Luminescence of ZnO nanorods grown by chemical vapor deposition on (111) Si substrates

ZnO nanorods have been grown on (111) Si substrates by chemical vapor deposition in a horizontal reactor, with no catalyst. The nanorods grown far from the outlet end of the reactor are larger in size, have a higher structural perfection, and exhibit more efficient room-temperature edge luminescence in comparison with the nanorods grown at the outlet end. The low-temperature cathodoluminescence spectrum of the nanorods also depends on their position in the reactor during growth, which is interpreted in terms of the density of native defects. The nanorods exhibit room-temperature stimulated emission in the excitonic spectral region.     

Photoluminescence and structure of ZnO films deposited on Si substrates by metal-organic chemical vapor deposition

The structure and photoluminescence (PL) at room temperature of ZnO films deposited on Si(111) substrates by metal-organic chemical vapor deposition (MO-CVD) using diethylzinc (DEZ) and CO₂ was investigated. It was found that these properties strongly depend on growth temperature and pressure. ZnO films can be deposited only at low pressure and in the temperature region of 500–650°C. The samples grown at certain conditions can generate stronger luminescence of ZnO. When the growth temperature increased to 650°C, the ZnO₂ phase was observed in X-ray diffraction (XRD) patterns of the samples. This characteristic became evident after the samples annealed. Appearance of a ZnO₂ phase results in production of a new emission band centered at 575 nm in the PL spectrum at room temperature, and the green emitting band also disappears.     

Synthesis of indium-catalyzed Si nanowires by hot-wire chemical vapor deposition

Indium (In) catalyzed silicon nanowires (SiNWs) were synthesized by using hot-wire chemical vapor deposition (HWCVD) technique. Indium droplets were deposited on Si substrates by hot-wire evaporation of In wire, which was immediately followed by the growth of SiNWs from the droplets. Three sets of samples were prepared by varying the length of In wires, l, as 3, 1 and 0.5 mm. The sizes of In catalyst droplets decreased from 271.4 ± 66.8 to 67.4 ± 16.6 nm when the l was reduced from 3 to 0.5 mm. Larger size of In droplets (271.4 ± 66.8 nm) was found to induce the growth of worm-like NWs. The decrease in size of In catalyst droplets induced the formation of aligned and tapered NWs with smaller tips. The smallest value of tapering parameter, T_p of 40.5 nm/μm is correlated to the SiNWs induced by the smallest size of In droplets (67.4 ± 16.6 nm). The as-grown SiNWs showed high purity and good crystalline structure.     

Selective area growth of GaN nanowires using metalorganic chemical vapor deposition on nano-patterned Si(111) formed by the etching of nano-sized Au droplets

We report on the selective area growth of GaN nanowires (NWs) on nano-patterned Si(111) substrates by metalorganic chemical vapor deposition. The nano-patterns were fabricated by the oxidation of Si followed by the etching process of Au nano-droplets. The size of formed nano-pattern on Si(111) substrate was corresponding to the size of Au nano-droplet, and the diameter of GaN NWs grown was similar to the diameter of fabricated nano-pattern. The interesting phenomenon of using the nano-patterned Si(111) substrates is the formation of very clear substrate surface even after the growth of GaN NWs. However, in the case of GaN NWs grown using Au nano-droplets, there was several nanoparticles including GaN bulk grains on the Si(111) substrates. The smooth surface morphology of nano-patterned Si(111) substrates was attributed to the presence of SiO₂ layer which prevents the formation of unnecessary GaN particles during the GaN NW growth. Therefore, we believe that nano-patterning method of Si(111) which was obtained by the oxidation of Si(111) substrate and subsequent Au etching process can be utilized to grow high-quality GaN NWs and its related nano-device applications.     

