共查询到19条相似文献,搜索用时 109 毫秒
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本文介绍了由复合薄膜测定单层薄膜的杨氏模量的一种新方法。考虑到圆膜形成时的初始变形 ,本文采用了球壳模型 ,通过测量圆形复合薄膜在集中载荷作用下的变形 ,获得其中单层薄膜材料的杨氏模量。以 PZT/Pt/Ti/Si O2 复合薄膜试样为例 ,测得单层 PZT薄膜的杨氏模量为 1 1 9± 1 2 GPa。这一数据应用于 PZT微悬臂梁的振动分析 ,发现 ANSYS谐振模拟和实验测试结果相符。 相似文献
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设计了一种采用锆钛酸铅(PZT)压电薄膜悬臂梁作为驱动机理的500μm×500μm微镜结构。该微镜主要由4个悬臂梁与1个反射镜组成,4个悬臂梁起支撑微镜的作用,即微镜主要利用微悬臂梁自由端头的小挠度来实现垂直方向的位移。提出了与互补金属氧化物半导体(CMOS)工艺相兼容的制作方法,利用有限元软件ANSYS7.0对压电微镜的反射镜平整度、结构机械强度、线性度、响应速度和功耗等性能进行了研究,并与数值计算结果进行了比较,结果表明此微镜达到了快速、高精度、低功耗的设计要求。 相似文献
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Seung Eon Moon Sung Q Lee Sang‐kyun Lee Young‐Gi Lee Yil Suk Yang Kang‐Ho Park Jongdae Kim 《ETRI Journal》2009,31(6):688-694
In this paper, we present the results of a preliminary study on the piezoelectric energy harvesting performance of a Zr‐doped PbMg1/3Nb2/3O3‐PbTiO3 (PMN‐PZT) single crystal beam. A novel piezoelectric beam cantilever structure is used to demonstrate the feasibility of generating AC voltage during a state of vibration. The energy‐harvesting capability of a PMN‐PZT beam is calculated and tested. The frequency response of the cantilever device shows that the first mode resonance frequency of the excitation model exists in the neighborhood of several hundreds of hertz, which is similar to the calculated value. These tests show that several significantly open AC voltages and sub‐mW power are achieved. To test the possibility of a small scale power source for a ubiquitous sensor network service, energy conversion and the testing of storage experiment are also carried out. 相似文献
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M. D. Malinkovich A. S. Bykov I. V. Kubasov D. A. Kiselev S. V. Ksenich R. N. Zhukov A. A. Temirov N. G. Timushkin Yu. N. Parkhomenko 《Russian Microelectronics》2016,45(8-9):582-586
The possibility of increasing the efficiency of a beta-voltaic generator due to using a single-crystal bimorph element made of lithium niobate as a piezoelectric converter. The known beta voltaic alternators consist of a piezoelectric cantilever and a source of β-electrons. The cantilever represents a resilient member made, for example, of silicon, on which a piezoelectric element made of PZT piezoceramics is mounted. It is proposed to replace the silicon cantilever structure with a piezoelectric element by a uniform cantilever that represents a thin wafer made of a bidomain single-crystal lithium niobate. Due to this, the efficiency of the mechanical oscillation conversion into electrical power, the system Q-factor, and the stability of the operating parameters simultaneously increase; and the operation temperature range also significantly increases (by several hundred degrees). The solution of the main problem—the formation of a bidomain structure in a thin wafer of lithium niobate—is considered in detail. A method for the high-temperature annealing of samples in a nonuniform electric field is proposed. It is demonstrated that one can predict the domain structure based on the developed model. Samples are obtained having the occurrence depth of the interdomain boundary ranging from 120 to 150 μm. At the same time, it is shown that the sharpness of the boundary depends on the potential difference between the striated electrodes of the technological cell and the external electrode. The method is efficient for manufacturing a bidomain structure in a wafer up to 300 μm thick. 相似文献
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基于微机电系统(MEMS)设计了风车型结构的压电振动能量采集器,通过压电效应将低频振动能量转化为电能,用以解决环境中低频能量采集的问题。风车型结构的压电振动能量采集器以硅为基底,以PZT 5A为压电材料,包含上、下电极;4条悬臂梁旋转连接中心质量块与四周固定端,类似于风车结构。数学建模与有限元仿真分析表明,在结构尺寸与材料相同的情况下,圆弧风车型结构的谐振频率较直接连接、直角连接结构的谐振频率更低;4条悬臂梁距离中心质量块越远,谐振频率越低;在0.1g(g=9.8 m/s2)加速度谐振状态下,输出电压约为6.2 V,最大位移接近1.2 mm。基于MEMS工艺,通过IntelliSuite软件研究和定义了风车型振动能量采集器的工艺流程。 相似文献
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The integration and the device realization of Pb(Zr, Ti)O3 (PZT) thick films on Si substrates are known to be extremely difficult because the processing temperature of the PZT thick film is close to the melting point of Si. However, PZT thick‐film devices on Si warrant attention as they are appropriate for biological transducers; they generate large actuating forces and have a relatively high sensitivity for mass detection, especially in liquids. In this study, Pb(Zr0.52Ti0.48)O3 thick‐film cantilever devices are successfully fabricated on a Pt/TiO2/SiNx/Si substrate using a screen‐printing method and microelectromechanical systems (MEMS) process. Elastic and electromechanical properties such as the Young's modulus and transverse piezoelectric coefficient are determined from microstructural and electrical analyses for further mechanical study. The calculated Young's modulus of the thick film, 53.9 ± 3.85 GPa, corresponds to the resonant frequency obtained from the measured harmonic oscillation response. The transverse piezoelectric constant, d31, of –20.7 to –18.8 pC N–1 is comparable to that of a dense thin film. These values promise the possibility of determining the resonance properties of a thick‐film cantilever by designing its structure and then simulating the harmonic oscillation response. Using the PZT thick‐film cantilever, a strong harmonic oscillation with a quality (Q) factor of about 23 is demonstrated in water. The observation of strong harmonic oscillation in liquid implies the feasibility of precise real‐time recognition of biomolecules using PZT thick‐film cantilevers. 相似文献
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两腔压电泵结构与特性 总被引:7,自引:0,他引:7
介绍了两个压电振子所构成的两腔串联和两腔并联压电泵的结构及工作原理,分析了两个压电振子驱动方式(同步工作和交叉工作)对两种结构压电泵输出性能的影响规律。制作了两腔串联和两腔并联压电泵的试验样机,分别测试了两个腔体同步工作和交叉工作状态下压电泵的输出能力,并与理论分析的结果进行了对比。理论和试验两方面的研究结果表明,在相同驱动电压和频率条件下,两个腔体交叉工作时压电泵的输出能力较好,其中并联泵的流量最大,为单个腔体流量的2倍;而串联泵的流量串联泵压力最大,是单个腔体输出压力的2倍,同时其流量也有大幅度提高,约为单个腔体流量的1.4倍。 相似文献