共查询到17条相似文献,搜索用时 187 毫秒
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应用基于表面硅、体硅微电子工艺的混合微加工技术,制作了新型2×2扭转微镜光开关阵列,并研究了其在外加静电场和交变电场中的机电特性.当该光开关中悬挂多晶硅微镜的弹性扭转梁的厚度约为1μm时,驱动微镜以实现其"开"状态的拐点静电电压为270~290V,而维持微镜"开"状态的最低保持电压在55V左右.理论分析表明,在关于该光开关结构的一系列设计参数中,拐点静电电压对于弹性扭转梁的厚度最敏感.该光开关的开关寿命超过108次,而其开关时间预计小于2ms.对单片集成制造在该光开关阵列芯片上的两种新型光纤自定位保持结构的力学分析表明,它们具有光纤自固定、自对准的性质. 相似文献
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应用基于表面硅、体硅微电子工艺的混合微加工技术,制作了新型2×2扭转微镜光开关阵列,并研究了其在外加静电场和交变电场中的机电特性.当该光开关中悬挂多晶硅微镜的弹性扭转梁的厚度约为1μm时,驱动微镜以实现其"开"状态的拐点静电电压为270~290V,而维持微镜"开"状态的最低保持电压在55V左右.理论分析表明,在关于该光开关结构的一系列设计参数中,拐点静电电压对于弹性扭转梁的厚度最敏感.该光开关的开关寿命超过108次,而其开关时间预计小于2ms.对单片集成制造在该光开关阵列芯片上的两种新型光纤自定位保持结构的力学分析表明,它们具有光纤自固定、自对准的性质. 相似文献
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对静电驱动光开关的驱动结构进行了研究分析,对比分析了采用平面下电极和倾斜下电极两种驱动结构光开关的驱动电压。采用倾斜下电极光开关的pull-in电压较低,在此基础之上,提出了一种双倾斜电极三明治驱动结构光开关。在微反射镜偏移相同距离时,该种驱动结构光开关的pull-in电压更低,从而能够更进一步地提高光开关的性能。 相似文献
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MEMS optical switches 总被引:9,自引:0,他引:9
Leveraging MEMS's inherent advantages such as the batch fabrication technique, small size, integrability, and scalability, MEMS is positioned to become the dominant technology in optical crossconnect switches. MEMS optical switches with complex movable 3D mechanical structures, micro-actuators, and micro-optics can be monolithically integrated on the same substrate by using the matured fabrication process of the integrated circuit industry. In this article we report various popular actuating mechanisms and switch architectures of MEMS optical switches. The basics of surface and bulk micromachining techniques used to fabricate MEMS devices are reviewed. Examples of 2D and 3D approaches to MEMS optical switches are described. The pros and cons of the two approaches are analyzed. In the short term, MEMS-based optical switches seem to have captivated the attention of both the industry and academia. However, there are challenges that threaten the long-term survival of this technology. The problems that remain to be fully addressed are discussed 相似文献
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报道了基于双面反射镜的N×N光开关器件。介绍了使用双面反射镜的2×2,4×4光开关的集成光路设计和工作原理;采用Benes网络,以2×2和4×4光开关为基本单元的N×N光开关器件的整体结构,并根据“一笔画”原理,分析了4×4,8×8和16×16光开关矩阵的可重排无阻塞特性和光开关矩阵的光路选择算法。最后,基于2×2,4×4光开关技术制备了16×16光开关矩阵。测试表明,该器件具有良好的插入损耗、回波损耗、串扰和开关时间等性能,从而验证了设计思想和工艺的可行性。在基于双面反射镜的光开关矩阵中,双面反射镜的使用大大减少了光开关矩阵中运动镜片的数量,简化了控制程序,并有利于提升光开关器件的可靠性能,有望在中小型光交换机、网络管理和光路测量中获得应用。 相似文献
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应用基于表面硅、体硅微电子工艺的混合微加工技术研制了新型扭转微镜光学致动器 ,实现了致动器结构与具有光纤自固定、自对准功能的新型光纤定位保持结构的单片集成。新型扭转微镜光学致动器的机电和光学特性研究表明 ,其工作寿命超过 10 8次动作 ,最小动作时间估计可低于2ms ,存在驱动微镜自然地翻转 90°角的静电阈值电压和维持微镜处于已翻转 90°角状态的静电最低保持电压 ;其微镜的表面粗糙度及其分布基本满足光的波分复用技术等的应用要求。新型扭转微镜光学致动器可在光纤网络中作为光开关或可变光衰减器使用。设计、制作及研究了由新型扭转微镜光学致动器组成的 2× 2光开关阵列 相似文献
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MEMS光开关的研究与进展 总被引:4,自引:0,他引:4
光开关是光通信网络的重要功能器件,MEMS光开关是最具发展前景的光开关之一。在简介不同种类光开关原理特点的基础上,详细分析了当前主要的MEMS光开关的分类、结构、工艺与性能特点,并给出这一领域的研究与发展状况。 相似文献
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M. Hoffmann D. Nusse E. Voges 《Photonics Technology Letters, IEEE》2003,15(1):39-41
A 1/spl times/2 moving-fiber switch for optical protection switching is presented. A detailed measurement of the optical performance is given. A coupling loss of 0.5 dB is achieved in the lensless optical path based on butt-coupled standard single-mode fibers. The actuation voltage is approximately 30 V. Both the electrostatic parallel-plate actuators and the fiber alignment structures are realized by anisotropic machining of crystalline silicon. This type of switch is designed for compact rows of switches. 相似文献
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Plastic optical fiber (POF) is suitable for indoor local area network (LAN), for example, in-home or office networks, because of its flexibility and its ease of connection due to its relatively large core diameter. A 1/spl times/2 optical switch for indoor LAN using POF and a shape memory alloy (SMA) coil actuator with magnetic latches was successfully fabricated and tested. In this paper, the design concept and the characteristics of this switch are described. To achieve switching by the movement of a POF, large displacement is necessary because the core diameter is large (e.g., 0.486 mm). A SMA coil actuator is used for large displacement and a magnetic latching system is employed for fixing the position of the shifted POF. For this design, the insertion loss is 0.40 to 0.50 dB and crosstalk is more than -50 dB without index-matching oil. Switching speed is less than 0.5 s at a driving current of 80 mA. A cycling test was performed 1.4 million times at room temperature. Another optical fiber switch was fabricated and successfully actuated using plastic clad fiber (PCF). PCF also has a large core diameter (e.g., 0.20 mm) and optical switches using PCF will be useful for short distance networks between buildings. 相似文献