Optical characterization of thin chalcogenide films by multiple-angle-of-incidence ellipsometry

Optical properties of thin chalcogenide films from the systems As-S(Se) and As-S-Se were investigated as a function of the film composition, film thickness and conditions of illumination by light using multiple-angle-of-incidence ellipsometry. Thin films were deposited by thermal evaporation and exposed to white light (halogen lamp) and to monochromatic light from Ar⁺ — (λ = 488, 514 nm) and He-Ne- (λ = 632.8 nm) lasers. The ellipsometric measurements were carried out at three different angles of light incidence in the interval 45-55°, at λ = 632.8 nm. An isotropic absorbing layer model was applied for calculation of the optical constants (refractive index, n and extinction coefficient, k) and film thickness, d. The homogeneity of the films was checked and verified by applying single-angle calculations at different angles. It was shown that the refractive index, n of As-S-Se films is independent of film thickness in the range of 50 to 1000 nm and its values varied from 2.45 to 3.05 for thin layers with composition As₂S₃ and As₂Se₃, respectively. The effect of increasing in the refractive index was observed after exposure to light which is related to the process of photodarkening in arsenic containing layers. The viability of the method for determining the optical constants of very thin chalcogenide films with a high accuracy was confirmed.     

Optical and structural properties of SiOx films from ion-assisted deposition

This study investigates the optical and structural properties of SiO_x (x ∼ 1) films prepared by an ion-assisted deposition (IAD) process. The films were prepared by evaporating silicon monoxide, with and without simultaneous Ar⁺ bombardment. The stoichiometry of each film was determined as measured by the infrared spectrometry and X-ray photoelectron spectrometry. The variation in the stoichiometry revealed that the oxygen content of the SiO_x thin films varied slightly under the different conditions of the Ar⁺ bombardment. The results of the X-ray diffraction and transmission electron microscopy (TEM) measurements illustrated that all of the films had amorphous structures. However, a different interfacial appearance between the film and the substrate was observed from the TEM image. The optical constants of the SiO_x thin films were determined by a spectroscopic ellipsometry. The extinction coefficient of all of the films approached zero in the infrared wavelength range from 2 to 7 μm, but the refractive index was varied by the IAD process. The variation of these refractive indices is mainly related to the packing density of the films.     

Spectrographic ellipsometry study of a liquid crystal display substrate consisting of thin films of SiO2, polyimide and indium tin oxide on glass

Variable angle spectrometric ellipsometry at room temperature is used to determine thin film parameters of substrates used in liquid crystal displays. These substrates consist of sequential thin films of polyimide (PI), on indium tin oxide (ITO),on SiO₂ deposited on a glass backing approximately 1.1 mm thick. These films were studied by sequentially examining more complex systems of films (SiO₂, SiO₂-ITO, SiO₂-ITO-PI). The SiO₂ layer appears to be optically uniform and flat. The ITO film is difficult to characterize. When this surface film's lower surface is SiO₂ and upper surface is an air-ITO-interface it is found that including surface roughness and variation of the optical properties with ITO thickness in the model improved the fit; suggesting that both phenomena exist in the ITO films. However, the surface roughness and graded nature of optical properties could be not determinable by ellipsometry when the ITO is coated with a polyimide film. The PI films are ellipsometrically flat and over the wavelength range from 500 to 1400 nm the real refractive index of polyimide films varying in thickness between 25 and 80 nm is well modeled by a two-term Cauchy model with no absorption. The ellipsometric thickness of the ITO layer is the same as the profilometric thickness; however, the ellipsometric thickness of the polyimide layers is roughly 10 nm larger than that obtained from the profilometer. These final observations are consistent with the literature.     

Structural and optical properties of TiO2 thin films grown by sol-gel dip coating process

The mono and bi-layer TiO₂ thin films have been prepared by sol-gel method on glass. X-Ray diffraction, Raman spectroscopy, atomic force microscopy, spectroscopic ellipsometry and m-lines spectroscopy techniques have been used to characterize the TiO₂ films. The mono-layer film is found to be amorphous, while the bi-layer film shows the presence of anatase phase. The bi-layer film exhibits more homogeneous surface with less roughness. The thickness effect on the refractive index, extinction ceofficient, packing density and optical band gap is analysed. The waveguiding measurements of the bi-layer film exhibit single-guided TE₀ and TM₀ polarized modes from which we can measure the refractive index and the film thickness.     

