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1.
A novel self-calibration method is proposed for calibrating differential interferometers with subnanometer resolution, and the basic characteristics of the method are discussed. Analysis shows that without using any external reference, the calibration accuracy approaches the resolution limit of the interferometer, which is determined by the signal-to-noise ratio (SNR) and the stability of the measurement system. A compact differential interferometer that uses a laser diode as the light source has been developed in order to demonstrate the viability of the proposed calibration method. The conventional fringe-counting and phase modulation methods are combined in order to extend the measurement range and improve the resolution of the interferometer. The developed interferometer was calibrated using the new method, and the calibration results were compared to those obtained by a comparison calibration method that uses a capacitance displacement sensor as the reference.  相似文献   

2.
Displacement measuring interferometry has high resolution and high dynamic range, which is widely used in displacement metrology and sensor calibration. Due to beam leakage in the interferometer, imperfect polarization components, and ghost reflections, the displacement measurement suffers from periodic error, whose pitch is multiple harmonics of the Doppler frequency. In dynamic measurements, periodic error is usually on the order of nanometers, which impacts the dynamic measurement accuracy. This paper presents an approach to estimate and correct periodic error in real time based on an extended Kalman filter, which has the capability to deal with both constant and non-constant velocity motions. This algorithm is implemented on an application-specific hardware architecture in an FPGA, which has advantages in throughput and resource usage compared with conventional implementations. The measurement validation shows that this approach can effectively eliminate the periodic error for both constant and non-constant velocity motion, and the residual error reaches to the level of the background noise of the interferometer.  相似文献   

3.
Intense E-field measurement is widely applied in high voltage and dielectric insulation research. In this paper, an integrated optical E-field sensor for time-domain measurement has been studied comprehensively, which is based on Mach–Zehnder interferometer with a mono-shielding electrode. Firstly, the principle and the key issues of the sensor design are presented. Secondly, the time-domain response characteristics are studied and the sensor can well follow waveforms with a rise time from nano-second to micro-second. Thirdly, the temperature stability of the sensor is analyzed, and the influence of temperature is quantified. Finally, the measurement of gas discharge field by the developed sensor is introduced, showing that the time-domain transient field measurement is an effective criterion for streamer inception.  相似文献   

4.
沈涛  孙滨超  冯月 《光学精密工程》2018,26(6):1338-1345
为了简化光纤磁场与温度传感器的结构并提高传感器灵敏度,设计并制作了马赫-曾德尔干涉集成化的全光纤磁场与温度传感器。将单根光纤的马赫-曾德尔模间干涉结构和双臂马赫-曾德尔干涉结构结合:将总长度为1.2m的单模光纤部分制备成长度为2.7cm、锥腰直径为30.1μm的锥形微纳光纤,并得到了拉锥时间与锥腰直径的关系。将锥形微纳光纤放置尼龙槽内并包覆磁凝胶构成传感头,实现模间干涉的马赫-曾德尔磁场传感器;将磁场传感器通过两耦合比为50%∶50%的耦合器并联带有可调谐光衰减器的单模光纤形成马赫-曾德尔干涉的温度传感器。从理论上分析了光谱漂移对磁场和温度传感的特性关系,实验测得室温下磁场强度在25~50mT时,磁场传感的灵敏度为0.301 14nm/mT;在磁场强度为0,温度由25℃升高到30℃时,温度传感的灵敏度为0.518 86nm/℃。该传感器可广泛应用于电力系统放电检测、材料加工、安全监控等领域。  相似文献   

5.
A fiber Bragg grating (FBG) sensor with an unbalanced Mach-Zehnder fiber interferometer for the shock stress measurement is proposed and demonstrated. An analysis relationship between the shock stress and the central reflection wavelength shift of the FBG is firstly derived. In this sensor, the optical path difference of the unbalanced Mach-Zehnder fiber interferometer is ~3.1 mm and the length of the FBG is 2 mm. An arctangent function reduction method, which can avoid sine function's insensitive zone where the shock stress measurement has a reduced accuracy, is presented. A shock stress measurement of water driven by one stage gun (up to 1.4 GPa), with good theoretical accuracy (~10%), is launched.  相似文献   

