和能量耗散的影响

原子力显微镜(AFM)在扫描图像过程中会产生赝像的重要因素是:在探针和基底表面接触过程中,两者之间会生成一种带有黏附力的结构,称之为液桥。在大气环境下,不同的湿度条件能够影响液桥的形成和断裂,而液桥的存在会使得原子力显微镜在扫描成像过程中,悬臂梁自由端的受力和能量产生变化,最终干扰扫描成像的质量。研究不同湿度对于针尖和基底之间的毛细力F_(max)、能量耗散η的影响,选择最佳的成像条件,可以提高AFM工作的准确性和可靠性。     

快速大面积测量用原子力显微镜扫描速度对测量结果的影响

构建了一种可快速大面积测量光栅表面微结构的原子力显微镜(AFM)系统,研究了不同扫描模式下扫描速度对测量结果的影响。分别测量了微悬臂探针在恒高模式与恒力模式下的频谱,获得了这两种模式下微悬臂探针的有效带宽。基于恒高模式与恒力模式,在不同扫描速度下分别测量了光栅微结构表面上的一条直线与一个圆周,进而分析了扫描速度对测量结果的影响。基于该AFM系统,采用恒高模式下不失真扫描速度对光栅微结构表面进行了快速、大面积三维形貌测量实验。实验结果表明:测量光栅微结构表面上直径为4.0mm的圆形区域所用时间仅为40s。当扫描速度不超过微悬臂探针有效带宽所对应的速度时,所构建的AFM系统可无失真地实现微结构表面的快速、大面积测量。     

基于反投影的MIT动态图像重建方法研究

磁感应断层成像(magnetic induction tomography,MIT)是一种无创、非接触的新型医学成像技术,图像重建算法是实现MIT快速、精确成像的关键.提出一种改进的反投影图像重建算法,首先根据成像区域的磁场分布,由磁力线确定反投影路径,降低了直线反投影用于磁场成像的定位误差;其次根据MIT电磁关系推导,构建了边界检测数据的修正模型,据此对边界相位差数据进行修正处理,进一步提高了重建图像定位准确性;最后分别对成像区域内扰动目标电导率大小变化及位置变化2种情况,构建了序列重建图像,对该图像序列联合分析获取纵向阻抗变化信息,反映了成像体随时间变化的动态信息.实验结果表明该算法具有重建速度快、定位准确的特性,能够准确反映成像区域内部电导率变化,结合序列图像联合分析实现MIT动态成像.     

光学原子力显微镜中的蒙特卡罗方法

扫描探针显微镜(Scanning probe microscopy,SPM)是显微镜的一个分支,它利用物理探针扫描标本形成样本表面图像.而原子力显微镜(Atomic force microscopy,AFM)是SPM中一种多功能的表面成像和测量工具,对导电、不导电、真空中、空气中或流体中的各种样本均可测量.原子力显微镜最面临的最大挑战之一是评估其在表面测量过程中所伴随的不确定度.本研究通过XYZ Phase的标定,对一台光学原子力显微镜进行了校准.该方法旨在克服在评估一些无法实验确定的不确定部件时遇到的困难,如尖端表面相互作用力和尖端几何.运用蒙特卡罗方法来确定根据相关容差和概率密度函数(PDFs)随机绘制参数而引起的相关不确定度.整个过程遵循《测量不确定度表示指南》(GUM)补编2.经本方法验证,原子力显微镜的评估不确定度为10nm左右.     

光学原子力显微镜中的蒙特卡罗方法（英文）

扫描探针显微镜(Scanning probe microscopy, SPM)是显微镜的一个分支,它利用物理探针扫描标本形成样本表面图像。而原子力显微镜(Atomic force microscopy, AFM)是SPM中一种多功能的表面成像和测量工具,对导电、不导电、真空中、空气中或流体中的各种样本均可测量。原子力显微镜最面临的最大挑战之一是评估其在表面测量过程中所伴随的不确定度。本研究通过XYZ Phase的标定,对一台光学原子力显微镜进行了校准。该方法旨在克服在评估一些无法实验确定的不确定部件时遇到的困难,如尖端表面相互作用力和尖端几何。运用蒙特卡罗方法来确定根据相关容差和概率密度函数(PDFs)随机绘制参数而引起的相关不确定度。整个过程遵循《测量不确定度表示指南》(GUM)补编2。经本方法验证,原子力显微镜的评估不确定度为10 nm左右。     

基于平板扫描器的新型AFM系统

研制了一种基于平板扫描器的新型原子力显微镜(AFM)系统。该系统创新地把二维平板扫描器和一维反馈控制器相结合,有效地克服了传统扫描器Z向反馈控制与XY扫描平面之间的非线性交叉耦合误差,同时保证了大范围扫描时检测光路的稳定性。利用该系统与传统AFM作了氧化铝薄膜和光栅对比扫描实验,结果表明这种AFM系统能够获得无扭曲、规则的理想图像。     

