Effect of erbium fluoride doping on the photoluminescence of SiO<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript> films

The photoluminescence of SiO _x films deposited on c-Si wafers by the thermal evaporation of SiO in a vacuum and, for the first time, doped with ErF₃ by coevaporation is studied. It is shown that, like undoped SiO _x films, the unannealed SiO _x :ErF₃ films passivate the surface of the Si wafers and, thus, increase their edge photoluminescence intensity almost fivefold. A similar increase is observed after annealing of the doped films in air at 750°C. Doping with ErF₃ suppresses the photoluminescence of Si nanoclusters, if the films have been subjected to high-temperature annealing (at 750°C). In this case, the PL intensity of the band with a peak at ∼890 nm decreases as well. The ∼890 nm band is observed for the first time and, due to its features, is attributed to transitions in SiO _x matrix defects. The experimentally observed effect of ErF₃ doping on SiO _x film photoluminescence is interpreted. An intense photoluminescence signal from Er³⁺ ions in the nearinfrared spectral region (the ⁴ I _11/2 → ⁴ I _15/2 and ⁴ I _13/2 → ⁴ I _15/2 transitions) is observed in the SiO _x :ErF₃ films annealed in air at 750°C. This finding shows that 1.54 μm luminescent emitters, which are currently in popular demand, can be produced by a simple low-cost method.     

Composition and microstructure of the luminescence-active area in the light-emitting SiO<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript>N<Subscript><Emphasis Type="Italic">y</Emphasis></Subscript>(Si) nanocomposite layers

Features of formation, the composition, and the mictostructure of the luminescence-active transition region arising in the course of the deposition of the SiO _x N _y (Si) nanocomposite layer with the use of the reactive ion sputtering of the Si target in the O₂ and N₂ atmosphere are studied. The composition and the microstructure of the transition regions are analyzed using the methods of the X-ray photoelectron spectroscopy (XPS) upon the layer-by-layer etching of the composite layers. it is found that the transition regions contain amorphous clusters and nanocrystals of Si as well as such nanoinclusions as Si-Si chains in the oxynitride matrix. The influence of the microstructure on the characteristics of the electroluminescence of nanocomposite layers is revealed.     

Structural and Luminescent Properties of SiO<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript>N<Subscript><Emphasis Type="Italic">y</Emphasis></Subscript>(Si) Nanocomposite Films

With a view to creating Si LEDs, the structural and luminescent properties of SiO _x N _y films containing Si nanocrystals in the SiO _x N _y matrix are studied experimentally. It is found that the film structure (nanocrystal size and concentration, the presence of an amorphous phase, etc.) and the spectrum and intensity of photoluminescence (PL) and electroluminescence (EL) are strongly dependent on the Si stoichiometric excess δ and annealing conditions. At δ≈ 10%, unannealed films are amorphous and contain Si clusters of size < 2 nm, as deduced from the TEM and microdiffraction data obtained. Annealing at 800–1000°C for 10–60 min produces Si crystals 3–5 nm in size with a concentration of ≈10¹⁸ cm^?3. The annealed films exhibit room-temperature PL and EL over the wavelength range 400–850 nm with intensity peaks located at 50–60 and 60–70 nm, respectively. The PL and EL spectra are found to be qualitatively similar. This suggests that both the PL and the EL should be associated with the formation of luminescent centers at nanocrystal–matrix interfaces and in boundary regions. However, the two phenomena should differ in the mechanism by which the centers are excited. With the EL, excitation should occur by impact processes due to carrier heating in high electric fields. It is found that as δ increases, so does the proportion of large amorphous Si clusters with a high density of dangling bonds. This enhances nonradiative recombination and suppresses luminescence.     

