硅片传输中的预对准方法

本文叙述了硅片自动传输中片子位置精度的预对准方法。并汇集了常见的具有代表性的十几种典型的预对准结构,介绍了其实现的途径和特点。     

Touch Print模板印刷机

TouchPrint是真正的精确全自动模板印刷机，能装板、对准、印刷和卸板，也能处理品片，无需操作人员干预。印板和晶片能手动或自动装到系统上进行加工。虽然高速牛产对于印板和晶片印刷不是明确的要求，但该系统的生产周期时间可达3．8秒。在2.2     

DB-6120全自动芯片键合机图像处理系统分析及软件处理

概述了DB-6120全自动芯片键合机图像处理系统的组成及工作原理,重点介绍了软件结构及设计方法,并对晶片及芯片对准、芯片识别技术进行了重点探讨。     

芯片制作过程中切割道光刻对准标记的优化

在0．18υm高压产品工艺生产过程中,作者发现晶片在钨化学机械研磨制程后会有很严重的鸽剥落缺陷,此种缺陷成行排列,有一定规律,与光罩的曝光间膈距离相匹配,该缺陷会导致产品良率有非常明显的下降。同时在生产过程中也发现在MIM上极板蚀刻后,有些聚合物难以去除,此种残留物也来自曝光的固定位置。因此解决这类与光罩相关的缺陷和残留物显得尤为重要。作者经过深入的研究分析以及实验验证,通过对切割道上的光罩对准标记进行优化,彻底解决了这两种缺陷问题,使得产品的良率得以提升。     

非接触式预对准系统及控制技术研究

高精度高效率的预对准系统是现代集成电路（IC）生产中实现晶圆自动传输的重要部件。介绍了预对准台的大致设计结构,分析了目前常见的找心算法以及存在的问题,进而提出新的找圆心算法。之后针对带切边晶圆片的切边方向定位算法进行了分析归纳,总结出完整的切边定位算法。     

0.8～1μm分步重复投影光刻机主要机构控制系统研制

传输片、预对准、调平及预调焦系统是分步重复投影光刻机的重要组成部分 ,其精度和运行可靠性对分步重复投影光刻机的整机性能指标将产生重大影响。介绍了 0 8～ 1 μm分步重复投影光刻机传输片、预对准、调平及预调焦控制系统的组成及控制软件 ;分析了预对准、机械手上片、调平及预调焦的精度和运行可靠性 ,并给出了研制结果。     

APC在CMP工艺中的应用II

晶片到晶片（Wafer-to-Wafer）的均匀控制在晶片至晶片均匀性的控制中．iAPC通过对研磨时间的动态调整，使得研磨后的晶片厚度值达到或少偏离预定的目标值。对于晶片至晶片均匀性的控制．它的控制模型函数必须能够补偿由于连续进来的晶片厚度的变化而引起研磨时间的不同。     

光刻设备中硅片预对准的算法模型分析

分析了硅片预对准设备的工作原理、流程及计算方法,并在实验数据的基础上详细讨论了各种方法的优缺点。     

APC在CMP工艺中的应用Ⅱ

晶片到晶片(Wafer-to-Wafer)的均匀控制在晶片至晶片均匀性的控制中,iAPC通过对研磨时间的动态调整,使得研磨后的晶片厚度值达到或少偏离预定的目标值。     

基于图像处理的石英晶片定位技术研究

为了实现自动测量石英晶片的频率等相关参数并进行分档,研究了石英晶片的图像定位技术,主要利用图像处理技术对采集的图像进行图像二值化、边缘检测、轮廓提取等处理,完成对石英晶片中心的定位。经验证,该石英晶片定位技术能够在保证系统要求的石英晶片分选速度的前提下实现石英晶片的准确定位。     

层压板、覆铜板基板白边角成因与预防措施

基板白边角是层压板、覆铜板及多层印制电路板生产中比较常见的产品缺陷．产品热压成烈时流胶偏多与“欠压”是其产生主因．控制半固化片技术指标及设计合道层压菜单是解决问题的关键．     

