基于卡尔曼预测的差动共焦轮廓跟踪测量方法

针对轴向扫描式差动共焦测量法(ASDCM)测量轮廓效率低下问题,提出一种基于卡尔曼预测的差动共焦轮廓跟踪测量方法。该方法使用激光差动共焦轴向响应曲线数百纳米量程的线性区间实现了表面连续轮廓高精度线性传感测量,提高了测量效率;同时引入基于卡尔曼预测器的轮廓跟踪原理利用已测轮廓点数据对未测表面预测并跟踪,扩展了线性传感轮廓测量法测量范围。实验结果表明,该方法相对于ASDCM法测量效率提升了8倍,且实现了轮廓PV值大于线性传感测量范围的标准椭圆柱高精度跟踪测量,激光聚变靶丸内轮廓圆度重复测量标准差达3 nm。为精密元器件表面连续轮廓的高精度、快速、无损测量提供了一种高质量方法。     

表面微观轮廓的高分辨率光学测量方法

较全面地介绍了用于表面微观轮廓测量的几种高分辨率甚至可达亚纳米的光学测量方法及其最新进展.文中重点描述了以扫描共焦显微检测法、离焦误差检测法为代表的光触针法,以TOPO轮廓仪、Nomarski显微镜、外差干涉轮廓仪、双焦干涉轮廓仪和同轴干涉轮廓仪为代表的干涉测量法和以扫描近场光学显微镜及光子扫描隧道显微镜为代表的近场光学法三种适用于表面微观轮廓测量的光学测量方法,分别介绍了其工作原理、特性、发展现状及存在问题,通过对这些方法的对比和总结,阐述了表面微观轮廓纳米级光学测量的发展趋势.     

基于并行共聚焦显微系统的物方差动轴向测量

差动共聚焦显微成像技术可以获得很高的轴向测量精度,然而已有的差动共聚焦测量技术主要适用于激光扫描共聚焦,还不能满足微纳加工过程中对工件进行非接触式的在线、在位测量的要求。本文在分析差动共聚焦显微成像系统能够实现轴向测量原理的基础上,提出了适用于并行共聚焦技术的轴向测量方法。该方法利用均匀白光照明,在像方只需要使用一台相机做探测器,在物方通过移动载物台分别对样品在焦前和焦后两次成像,根据预先刻度好的差动曲线就可以得出物体表面的高度。理论模拟与实验结果均表明,该方法可以实现高精度的轴向测量,对500nm的台阶样品测量的平均误差为2.9nm,相对误差为0.58%。该方法简单、廉价、测量精度高,可以用于普通显微镜,易于实现样品的三维快速形貌还原与测量。     

激光 ICF 聚变靶丸轮廓测量系统标定方法

针对激光惯性约束聚变靶丸轮廓高精度测量系统的溯源标定问题,提出一种基于激光差动共焦测量原理的标定溯源方法。该方法基于激光差动共焦靶丸测量系统轴向响应曲线过零点精确对应测量系统焦点的性质,首先利用激光差动共焦靶丸测量系统测量经中国计量科学研究院计量检定的标准椭圆块的圆度,其次通过比对测量值和标准椭圆块圆度计量值,得出该系统测量传递系数为1.03,最后通过多次检定验证测量的方法,完成系统的高精度标定。实验结果显示,利用标定完成的系统进行激光聚变靶金属球比对测量,其标准差为37 nm,该标定方法的测量重复性为17 nm,其为靶丸表面轮廓的高精度测量奠定了坚实基础。     

基于数字微镜器件的并行彩色共聚焦测量系统

彩色共聚焦技术因其高分辨率、高测速的特点,在表面形貌测量领域备受关注,然而现有的彩色共聚焦技术多为单点测量,一定程度上限制了测量效率。本文在彩色共聚焦技术的基础上,以DMD作为光分束器件,结合自主研发的大口径色散管镜,利用面阵彩色相机作为光电接收器件,研究和建立了基于数字微镜器件的并行彩色共聚焦实验平台,实现了对被测物面上多个探测点的并行图像处理。最终,利用所搭建的并行彩色共聚焦测量系统,对50μm高的台阶和自制台阶进行了测量,并对硬币的表面形貌进行了三维恢复。实验结果表明,该测量系统的轴向测量范围为300μm,测量精度达到微米级;同时,能够较好地恢复硬币的表面形貌特征,具有较好的测量效率与可靠性。     

Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy

This paper describes a multi-probe scanning system comprising three laser interferometers and one autocollimator to measure a flat bar mirror profile with nanometer accuracy. The laser interferometers probe the surface of the flat bar mirror that is fixed on top of a scanning stage, while the autocollimator simultaneously measures the yaw error of the scanning stage. The flat bar mirror profile and horizontal straightness motion error are reconstructed by an application of simultaneous linear equations and least-squares method. Measurement uncertainties of the flat bar mirror profile were numerically evaluated for different installation distances between the laser interferometers. The average measurement uncertainty was found to be only 10 nm with installation distances of 10 and 21 mm between the first and second, and first and third interferometers, respectively. To validate the simulation results, a prototype system was built using an X–Y linear stage driven by a stepper motor with steps of 1 mm along the X direction. Experiments were conducted with fixed interferometers distances of 10 and 21 mm, as in the simulation, on a flat bar mirror with a profile known to an accuracy of λ = 632.8 nm. The average value of two standard deviations (95%) of the profile calculated over ten experiments was approximately 10 nm. Other results from the experiment showed that the system can also measure the yaw and horizontal straightness motion errors successfully at a high horizontal resolution. Comparing with the results measured by ZYGO's interferometer, our measured data excluding some edge points showed agreement to within approximately 10 nm. Therefore, we concluded that our measurement profile has an accuracy in the nanometer range.     

激光共焦透镜曲率半径测量系统

基于共焦技术独特的轴向层析定焦能力并结合气浮导轨平移台和激光干涉仪测长系统,研制了一套高精度、非接触激光共焦透镜曲率半径测量系统。该系统利用共焦轴向光强响应曲线的峰值点对应系统物镜聚焦焦点这一特性,使用峰值点对被测透镜的猫眼位置及共焦位置进行精确定位,并结合激光干涉仪获得透镜猫眼位置及共焦位置坐标值,从而计算得到透镜的曲率半径。系统由主控软件控制气浮导轨带动被测透镜在猫眼位置及共焦位置附近进行扫描测量,并实现信号采集和数据处理。实验表明,利用该系统测量透镜的曲率半径时,测量重复性优于2 μm,满足国内高精度透镜曲率半径测量的精度需求。该系统测量速度快、操作简便、结构简单且易于实现小型化。     

Multipoint scanning dual‐detection confocal microscopy for fast 3D volumetric measurement

We propose a multipoint scanning dual‐detection confocal microscopy (MS‐DDCM) system for fast 3D volumetric measurements. Unlike conventional confocal microscopy, MS‐DDCM can accomplish surface profiling without axial scanning. Also, to rapidly obtain 2D images, the MS‐DDCM employs a multipoint scanning technique, with a digital micromirror device used to produce arrays of effective pinholes, which are then scanned. The MS‐DDCM is composed of two CCDs: one collects the conjugate images and the other collects nonconjugate images. The ratio of the axial response curves, measured by the two detectors, provides a linear relationship between the height of the sample surface and the ratio of the intensity signals. Furthermore, the difference between the two images results in enhanced contrast. The normalising effect of the MS‐DDCM provides accurate sample heights, even when the reflectance distribution of the surface varies. Experimental results confirmed that the MS‐DDCM achieved high‐speed surface profiling with improved image contrast capability.     

基于像散原理的并行共焦检测的微形貌参数的可视化测量

为实现对微结构表面轮廓参数的精确测量,用基于像散原理的并行共焦检测系统获取微结构表面的三维信息,进而实现对微结构表面参数的可视化测量。考虑到微结构表面特点,采用累加弦长双三次样条插值曲面对其表面进行重构。并选择高的插值细分倍率获得连续光顺廓形表面,通过拾取拟合曲面上的点而不是廓形局部三角面片上的点实现三维廓形参数评定。由重构曲面模拟结果显示:累加弦长双三次样条重构微结构表面可以有效地实现对微结构表面参数的精确测量。     

激光三角法在锥管螺纹轮廓测量中的应用

设计了基于激光三角测量原理的锥管螺纹轮廓测量系统,以非接触扫描的测量方法实现螺纹轮廓的自动测量。系统以ADu C845单片机为核心,采用激光三角位移传感器、精密丝杠和编码器分别获取螺纹垂直(Y轴)和水平(X轴)方向的原始数据,进而得到螺纹轮廓的坐标值。对数据进行相应的滤波和处理后综合得到螺纹轮廓,通过参数的算法模型得出螺纹的牙高、螺距和锥角等参数。     

High-precision radius measurement of ball indenter

To solve the problem of calibrating the radius of a ball indenter in a hardness tester, a laser confocal radius measurement and calibration method for the ball indenter is proposed without separating the ball from the body of the indenter. The laser confocal radius measurement and calibration method uses the maximum of the confocal axial intensity curve to precisely identify the cat’s eye and confocal position of the test ball indenter. The distance between these two positions is then measured to achieve high-precision radius measurement. The theoretical analyses and experimental results indicate that the radius measurement uncertainty of the ball indenter with a diameter of 1.5875 mm is within 0.12 μm.     

