硅纳米颗粒和多孔硅的荧光光谱研究

采用不同氧化电流密度制备多孔硅,利用超声波粉碎多孔硅层得到硅纳米颗粒,研究了多孔硅和硅纳米颗粒的荧光光谱性质。结果表明,随着氧化电流密度的增加．多孔硅的发光峰值波长向短波方向“蓝移”。硅纳米颗粒相对多孔硅发光强度提高,峰值波长也发生“蓝移”,观察到硅纳米颗粒极强的蓝紫光发射(≈400nm)现象。表明量子限制效应和表面态对多孔硅和硅纳米颗粒的PL性质有重要作用,并用量子限制效应发光中心模型对实验现象进行了解释。     

铜掺杂多孔硅的光致发光及其载流子的复合过程

采用浸泡镀敷的方法在多孔硅表面形成了一镀铜层,通过对掺铜前后多孔硅的光致发光(PL)谱和傅里叶变换红外(FTIR)吸收光谱的研究,讨论了铜在多孔硅表面的吸附对其光致发光的影响。实验表明,掺铜多孔硅的光致发光谱出现两个发光带,其中能量较低的发光带随主发光带变化,并使多孔硅的发光峰位蓝移。多孔硅发光峰位的蓝移,是由于在发生金属淀积的同时伴随着多孔硅表面Si的氧化过程(纳米Si氧化为SiO2)的缘故。     

无酸水热法制备多孔硅及其PⅢ表面改性

采用无酸水热法,制备了多孔硅材料.使用扫描电子显微镜、原子力显微镜等手段观察了样品表面形貌,比较了在不同氧化铋刻蚀剂量下得到的多孔硅结构,发现随着刻蚀剂浓度的增加,平均孔径尺寸变大,且孔径分布趋于离散.使用等离子浸没注入技术,对多孔硅样品进行了表面注氮处理.室温荧光光谱研究发现处理后的样品的光谱峰位产生了蓝移,根据X光电子能谱仪检测的结果发现样品表面形成了Si-NxOy相,这一物相的出现导致了光谱的蓝移.     

硅基底电子束蒸发铝膜阳极氧化特性

研究了硅衬底上电子束蒸发铝膜 ,在 H2 SO4 水溶液中阳极氧化形成硅衬底多孔氧化铝复合结构的过程 .硅衬底电子束蒸发铝膜的阳极氧化过程主要由多孔氧化铝的生长、氧化铝生长向氧化硅生长的过渡和氧化硅生长三个阶段构成 .硅衬底多孔氧化铝复合结构的透射电子显微镜观察表明 ,在硅衬底上形成了垂直于硅表面的氧化铝纳米孔 ,而孔底可形成 Si O2 层 .有序结构多孔氧化铝的形成不依赖于铝膜的结晶状态 ,而是由阳极氧化过程的自组织作用所决定的 .实验表明将多孔氧化铝制备工艺移植到硅基衬底上直接形成硅基衬底多孔氧化铝复合结构是可行的     

H2O2催化多孔硅的光致发光研究

采用H2O2催化的电化学法制备多孔硅,用原子力显微镜观察了样品的形貌,并测量了在不同电流密度下制得的多孔硅和在不同氧化时间高温氧化的多孔硅的光致发光谱。实验结果表明,采用H2O2催化的电化学法制备的多孔硅与常规电化学法制备的多孔硅相比,其表面更平整、细密、均匀。随着电流密度和氧化时间的增加,多孔硅的发光谱峰位蓝移。此实验结果符合量子限制模型。     