Optical properties of TiO2 thin films deposited on polycarbonate by ion beam assisted evaporation

TiO₂ thin films were deposited on polycarbonate (PC) substrate by ion beam assisted evaporation. The grain size increased with the ion anode voltage and film thickness. The TiO₂ thin films had an amorphous structure. Moiré deflectometry was used to measure the nonlinear refractive indices of TiO₂ thin films on PC substrates. The nonlinear refractive index was measured to be of the order of 10^− 8 cm² W^− 1 and a change in refractive index was of the order of 10^− 5. Dense TiO₂ films exhibited high linear refractive indices, red-shift of the optical absorbance, and absorbance in the near-IR region.     

Spray deposition and property analysis of anatase phase titania (TiO2) nanostructures

Anatase phase titanium dioxide thin films have been deposited at various substrate temperatures by chemical spray pyrolysis of an aerosol of titanyl acetylacetonate. Deposited TiO₂ films were nanocrystalline and preferentially oriented along [101] direction, uniform and adherent to the glass substrate. Best films processed at 450 °C were characterized to analyze its phase composition, texture, roughness, optical and electrical properties. X-ray photoelectron spectroscopy revealed that the surface of the film has only the Ti⁴⁺ cations to form perfect TiO₂ stoichiometry with less amount of hydration. Atomic force microscopy image demonstrated the existence of homogeneous and rough surface, suitable for electrocatalytic applications. The film has an optical transmittance more than 90% and the refractive index of 2.07 was recorded at the wavelength 633 nm. Due to nano-sized grains, obtained optical band gap (3.65 eV) of the TiO₂ thin film was larger than that of the bulk TiO₂ (3.2 eV). Calculated porosity of the films 0.44, revealed the porous nature of the films. Hall measurements indicated that these materials are p-type and yield a carrier density of the order 8.8 × 10²⁰ cm⁻³ and a carrier mobility of 0.48 × 10⁻⁶ cm²/Vs. The dc electrical conductivity was therefore very low (8.91 × 10⁻⁶ S/cm) because of lower value of mean free path of the charge carriers (4.36 × 10⁻¹¹ cm). It gives an impression that the process of spray pyrolysis provides an easy way to tailor make thin films possessing superior properties.     

Ellipsometric determination of optical properties of carbazole-containing poly(l-glutamate) thin films prepared from different solvents

In this study, the refractive indices (n) and thicknesses of carbazole-containing hole-transport materials such as poly(γ-carbazolylethyl l-glutamate) (PCELG) and poly(N-vinyl carbazole) (PVCz) films were determined by carrying out ellipsometric measurements. The thicknesses of PCELG and PVCz films determined by ellipsometric analysis were in good agreement with those determined by surface profilometry. The dependence of the refractive indices of the PCELG films on film thickness was classified into two types on the basis of the solvent from which the films were prepared: the refractive indices either increased with increasing film thickness, as in the case of PCELG films prepared from 1,2-dichloroethane (DCE) and monochlorobenzene (?-Cl), or were independent of the film thickness, as in the case of films prepared from 1,1,2,2-tetrachloroethane (TCE). A comparison of these results with the structures of the polymers, as determined by ¹H NMR, reveals that the two types of dependences of the refractive indices of the PCELG thin film on the film thickness can be attributed to the two types of aggregation structures and/or orientational characteristics corresponding to the helical conformation of the polymer. In contrast, the refractive indices of PVCz films are governed mainly by the film thickness. Finally, we would like to emphasize that the combination of ellipsometry and other techniques such as NMR and surface profilometry provide information not only on the film thickness and refractive index but also on the aggregation structure in thin films with thicknesses on the order of 50 nm.     

