Physics of very thin ITO conducting films with high transparency prepared by DC magnetron sputtering

The preparation of very thin indium tin oxide (ITO) films with extremely high transparency and suitable resistivity, as well as resistivity stability for long term use, is described. In order to obtain these properties, amorphous suboxide films were first prepared and then annealed. Suboxide films with a thickness of 20 to 30 nm were prepared on PET film and glass substrates at a temperature of 60 °C using In₂O₃---SnO₂ targets with a SnO₂ content of 0 to 10 wt% by DC magnetron sputtering in a pure argon gas atmosphere. The films were annealed at a temperature of 150 °C for 1 to 100 h in air. The resistivity of films on PET films was, depending on the SnO₂ content, on the order of 10⁻³ ω cm. An average transmittance above 97% in the visible wavelength range and a resistivity of about 4 × 10⁻³ ω cm, as well as resistivity stability, were attained in ITO films with a SnO₂ content of about 1 wt% prepared on PET films by the low-temperature process. It is thought that these properties result from crystallization which occurred during the annealing, duration up to about 25 h.     

Structural, electrical and optical characteristics of SnO2:Sb thin films by ultrasonic spray pyrolysis

Antimony-doped tin oxide (SnO₂:Sb) thin films were fabricated by an ultrasonic spray pyrolysis method. The effect of antimony doping on the structural, electrical and optical properties of tin oxide thin films were investigated. Tin(II) chloride dehydrate (SnCl₂·2H₂O) and antimony(III) chloride (SbCl₃) were used as a host and a dopant precursor. X-ray diffraction analysis showed that the non-doped SnO₂ thin film had a preferred (211) orientation, but as the Sb-doping concentration increased, a preferred (200) orientation was observed. Scanning electron microscopy studies indicated that the polyhedron-like grains observed for the non-doped SnO₂ thin films became rounder and decreased in size with the Sb-doping concentration. The lowest resistivity (about 8.4 × 10^− 4 Ω·cm) was obtained for the 3 at.% Sb-doped films. Antimony-doping led to an increase in the carrier concentration and a decrease in Hall mobility. The transmittance level in the near infrared region was lowered with the Sb-doping concentration.     

Excimer laser deposition and characteristics of tin oxide thin films

ArF excimer laser assisted chemical vapor deposition of tin oxide thin films on Si was obtained using SnCl₄ and O₂ as precursors. Experimental measurements revealed that the deposition rate increases with incident laser energy density. The composition, structure and ultraviolet-to-visible spectra of the thin films were investigated by means of XPS, SEM, XRD and a UV–Vis techniques. It was shown that SnO₂ and SnOCl₂ coexisted in the thin films, and SnOCl₂ was almost completely converted into SnO₂ after annealing. The SnO₂ thin films deposited at room temperature were amorphous in structure and the grain size of the films became larger after annealing. The transmittance of the SnO₂ thin films is above 90%, the absorption edge is 355 nm and the energy gap is 3.49 eV.     

Highly conducting indium tin oxide (ITO) thin films deposited by pulsed laser ablation

Highly conducting and transparent indium tin oxide (ITO) thin films were prepared on SiO₂ glass and silicon substrates by pulsed laser ablation (PLA) from a 90 wt.% In₂O₃-10 wt.% SnO₂ sintered ceramic target. The growths of ITO films under different oxygen pressures (P_O2) ranging from 1×10⁻⁴–5×10⁻² Torr at low substrate temperatures (T_s) between room temperature (RT) and 200°C were investigated. The opto-electrical properties of the films were found to be strongly dependent on the P_O2 during the film deposition. Under a P_O2 of 1×10⁻² Torr, ITO films with low resistivity of 5.35×10⁻⁴ and 1.75×10⁻⁴ Ω cm were obtained at RT (25°C) and 200°C, respectively. The films exhibited high carrier density and reasonably high Hall mobility at the optimal P_O2 region of 1×10⁻² to 1.5×10⁻² Torr. Optical transmittance in excess of 87% in the visible region of the solar spectrum was displayed by the films deposited at Po₂≥1×10⁻² Torr and it was significantly reduced as the P_O2 decreases.     

Effect of SnO2 on the photocatalytical properties of TiO2 films

TiO₂/SnO₂ thin films with different tin atomic percentages were successfully prepared on glass substrates by the spray pyrolysis method from an alcoholic solution of TiO[C₅H₇O₂]₂ with different concentrations of SnCl₄. The TiO₂/SnO₂ thin films prepared at 450 °C presented the anatase phase in polycrystalline configuration from %Sn = 0 in the starting solution up to %Sn = 20, at higher tin content the films present an amorphous configuration. The resulting thin films have a homogeneous surface structure with some porosity. The photocatalytical properties of the films were evaluated with the degradation of methylene blue. The products of the degradation reaction were identified by ¹H nuclear magnetic resonance and the film properties were studied by atomic force microscopy, scanning electron microscopy, UV–Vis spectroscopy, and X-ray diffraction.     