SiO<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript> layer formation during plasma sputtering of Si and SiO<Subscript>2</Subscript> targets

Deposition of SiO _x layers of variable composition onto silicon wafers was performed by co-sputtering of spaced Si and SiO₂ targets in argon plasma. Coordinate dependences of the thickness and refractive index of separately deposited Si and SiO₂ layers and the SiO _x layer grown during co-sputtering of targets were determined using optical techniques. It was shown that the SiO _x layer composition is not equal to a simple sum of thicknesses of separately deposited Si and SiO₂ layers. The coordinate dependences of the Si and SiO₂ layer thicknesses were calculated. To fit the calculated and experimental data, it is necessary to assume that no less than 10% of silicon is converted to dioxide during co-sputtering. A comparison of the coordinate dependences of the IR absorbance in SiO₂ and SiO _x layers with experimental ellipsometric data confirmed the presence of excess oxygen in the SiO _x layer. Taking into account such partial oxidation of sputtered silicon, composition isolines in the substrate plane were calculated. After annealing of the SiO _x layer at 1200°C, photoluminescence was observed in a wafer area predicted by calculations, which was caused by the formation of quantum-size Si nanocrystallites. The photoluminescence intensity was maximum at x = 1.78 ± 0.3, which is close to the composition optimum for ion-beam synthesis of nanocrystals.     

Electrodeposition of <Emphasis Type="Italic">p</Emphasis>-Type Sb<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript>Te<Subscript><Emphasis Type="Italic">y</Emphasis></Subscript> Thermoelectric Films

Thermoelectric Sb _x Te _y films were potentiostatically electrodeposited in aqueous nitric acid electrolyte solutions containing different concentrations of TeO₂. Stoichiometric Sb _x Te _y films were obtained by applying a voltage of −0.15 V versus saturated calomel electrode (SCE) using a solution consisting of 2.4 mM TeO₂, 0.8 mM Sb₂O₃, 33 mM tartaric acid, and 1 M HNO₃. The nearly stoichiometric Sb₂Te₃ films had a rhombohedral structure, R[`3]m R\bar{3}m , with a preferred orientation along the (015) direction. The films had hole concentration of 5.8 × 10¹⁸/cm³ and exhibited mobility of 54.8 cm²/Vs. A more negative potential resulted in higher Sb content in the deposited Sb _x Te _y films. Furthermore, it was observed that the hole concentration and mobility decreased with increasingly negative deposition potential, and eventually showed insulating properties, possibly due to increased defect formation. The absolute value of the Seebeck coefficient of the as-deposited Sb₂Te₃ thin film at room temperature was 118 μV/K.     

Electrical and gas sensing properties of <Emphasis Type="Italic">por</Emphasis>-Si/SnO<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript> nanocomposite layers

The electrical characteristics and chemical reactant sensitivity of layers of heterogeneous nanocomposites based on porous silicon and nonstoichiometric tin oxide por-Si/SnO _x , fabricated by the magnetron sputtering of tin with subsequent oxidation, are studied. It is shown that, in the nanocomposite layers, a system of distributed heterojunctions (Si/SnO _x nanocrystals) forms, which determine the electrical characteristics of such structures. The sensitivity of test sensor structures based on por-Si/SnO _x nanocomposites to NO₂ is determined. A mechanism for the effect of the adsorption of NO₂ molecules on the current-voltage characteristics of the por-Si(p)/SnO _x (n) heterojunctions is suggested.     

Variation in optical-absorption edge in SiN<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript> layers with silicon clusters

Using optical methods, data on optical constants are obtained for silicon nitride films synthesized by plasma-chemical vapor deposition (PCVD). Models for calculating the permittivity in the model of inhomogeneous phase mixture of silicon and silicon nitride are considered. It is found that the optical-absorption edge (E _g) and the photoluminescence peak shift to longer wavelengths with increasing nitrogen atomic fraction x in sin _x films. When x approaches the value 4/3 characteristic for stoichiometric silicon nitride Si₃N₄, a nonlinear sharp increase in E _g is observed. Using Raman scattering, Si-Si bonds are revealed, which confirms the direct formation of silicon clusters during the film deposition. The relation between the composition of nonstoichiometric silicon nitride films, values of permittivity, and the optical-band width is established for light transmission.     