激光制导测量机器人运动系统设计

激光跟踪测量系统是目前最新型的便携式空间大尺寸坐标测量系统,但在测量大型被测对象时,人工布点及测量过程繁杂,测量效率低,并造成被测对象几何形状变形,严重影响其测量精度。为解决以上问题,提出了新型的“光束运动—光靶跟踪”激光跟踪测量方法,建立了新型激光跟踪测量方法论,并在此理论基础上,研制开发了一种能够在水平和垂直被测对象表面上运动小型轮臂复合式激光制导测量机器人。该机器人机构融合轮式机构、爬行臂式结构和真空吸附式机构优点,并且具有重量轻、体积小、运动灵活和反应快速等特点,可以根据不同的被测对象表面特征变换测量模式,利用轮式结构实现机器人在水平被测表面上高速远距离运动,利用爬行臂式和真空吸附式机构实现机器人在倾斜光滑表面上灵活地爬行和转向。对其运动特性进行了详细的分析。最后利用激光跟踪仪和三坐标测量机对研制激光制导测量机器人进行了性能测试,试验结果证明了该机器人能跟踪激光束自动高效地完成被测对象实体测量。     

Linear computed tomography of two-phase distribution in a rectangular channel

Two-phase flow is closely linked with the efficiency and safety of industrial processes in many fields, and there are various instruments for measuring the two-phase distribution. Among them, γ-ray and ultrafast X-ray tomography systems are most promising to break the technical barrier of gas-liquid measurement in the flow channel of high-temperature and high-pressure (up to 15 MPa/342 °C) nuclear reactors. Hence, A CT measurement method has been developed for imaging a two-phase distribution of a central plane oriented in axial direction in a rectangular duct, which was tested theoretically using a numerical phantom and experimentally on a preliminary tomographic hardware with a mechanically traversed gamma source and a detector unit, as well as a static phantom simulating gas bubbles in the pipe. After completing experimental and numerical imaging of a multi-bubbles phantom, the two-phase contrast and locations of bubbles in the experimental and simulated reconstruction images showed a good agreement and supported the feasibility of applying the linear scanning technique to realize two-phase detection in rectangular channels. The sensitivity analyses of scanning range, photon-registering time and scanning step length conveyed the optimal experimental strategy for this system. Morphological operation has also been imposed on image processing achieving elimination of severe ringing artefacts.     

激光差动共焦透镜中心厚度测量系统的研制

基于高精度光学共焦定位技术研制了一种全新的非接触透镜中心厚度测量系统,该系统利用差动共焦技术的高轴向层析特性和轴向响应曲线的绝对零点对被测透镜的前表面顶点和后表面顶点分别进行精密瞄准定位;同时,利用激光干涉仪获得透镜前、后表面顶点的位置坐标;然后通过光线追迹算法计算透镜中心厚度,进而实现了透镜中心厚度的高精度非接触测量。实验结果表明,该系统测量精度高,测量标准差小于1μm,满足透镜中心厚度测量的精度要求。     

Pitch deviation measurement of an involute spur gear by a rotary profiling system

This paper presents surface-profiling based gear pitch deviation measurement for an involute spur gear. A rotary profiling system, which consists of an air-bearing spindle and a displacement sensor with a diamond stylus, is employed to measure gear pitch deviation. In measurement of gear pitch deviation, an eccentric error between a gear axis and a motion axis of the rotary stage in the profiling system would affect accuracy of gear profile measurement. In this paper, at first, the influence of the eccentric error on measurement of gear pitch deviation is estimated in computer simulation based on a geometric model of the profiling system. After that, a new scanning method named “opposite-direction dual scanning method” is proposed so that a steep profile of gear flank surface with a local slope of up to 90° can be measured by the developed rotary profiling system. For compensating distortions in the measured gear tooth profile, which are induced not only by the eccentric error but also by a probe offset introduced by the proposed scanning method, a self-calibration and compensation method is applied. To verify the feasibility of the proposed method, measurement of gear pitch deviation of a master involute spur gear with a certificate data is carried out. Measurement uncertainty of the proposed method is also analyzed.     

