共查询到20条相似文献,搜索用时 109 毫秒
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在记录全息图时,要求由物光和参考光所形成的干涉场在曝光期间保持稳定。这一要求在采用连续激光器时由曝光装置的刚性来保证,而采用脉冲激光器则是通过缩短曝光时间来满足这一要求。如果我们只有小功率的连续激光器,而记录材料的感光性能又很差(对于这种材料来说,相干定律有时不起作用),那么,就只得采用较细的激光束,而且,也只能将小物体记录在不大的全息片上。在重铬酸盐明胶层上记录全息图时就会发生这种情况。重铬酸盐明胶对于位相全息图光刻胶是一种极好的材料。而采用光刻胶则提供了用机械压制法复制浮雕型全息图的可能性。 相似文献
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本文介绍复制镍版表面扫描电镜观察的结果,记录有全息图的光刻胶金属化的方法是影响全息图复制质量的关系。从复制效果看,化学喷镀镍比化学喷镀银好。 相似文献
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衍射光学元件的扫描刻蚀深度在线检测 总被引:2,自引:0,他引:2
基于楔形光学平板的等厚干涉原理,提出了一种透射衍射光学元件扫描离子束刻蚀深度的在线检测方法,用一块与被刻蚀光学元件材料相同的楔形薄片作为陪片,在刻蚀过程中将其遮档一半,利用陪片等厚条纹的错位去测量其刻蚀深度,从而间接检测出被刻蚀光学元件的刻蚀深度.在KZ-400大型离子束刻蚀装置上建立了这种在线检测装置.多次实验表明,在线检测结果同台阶仪的测量结果基本吻合,二者相差不超过10 nm.本检测方法能够可靠、准确地用来确定刻蚀终点,已经成功应用于位相型Ronchi光栅等大口径位相衍射光学元件的刻蚀制作.本方法还可以用于对其他透明材料的微结构进行扫描刻蚀深度在线检测. 相似文献
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以AZl500光刻胶为例,将氧气作为工作气体的反应离子束刻蚀工艺用于光刻胶图形的灰化处理,以去除经紫外曝光-显影后光栅中的残余光刻胶。研究结果表明灰化速率有随束流密度呈线性增加的趋势。经过反应离子束刻蚀后,光栅槽底残余光刻胶被去除干净,同时线条的宽度变细,在一定程度上达到修正光刻胶光栅线条占空比的目的。用原子力显微镜检测,无光刻胶的K9基片表面在灰化工艺前后其粗糙度无明显变化。该工艺具有良好的可控性,解决了在厚基片上制作大口径衍射光学元件时残余光刻胶的去除问题。 相似文献
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镀铬基片全息光栅光刻胶掩模槽形参量光谱检测方法 总被引:7,自引:1,他引:7
为了检测全息光栅掩模槽形,运用严格耦合波理论(RCWT)分析镀铬基片光栅光刻胶掩模反射0级衍射效率光谱曲线与槽形参量的关系。测量了400~700 nm波长范围内60°入射角条件下的镀铬基片全息光栅光刻胶掩模反射0级衍射效率光谱曲线。将实验曲线与不同槽形参数对应理论曲线相减、求标准差进行匹配,标准差最小者为匹配结果,从而找到被测掩模的槽深和占宽比(光栅齿宽占光栅周期的百分比)。结果表明,该方法图形匹配速度快,误差容限大,匹配结果与电镜结果相符。对于要求同时检测矩形或接近矩形槽形的全息光刻胶光栅掩模的槽深和占宽比,该方法完全适用。 相似文献
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Easy-to-prepare assembly array of Tungsten microelectrodes 总被引:2,自引:0,他引:2
Takahashi H Suzurikawa J Nakao M Mase F Kaga K 《IEEE transactions on bio-medical engineering》2005,52(5):952-956
This paper provides a detailed process flow for fabricating an easy-to-prepare, inexpensive, dense array of tungsten microelectrodes. We designed the process flow to minimize routine tasks by separating an initial preparation of a master mold from a routine preparation of substrate replication, array assembly and tip processing. Sandblast processing first produced a glass mold with a pattern of a series of protruding lines at a requested interval of a few hundred micrometers. Copying the groove pattern onto polystyrene mass-produced a replica substrate. Tungsten probes were then aligned on the substrate, and the tips of probes were finely processed in the block. 相似文献
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使用光致抗蚀剂的全息干涉曝光、显影方法在GaAs(100)面衬底上形成光致抗蚀剂光栅图形.采用选择化学腐蚀将光致抗蚀剂光栅浮雕图形转换到GaAs(100)面衬底上.已成功地在GaAs(100)面衬底上制作了周期为0.33微米的光栅皱折.在GaAs(100)面上的光栅皱折具有良好的V-形沟槽轮廓. 相似文献
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Shimizu J. Inomoto Y. Kida N. Terakado T. Suzuki A. 《Photonics Technology Letters, IEEE》1990,2(10):721-723
The etched back planar process utilizes a nonselective reactive ion beam etching (RIBE) technique both for semiconductor layers and for photoresist. Application of the technique to the fabrication of a planar InP-InGaAs embedded p-i-n photodiode is discussed. The groove depth on the wafer was reduced from 5.3 μ to 0.6 μm, and the wafer was nearly planarized. Estimates based on photoluminescence intensity variation and the characteristics of the fabricated p-i-n photodiode indicate that little damage was incurred during the process. These results indicate that fabrication of planar OEICs by means of this process is feasible 相似文献
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Davidson G.W. Wong F. Cumming I. 《Geoscience and Remote Sensing, IEEE Transactions on》1996,34(2):471-478
The chirp scaling (CS) SAR processing algorithm uses the linear FM property of the transmitted pulses to provide accurate range cell migration correction. However, when the transmitted pulse is not linear FM, or if the FM rate is not known exactly, processing errors due to chirp scaling will result. This paper presents the resulting processing error in the CS algorithm, given pulse phase errors that exceed those expected in SAR systems. The registration and phase error that result in chirp scaling are negligible for typical or stable pulse phase errors, or can be avoided if phase modulation coefficients are estimated from the replica. A fast Fourier transformed pulse replica is sufficient to form the range matched filter in the CS algorithm, giving slightly better range resolution than the range/Doppler (R/D) algorithm 相似文献