Atomic force microscope tip cleaning by using gratings as micro‐washboards

The sharpness of atomic force microscope (AFM) tips is essential for acquiring high quality AFM images. However, AFM tips would easily get contaminated during scanning and storage at ambient condition, which influences image resolution and causes image distortion. Replacing the probe frequently is a solution, but uneconomical. To solve this problem, several tip cleaning methods have been proposed but there is space for further improvement. Therefore, this article developed a method of tip cleaning by using a one‐dimensional grating (600 lines/mm) as a micro‐washboard to “wash” contaminated tips. We demonstrate that the contaminants can be scrubbed away by rapidly scanning such micro‐washboard against the tip in the aids of Z‐dithering (10–20 Hz) exerted on the washboard. This method is highly efficient and proved to be superior to traditional ones. Experiments show that AFM images acquired with “washed” tips have higher resolution and less distortion compared with images acquired using contaminated tips, even comparable to those scanned by new ones. Microsc. Res. Tech. 76:1131–1134, 2013. © 2013 Wiley Periodicals, Inc.     

Atomic Friction Modulation on the Reconstructed Au(111) Surface

Friction between a nanoscale tip and a reconstructed Au(111) surface is investigated both by atomic force microscopy (AFM) and molecular statics calculations. Lateral force AFM images exhibit atomic lattice stick–slip behavior with a superstructure corresponding to the herringbone reconstruction pattern. However, the superstructure contrast is not primarily due to variations in the local frictional dissipation (which corresponds to the local width of the friction loop). Rather, the contrast occurs primarily because the local centerline position of the friction loop is periodically shifted from its usual value of zero. Qualitatively, similar behavior is reproduced in atomistic simulations of an AFM tip sliding on the reconstructed Au(111) substrate. In both simulations and experiments, this centerline modulation effect is not observed on unreconstructed surfaces. Similarly, using a topographically flat surface as a hypothetical control system, the simulations show that the centerline modulation is not caused by variations in the reconstructed surface’s topography. Rather, we attribute it to the long-range variation of the local average value of the tip-sample interaction potential that arises from the surface reconstruction. In other words, surface atoms located at unfavorable sites, i.e., in the transition between face-centered-cubic (FCC) and hexagonal-close-packed (HCP) regions, have a higher surface free energy. This leads to a varying conservative force which locally shifts the centerline position of the friction force. This demonstrates that stick–slip behavior in AFM can serve as a rather sensitive probe of the local energetics of surface atoms, with an attainable lateral spatial resolution of a few nanometers.     

Reconstruction of a scanned topographic image distorted by the creep effect of a Z scanner in atomic force microscopy

We analyzed the illusory slopes of scanned images caused by the creep of a Z scanner in an atomic force microscope (AFM) operated in constant-force mode. A method to reconstruct a real topographic image using two scanned images was also developed. In atomic force microscopy, scanned images are distorted by undesirable effects such as creep, hysteresis of the Z scanner, and sample tilt. In contrast to other undesirable effects, the illusory slope that appears in the slow scanning direction of an AFM scan is highly related to the creep effect of the Z scanner. In the controller for a Z scanner, a position-sensitive detector is utilized to maintain a user-defined set-point or force between a tip and a sample surface. This serves to eliminate undesirable effects. The position-sensitive detector that detects the deflection of the cantilever is used to precisely measure the topography of a sample. In the conventional constant-force mode of an atomic force microscope, the amplitude of a control signal is used to construct a scanned image. However, the control signal contains not only the topography data of the sample, but also undesirable effects. Consequently, the scanned image includes the illusory slope due to the creep effect of the Z scanner. In an automatic scanning process, which requires fast scanning and high repeatability, an atomic force microscope must scan the sample surface immediately after a fast approach operation has been completed. As such, the scanned image is badly distorted by a rapid change in the early stages of the creep effect. In this paper, a new method to obtain the tilt angle of a sample and the creep factor of the Z scanner using only two scanned images with no special tools is proposed. The two scanned images can be obtained by scanning the same area of a sample in two different slow scanning directions. We can then reconstruct a real topographic image based on the scanned image, in which both the creep effect of the Z scanner and the slope effect of the sample have been eliminated. The slope effect of the sample should be eliminated so as to avoid further distortion after removal of the creep effect. The creep effect can be removed from the scanned image using the proposed method, and a real topographic image can subsequently be efficiently reconstructed.     