Stress reduction in GaN films on (111) silicon-on-insulator substrate grown by metal-organic chemical vapor deposition

The GaN film was grown on the (111) silicon-on-insulator (SOI) substrate by metal-organic chemical vapor deposition and then annealed in the deposition chamber. A multiple beam optical stress sensor was used for the in-situ stress measurement, and X-ray diffraction (XRD) and Raman spectroscopy were used for the characterization of GaN film. Comparing the characterization results of the GaN films on the bulk silicon and SOI substrates, we can see that the Raman spectra show the 3.0 cm^− 1 frequency shift of E₂(TO), and the full width at half maximum of XRD rocking curves for GaN (0002) decrease from 954 arc sec to 472 arc sec. The results show that the SOI substrates can reduce the tensile stress in the GaN film and improve the crystalline quality. The annealing process is helpful for the stress reduction of the GaN film. The SOI substrate with the thin top silicon film is more effective than the thick top silicon film SOI substrate for the stress reduction.     

Catalyst-free metal-organic chemical vapor deposition growth of InN nanorods

We demonstrated the successful growth of catalyst-free InN nanorods on (0001) Al2O3 substrates using metal-organic chemical vapor deposition. Morphological evolution was significantly affected by growth temperature. At 710 degrees C, complete InN nanorods with typical diameters of 150 nm and length of approximately 3.5 microm were grown with hexagonal facets. theta-2theta X-ray diffraction measurement shows that (0002) InN nanorods grown on (0001) Al2O3 substrates were vertically aligned along c-axis. In addition, high resolution transmission electron microscopy indicates the spacing of the (0001) lattice planes is 0.28 nm, which is very close to that of bulk InN. The electron diffraction patterns also revealed that the InN nanorods are single crystalline with a growth direction along (0001) with (10-10) facets.     

Growth of InAs quantum dots on GaAs nanowires by metal organic chemical vapor deposition

InAs quantum dots (QDs) are grown epitaxially on Au-catalyst-grown GaAs nanowires (NWs) by metal organic chemical vapor deposition (MOCVD). These QDs are about 10-30 nm in diameter and several nanometers high, formed on the {112} side facets of the GaAs NWs. The QDs are very dense at the base of the NW and gradually sparser toward the top until disappearing at a distance of about 2 μm from the base. It can be concluded that these QDs are formed by adatom diffusion from the substrate as well as the sidewalls of the NWs. The critical diameter of the GaAs NW that is enough to form InAs QDs is between 120 and 160 nm according to incomplete statistics. We also find that these QDs exhibit zinc blende (ZB) structure that is consistent with that of the GaAs NW and their edges are faceted along particular surfaces. This hybrid structure may pave the way for the development of future nanowire-based optoelectronic devices.     

Optimizing growth conditions for electroless deposition of Au films on Si(111) substrates

Electroless deposition of Au films on Si(111) substrates from fluorinated-aurate plating solutions has been carried out at varying concentrations, deposition durations as well as bath temperatures, and the resulting films were characterized by X-ray diffraction, optical profilometry, atomic force microscopy and scanning electron microscopy. Depositions carried out with dilute plating solutions (< 0.1 mM) at 28°C for 30 min produce epitaxial films exhibiting a prominent Au(111) peak in the diffraction patterns, while higher concentrations or temperatures, or longer durations yield polycrystalline films. In both epitaxial and polycrystalline growth regimes, the film thickness increases linearly with time, however, in the latter case, at a rate an order of magnitude higher. Interestingly, the surface roughness measured using atomic force microscopy shows a similar trend. On subjecting to annealing at 250°C, the roughness of the film decreases gradually. Addition of poly (vinylpyrrolidone) to the plating solution is shown to produce a X-ray amorphous film with nanoparticulates capped with the polymer as evidenced by the core-level photoelectron spectrum. Nanoindentation using AFM has shown the hardness of the films to be much higher (∼ 2.19 GPa) than the bulk value.     