Synthesis and characterization of p-type transparent conducting CuAlO2 thin film by DC sputtering

P-type transparent conducting thin films of copper aluminium oxide were prepared by DC sputtering of polycrystalline CuAlO₂ target, which was fabricated by heating a stoichiometric mixture of Cu₂O and Al₂O₃ at 1375 K for 24 h. Thin films of CuAlO₂ were deposited on Si (4 0 0) and glass substrates. The sputtering was performed in Ar+O₂ (40 vol.%) atmosphere and the substrate temperature was 453 K. X-ray diffraction spectra of the films showed the peaks that could be assigned with those of the crystalline CuAlO₂. Fourier transform infrared spectra showed Cu---O, Al---O, O---Cu---O bonding. UV–Vis–NIR spectrophotometric measurement showed high transparency of the films in the visible region. Both direct and indirect band gaps were found to exist and their corresponding estimated values were 3.66 and 2.1 eV, respectively. The room temperature conductivity of the film was fairly high and was of the order of 0.08 S cm⁻¹, while the activation energy was 0.26 eV. Thermoelectric power measurement indicated positive value of Seebeck coefficient and its room temperature value was +128 μV K⁻¹. Positive value of Hall coefficient (R_H=+16.7 cm³ C⁻¹) also confirmed p-type conductivity of the films.     

SnO2退火温度对钙钛矿太阳能电池性能的影响

电子传输层是钙钛矿太阳能电池的关键部分, 起到阻挡空穴、传输电子和减少电子空穴复合的作用。本研究采用低温溶液法制备SnO₂薄膜作为钙钛矿电池的电子传输层, 研究SnO₂的退火温度对电子传输层微观形貌、物理性能以及钙钛矿太阳能电池性能的影响。结果表明: 当退火温度为60、90、120和240 ℃时, SnO₂薄膜表面存在较多的孔隙; 而退火温度为150、180和210 ℃时, 薄膜表面孔隙较少。在实验温度下, 制备的SnO₂薄膜为四方相, FTO玻璃上涂覆SnO₂薄膜后其透过率要优于空白FTO玻璃的透过率。当SnO₂退火温度为180 ℃时, 薄膜的电子迁移率最高, 钙钛矿电池具有最佳的传输电阻和复合电阻, 所得电池的性能最优, 其光电转换效率为17.28%, 开路电压为1.09 V, 短路电流为20.91 mA/cm², 填充因子为75.91%。     

Optical and electrical properties of p-type AgInSnxS2−x (x = 0–0.04) thin films prepared by spray pyrolysis

AgInSn_xS_2−x (x = 0–0.2) polycrystalline thin films were prepared by the spray pyrolysis technique. The samples were deposited on glass substrates at temperatures of 375 and 400 °C from alcoholic solutions comprising silver acetate, indium chloride, thiourea and tin chloride. All deposited films crystallized in the chalcopyrite structure of AgInS₂. A p-type conductivity was detected in the Sn-doped samples deposited at 375 °C, otherwise they are n-type. The optical properties of AgInSn_xS_2−x (x < 0.2) resemble those of chalcopyrite AgInS₂. Low-temperature PL measurements revealed that Sn occupying an S-site could be the responsible defect for the p-type conductivity observed in AgInSn_xS_2−x (x < 2) thin films.     

Indium tin oxide thin films for metallization in microelectronic devices

The use of sputtered indium tin oxide (ITO) thin films as metal layers in silicon-based electronic circuits has been investigated. The ITO films were sputtered directly from In₂O₃/SnO₂ targets under inert ambient in an r.f. sputtering system. The films were characterized as functions of process parameters such as r.f. power, substrate temperature and post-deposition annealing treatments. The properties studied included sheet resistance, transparency, thickness uniformity, composition and structure, step coverage, and etchability. In addition, the suitability of these ITO films as interconnects in microelectronic devices was examined by fabricating MOSFET devices using fine line patterned ITO for the metallization.     

Ferroelectric properties of BiFeO3 films grown by sol–gel process

Several methods have been used to prepare ferroelectromagnetic BiFeO₃ films. In this paper, we adopted a sol–gel process to fabricate BiFeO₃ films on indium tin oxide (ITO)/glass substrates. X-ray diffraction pattern indicated that the samples are randomly oriented. Cross section scanning microscopy showed that the thicknesses of both films were about 1.2 μm and no apparent diffusion between the BiFeO₃ films and ITO/glass substrates. Remnant polarization of 2.0 and 1.75 μC/cm² were identified by the measuring of electric hysteresis loops for the films annealed at 500 and 600 °C respectively at an applied field of 108 kV/cm. Dielectric property and loss factor were investigated as a function of frequency. In addition, magnetism was detected at 77 K.     

