压电陶瓷微动台的复合控制

压电陶瓷微动台的迟滞非线性严重影响其动态定位精度,为了解决这一问题,采用一种改进的PI模型对微动台的迟滞非线性进行了建模.为了提高传统PID算法对压电陶瓷微动台的动态定位性能,将改进的PI模型与传统PID算法组合构成前馈复合控制算法,并进行了微动台的慢速与快速动态定位实验.结果表明,对同频曲线定位时,前馈PID复合算法的最大误差为传统PID算法的40％左右,平均误差为传统算法的20％～30％左右;对多频曲线定位时,前馈PID复合算法的最大误差和平均误差为传统PID算法的33％左右.数据表明前馈PID复合算法的动态定位性能明显优于传统PID算法.     

Ultra-precise tracking control of piezoelectric actuators via a fuzzy hysteresis model

In this paper, a novel Takagi-Sugeno (T-S) fuzzy system based model is proposed for hysteresis in piezoelectric actuators. The antecedent and consequent structures of the fuzzy hysteresis model (FHM) can be, respectively, identified on-line through uniform partition approach and recursive least squares (RLS) algorithm. With respect to controller design, the inverse of FHM is used to develop a feedforward controller to cancel out the hysteresis effect. Then a hybrid controller is designed for high-performance tracking. It combines the feedforward controller with a proportional integral differential (PID) controller favourable for stabilization and disturbance compensation. To achieve nanometer-scale tracking precision, the enhanced adaptive hybrid controller is further developed. It uses real-time input and output data to update FHM, thus changing the feedforward controller to suit the on-site hysteresis character of the piezoelectric actuator. Finally, as to 3 cases of 50 Hz sinusoidal, multiple frequency sinusoidal and 50 Hz triangular trajectories tracking, experimental results demonstrate the efficiency of the proposed controllers. Especially, being only 0.35% of the maximum desired displacement, the maximum error of 50 Hz sinusoidal tracking is greatly reduced to 5.8 nm, which clearly shows the ultra-precise nanometer-scale tracking performance of the developed adaptive hybrid controller.     

Precision position control using combined piezo-VCM actuators

This paper presents the control performance of a high-precision positioning table using the hybrid actuators composed of the piezoelectric (PZT) actuators and voice-coil motors (VCMs). The combined piezo-VCM actuator features two main characteristics, i.e., a large operation range due to the long stroke of VCM, and a high precision and heavy load positioning ability due to the actuation of PZT impact force. In this paper, a one-degree-of-freedom (1-DOF) experimental setup was configured to examine the control performance and the parametric identification for the VCM was performed based on the recursive-least-square (RLS) method. The control performance was effectively demonstrated by using a switching controller configured by an integral variable structure controller (IVSC) for the VCM to conduct rough position control and an impact force controller (IFC) for the PZT actuator to conduct fine position control. The experimental results showed that the positioning table having mass 881 g was successfully positioned within the positioning accuracy of 10 nm by both the forward and backward positioning processes. In the forward control, it totally took 1.253 s for the sliding table to reach the target position of 450 μm; in the backward control, it took 1.387 s for the sliding table moving from the position of 450 μm to the target position of 200 μm.     

压电陶瓷驱动微位移机构迟滞非线性改善方法研究

压电陶瓷驱动器在精密微位移系统中有着广泛的应用,但其固有的迟滞非线性严重影响系统的运动精度,使控制困难.通过数学建模方法建立压电陶瓷的迟滞曲线逆模型,并用此模型对压电陶瓷进行位移补偿,可以有效减小压电陶瓷迟滞非线性对系统精确控制的影响.提出一种用两个压电陶瓷协同驱动微动平台运动的微位移机构,通过基于迟滞逆模型的开环控制方法,对压电陶瓷位移进行误差补偿,可以实现微动平台运动与控制信号较好的线性对应关系.     

Modeling of hysteresis in piezoelectric actuators using neural networks

For the application of neural networks to the approximation of hysteresis which is characterized of multi-valued mapping and non-smooth nonlinearities, a novel modeling technique based on a transformation of one-to-one mapping is proposed in this paper. In this method, a special hysteretic operator is introduced to describe the change tendency of the hysteresis with regard to its input. Then an expanded input space is constructed for hysteresis with the introduction of such hysteretic operator, on which the multi-valued hysteresis is decomposed into a one-to-one mapping. Thus, neural networks model for hysteresis is derived, avoiding the calculation of the gradient of hysteresis. Subsequently, for approximation of rate-dependent hysteresis in piezoelectric actuators which is caused by the dynamic voltage excitations, a hybrid model, i.e. the dynamic extension of the proposed neural hysteresis submodel is developed. In the model, a linear dynamic block is introduced in series with the proposed neural model to allow for rate-dependent dynamics of the piezoelectric actuator simultaneously. Also the corresponding optimization algorithm by use of the modified Levenberg–Marquarqt (MLM) method is given. Finally, the experimental validation results of applying both the proposed neural hysteresis model and hybrid model to a piezoelectric actuator are presented.     