The growth of infrared antimonide-based semiconductor lasers by metal-organic chemical vapor deposition

We describe the metal-organic chemical vapor deposition (MOCVD) growth of InAsSb/InAs and GaAsSb/GaAs(P) multiple quantum well (MQW) and InAsSb/InAsP and InAsSb/InPSb strained-layer superlattice (SLS) active regions for use in mid-infrared emitters. We also describe the growth and initial characterization of GaAsSbN/GaAs MQW structures. By changing the layer thickness and composition of the InAsSb SLSs and MQWs, we have prepared structures with low temperature (<20 K) photoluminescence wavelengths ranging from 3.2 to 6.0 m. We have made gain-guided, injection lasers using undoped, p-type AlAs_0.16Sb_0.84 for optical confinement and both strained InAsSb/InAs MQW and InAsSb/InAsP and InPSb SLS active regions. The lasers and LEDs utilize the semi-metal properties of a p-GaAsSb/n-InAs heterojunction as a source for electrons injected into the active regions. Cascaded, semi-metal, mid-infrared, injection lasers with pseudomorphic InAsSb multiple quantum well active region lasers and LEDs are reported. We also report on GaAsSb/GaAs(P) lasers and LEDs emitting at 1.1 to 1.2 m grown on GaAs substrates and using AlGaAs layers for confinement.     

Growth of GaAs nanowhisker arrays by magnetron sputtering on Si(111) substrates

The growth of GaAs nanowhisker (NW) arrays on Si(111) substrates by magnetron sputtering is demonstrated. The characteristic NW length is proportional to the effective thickness of a deposited layer and inversely proportional to the transverse whisker size at the top. The results are explained in terms of the diffusion model of NW growth.     

Layer-by-layer growth of graphene layers on graphene substrates by chemical vapor deposition

We demonstrate a synthesis of graphene layers on graphene templates prepared by the mechanical exfoliation of graphite crystals using a developed chemical vapor deposition (CVD) apparatus that has a furnace with three temperature zones and can regulate the temperatures separately in each zone. This results in individual control over the decomposition reaction of the carbon feedstock and the growth of graphene layers by activated carbon species. CVD growth using multi-temperature zones provides wider temperature windows appropriate to grow graphene layers. We observed that graphene layers proceed by a layer-by-layer growth mode using an optical microscopy, an atomic force microscopy, and Raman spectroscopy. This result suggests that a graphene growth technique using the CVD apparatus is a potential approach for making graphene sheets with precise control of the layer numbers.     

Growth of TiO2 anti-reflection layer on textured Si (100) wafer substrate by metal-organic chemical vapor deposition method

Recently anti-reflective films (AR) have been intensely studied. Particularly for textured silicon solar cells, the AR films can further reduce the reflection of the incident light through trapping the incident light into the cells. In this work, TiO2 anti-reflection films have been grown on the textured Si (100) substrate which is processed in two steps, and the films are deposited using metal-organic chemical vapor deposition (MOCVD) with a precursor of titanium tetra-isopropoxide (TTIP). The effect of the substrate texture and the growth conditions of TiO2 films on the reflectance has been investigated. Pyramid size of textured silicon had approximately 2-9 microm. A well-textured silicon surface can lower the reflectance to 10%. For more reduced reflection, TiO2 anti-reflection films on the textured silicon were deposited at 600 degrees C using titanium tetra-isopropoxide (TTIP) as a precursor by metal-organic chemical vapor deposition (MOCVD), and the deposited TiO2 layers were then treated by annealing for 2 h in air at 600 and 1000 degrees C, respectively. In this process, the treated samples by annealing showed anatase and rutile phases, respectively. The thickness of TiO2 films was about 75 +/- 5 nm. The reflectance at specific wavelength can be reduced to 3% in optimum layer.     

Ge组分渐变的Si1-x-yGexCy薄膜的制备

用化学气相淀积方法在Si（100）衬底上外延生长了Ge组分最高约0．40的组分渐变的Si1-x-yGexCy合金薄膜,研究了生长温度等工艺参数的影响．结果表明,生长温度和C2H4分压的提高均导致薄膜中碳组分的增加和合金薄膜晶格常数的减小,这表明外延薄膜中的C主要以替位式存在．C掺入量的变化可有效地调节薄膜的禁带宽度,而提高生长温度有助于改善Si1-x-yGexCy薄膜的的晶体质量．组分渐变的Si1-x-yGexCy合金薄膜包括由因衬底中Si原子扩散至表面与GeH4．C2H4反应而生成的Ni1-x-yGexCy外延层和由Ni1-x-yGexCy外延层中Ge原子向衬底方向扩散而形成的Ni1-xGex层．     