Annealing-induced evolution of optical properties of the multilayered nanoperiodic SiO<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript>/ZrO<Subscript>2</Subscript> system containing Si nanoclusters

The photoluminescence, infrared absorption, and Raman spectra of amorphous multilayered nanoperiodic a-SiO _x /ZrO₂ structures produced by vacuum evaporation and then annealed at different temperatures (500–1100°C) are studied. It is established that the evolution of the optical properties with increasing annealing temperature is controlled by sequential transformation of Si clusters formed in the SiO _x layers from nonphase inclusions to amorphous clusters and then to nanocrystals. The finally formed nanocrystals are limited in sizes by the thickness of the initial SiO _x layers and by chemical reactions with ZrO₂.     

Visible photoluminescence of selectively etched porous <Emphasis Type="Italic">nc</Emphasis>-Si-Sio<Subscript>x</Subscript> structures

The results of the first studies of the effect of selective etching on photoluminescence in porous nc- Si–SiO_x structures containing Si nanoclusters (nc-Si) in the SiO_x matrix are reported. In the initial samples at room temperature, intense photoluminescence bands are observed with peaks at 840 and 660 nm corresponding to radiative recombination of free charge carriers (or charge carriers bound to excitons) excited in nc- Si. After selective etching of the nc- Si–SiO_x structures in 1% HF solution, these bands are noticeably shifted to higher energies of the spectrum. It is suggested that the evolution of the spectra is due to the decrease in the Si nanoparticle dimensions on etching of the oxide and additional oxidation of nc- Si. The results show that selective etching of the oxide matrix can be used to control the radiation spectra of porous nc- Si–SiO_x structures.     

Electronic states on silicon surface after deposition and annealing of SiO<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript> films

The spectrum of the photoconductivity induced by the polarization field of charges at surface states and traps in the film bulk has been analyzed to determine the energy band diagram at the c-Si-SiO _x interface and the changes in the electronic states after the film annealing. It is found that the energy bands are bent at the Si-SiO _x interface and the Si surface is enriched in electrons. In equilibrium the photocurrent peak at 1.1 eV is due to the band-to-band transitions in the silicon part of the interface. Annealing shifts the peak to higher energies; this shift increases with an increase in the annealing temperature from 650 to 1000°C. This effect is accompanied by a decrease in the photocurrent at ≤1.1 eV and weakening of the band-edge photoluminescence near the Si surface. The changes revealed are explained by the formation of an oxide layer with Si nanoclusters at the Si-SiO _x interface upon annealing. This process is caused by oxygen diffusion from the SiO _x film, which occurs mainly via defects on the Si wafer surface. The photoconductivity spectrum of the samples charged by short-term application of a negative potential to silicon exhibits electronic transitions in the SiO _x film, both from the matrix electronic states and from the states of the defects and Si nanoclusters in the film.     

Epitaxial growth and properties of Mg<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript>Zn<Subscript>1-<Emphasis Type="Italic">x</Emphasis></Subscript>O films produced by pulsed laser deposition

The Mg _x Zn_1-x O thin films with a Mg content corresponding to x = 0–0.45 are grown by pulsed laser deposition on ablation of ceramic targets. The conditions for epitaxial growth of the films on the single-crystal Al₂O₃ (00.1) substrates are established. The record limit of solubility of Mg in hexagonal ZnO, x = 35 is attained. In this case, the lattice mismatch for the parameter a of the ZnO and Mg_0.35Zn_0.65O films does not exceed 1%, whereas the band gaps of the films differ by 0.78 eV. The surface roughness of the films corresponds to 0.8–1.5 nm in the range of x = 0–0.27.     