Real-time inverse hysteresis compensation of piezoelectric actuators with a modified Prandtl-Ishlinskii model

This paper presents a novel real-time inverse hysteresis compensation method for piezoelectric actuators exhibiting asymmetric hysteresis effect. The proposed method directly utilizes a modified Prandtl-Ishlinskii hysteresis model to characterize the inverse hysteresis effect of piezoelectric actuators. The hysteresis model is then cascaded in the feedforward path for hysteresis cancellation. It avoids the complex and difficult mathematical procedure for constructing an inversion of the hysteresis model. For the purpose of validation, an experimental platform is established. To identify the model parameters, an adaptive particle swarm optimization algorithm is adopted. Based on the identified model parameters, a real-time feedforward controller is implemented for fast hysteresis compensation. Finally, tests are conducted with various kinds of trajectories. The experimental results show that the tracking errors caused by the hysteresis effect are reduced by about 90%, which clearly demonstrates the effectiveness of the proposed inverse compensation method with the modified Prandtl-Ishlinskii model.     

压电微位移台的动态迟滞建模及实验验证

为了提高压电微位移平台快速定位的精确度,建立了一种表征压电微位移平台驱动电压与输出位移关系的定位模型。考虑压电工作台在快速、大行程精确定位过程中会受压电陶瓷迟滞特性及本身动态特性的影响,本文采用BoucWen模型描述压电陶瓷迟滞特性,并结合压电工作台的动态特性进行共同建模,使模型同时体现压电工作台的动态特性与迟滞特性。为了验证模型的正确性,搭建了基于压电微位移平台和相关驱动器的实验设备对模型进行了实验验证,并进行了测控程序的二次开发。研究结果表明,与单纯的Bouc-Wen模型相比,提出模型在最大位移输出为40μm,输入电压频率为40Hz时的最大误差由3.04μm下降到了0.67μm,此时最大相对误差为1.68%。得到的结果验证了提出的模型可较好地模拟压电工作台的迟滞特性与动态特性,大大提高压电微位移平台在快速、大行程定位中的精确度。     

压电陶瓷微位移器件控制模型的研究

从不同角度介绍了压电陶瓷微位移器件的两种控制模型.首先,借助于统计物理学分析,结合数学建模方法,建立了一个简单实用的压电陶瓷的迟滞数学模型.其次,借助于弹性体变形理论,介绍了压电/电致伸缩陶瓷的归一化控制模型,从理论上说明了采用电极化强度的方法可以有效减小迟滞的观点.并设计了两种实验系统,对两种控制模型进行了实验验证,实验结果表明,所建立的两种模型可有效减小压电陶瓷的迟滞非线性误差,提高压电陶瓷微位移的控制精度,有助于实现压电陶瓷驱动器的高精度开环微位移控制.     

Dynamic characteristics and dual control of a ball screw drive with integrated piezoelectric actuator

This paper describes the precision continuous path tracking control by using a dual-actuated single stage. First, fine-drive mechanism and the dynamic model of the entire drive system are described. In the simulation model, the dynamic characteristic of the dual-actuated stage is investigated to see whether it can provide precise motion by using dual control. Second, the fine motion controller is designed. Adjusting the control parameters, a positioning resolution of 20 nm and a bandwidth of 260 Hz were obtained. Third, the frequency responses of coarse and fine drives are experimentally investigated. After that, the dual controller is designed based on the investigated dynamics. Finally, whether coarse motion and fine motion could work complimentarily by the dual servo is examined in the experiments. By using the simultaneous dual controller, tracking errors were reduced sufficiently compared to the single coarse control.     

Output feedback integral control of piezoelectric actuators considering hysteresis

In this paper, output feedback integral control of piezoelectric actuators is considered with respect to the hysteresis effect. The linear dynamics of the piezoelectric actuator is modeled as a linear state space system with an input nonlinearity that considers the hysteresis effect. A proof of the Lyapunov stability of the system with integral control is presented, and a method for deriving the upper bound for the regulating gain is shown. A simple example is used to illustrate the approach, and then the approach is applied for tracking a step signal with an experimental single-axis piezoelectric actuator to verify that the system is stable.     