Non-linear dynamic compensation and re-sampling for tactile scanning measurement of curved surface topography based on GPS standards

Tactile scanning method is widely used for curved surface topography measurement. Owing to the non-linear transformation process from the vertical translational displacement of the measured point (the coordinates of stylus tip) to the angular displacement of the stylus tip (measured by the cylindrical diffraction grating), the non-linear error exists within the horizontal and vertical coordinates of the obtained sampling data. And the non-linear error normally rises with the increasing of the measurement range.     

On-machine profile measurement of a micro cutting edge by using a contact-type compact probe unit

A new contact-type on-machine measurement system is designed and developed for the evaluation of a micro cutting edge profile. The measurement system is composed of a compact probe unit having a sharp stylus mounted on a flexible beam, an inner displacement sensor for the detection of the stylus displacement, and a two-axis precision positioning system. For the evaluation of tool faces having a steep slope, a new probing procedure with the enhancement of the inner displacement sensor integrated into the probe unit is newly proposed. After the design and development of the probe unit, the feasibilities of the developed measurement system and the proposed probing procedure are demonstrated through some basic experiments. Regarding the out-of-straightness and angular error motion of the two-axis positioning system employed in the developed measurement system, a pair of length gauges is newly employed to reduce the influences of error motions of the stage system. The topographic profile of the micro cutting edge obtained by the measurement system with the modified probe unit is then compared with those obtained by a commercial stylus profiler and a laser confocal microscope. The feasibility and effectiveness of the developed on-machine tool edge profile measurement system are also demonstrated through uncertainty analysis based on the GUM with the Monte-Carlo method.     

Thickness estimation of fluorescent sections using a CSLM

A novel method for the measurement of the section thickness of LM-plastic embedded specimen has been developed. This method makes use of the fluorescence that comes from standard routine stainings such as haematoxylin and eosin and periodic acid-Schiff. An x-z profile of the specimen is first scanned using a confocal scanning laser microscope. The full-width half-maximum, FWHM, of the profile is computed and used as a measure of the specimen thickness. This method has proven to be simple and quick: a slide with five sections takes less than 1 min to measure. A theoretical treatment is presented which shows that the FWHM of the axial fluorescent profile is a good estimate of the actual thickness when the sample thickness is greater than 20 (when thickness is expressed in generalized longitudinal optical coordinates). This corresponds to a thickness of about 1μm when using an NA=1.3 oil-immersion objective and 488-nm excitation. The relative error in thickness is then less than 10%. Simulations and experiments have been carried out to examine how problems such as bleaching, sample tilt and curvature of field influence the FWHM. The results show that the method is robust and insensitive to such problems.     

Simple method to determine linearity deviations of topography measuring instruments with a large range axial scanning system

The use of areal characterization of surface texture with high accuracy in a quality control process requires reliability. Therefore, regular inspection of the measurement systems is needed. Important metrological features of a measurement system in dimensional metrology are the amplification factor and linearity.This paper presents a simple method for characterizing the axial scanning system of areal topography measuring instruments with little expense and effort, well suited for industrial routine calibration in the field. The method is based on employing a single material measure with a range of step heights. It is shown that the amplification factor and linearity deviations can be determined and adjusted for large axial measurement ranges.     

Methods to calibrate and scale axial distances in confocal microscopy as a function of refractive index

Accurate distance measurement in 3D confocal microscopy is important for quantitative analysis, volume visualization and image restoration. However, axial distances can be distorted by both the point spread function (PSF) and by a refractive‐index mismatch between the sample and immersion liquid, which are difficult to separate. Additionally, accurate calibration of the axial distances in confocal microscopy remains cumbersome, although several high‐end methods exist. In this paper we present two methods to calibrate axial distances in 3D confocal microscopy that are both accurate and easily implemented. With these methods, we measured axial scaling factors as a function of refractive‐index mismatch for high‐aperture confocal microscopy imaging. We found that our scaling factors are almost completely linearly dependent on refractive index and that they were in good agreement with theoretical predictions that take the full vectorial properties of light into account. There was however a strong deviation with the theoretical predictions using (high‐angle) geometrical optics, which predict much lower scaling factors. As an illustration, we measured the PSF of a correctly calibrated point‐scanning confocal microscope and showed that a nearly index‐matched, micron‐sized spherical object is still significantly elongated due to this PSF, which signifies that care has to be taken when determining axial calibration or axial scaling using such particles.