多孔硅可见光发射研究

用常规电化学方法制备了发射高效可见光的多孔硅样品。对样品进行了光谱研究。用非化学方法从样品表面得到了粉末状荧光物质(非多孔硅膜研磨产物),光谱测定证实它的光致发光光谱与原多孔硅样品光致发光光谱相同,粉末进一步研磨后仍能发出同样的可见光。多孔硅样品还可以实现阴极射线激发发出同样的高效可见光,但易因电子束的轰击而发光强度较快减弱。用扫描电镜(SEM)对多孔硅样品的形貌、结构、荧光粉末的形状、尺寸、多孔硅样品阴极荧光发射区域进行了系统的研究。实验结果表明多孔硅样品一般可分为三层结构:表面层、多孔层和单晶硅衬底,样品荧光是来源于其表面层的。对样品表层组分的x射线光电子谱(XPS)分析表明,此时的多孔硅表层有大量非硅元素存在,如:C、O、F(没考虑H),硅元素的原子个数比只占30％～50％。用同样的电化学方法在单晶硅未抛光面上和多晶硅未抛光面上制得了均匀发射可见光样品。上述实验结果说明,多孔硅的高效可见光发射是来源于样品制备过程中在其表面层中形成的粉末状荧光物质。     

多孔硅的氢化、氧化与光致发光

对于刚阳极氧化完的，阳极氧化后紧接着在Ｈ２Ｏ２中光照处理的及长期存放（１０个月）的三种多孔硅样品进行了持续激光照射，不断监视它们的光致发光（ＰＬ）与富利埃变换红外（ＦＴＩＲ）吸收光谱，并在最后对它们作了Ｘ射线光电子能谱（ＸＰＳ）测量，以确定它们所含氧化硅的情况．得出如下几条结论：（１）氢对多孔硅表面的钝化是不稳定的．（２）Ｓｉ—Ｈ键不是发光所必须的．（３）氧对多孔硅表面的钝化是稳定的，纳米硅周围氧化层的存在及其特性对于稳定的多孔硅可见光发射是至关重要的．对激光照射下多孔硅发光的退化提出了新的解释．     

用氧化多孔硅方法制备厚的SiO_2膜及其微观分析

用氧化多孔硅的方法来制备厚的 Si O2 成本低 ,省时 .氧化硅膜的厚度 ,表面粗糙度和组分这三个参数 ,对波导器件的性能有重要影响 ,扫描电子显微镜 ( SEM)、原子力显微镜 ( AFM)和俄歇分析得到 :氧化的多孔硅的膜厚已达 2 1 .2μm;表面粗糙度在 1 nm以内 ,Si和 O的组分比为 1∶ 1 .90 6.这些结果表明 ,用氧化多孔硅方法制备的厚 Si O2 膜满足低损耗光波导器件的要求     

铁钝化多孔硅的水热制备法及其光致发光特性

利用水热技术原位制备出铁钝化多孔硅样品,并对其发光特性进行了测试。样品具有较强的光致发光强度,而且在室温空气存放过程中其发光强度不发生衰减,发光峰位不发生蓝移。上述发光特性归因于样品表面形成的良好铁钝化。     

多孔硅PL谱的影响因素分析

通过阳极氧化电化学方法制备了多孔硅,并在室温下对不同条件下制得的多孔硅光致发光谱(PL谱)进行系统的分析.结果表明,随着阳极电流密度、阳极化溶液浓度和时间的增大,多孔硅的PL谱峰将发生"蓝移",并且PL峰强也显著增加,但过大的电流密度、阳极化溶液浓度和时间将导致PL峰强下降.另外,还发现PL谱存在多峰结构,而多孔硅在空气中放置时间的延长将引起其PL的短波峰"蓝移"和强度下降,但对长波峰只引起强度减弱,并不影响其峰位.PL谱的多峰结构可以认为是由于样品中同时存在"树枝"状和"海绵"状两种微观结构所产生的,在这个假设下,用多孔硅氧化后发光中心从硅表面移到二氧化硅层及量子限制模型能够解释上述现象.     