压电驱动器迟滞非线性的分数阶建模及实验验证

存在于压电陶瓷全工作范围内的迟滞非线性特性,往往会导致压电陶瓷执行器的系统精度下降、振荡,甚至造成系统的不稳定。针对周期性的正弦输入信号,提出一种基于分数阶算子的迟滞建模方法。首先,在分析压电特性和分数阶算子特性的基础上,采用结构简单参数少的分数阶算子来描述压电陶瓷的迟滞特性;然后,搭建了基于dSpace的压电驱动微位移定位实验平台;最后,将基于分数阶算子的迟滞建模方法应用于压电驱动微位移定位平台中,对压电陶瓷的迟滞非线性特性进行辨识。实验结果表明采用基于分数阶的迟滞模型(FOM)比传统的Prandtl-Ishlinskii模型(PIM)及其改进的增强型Prandtl-Ishlinskii模型(EPIM)更有优势;在低频段,FOM模型比PIM模型和EPIM模型精度略有提高,但是在高频段,FOM模型比PIM模型和EPIM模型精度则提高显著。在输入频率为100HZ的情况下,所提出的FOM模型较PIM模型的均方根误差(RMSE)值精度提高69.84%,较EPIM模型的RMSE值精度提高68.88%。     

Supervisory hybrid control of piezoelectric actuators utilized in tracking piecewise continuous trajectories

This article presents a supervisory hybrid control design for piezoelectric actuators utilized in tracking trajectories with intermittent jump discontinuities. We use a previously developed robust adaptive controller and a standard PID controller to construct this hybrid control strategy. We show that when the sub-controllers are used for step tracking, while primarily tuned for continuous trajectory tracking, large undesirable oscillations occur. Conversely, when the controllers are retuned for step tracking, their performance degrades in tracking high-frequency continuous trajectories. Thus, a supervisory hybrid controller is developed to track desired trajectories with occasional discontinuities, using both the robust adaptive and the PID controllers. The robust adaptive controller performs as the primary controller for tracking the continuous segments of the desired trajectory, while the PID controller is activated when the steps occur. Results indicate that the proposed supervisory hybrid controller outperforms both sub-controllers in tracking high-frequency trajectories with intermittent discontinuities.     

Adaptive sliding mode control of a piezo-actuated bilateral teleoperated micromanipulation system

Piezoelectric actuators are widely used in micro manipulation applications. However, hysteresis nonlinearity limits the accuracy of these actuators. This paper presents a novel approach for utilizing a piezoelectric nano-stage as the slave manipulator of a teleoperation system based on a sliding mode controller. The Prandtl-Ishlinskii (PI) model is used to model actuator hysteresis in feedforward scheme to cancel out this nonlinearity. The presented approach requires full state and force measurements at both the master and slave sides. Such a system is costly and also difficult to implement. Therefore, sliding mode unknown input observer (UIO) is proposed for full state and force estimations. Furthermore, the effects of uncertainties in the constant parameters on the estimated external forces should be eliminated. So, a robust adaptive controller is proposed and its stability is guaranteed through the Lyapunov criterion. Performance of the proposed control architecture is verified through experiments.     

Force control of a piezoelectric actuator based on a statistical system model and dynamic compensation

Piezoelectric actuators present a promising option if actuation of small-sized robot joints is considered. They develop forces of several newtons at velocities in the cm/s range while their dimensions and weight remain small as compared to electric motors. This work presents an approach for modelling a class of contemporary, non-resonant translatory piezoelectric actuators. The proposed modelling approach results in three motor models of increasing complexity independently of the low-level piezoelectric properties of the driving elements. The basic model establishes a static relation between motor velocity and drive frequency for a free-moving motor. The second model is a non-linear extension of the first model which introduces external load forces. The final model introduces time-dependent aspects by employing system identification techniques. The final model is used to develop a force compensation mechanism which restores linearity in the motor operation even in the loaded case. Based on the linearised model, standard control design techniques are applicable to design an explicit force controller. Limits on the performance of the controller are derived. The actual performance of the controller is evaluated both in simulations and experiments by pulling on tendons of different elasticity.     