Preparation and Thermoelectric Properties of LaGd<Subscript>1+<Emphasis Type="Italic">x</Emphasis></Subscript>S<Subscript>3</Subscript> and SmGd<Subscript>1+<Emphasis Type="Italic">x</Emphasis></Subscript>S<Subscript>3</Subscript>

Thermoelectric materials are attractive since they can recover waste heat directly in the form of electricity. In this study, the thermoelectric properties of ternary rare-earth sulfides LaGd_1+x S₃ (x = 0.00 to 0.03) and SmGd_1+x S₃ (x = 0.00 to 0.06) were investigated over the temperature range of 300 K to 953 K. These sulfides were prepared by CS₂ sulfurization, and samples were consolidated by pressure-assisted sintering to obtain dense compacts. The sintered compacts of LaGd_1+x S₃ were n-type metal-like conductors with a thermal conductivity of less than 1.7 W K⁻¹ m⁻¹. Their thermoelectric figure of merit ZT was improved by tuning the chemical composition (self-doping). The optimized ZT value of 0.4 was obtained in LaGd_1.02S₃ at 953 K. The sintered compacts of SmGd_1+x S₃ were n-type hopping conductors with a thermal conductivity of less than 0.8 W K⁻¹ m⁻¹. Their ZT value increased significantly with temperature. In SmGd_1+x S₃, the ZT value of 0.3 was attained at 953 K.     

Formation of silicon nanocrystals in multilayer nanoperiodic <Emphasis Type="Italic">a</Emphasis>-SiO<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript>/insulator structures from the results of synchrotron investigations

The problem of the efficiency of the controllable formation of arrays of silicon nanoparticles is studied on the basis of detailed investigations of the electronic structure of multilayer nanoperiodic a-SiO _x /SiO₂, a-SiO _x /Аl₂О₃, and a-SiO _x /ZrO₂ compounds. Using synchrotron radiation and the X-ray absorption near edge structure (XANES) spectroscopy technique, a modification is revealed for the investigated structures under the effect of high-temperature annealing at the highest temperature of 1100°C; this modification is attributed to the formation of silicon nanocrystals in the layers of photoluminescent multilayer structures.     

Composition and optical properties of amorphous <Emphasis Type="Italic">a</Emphasis>-SiO<Subscript> <Emphasis Type="Italic">x</Emphasis> </Subscript>:H films with silicon nanoclusters

The phase composition and optical properties of hydrogenated amorphous films of silicon suboxide (a-SiO_x:H) with silicon nanoclusters are studied. Ultrasoft X-ray emission spectroscopy show that silicon- suboxide films with various oxidation states and various amorphous silicon-cluster contents can be grown using dc discharge modulation. In films with an ncl-Si content of ～50%, the optical-absorption edge is observed, whose extrapolation yields an optical band gap estimate of ～3.2–3.3 eV. In the visible region, rather intense photoluminescence bands are observed, whose peak positions indicate the formation of silicon nanoclusters 2.5–4.7 nm in size in these films, depending on the film composition.     

An ultra-low-power CMOS symmetrical OTA for low-frequency <Emphasis Type="Italic">G</Emphasis><Subscript><Emphasis Type="Italic">m</Emphasis></Subscript>-<Emphasis Type="Italic">C</Emphasis> applications

In this paper an ultra-low-power CMOS symmetrical operational transconductance amplifier (OTA) for low-frequency G _m -C applications in weak inversion is presented. Its common mode input range and its linear input range can be made large using DC shifting and bulk-driven differential pair configuration (without using complex approaches). The symmetrical OTA was successfully verified in a standard CMOS 0.35-μm process. The measurements show an open loop gain of 61 dB and a unit gain frequency of 195 Hz with only 800 mV of power supply voltage and just 40 nW of power consumption. The transconductance is 66 nS, which is suitable for low-frequency G _m -C applications.     

Control over carrier lifetime in high-voltage <Emphasis Type="Italic">p-i-n</Emphasis> diodes based on In<Subscript>x</Subscript>Ga<Subscript>1-<Emphasis Type="Italic">x</Emphasis></Subscript>As/GaAs heterostructures

The possibility of controlling the effective lifetime of nonequilibrium carriers by varying the lattice mismatch between the interfaced materials of a heterostructure has been studied on the example of InGaAs/GaAs heterostructures. It was found that, at a given composition (thickness) of a lightly doped layer of the InGaAs alloy, the nonequilibrium carrier lifetime depends on its thickness (composition), which enables variation of the nonequilibrium carrier lifetime from several nanoseconds to a microsecond without any significant change in the concentration of mobile carriers. The results obtained were used to fabricate pulse p ⁺-p ⁰-π-n ⁰-n ⁺ diodes with blocking voltages of up to 500 V, which can switch currents of ≥10 A and have recovery times no longer than 10 ns.     