Nanostructured surface modification of ceramic-based microelectrodes to enhance biocompatibility for a direct brain-machine interface

Many different types of microelectrodes have been developed for use as a direct Brain-Machine Interface (BMI) to chronically recording single neuron action potentials from ensembles of neurons. Unfortunately, the recordings from these microelectrode devices are not consistent and often last for only a few weeks. For most microelectrode types, the loss of these recordings is not due to failure of the electrodes but most likely due to damage to surrounding tissue that results in the formation of nonconductive glial-scar. Since the extracellular matrix consists of nanostructured microtubules, we have postulated that neurons may prefer a more complex surface structure than the smooth surface typical of thin-film microelectrodes. We, therefore, investigated the suitability of a nano-porous silicon surface layer to increase the biocompatibility of our thin film ceramic-insulated multisite electrodes. In-vitro testing demonstrated, for the first time, decreased adhesion of astrocytes and increased extension of neurites from pheochromocytoma cells on porous silicon surfaces compared to smooth silicon sufaces. Moreover, nano-porous surfaces were more biocompatible than macroporous surfaces. Collectively, these results support our hypothesis that nano-porous silicon may be an ideal material to improve biocompatibility of chronically implanted microelectrodes. We next developed a method to apply nano-porous surfaces to ceramic insulated, thin-film, microelectrodes and tested them in vivo. Chronic testing demonstrated that the nano-porous surface modification did not alter the electrical properties of the recording sites and did not interfere with proper functioning of the microelectrodes in vivo.     

纳米硅／氧化硅体系光致发光机制

实际研究的多孔硅几乎都是氧化程度不同的氧化多孔硅，它与另一大类硅基发光材料纳米硅镶嵌氧化硅有相似的结构和发光特徵．两者都是由大量为氧化硅所包裹的纳米硅组成，可统称为纳米硅／氧化硅体系．它是当前研究最多并被普遍认为很有希望的硅基发光材料体系．本文主要讨论纳米硅／氧化硅体系光致发光的机制，文中扼要介绍了我自己所在的研究小组近十几年来的一些相关研究工作．     

铁电纳米结构的浸渍涂敷法制备和微结构STEM表征(英文)

本文利用浸渍涂敷法在硅基多孔氧化铝模版介质(孔径20nm-100nm)上制备了Pb(Zr0.53Ti0.47))3(PZT)铁电纳米结构,并利用扫描透射电子显微镜(STEM)观察了其表面形貌和剖面微结构.TEM像和X-射线能谱分析结果表明在多孔氧化铝模版孔道内形成了PZT纳米结构,其横向尺寸可通过改变氧化铝模版的孔径来调节.采用浸渍涂敷法可使PZT溶液贯穿整个氧化铝纳米孔道,在其内壁形成PZT涂层,厚度为4nm-15nm.氧化铝纳米孔道内的黑色TEM衬度线证实了PZT涂层的存在,其存在方式为连续介质型或离散的晶粒形状.平面STEM像显示PZT纳米结构具有椭球状形貌,这可能是由氧化铝纳米孔道的局部扭曲或PZT溶液在退火过程中的收缩引起的.在硅基多孔氧化铝模版介质上采用浸渍涂敷法制备的PZT有序纳米结构,在将来三维结构的非挥发性铁电存储器方面具有十分诱人的应用前景.     

多孔硅场致电子发射

研究了多孔硅冷阴极的场致电子发射特性，实验表明采用电化学阳极腐蚀、氧化、蒸电极等工艺可以制备一种平面薄膜型多孔硅冷阴极。在超高真空环境下测量了多孔硅冷阴极的电子发射特性。     

阳极氧化条件对多孔硅冷阴极场发射特性的影响

研究了多孔硅的制备条件对多孔硅冷阴极场发射特性的影响,实验表明多孔硅的制备条件如电解电流密度、电解时间等多孔硅冷阴极的场发射特性有较大的影响。     

Formation of two-layer composite-on-insulator structures based on porous silicon and SnO x . Study of their electrical and gas-sensing properties

The objective of this work is to fabricate and study multilayer “composite-on-insulator” sensor structures based on porous silicon and nonstoichiometric tin oxide. Two-layer structures “macroporous silicon-mesoporous silicon” on single-crystal silicon with sharp geometrical boundaries are grown. Test “composite-on-insulator” structures are fabricated. Oxide on macroporous silicon walls and a buried layer of oxidized mesoporous silicon play the role of the insulator. Nonstoichiometric tin oxide deposited onto the extended surface of oxidized macroporous silicon by chemical vapor deposition (CVD) is the sensitive layer. The gas sensitivity is studied upon exposure to NO₂ and degassing in air at room temperature. The sensitivity of the por-Si/SnO _x composite structures is higher than the sensitivity of tin-oxide film samples.     