High-speed force load in force measurement in liquid using scanning probe microscope

This article presents an inversion-based iterative feedforward-feedback (II-FF/FB) approach to achieve high-speed force load in force measurement of soft materials in liquid using scanning probe microscope (SPM). SPM force measurement under liquid environment is needed to interrogate a wide range of soft materials, particularly live biological samples. Moreover, when dynamic evolution of the sample occurs during the measurement, and/or measuring the rate-dependent viscoelasticity of the sample, the force measurement also needs to be acquired at high-speed. Precision force load in liquid, however, is challenged by adverse effects including the thermal drift effect, the reduction of the signal to noise ratio, the distributive hydrodynamic force effect, and the hysteresis and vibrational dynamics effects of the piezoelectric actuators (for positioning the probe relative to the sample), particularly during high-speed measurement. Thus, the main contribution of the article is the development of the II-FF/FB approach to tackle these challenges. The proposed method is illustrated through an experimental implementation to the force-curve measurement of a poly (dimethylsiloxane) sample in liquid at high-speed.     

Modeling of piezoelectric actuator for compensation and controller design

This work proposes a novel method for describing the hysteretic non-linearity of a piezoelectric actuator. The hysteresis behavior of piezoelectric actuators, including the minor loop trajectory and the residual displacement near zero input, are modeled by a set of hysteresis operators, including a gain and an input-dependent lag, as well as the parameter scheduling method. A hysteresis model, using the identified parameters, and containing only the dominant hysteresis operator, is presented herein. Based upon a simplified hysteresis model, tracking is controlled to reduce the non-linear effects in the characteristics of the piezoelectric actuator. A proportional-integral (PI) controller, with inverse model feed-forward, suppresses the tracking error to within ±1% full span range (FSR) of the actuator, noticeably improving the tracking performance of the piezoelectric actuator.     

Model reference adaptive control for a piezo-positioning system

Piezoelectric (PZT) actuators having the characteristic of infinitely small displacement resolution are popularly applied as actuators in precision positioning systems. Due to its nonlinear hysteresis effect, the tracking control accuracy of the precision positioning system is difficultly achieved. Hence, it is desirable to take hysteresis effect into consideration for improving the trajectory tracking performance. In this paper, a model reference adaptive control scheme based on hyperstability theory is developed for a moving stage system driven by a PZT actuator. It is worth emphasizing that the controller can be constructed without a nonlinear hysteresis dynamic equation to compensate the hysteresis effect. According to simulation results, the tracking error was only nanometer order. Through experimental examinations, the tracking performance was obtained as precision as ten nanometers order which is the resolution limitation of the measurement system. The effectiveness of the proposed adaptive control scheme was validated.     

Observer-based sliding mode control with adaptive perturbation estimation for micropositioning actuators

Control of piezoelectric actuators is under the effects of hysteresis that could affect actuators micropositioning accuracy. In this paper a modified Prandtl-Ishlinskii (PI) operator and its inverse is utilized for both identification and real time compensation of the hysteresis effect. As a result, the actuator dynamic model would be transformed to the second order linear dynamic model. Considering the parametric uncertainties, PI estimation error and probably unmodeled dynamics, a variable structure controller coupled with adaptive perturbation estimation is proposed for trajectory tracking of the piezoelectric position. Considering the very noisy output of the actuator, a high-gain observer would estimate full states from the only measurable position trajectory. The stability of the controller in the presence of the estimated state is demonstrated with the Lyapunov criterion. Comparing to the widely used proportional-integral controller, the experimental results depicts that the proposed approach is greatly achieved in precisely tracking of multiple frequency trajectories.     

Adaptive feed-forward hysteresis compensation for piezoelectric actuators

Piezoelectric actuators are often employed for high-resolution positioning tasks. Hysteresis and creep nonlinearities inherent in such actuators deteriorate positioning accuracy. An online adaptive nonlinear hysteresis compensation scheme for the case of symmetric hysteretic responses and certain periodic reference trajectories is presented. The method has low complexity and is well suited for real-time implementation. Experimental results are presented in order to verify the method, and it is seen that the error due to hysteresis is reduced by more than 90% compared to when assuming a linear response.     

扫描隧道显微镜扫描器的迟滞非线性控制

压电驱动器被广泛应用于扫描隧道显微镜(scanning tunneling microscope,简称STM)的扫描器,但压电材料本身的迟滞非线性特性影响了STM的扫描精度。为了补偿由于迟滞非线性带来的扫描器控制误差,提高STM的扫描精度,基于迟滞非线性模型,设计了前馈控制器,并与PID反馈控制相结合。利用所设计的控制器进行了扫描实验,并与位移反馈控制扫描进行对比。实验结果表明,采用位移反馈控制时光栅周期相对测量误差和光栅线宽相对测量误差分别为4.41%和2.65%,采用迟滞逆模型与PID反馈的复合控制后,光栅周期相对测量误差和光栅线宽相对测量误差分别减小到1.26%和0.27%,迟滞引起的非线性误差得到了补偿,减小了扫描器控制误差,提高了扫描精度。