Influence of the sputtering system''s vacuum level on the properties of indium tin oxide films

The influence of the chamber residual pressure level in the radio frequency magnetron sputtering process on the electrical, optical and structural properties of indium thin oxide (ITO) is investigated. Several ITO films were deposited at various residual pressure levels on Corning glass using In₂O₃:SnO₂ target in argon atmosphere and without the addition of oxygen partial pressure. It is found that a very good vacuum is associated to metallic films and results in less transparent ITO films, with some powder formation on the surface. On the contrary highly transparent and conducting films are produced at a higher residual pressure. The best deposition conditions are addressed for ITO films as transparent conducting oxide layers in silicon heterojunction solar cells. Using the optimal vacuum level for ITO fabrication, a maximum short circuit current of 36.6 mA/cm² and a fill-factor of 0.78 are obtained for solar cells on textured substrates with a device conversion efficiency of 16.2%.     

Characterization of SnS films prepared by constant-current electro-deposition

SnS films have been prepared on the indium tin oxide coated glass substrates by the constant-current electro-deposition. By investigating the influence of the deposition parameters on the composition of the deposited films, we obtained the optimum deposition parameters with pH = 2.7, Sn²⁺ / S₂O₃²⁻ = 1 / 5, J = 3.0 mA/cm² and t = 1.5 h. Many nearly stoichiometric SnS films were prepared. These films were characterized with X-ray diffraction and scanning electron microscopy analysis, and they were polycrystalline with orthorhombic structure. Their direct band gaps were estimated to be 1.211.42 eV from optical measurements. The films have p-type conductivity with a resistivity of 7.520 Ω·cm.     

Transparent conducting F-doped SnO2 thin films grown by pulsed laser deposition

Transparent conducting fluorine-doped tin oxide (SnO₂:F) films have been deposited on glass substrates by pulsed laser deposition. The structural, electrical and optical properties of the SnO₂:F films have been investigated as a function of F-doping level and substrate deposition temperature. The optimum target composition for high conductivity was found to be 10 wt.% SnF₂ + 90 wt.% SnO₂. Under optimized deposition conditions (T_s = 300 °C, and 7.33 Pa of O₂), electrical resistivity of 5 × 10^− 4 Ω-cm, sheet resistance of 12.5 Ω/□, average optical transmittance of 87% in the visible range, and optical band-gap of 4.25 eV were obtained for 400 nm thick SnO₂:F films. Atomic force microscopy measurements for these SnO₂:F films indicated that their root-mean-square surface roughness ( 6 Å) was superior to that of commercially available chemical vapor deposited SnO₂:F films ( 85 Å).     

Spray deposition of lanthanum selenide (La2Se3) thin films from non-aqueous medium and their characterizations

The spray pyrolysis technique was employed to prepare lanthanum selenide (La₂Se₃) thin films on ordinary glass and fluorine doped tin oxide (FTO) coated glass substrates under optimized conditions. The preparative parameters are optimized to get good quality of La₂Se₃ thin films. X-ray diffraction (XRD) study reveals that only cubic La₂Se₃ is formed with a grain size of about 42 nm. The direct optical band gap is estimated to be 2.6 eV. The dispersions of dielectric constant and dielectric loss are studied with the variation of frequency. The room temperature electrical resistivity of the films is found to be of the order of 10⁵ Ω cm. The film is found to be a p-type semiconductor.     

Electrical and optical characterization of Na: CuInS2 thin films grown by spray pyrolysis

The structural, electrical and optical properties of Na-doped CuInS₂ thin films grown by spray pyrolysis were studied. These films crystallized in the sphalerite structure of CuInS₂, and showed to contain traces of indium sulfide and CuIn₅S₈ as impurity phases. All films were In-rich and showed p-type conductivity. The film conductivity was strongly affected by Na-doping, which decreased from 10⁻² to 10⁻⁵ S/cm by increasing the [Na]/[Cu] ratio from 0.005 to 0.03 in the spray solution. The band gap energy was observed to increase, from 1.4 to 1.45 eV, with increasing the [Na]/[Cu] ratio. Our results suggested that Na could be an effective acceptor impurity in sprayed CuInS₂.     