数字全息相位再现误差分析及抑制技术

为实现基于数字全息的三维轮廓测量,本文探讨了菲涅耳近似算法实现数字全息相位再现的误差及抑制技术。首先理论分析了基于菲涅耳近似算法实现全息相位再现所包含的误差项,然后计算机模拟了数字离轴全息图的记录和相位再现结果,在此基础,模拟分析了离焦误差、数字再现光波误差及样本深度对相位再现的影响。针对记录参考光波和光学器件所引入的相位误差及其不定性,本文提出利用相位相减全息图处理方法加以消除,并给出了实验结果加以验证。模拟分析结果表明,菲涅耳近似算法误差、离焦误差、数字再现光波倾斜误差、解包裹错误对相位再现结果都有不同程度的影响。若获得高精度的再现结果,对记录过程、再现参数选择和处理方法都要进行严格控制或适当的选取。     

Imaging tip formation in single-mode optical fibres

The formation of probe tips is a crucial step in all forms of scanning probe microscopy (SPM). In this work single-mode optical fibres are chemically etched in a variable temperature bath of etchant solution (HF acid buffered with ammonium fluoride) to produce tips for optical SPM. Tip evolution is monitored by prematurely truncating the etching process and imaging the tip end-structure using atomic force microscopy (AFM). In the case of a visible regime single-mode fibre the AFM images show a remarkable ring structure in the central cladding region and a tip structure in the core with a central depression; this serves to demonstrate the efficacy of chemical etching for converting compositional variation to three-dimensional topography. In the case of a standard, single-mode optical communications fibre the (projected) tip cone angle is assessed from AFM images in the early stages of tip formation. Values of the cone angle thus determined, for different etch conditions, are compared to those predicted by a model in which the independently determined core and cladding etch rates, and core diameter are the sole determinants of the final tip geometry. The model was devised in the context of etching multi-mode fibres and is shown to be valid here for single-mode fibres within the range of experimental accuracy and etch conditions examined.     

Blind estimation of general tip shape in AFM imaging

The use of flared tip and bi-directional servo control in some recent atomic force microscopes (AFM) has made it possible for these advanced AFMs to image structures of general shapes with undercut surfaces. AFM images are distorted representations of sample surfaces due to the dilation produced by the finite size of the tip. It is necessary to obtain the tip shape in order to correct such tip distortion. This paper presents a noise-tolerant approach that can for the first time estimate a general 3-dimensional (3D) tip shape from its scanned image in such AFMs. It extends an existing blind tip estimation method. With the samples, images, and tips described by dexels, a representation that can describe general 3D shapes, the new approach can estimate general tip shapes, including reentrant features such as undercut lines.     

A simple method for AFM tip characterization by polystyrene spheres

An AFM image would not be the true topography of a surface because of the limitation of a finite size of the tip. The true topography of the surface can be deduced if we can know the tip shape. In this paper a simple method has been established to determine the profile of an AFM tip. A geometrical model for the tip and a spherical object has been proposed to show the procedure for deducing the tip shape from AFM images. Isolated spheres and closely packed spheres with different diameters have been observed to confirm the tip shape by this method. It is a non-destructive method to determine the tip shape and the results can be used for future reconstruction of an AFM image.     

基于全变分法重建光声图像

针对光声成像在实际应用中涉及的采样数据不足,提出了一种基于全变分法的光声图像重建方法。通过计算重建图像的模拟信号与实际信号的残差来更新图像,进行迭代以获取重建图像。在迭代重建的过程中引入压缩传感理论中的全变分法,通过梯度下降法得到全变分最小的图像。通过数值仿真,模拟了在不足采样情况下的图像重建。结果表明,全变分重建法的重建效果比滤波反投影法、反卷积重建算法及代数重建算法等3种方法更好。在30个采样点的情况下,重建图像的峰值信噪比值比上述3种算法的重建结果分别高出30.98,22.09和8.35 dB。另外,仿体实验结果也表明该方法能更有效地避免噪声的干扰。     

联合光度立体视觉和图像校正的磨粒三维形貌重建

分析铁谱技术在机械装备磨损状态检测中发挥了重要作用,但其仅能提供磨粒二维图像,导致磨粒形貌信息不足。为实现磨粒三维形貌的精确重建,联合光度立体视觉和图像校正,为精确重建磨粒的三维形貌,联合光度立体视觉和图像。该方法首先采用大津阈值法由全光源图像识别磨粒与背景区域;然后为消除LED发光强度差异对磨粒形貌重建的影响,结合平面形状和朗伯反射模型确定背景区域的理想成像亮度,并校正各光度图像序列的亮度;最后根据光度立体视觉方法,由校正后光度图像序列重建磨粒的三维形貌。以不同类型的磨粒为测试样本,将所提出的方法的重建结果与激光共聚焦显微镜的测量结果进行对比。结果表明：重建磨粒的形貌参数误差小于15%,表明提出的方法能够精确重建磨粒的三维形貌。