Structural and spectroscopic ellipsometry characterization for electrodeposited ZnO growth at different hydrogen peroxide concentration

This work deals with textural and optical characterization of zinc oxide (ZnO) layers obtained by potentiostatic electroplating at various hydrogen peroxide concentrations (from 0 up to 5 mM). The electrodeposition process was studied by cyclic voltametry and chronoamperometry. The [002] preferred growth orientation of hexagonal phase is obtained for the lowest hydrogen peroxide concentration (1 mM), while additionally X-ray diffraction peaks are observed for hydrogen peroxide concentration ranging from 3 to 5 mM. The optical constants and the thickness of films were determined by spectroscopic ellipsometry measurements. The refractive index of all thin films shows normal dispersion behavior. It was also found that refractive index values decrease with increasing hydrogen peroxide concentration. Further, it was revealed that the changes in the optical properties are correlated to the changes in the surface structure.     

Extension of Far UV spectroscopic ellipsometry studies of High-κ dielectric films to 130 nm

Next generation CMOS devices use a high-κ dielectric layer (HfO₂, HfSiO, HfSiON and La₂O₃) grown on thin interfacial silicon dioxide as the gate dielectric. The higher dielectric constant of the Hf oxide based film stack allows a decrease in equivalent oxide thickness (EOT). Because the high-κ film stack has a greater physical thickness than an electrically equivalent SiO₂ film, the tunneling current decreases. It is a critical metrology requirement to measure the thickness of silicon dioxide and high-κ film stacks. Spectroscopic ellipsometry (SE) in the far UV wavelength region can be used to differentiate the high-κ films from silicon dioxide. This is due to the non-zero nature of the imaginary part of the dielectric function (beyond 6 eV) in the far UV region for high-κ films. There has been some conjecture that optical studies should be extended beyond 150 nm further into the VUV. This study addresses these concerns through determination of the dielectric function down to 130 nm. We show the fitted dielectric function of hafnium silicates and lanthanum oxide down to 130 nm. X-ray reflectivity (XRR) measurements were also performed on the high-κ films to complement the thickness measurements performed with SE.     

Thermal stability of sputtered zirconium oxide films

In this work, the effect of post-growth annealing on the structural and optical properties of sputtered zirconium oxide films has been investigated. The temperature dependence of structure, density, and optical constants has been systematically studied by X-ray diffraction, X-ray reflectometry, atomic force microscopy (AFM) and optical spectroscopy. X-ray diffraction studies show no variation in the crystalline phase upon annealing except grain growth. X-ray reflectivity measurements determine a density increase of approximately 11% and a simultaneous thickness reduction of 10% upon annealing. The surface roughness of the films increases upon annealing as determined by XRR and confirmed by AFM measurements. Optical spectroscopy measurements confirm that the refractive index n of the films decreases with increasing annealing temperature. At the same time the optical band gap E_g of the films increases from 4.58 to 4.97 eV annealing at 900°C. The surprising decrease of refractive index upon annealing is attributed to both the intermixing of Si with ZrO₂ and the increasing surface roughness of the films.     

In situ ellipsometric study of copper growth on silicon

Thin copper films are of high interest for interconnect applications. However, optical studies, such as ellipsometry, of metallic thin films are still rare as the measurements are difficult to interpret due to the lack of a transparent range and often island-like growth at very low coverages. We investigated by in situ spectroscopic ellipsometry the growth of thermally evaporated thin copper films on silicon substrates from 0.5 nm to more than 100 nm, a thickness for which bulk-like response is observed. A strong change in the optical response was observed for films thinner than 10 nm as a result of plasmonic effects. The data at each thickness was modeled by employing the effective medium approximation theory. Besides the layer thickness and the void filling fraction, giving the film density, we obtained information about the mean free path of electrons in the thin films and compared it to single crystals. Cu oxidation was studied by deliberately introducing oxygen or air in the chamber, leading to a fast and pronounced change in the optical response. The data analysis provides detailed information on film thickness and quality.     

Ellipsometric studies on cupric telluride thin films

The optical properties of cupric telluride (CuTe) thin films have been studied in the wavelength range 310-800 nm using spectroscopic ellipsometry (SE). Thin films of thickness between 30 and 150 nm were prepared by thermal evaporation at the rate of 15.6 Å/s on well cleaned glass substrates kept at 300 K under the vacuum better than 2×10⁻⁵ mbar. It has been found that the optical band gap increases with the thickness of the films. The refractive index of the films increases with the energy but the extinction coefficient first increases and then decreases gradually with energy. The analysis of the absorption coefficient determined from the extinction coefficient reveals that there is allowed direct transition with a band gap of about 1.5 eV. The increase in the band gap with the increase in the film thickness has been ascribed to defect levels in the band gap formed by defects in the films.     