OF和NF气体激光新体系

用常态下稳定的气体分子和稀有气体卤化物准分子作为激光工作物质已被广泛和深入地研究,其中有一些已成为实用的商品器件。对在特殊状态下产生的不稳定二原子、三原子以及多原子体系的探索工作一直在开展着。虽然在自由基家族中已有OH、CN、CO实现了激光输出,然而,真正实用的体系还有待进一步研究。从Diegelman等人偶然发现了CLF交叉卤素激光以来,曾有一度对三原子准分子体系在卤素及惰性气体之间进行了探索。从目前所发现的激光工作物质来看,在适当的条件下,每一种双原子分子都有可能实现激光输出,因此对双原子自由基的探索工作将是有意义而富有成果的。     

Synthesis of Zwitterionic Water‐Soluble Oligofluorenes with Good Light‐Harvesting Ability

A new water‐soluble zwitterionic oligofluorene bearing carboxylic acid and quaternary ammonium as pendant groups (OF‐1) is synthesized and characterized. It forms aggregates by intermolecular electrostatic interactions and exhibits similar light‐harvesting ability as that of conjugated polymers. Efficient fluorescence resonance energy transfer (FRET) occurs from OF‐1 to double‐stranded DNA tagged with fluorescein (dsDNA‐F1). A photoresponsive oligofluorene (OF‐3) is also synthesized by protecting OF‐1 with 1‐(2‐nitrophenyl)ethanol. Photolysis of OF‐3 can produce OF‐1 to result in a fluorescence “turn‐on” response, thus the FRET from OF‐3 to dsDNA‐Fl can be turned on by light irradiation. OF‐3 offers the potential for remote DNA sensing.     

Fault Detection and Diagnosis Techniques in Induction Electrical Machines

A GREAT AND VARIED DEAL OF APPROACHES FOR FAULT DETECTION AND DIAGNOSIS IN INDUCTION MACHINES HAS BEEN PROPOSED AND IMPLEMENTED IN THE LAST YEARS. THESE NEW TECHNIQUES ARE ATTRACTIVE DUE TO THEY ARE CHARACTERIZED BY THEIR ON-LINE AND NON-INVASIVE FEATURES. THAT IS, THE ABILITY OF DETECTING FAULTS WHILE THE MACHINE IS UNDER NORMAL RUNNING AND WITHOUT NEEDING TO MOUNT SENSORS WITHIN THE MOTOR. THESE FEATURES, INHERENT OF THE NEW TECHNIQUES, DISTINGUISH THEM FROM THE TRADITIONAL ONES, WHICH MAINLY REQUIRE THAT THE MACHINE UNDER STUDY IS OUT OF SERVICE IN ORDER TO YIELD A DIAGNOSIS. THE PURPOSE OF THIS ARTICLE CONSISTS THEN IN REVIEWING THE PRINCIPAL ALTERNATIVES IN THE FIELD OF FAULT DIAGNOSIS FOR INDUCTION MACHINES AND TO COMPARE THEIR PERFORMANCE TAKING INTO ACCOUNT THE REQUIRED DIAGNOSTIC INFORMATION, THE NUMBER AND IMPORTANCE OF THE FAULTS THEY CAN DETECT, THEIR SPEED TO ANTICIPATE A FAULT AND THE CERTAINTY DEGREE IN THE FINAL DIAGNOSIS.     

Characterizing the orthogonality factor in WCDMA downlinks

The loss of orthogonality between the spreading codes in a wideband code-division multiple-access downlink is modeled in analysis and simulations by means of the orthogonality factor (OF). The OF, which is an important parameter limiting downlink capacity, increases with the multipath dispersion in the channel. We utilize this relationship between the OF and the channel dispersion to show a novel, simple, and accurate way to determine the time-averaged OF directly from the channel delay profile. To this end, we define the diversity factor (DF) of a channel profile, derive the expression for it, and show that the DF and the OF are related by a simple mathematical relationship. We then verify our approach over an entire ensemble of channel profiles generated by the general COST259 macrocellular channel model.     