Fast growth of branched nickel monosilicide nanowires by laser-assisted chemical vapor deposition

Branched nickel monosilicide (NiSi) nanowires (NWs), for the first time, have been synthesized on Ni foams by laser-assisted chemical vapor deposition using disilane precursor molecules. Studies indicate that 600?°C is the threshold temperature for the growth of a large number of branched NiSi NWs with 100-500 nm long branches extending from the main stems. Below the threshold temperature, unbranched NiSi NWs were obtained. The density of the branched NiSi NWs is relatively higher in comparison to that of the unbranched ones. The growth rate of the branched NiSi NWs at 700?°C is estimated up to 10 μm min(-1). High-resolution transmission electron microscopy and energy-dispersive x-ray spectroscopy of the branched NiSi NWs suggest that the formation of these branched nanostructures is ascribed to the Ni-dominant diffusion process. These NiSi NWs with branched nanostructures could bring them new opportunities in nanodevices.     

Photoluminescence study of GaAs thin films and nanowires grown on Si(111)

Mg-doped GaAs nanowires have been grown by molecular beam epitaxy on a partially Au-coated Si(111) substrate by the vapor–liquid–solid mechanism. Outside the coated areas, a thin film of GaAs was grown epitaxially at the same time. The optical properties in both parts of the sample were investigated by photoluminescence spectroscopy, as a function of temperature. A structured emission in the range ～1.25–1.55 eV was observed at 10 K and the resemblances in both cases were identified. The radiative transitions are discussed with relevance to known defect centers in the GaAs thin films and to their possible relation with the zinc-blende and wurtzite phases in the nanowires. The presence of both crystalline phases in the nanowires was confirmed by μ-Raman spectroscopy.     

爆炸辅助气相沉积法制备炭纳米线的研究

根据爆炸辅助气相沉积法生长碳纳米管的机理,设计了两种制备炭纳米线的方案:(1)使用低活性铁-镍二元金属催化剂;(2)对钴催化剂作用下碳纳米管的生长实施冷冻。透射电子显微镜显示这两种方法制备的炭纳米线均为纳米颗粒组装而成,具有非常粗糙的表面。其中,使用铁-镍二元催化剂所制炭纳米线直径分布不均匀,黏结情况严重;而在冷冻钴催化剂作用下炭纳米管生长过程所得的炭纳米线直径分布比较均匀,黏结情况也大为减少。这两种纳米线的差别与金属催化剂的活性有关。光催化降解亚甲基蓝实验表明:冷冻碳纳米管生长所得炭纳米线具有良好的催化辅助功能,可以提高ZnS纳米晶的光催化活性。     

Growth and characterization of well-aligned densely-packed rutile TiO(2) nanocrystals on sapphire substrates via metal-organic chemical vapor deposition

Well-aligned densely-packed rutile TiO(2) nanocrystals (NCs) have been grown on sapphire (SA) (100) and (012) substrates via metal-organic chemical vapor deposition (MOCVD), using titanium-tetraisopropoxide (TTIP, Ti(OC(3)H(7))(4)) as a source reagent. The surface morphology as well as structural and spectroscopic properties of the as-deposited NCs were characterized using field-emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM), selected-area electron diffractometry (SAED), x-ray diffraction (XRD) and micro-Raman spectroscopy. FESEM micrographs reveal that vertically aligned NCs were grown on SA(100), whereas the NCs on the SA(012) were grown with a tilt angle of ～33° from the normal to substrates. TEM and SAED measurements showed that the TiO(2) NCs on SA(100) with square cross section have their long axis directed along the [001] direction. The XRD results reveal TiO(2) NCs with either (002) orientation on SA(100) substrate or (101) orientation on SA(012) substrate. A strong substrate effect on the alignment of the growth of TiO(2) NCs has been demonstrated and the probable mechanism for the formation of these NCs has been discussed.