6.
A novel optical fiber sensing system multiplexing low coherence interferometry and high coherence interferometry that is endowed with large range and high resolution and is stabilized for on-line measurement is presented. An optical fiber Michelson interferometer performing measurement task in the system works in both modes of low coherence interferometry and high coherence interferometry simultaneously by employing a broadband light source and a fiber Bragg grating as an in-fiber reflective mirror. The amplitude of the measurand is determined by the low coherence interferometry while the value of the measurand is measured by the high coherence interferometry. Another optical fiber Michelson interferometer which is incorporated with the one performing measurement task stabilizes the sensing system for on-line measurement by exploiting an electronic feedback loop to reduce the influences that are resulted from environmental disturbances. The measurement range is 6 mm and the measurement uncertainty is less than 2 nm.  相似文献   

7.
提出一种利用短扫描导轨(100 mm)实现1 m以上绝对距离测量的光纤干涉测距新方法测量系统由定位干涉仪和扫描干涉仪组成,定位干涉仪采用准白光光源实现测量中的定位瞄准,扫描干涉仪完成距离的测量。此外定位干涉仪采用多组光纤干涉结构,各组光纤的光程差由自身系统进行标定,从而实现量程的倍增。实验表明,测量精度达10  相似文献   

8.
Results of the analysis of acoustic-emission signals generated due to ultrasonic waves propagating in a polymer composite material and registered with piezoelectric and fiber-optic sensors are presented. The fiber-optic sensors were arranged into an adaptive interferometer based on using a dynamic hologram formed in a photorefractive crystal. Reducing the setpoint fading has made it possible to improve the noise immunity and sensitivity of the measurement system when using an adaptive interferometer on a photorefractive crystal. Optical fibers in the interferometer’s measurement system served as sensors of ultrasonic waves and were built into a polymer composite material when the sample was manufactured. The sample was a rectangular plate made of a multilayer fiberglass material. It has been discovered that the sensitivity of the adaptive interferometer makes it possible to detect acoustic- emission signals generated by a Hsu–Nielsen source. When determining the speed of sound in the polymer composite material, peculiarities of registering a group wave by fiber-optic sensors have been established that are due to the anisotropy of the medium the wave propagates in and the distributed character of sensor placement in the studied composite material. The wavelet transform has been used to separate the informative component of the wanted signal.  相似文献   

9.
理论分析和实验验证了通过对锥形光栅反射谱进行带宽解调来获得环境应力/应变的可行性,提出了对锥形光栅反射谱采用可调谐F-P腔进行带宽解调的方法,通过应力加载实验对该带宽解调方法进行了验证,并取得了较好的反射带宽解调和应力测量效果。实验证明,该测量系统实现了对温度变化不敏感的应力测量,同时具有较高的灵敏度,应力测量精度为0.060 N。在进一步进行锥形光栅中心反射波长解调的基础上,该方案可实现温度和应力的同时测量。  相似文献   

10.
《Measurement》1986,4(4):148-153
The laser interferometers for angle measurement in a wide range have been presented. These are the systems based on the modified Twyman-Green interferometer principle, constructed and tested by the author. Each modification is aimed at the optimum configuration, which should combine high accuracy and wide range simultaneously. Starting with the simple interferometer, through its various versions with beam shift compensation and diametrically placed reflectors, to the set-up which has a measuring range of 2π rad and rotational positioning of 0.04″. The final system is designed for automatic measurement of angular positions and for checking the angle standards. The error analysis common to all interferometers with rotating reflector is given.  相似文献   

11.
光纤干涉绝对测距技术   总被引:1,自引:0,他引:1  
提出一种利用短扫描导轨实现1m以上绝对距离测量的光纤干涉测距新方法:测系统由定位干涉仪和扫描干涉仪组成,定位干涉仪采用准光光源实现测量中的定位瞄准,扫描干涉仪完成距离的测量。  相似文献   

12.
The scheme and the main elements of an interferometer simultaneously operating at frequencies of the 8-and 4-mm ranges are presented. To combin e two radiations in a common waveguide section and separate them by sending to the corresponding receivers, a special separation filter has been developed. A homo-dyne technique for transferring phase measurements to an intermediate frequency is employed in the interferometer. The range of unambiguously measured phase shifts is 1.5°—360°, and the phase-shift measurement error is within 5%.  相似文献   

13.
The performance of a length-measuring interferometer system designed to be insensitive to stray reflections and polarization effects resulting in a subnanometric measurement capability is described. Results from the mathematical analysis of the interferometer signals, which provided accurate fringe subdivision and allowed a 1σ of 0.15 nm to be realized from this system, are also described. The motion of a piezoelectric transducer (PZT) was characterized over a 1-μm range using the system, and the results were used to confirm this subnanometric measurement capability of the interferometer.  相似文献   