电化学清洗在太阳能电池制绒前的应用

在太阳能电池制造工业中,为解决硅片制绒前的传统表面处理存在的药剂消耗多以及硅片去除量大的问题,引入电化学清洗的方法。这种方法是利用专用试剂电解后的强氧化性质,通过腐蚀、氧化与清洗的结合,有效清洗硅片表面有机物,且硅片去除量小。从实验中可以看出,去除量减少了1/2。通过应用金刚石膜电极,可高效生产专用试剂电解液。通过XPS显示,电化学清洗能够有效去除有机物污染。对比了电化学清洗与RCA清洗后硅片制绒的效果,证明电化学清洗的制绒效果良好。使用后的电解液经过电极处理后,仍能有效重复使用,说明电化学清洗可有力地控制排放,是大型工业生产中有效去除有机物的方法。     

Effect of thermal oxidation on charge carrier transport in nanostructured silicon

The effect of short-time annealing in air on the conductivity of porous silicon in two different directions (parallel and orthogonal to the sample surface) is studied. The samples under study are produced by electrochemical etching of single-crystal silicon wafers with (100)-oriented surfaces. It is found that thermal oxidation of the resulting porous silicon layers has different effects on the conductivity measured normally and parallel to the sample surface. For the oxidized samples, the conductivity in the direction orthogonal to the surface is noticeably higher than the conductivity in the direction parallel to the surface. The results are interpreted in the context of the model of charge carrier transport with consideration for potential barriers at the boundaries of silicon nanocrystals.     

Effect of phosphorus diffusion to the recombination at the Si–SiO2 interface

Measurements of the excess carrier lifetime of diffused and undiffused, thermally oxidized silicon samples are used to show that the presence of a phosphorus diffusion results in a modification of the interface defect properties, resulting in significantly higher surface recombination velocity compared to undiffused samples. In addition, for undiffused samples, positive and negative charges are demonstrated to be equally effective at passivating the silicon surface. Both results hold for (100) and (111) oriented samples, as well as for samples subjected to various post‐oxidation treatments. The results may have practical implications particularly for the design of rear contacted solar cells. Copyright © 2008 John Wiley & Sons, Ltd.     

Size Control of Nanoscale Silicon Particles Formed in Thermally Annealed A-Si∶H Films and Its Photoluminescence

A method to control the si ze of nanoscale silicon grown in thermally annealed hydrogenated amorphous silico n (a-Si∶H) films is reported. Using the characterizing techniques of micro-Ra man scattering, X-ray diffraction and computer simulation, it is found that the sizes of the formed silicon particles change with the temperature rising rate i n thermally annealing the a-Si∶H films. When the a-Si∶H films have been anne aled with high rising rate( ~100 ℃/s), the sizes of nanoscale silicon particle s are in the range of 1.6~15 nm. On the other hand, if the a-Si∶H films have been annealed with low temperature rising rate(~1 ℃/s), the sizes of nanoscale silicon particles are in the range of 23~46 nm. Based on the theory of crystal nucleation and growth, the effect of temperature rising rate on the sizes of th e formed silicon particles is discussed. Under high power laser irradiation, in situ nanocrystallization and subsequent nc-Si clusters are small enough for vis ible light emission, authors have not detected any visible photoluminescence(PL) from these nc-Si clusters before surface passivation. After electrochemical ox idization in hydrofluoric acid, however, intense red PL has been detected. Cycli c hydrofluoric oxidization and air exposure can cause subsequent blue shift in t he red emission. The importance of surface passivation and quantum confinement i n the visible emissions has been discussed.