High-Performance (Ag<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript>SbTe<Subscript><Emphasis Type="Italic">x</Emphasis>/2+1.5</Subscript>)<Subscript>15</Subscript>(GeTe)<Subscript>85</Subscript> Thermoelectric Materials Prepared by Melt Spinning

A new preparation process combining melt spinning and hot pressing has been developed for the (Ag _x SbTe _x/2+1.5)₁₅(GeTe)₈₅ (TAGS-85) system. Compared with samples prepared by the traditional air-quenching and hot-pressing method, electrical conductivity and thermal conductivity are lowered. The thermoelectric performance of the TAGS-85 samples varied with changing Ag content and reached the highest ZT of 1.48 when x was 0.8 for the melt-spun sample, compared with the maximum ZT of 1.36 for the air-quenched sample. The Seebeck coefficient of the melt-spun TAGS-85 alloys was improved, while both the electrical conductivity and thermal conductivity were decreased. The net result of this process is to effectively enlarge the temperature span of ZT > 1, which will benefit industrial application.     

Thermal Stability Study of Cu(MoN<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript>) Seed Layer on Barrierless Si

This study reports the good thermal stability of a sputtered Cu(MoN _x ) seed layer on a barrierless Si substrate. A Cu film with a small amount of MoN _x was deposited by reactive co-sputtering of Cu and Mo in an Ar/N₂ gas mixture. After annealing at 560°C for 1 h, no copper silicide formation was observed at the interface of Cu and Si. Leakage current and resistivity evaluations reveal the good thermal reliability of Cu with a dilute amount of MoN _x at temperatures up to 560°C, suggesting its potential application in advanced barrierless metallization. The thermal performance of Cu(MoN _x ) as a seed layer was evaluated when pure Cu is deposited on top. X-ray diffraction, focused ion beam microscopy, and transmission electron microscopy results confirm the presence of an ∼10-nm-thick reaction layer formed at the seed layer/Si interface after annealing at 630°C for 1 h. Although the exact composition and structure of this reaction layer could not be unambiguously identified due to trace amounts of Mo and N, this reaction layer protects Cu from a detrimental reaction with Si. The Cu(MoN _x ) seed layer is thus considered to act as a diffusion buffer with stability up to 630°C for the barrierless Si scheme. An electrical resistivity of 2.5 μΩ cm was obtained for the Cu/Cu(MoN _x ) scheme after annealing at 630°C.     

Sectoral transition between modes <Emphasis Type="Italic">H</Emphasis><Subscript>10</Subscript> and <Emphasis Type="Italic">H</Emphasis><Subscript>01</Subscript>

The excitation of main parasitic modes E ₁₁, H ₁₁, and H ₂₁, which have cutoff sections in a sectoral transition between modes H ₁₀ and H ₀₁, is investigated. It is shown that, for magnetic modes, including modes H ₁₁ and H ₂₁, it is unnecessary to use the Airy equation and that this circumstance simplifies the design relationships. The energies of these modes are calculated as functions of the transition parameters.     

Ab initio calculations of phonon spectra of (GaP)<Subscript><Emphasis Type="Italic">n</Emphasis></Subscript>(AlP)<Subscript><Emphasis Type="Italic">m</Emphasis></Subscript> superlattices

Using the method of linear response, vibrational spectra and densities of states of GaP and AlP crystals and monolayer GaP/AlP superlattices are calculated. Phonon modes of (GaP) _n (AlP) _m superlattices with various numbers of monolayers are calculated for the center of the Brillouin zone. The obtained results are compared with the Raman scattering data and the effect of nonideality of the interface on phonon frequencies is discussed.