14.
The design of a simple, robust, low-cost, and bidirectional displacement sensor with subangstrom resolution is described. A small gold plate is attached to the object, whose displacement is to be measured, and a small gold tip is brought into contact with the plate, establishing a reference current between the two. Movements of the gold plate away from the tip lead to a change in the tip-plate current; the reference current is then re-established by moving the tip using a simple magnetic actuator. The resolution of the sensor has been calibrated using an interferometer and was shown to be as high as 0.3 A? per system count. Potential applications of the sensor are numerous, including microbar air pressure measurement, motion and infrasound detection, thermal sensing, and gravitational field and relativistic gravity wave measurement.  相似文献   

15.
We study the Talbot interferometry with an additional mask grating located behind the diffraction grating. The self-imaging so-called, Talbot carpet, can be very sensitive to an external perturbation. We here show the measurement and the optimization of sensitivity of transverse shift of one of the two gratings inside Talbot interferometer as a function of grating constant and opening fraction of the grating itself. The results show that the sensitivity of the transverse shift is increased dramatically at smaller grating constants while no effect for different opening fractions. A sensor of our simple scheme can be suggested as an excellent inertial sensing applications such as displacement sensor, spectrometer, and vibration sensor.  相似文献   

16.
This article presents the development of a precision laser interferometric system, which is designed to achieve six-axis motion measurement for real-time applications. By combining the advantage of the interferometer with a retroreflector and that of the interferometer with a plane mirror reflector, the system is capable of simultaneously measuring large transverse motions along and large rotational motions about three orthogonal axes. Based on optical path analysis along with the designed kinematics of the system, a closed form relationship between the six-axis motion parameters of the object being measured and the readings of the six laser interferometers is established. It can be employed as a real-time motion sensor for various six-axis motion control stages. A prototype is implemented and integrated with a six-axis magnetic levitation stage to illustrate its resolution and measurement range.  相似文献   

17.
马成  徐磊 《光学仪器》2012,34(1):85-90
为了测量未知折射率或不透明薄膜的厚度,借助力传感器对传统迈克尔逊干涉仪加以改进,并运用等倾干涉的原理结合抵消法设计了测量装置。薄膜被等厚的空气层所代替,通过间接测量,避开了机械螺旋空程差造成的影响,使用力传感器有效减小了挤压形变引起的误差。该装置测量范围为0.3μm~1.5mm,分辨力为0.3μm。实测数据表明,该装置具有良好的重复性和准确性。  相似文献   

18.
高压输电线中的电流测量大都采用铁芯式电流互感器。由于铁芯的非线性特性,一次测电流过大或含有高次谐波分量时,会出现磁路饱和现象,使电流互感器二次测电流数值和波形发生失真,从而引起测量精度下降。文中,设计了一种干涉式光纤电流传感器,提出了使用Rogowski线圈进行电流-电压转换,利用压电晶体实现相位调制,用迈克尔逊干涉仪进行相位检测的方法,解决了在高压端无源情况下,由电流转换的电压小的问题,提高了传感器的精度、可靠性和测量范围。  相似文献   

19.
20.
In this paper, development of a sensor using a circular disc for air velocity measurement based on the drag force equation is proposed. The air velocity measurement sensor is basically designed with a load cell in order to determine the drag force. The circular disc is used for creating a drag force, and by using load cell, the drag force that acts on the circular disc is measured. As the circular disc's drag coefficient can be considered constant at Reynolds numbers between 103 and 106, it can be possible to obtain the explicit equation of drag force. The remaining components of drag force equation are obtained by measurement. The proposed air velocity measurement sensor is characterized by wind tunnel measurements. All measurements were performed in an ISO/IEC 17025 accredited calibration laboratory – the Wind Tunnel of Turkish State Meteorological Service. The characterization measurements were performed at air velocities between 1 m/s and 20 m/s. The correction factors were calculated and a calibration curve for the proposed air velocity measurement sensor was obtained. The calibration curve's linearity was higher than 0.99 and a comparison the results from a Micromanometer with Pitot-Tube shows that for the designed working range, the sensor has an acceptable performance for time-averaged air velocity measurements according to the requirements of the World Meteorological Organization.  相似文献   

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