Macrocell-Wide Behavior of the Orthogonality Factor in WCDMA Downlinks

The orthogonality factor (OF) quantifies the loss of orthogonality between the signals transmitted simultaneously on a wideband code division multiple access (WCDMA) downlink due to multipath dispersion. It is one of the fundamental parameters that determines the signal-to-interference-plus-noise ratio at the output of a Rake receiver and, consequently, it has a significant impact on downlink system capacity. The OF depends greatly on the delay profile of the multipath channel between the mobile and its serving base station; this profile varies considerably from one location in the cell to another. In this paper, we study how the statistical properties of the small-scale-fading-averaged OF vary over the entire macrocellular area. We use an ensemble of channel profiles at different locations in a cell generated from an implementation of the comprehensive COST259 channel model, which incorporates results from several experimental investigations. We show that the small-scale-fading-averaged OF is itself a random variable whose statistics depend on the mobile's distance from its serving base station. The large observed variance of the OF indicates that using a single value for all users in downlink capacity analyses and simulations, as has been the practice, may lead to erroneous conclusions. Finally, we propose a simple model that closely matches the statistics of the OF as a function of mobile-to-base distance, thus obviating the need to set up the complicated channel model every time OF values are to be generated     

Coupling orientation diffusion with coherence-enhancing diffusion: a fingerprint case

The enhancement of coherent flow-like structures is desired for many image processing tasks, such as segmentation and feature detection. This task can be accomplished in a natural way by adopting anisotropic diffusion filtering using a diffusion matrix adapted to the local structure. This method is referred to as coherence-enhancing diffusion (CED). The performance of CED can be analyzed by observing the evolution of the orientation field (OF) associated with an evolving diffusion matrix. It was revealed from a series of experiments that the final OF from a CED-enhanced image sometimes strays from its true underlying OF (marked by a human expert), degrading its performance. In this paper, a strategy is proposed which repeatedly cleans the OF associated with a diffusion matrix. Thus, for every iteration of CED, its OF is diffused separately until it converges and is then fed back to the CED process to move forward. This hypothesis is tested with the motive of getting an enhanced CED performance. The proposed scheme is validated using fingerprint data, and their numerical results are displayed.     

Theoretical analysis of the orthogonality factor in WCDMA downlinks

Wideband code-division multiaccess (WCDMA) downlink transmission is prone to self interference caused by the loss of orthogonality between the spreading codes due to multipath fading. The degree of loss of orthogonality in downlink WCDMA is usually measured in terms of the orthogonality factor (OF) which is directly related to the level of intra-cell interference. This paper presents accurate theoretical analysis of the OF over generalized fading channels. New exact expressions of the average OF are derived for full and partial RAKE receivers over arbitrarily correlated multipath fading channels.     

Comparison of block matching and differential methods for motion analysis of the carotid artery wall from ultrasound images

Motion of the carotid artery wall is important for the quantification of arterial elasticity and contractility and can be estimated with a number of techniques. In this paper, a framework for quantitative evaluation of motion analysis techniques from B-mode ultrasound images is introduced. Six synthetic sequences were produced using 1) a real image corrupted by Gaussian and speckle noise of 25 and 15 dB, and 2) the ultrasound simulation package Field II. In both cases, a mathematical model was used, which simulated the motion of the arterial wall layers and the surrounding tissue, in the radial and longitudinal directions. The performance of four techniques, namely optical flow (OF (HS)), weighted least-squares optical flow (OF (LK(WLS))), block matching (BM), and affine block motion model (ABMM), was investigated in the context of this framework. The average warping indices were lowest for OF (LK(WLS)) (1.75 pixels), slightly higher for ABMM (2.01 pixels), and highest for BM (6.57 pixels) and OF (HS) (11.57 pixels). Due to its superior performance, OF (LK(WLS)) was used to quantify motion of selected regions of the arterial wall in real ultrasound image sequences of the carotid artery. Preliminary results indicate that OF (LK(WLS)) is promising, because it efficiently quantified radial, longitudinal, and shear strains in healthy adults and diseased subjects.     

对《微波学报》1989～1998年论文的统计分析

本文依据文献计量学的原理,对《微波学报》１９８９～１９９８年论文的数量、内容、作者等进行了比较全面的统计分析,从而给《微波学报》统计的几个方面一个量的概念。为本学科的发展提供了可靠的依据。