Properties of Au nanolayer sputtered on polyethyleneterephthalate

AFM, XRD, zeta (ζ) potential measurement and spectroscopic ellipsometry were used for characterization of thin (20 nm) Au films sputtered onto polyethyleneterephthalate (PET). Sputtered Au film shows significantly different surface morphology and roughness in comparison with pristine PET. From XRD measurement of 20 nm thick sputtered Au layers it was found that Au crystalizes preferentially in (111) direction with lattice parameter of a = 0.40769 nm, density of ρ = 19.338 g cm^− 3 and lattice stress of about 230 MPa. Higher surface conductance of Au/PET by ζ-potential measurement was found. Au layer thickness of 19.4 nm determined from spectroscopic ellipsometry was in good agreement with the AFM estimated value of 20 nm.     

Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl)manganese and H2O

Manganese oxide (MnO) atomic layer deposition (ALD) was accomplished using sequential exposures of bis(ethylcyclopentadienyl)manganese (Mn(CpEt)₂) and H₂O. Rutherford backscattering analysis revealed a nearly 1:1 atomic ratio for Mn:O in the MnO ALD films. X-ray diffraction determined that the films were crystalline and consistent with the cubic phase of MnO. Quartz crystal microbalance (QCM) measurements monitored the mass deposition rate during MnO ALD and verified self-limiting reactions for each reactant. Extremely efficient reactions were observed that required reactant exposures of only 3 × 10⁴ L (1 L = 1.33 × 10^− 4 Pa s). X-ray reflectivity (XRR) studies were used to confirm the QCM measurements and determine the film density and film thicknesses. The MnO ALD film density was 5.23 g/cm³. The growth per cycle was investigated from 100-300 °C. The largest MnO ALD growth per cycle was 1.2 Å/cycle at 100 °C and the growth per cycle decreased at higher temperatures. Transmission electron microscopy images observed the conformality of MnO films on ZrO₂ nanoparticles and confirmed the growth per cycle observed by the XRR studies. Fourier transform infrared spectroscopy was used to study the -CpEt? and -OH? surface species during MnO ALD and also monitored the bulk vibrational modes of the growing MnO films. The results allowed a growth mechanism to be established for MnO ALD using Mn(CpEt)₂ and H₂O. Only 54% of the Mn sites are observed to retain the -CpEt? surface species after the Mn(CpEt)₂ exposure. Efficient MnO ALD using Mn(CpEt)₂ and H₂O should be useful for a variety of applications where metal oxides are required that can easily change their oxidation states.     

High-index low-loss gallium phosphide thin films fabricated by radio frequency magnetron sputtering

High-index low-loss Gallium Phosphide thin films for visible light have been produced by radio frequency magnetron sputtering in an argon environment. This broadens the high refractive index limit of transparent optical materials using a physical deposition process. Energy-dispersive x-ray analysis and spectroscopic ellipsometry were used to characterize the stoichiometry and optical properties. A post-deposition high-temperature anneal was found to be necessary to restore the proper stoichiometric ratio and to reduce the absorption. The annealing conditions were optimized by an in-situ fiber-optic transmission spectrum monitoring system. The films exhibit a high refractive index (N = 3.23) and a low extinction coefficient (K = 0.029) at 633 nm. Such high index GaP films have broad applications in nanophotonic device designs.     

Thickness dependence of structural and optical properties of indium tin oxide nanofiber thin films prepared by electron beam evaporation onto quartz substrates

Indium tin oxide (ITO) thin films, produced by electron beam evaporation technique onto quartz substrates maintained at room temperature, are grown as nanofibers. The dependence of structural and optical properties of ITO thin films on the film thickness (99-662 nm) has been reported. The crystal structure and morphology of the films are investigated by X-ray diffraction and scanning electron microscope techniques, respectively. The particle size is found to increase with increasing film thickness without changing the preferred orientation along (2 2 2) direction. The optical properties of the films are investigated in terms of the measurements of the transmittance and reflectance determined at the normal incidence of the light in the wavelength range (250-2500 nm). The absorption coefficient and refractive index are calculated and the related optical parameters are evaluated. The optical band gap is found to decrease with the increase of the film thickness, whereas the refractive index is found to increase. The optical dielectric constant and the ratio of the free carrier concentration to its effective mass are estimated for the films.     