Atomic layer deposition growth of zirconium doped In2O3 films

Zirconium doped indium oxide thin films were deposited by the atomic layer deposition technique at 500 °C using InCl₃, ZrCl₄ and water as precursors. The films were characterised by X-ray diffraction, energy dispersive X-ray analysis and by optical and electrical measurements. The films had polycrystalline In₂O₃ structure. High transparency and resistivity of 3.7×10⁻⁴ Ω cm were obtained.     

Influence of manufacturing process of indium tin oxide sputtering targets on sputtering behavior

Thin films of In₂O₃+SnO₂ (indium tin oxide or ITO) have wide utility because they are electrically conductive and transparent at visible wavelengths. A preferred method for making highest quality ITO coatings is reactive sputtering from targets of mixed indium and tin oxides. The resulting film properties are highly dependent upon the deposition conditions, and upon post-deposition film treatments. Film data and sputtering efficiency are also effected by sputtering target characteristics.

This study evaluated the influence of the targets on the electrical resistivity of deposited ITO films, and the effect of target properties on the sputtering rate. A matrix of 12 targets was tested; all had composition 90 wt.%In₂O₃+10 wt.%SnO₂. The effects of varying target density, degree of target oxide reduction from complete stoichiometry, and target purity were measured.

The results are, in summary, (1) partial reduction of oxide targets from complete stoichiometry does not influence film resistivity, (2) the data indicate a small (perhaps negligible) dependence of film resistivity upon target density, (3) higher target density tends to promote enhanced deposition rate, and (4) purposeful addition of silicon, aluminum, magnesium, calcium, and sodium at high levels to ITO targets degrades film resistivity depending upon the total concentration of impurities added, but independently of the contaminating species.     

Atmospheric plasma discharge chemical vapor deposition of SnOx thin films using various tin precursors

A series of 0.2–0.6 μm thick SnO_x films were deposited onto borosilicate and sodalime silica glass substrates by atmospheric plasma discharge chemical vapor deposition at 80 °C. SnO_x films deposited from monobutyltin trichloride contained a large percentage of SnCl₂:2H₂O, and therefore were partially soluble in water. SnO_x coatings deposited from tetrabutyltin were not soluble in water or organic solvents, had good adhesion even at growth rates as high as 2.3 nm/s, had high transparency of  90% and electrical resistivity of 10⁷ Ω cm. As-grown tin oxide coatings were amorphous with a small concentration of SnO₂, SnO and Sn crystalline phases as determined by grazing angle X-ray diffraction and X-ray photoelectron spectroscopy measurements. Upon annealing in air at 600 °C the resistivity of SnO_x films decreased to 5–7 Ω cm. Furthermore, optical and X-ray measurements indicated that SnO_x was converted into SnO₂ (cassiterite) with a direct band gap of 3.66 eV. Annealing of as-grown SnO_x films in vacuum at 340 °C led to formation of the p-type conductor SnO/SnO_x. The indirect band gap of SnO was calculated from the optical spectra to be 0.3 eV.     

The influence of post-deposition treatment on the physical properties of CdTe films deposited by stacked elemental layer processing

Cadmium telluride thin films have been deposited on glass and glass/SnO₂/CdS substrates using the stacked elemental layer (SEL) technique. After the films were deposited, they were subjected to the conventional heat treatment in the presence of a CdCl₂/methanol solution. The samples were analyzed, before and after treatment, by X-ray diffraction, atomic force microscopy, cathodoluminescence and energy dispersive X-ray spectrometry. The results suggest that the treatment promotes grain growth, decreases defect concentration, and gives rise to the formation of a CdTe_1−xS_x solid solution, which replaces the CdTe original layer. The existence of this solid solution was evidenced by a reduction in the lattice parameter relative to untreated samples and confirmed by EDS analysis of treated and untreated glass/SnO₂/CdS/CdTe structures.     

Indium Tin Oxide Thin-Film Sensor for Detection of Volatile Organic Compounds (VOCs)

Indium tin oxide (ITO) (In₂O₃ + 17% SnO₂) thin films were grown on glass substrate by direct evaporation method. Two thick gold pads were deposited to take out contacts. The response of these films at different operating temperatures, when exposed to various volatile organic compounds (VOCs) such as methanol, ethanol, butanol, and acetone in the concentration range 200-2500 ppm was evaluated. Additionally, the effect of film thickness on the response charateristics of methanol and acetone was studied. The linearity and sensitivity of the sensors were measured. The ITO thin-film sensors showed a sensitivity of 0.256 ohms/ppm to acetone vapors, which was almost linear in the range 200-2500 ppm. In order to improve sensitivity and selectivity, a thin layer of various metal and metal oxides such as Cu and PbO was deposited on the sensor surface to work as catalytic layer and the effect on the performance of the sensor was studied. The response and recovery times of the sensor were determined for acetone vapors and were found to be 155 sec and 110 sec, respectively.