Effect of chopping on the properties of bismuth oxide thin films

Nanocrystalline bismuth oxide thin films have been deposited by thermal oxidation, in air, of vacuum evaporated chopped bismuth thin films. The optical properties and adhesion have been studied. The oxidation temperature and duration were varied. As revealed by structural investigations, polycrystalline and multiphase bismuth oxide thin films were obtained. At all oxidation temperatures, monoclinic Bi₂O₃ is predominant. The films showed high transmittance in the visible range of spectrum. The direct band gap of the films obtained was between 2.78 eV and 3.04 eV. The refractive index observed is in the range 1.934 to 2.096. The adhesion of films was in the range 215 × 10² to 470 × 10² kgF/cm². The values are strongly influenced by the heat treatment characteristics. It was observed that chopping helps in improving the adhesion and increasing refractive index, packing density and band gap of bismuth oxide thin films. These bismuth oxide films can have potential use in optical waveguides.     

Evolution of optical properties with deposition time of silicon nitride and diamond-like carbon films deposited by radio-frequency plasma-enhanced chemical vapor deposition method

The paper presents investigations of the optical properties of thin high-refractive-index silicon nitride (SiN_x) and diamond-like carbon (DLC) films deposited by the radio-frequency plasma-enhanced chemical vapor deposition method for applications in tuning the functional properties of optical devices working in the infrared spectral range, e.g., optical sensors, filters or resonators. The deposition technique offers the ability to control the film's optical properties and thickness on the nanometer scale. We obtained thin, high-refractive-index films of both types at deposition temperatures below 350 °C, which is acceptable under the thermal budget of most optical devices. In the case of SiN_x films, it was found that for short deposition processes (up to 5 min long) the refractive index of the film increases in parallel with its thickness (up to 50 nm), while for longer processes the refractive index becomes almost constant. For DLC films, the effect of refractive index increase was observed up to 220 nm in film thickness.     

Deposition and characterization of BN/Si(0 0 1) using tris(dimethylamino)borane

Boron nitride thin films could be deposited on Si(0 0 1) by chemical vapor deposition (CVD) at atmospheric pressure using a single source precursor. IR absorption spectra of films deposited between 750 and 1000°C using B[N(CH₃)₂]₃ (tris(dimethylamino)borane, TDMAB) as the boron and nitrogen source showed a peak absorption at ∼1360 cm⁻¹ characteristic of the in-plane vibrational mode seen in h-BN. It was noted that the mode at 800 cm⁻¹ is very weak. The observed growth rate varied exponentially with temperature in the range 850-900°C. Ellipsometry measurements were used to investigate the thickness and optical constant of the films. The refractive index, slightly lower than the bulk material, is close to 1.65-1.7 depending on the surface morphology of the films. The surface morphology of thin layers has been observed by atomic force microscopy with an increase of the surface roughness from 0.3 to 3.5 nm as the growth temperature increases from 800 to 950°C.     

Third-order optical nonlinear absorption in Bi1.95La1.05TiNbO9 thin films

Single phase Bi_1.95La_1.05TiNbO₉ (LBTN-1.05) thin films with a layered aurivillius structure have been fabricated on fused silica substrates by pulsed laser deposition at 700 °C. The X-ray diffraction pattern revealed that the films are single-phase aurivillius. The band gap, linear refractive index and linear absorption coefficient were obtained by optical transmittance measurements. The film exhibits a high transmittance (> 70%) in visible-infrared region and the dispersion relation of the refractive index vs. wavelength follows the single electronic oscillator model. The nonlinear optical absorption property of the film was determined by the single beam Z-scan method using 800 nm with a duration of 100 fs. A large positive nonlinear absorption coefficient β = 5.95 × 10^− 8 m/W was determined experimentally. The results showed that the LBTN-1.05 is a promising material for applications in absorbing-type optical devices.