Investigation of single phase frictional pressure loss in circular micro tubes

Single phase pressure drops in micro tubes were investigated through an experimental measurement and a numerical simulation. Experimental Po was obtained in circular micro tubes with 87 and 118 μm diameter with distilled water. Experiments were carried out in laminar flow region with varying the Re 15–450 for the 87 μm diameter tubes and 60–1300 for the 118 μm diameter tube. No early transition from laminar to turbulent flow was detected for the experimental range. The computational estimation of pressure drop in the 87 μm diameter tube was performed with the aid of CFD software. Boundary conditions from experiments were used for the numerical simulation. The results of experimental and numerical studies showed a good agreement with the conventional macro theory.     

粉煤灰管道气力输送特性的研究

对浓相粉煤灰气力输送系统三维流场进行了数值模拟,给出了流场特性,分析了颗粒对气相的影响,描述了颗粒沉降的具体过程。研究表明单位长度压力损失与速度平方、体积浓度成正比,而与管道长度无关;颗粒直径越大,压力损失就越小;颗粒的沉降与运动速度、颗粒直径和管道长度有关。     

A review of focused ion beam sputtering

This paper reviews the applications of focused ion beam (FIB) sputtering for micro/nano fabrication. Basic principles of FIB were briefly discussed, and then empirical and fundamental models for sputtering yield, material removal rate, and surface roughness were presented and compared. The empirical models were more useful for application compared to fundamental models. Fabrication of various micro and nano structures was discussed. Trimmed atomic force microscope (AFM) tips were tested in measurement and imaging of high aspect ratio nanopillars where higher accuracy and clarity were observed. Micromilling tool fabricated using FIB sputtering was used to machine microchannels. Slicing and dwell time control approaches on FIB sputtering were presented for the fabrication of three dimensional microcavities. The first approach is preferred for practical applications. The maximum aspect ratio of 13:1 of the microstructures was achieved. The minimum size of the nanopore was in the range of 2–10 μm. Cavities of microgear of 70 μm outside diameter were sputtered with submicrometer accuracy and 2–5 nm average surface roughness. The microcavities were then filled with polymer in a subsequent micromodling process. The replicated microcomponents were inspected with scanning electron microscope where faithful duplication of accuracy and surface texture of the cavity was observed.     

A study on the mirror surface machining by using a micro-energy EDM and the electrophoretic deposition polishing

In order to achieve a mirror-like workpiece surface by EDM, a micro-energy EDM or a manual lapping is normally used. However, both methods are time consuming and economically unattractive. To have better performance, a sinking EDM machine was first used in this research on SKD 61 for a micro-energy discharge process followed by the electrophoretic deposition (EPD) process to coat Al₂O₃ particles uniformly on a rotation electrode. The precision polishing process was then applied on the discharged workpiece with suitable parameters including the voltage, electrode rotating speed, pH value of electrolyte, and abrasive concentration. After the EDM process, the surface roughness and the recast layer thickness of a workpiece could also be reduced. The experimental data showed that when 0.3 μm of Al₂O₃ particles was used for the EPD polishing process, the initial roughness of a discharge surface could be improved from 0.52 μm Ra (6.50 μm Rt) to a mirror-like surface of 0.068 μm Ra (0.742 μm Rt). Also, the total working time could be reduced significantly to within the range of 5 to 10 min.     

Friction and wear of polyphenylene sulfide composites filled with micro and nano CuO particles in water-lubricated sliding

The tribological behavior of polyphenylene sulfide (PPS) composites filled with micro and nano CuO particles in water-lubricated sliding condition were studied. Pin-on-disk sliding tests were performed against a steel counterface of surface roughness 0.09–0.11 μm. The lubrication regimes were established from friction data corresponding to various combinations of loads and sliding speeds. Later experiments were performed using the sliding speed of 0.5 m/s and contact pressure of 1.95 MPa, which corresponded to boundary lubrication regime. Micro CuO particles as the filler were effective in reducing the wear of PPS but nano CuO particles did not reduce wear. The steady state wear rate of PPS-30 vol.% micro CuO composite was about 10% of that of unfilled PPS and the coefficient of friction in this case was the lowest. The examination of the topography of worn pin surfaces of nano CuO-filled PPS by SEM revealed grooving features indicating three-body abrasion. The transfer films formed on the counterfaces during sliding were studied by optical microscopy and AFM. The wear behavior of the composites in water-lubricated sliding is explained using the characteristics of worn pin surfaces and transfer films on the counterface.     

Micro channel forming with ultra thin metallic foil by cold isostatic pressing

The objective of this study is to establish the limit of the metal forming process in terms of size and accuracy. In the present investigation, micro channel forming with ultra thin metallic foil by the sheet metal forming process was studied. In order to examine the fabrication limit of the process, both the channel size needed to be as small as possible and the sheet thickness to be as thin as possible. Copper foil 1.0 μm thick was made into 5.6 μm wide and 3.2 μm deep channels. The shapes of the channels were straight line, concentric circle, cross, and other curved shapes. Forming was done by cold isostatic pressing. Single crystal silicon wafer was used as the die material, and die grooves were made by micro machining techniques. The die, metallic foil, and plasticine as the pressure-transmitting medium were vacuum packed in a bag made of multilayered film. The forming was conducted with a cold hydrostatic press where the forming pressure was 240 MPa. The formed channels were examined in terms of their dimensions and surface qualities. Based on the examinations, channel formability was also discussed.     

Comparative study of conventional and micro WEDM based on machining of meso/micro Sized Spur Gear

This paper discusses the comparison of micro machining process using conventional and micro wire electrical discharge machining (WEDM) for fabrication of miniaturized components. Seventeen toothed miniaturized spur gear of 3.5 and 1.2 mm outside diameter were fabricated by conventional and micro WEDM respectively. The process parameters for both conventional and micro WEDM were optimized by preliminary experiments and analysis. The gears were investigated for the quality of surface finish and dimensional accuracy which were used as the criteria for the process evaluation. An average surface roughness (R_a) of 50 nm and dimensional accuracy of 0.1–1 μm were achieved in micro WEDM. Whenever applied conventional WEDM for meso/micro fabrication, a R_a surface roughness of 1.8 μm and dimensional accuracy of 2–3 μm were achieved. However, this level of surface roughness and dimensional accuracy are acceptable in many applications of micro engineering. A window of conventional WEDM consisting of low energy discharge parameters is identified for micromachining.     

Micro machining of high-hardness materials using magnetic abrasive grains

If processing speed is increased and processing time is lengthened, a magnetic abrasive system can be used as a tool both for finishing and precise dimensional control of manufactured products at the micro-level, and for mirror face processing. In this study, a micro machining system that can change its high rotational speed was developed. Using micro machining with a high speed magnetic abrasive system, the diameter of difficult-to-cut materials with high hardness could be controlled almost linearly by changing the rotational speed, the frequency of magnetic poles, and the size of diamond particles. By changing machining conditions, the surface roughness of the mirror face level could be obtained. To improve roundness, a higher rotational speed improved processing time and dimensional precision, and 20,000 rpm was the optimum speed in this experiment. Roundness was obtained up to 0.15 μm. Before and after the processing, there was almost no change in the WC(tungsten carbide) and Ni components of the material, and there were no remains of mixed-type particles such as iron and diamond on the material.     

Automated surface finishing of plastic injection mold steel with spherical grinding and ball burnishing processes

This study investigates the possibilities of automated spherical grinding and ball burnishing surface finishing processes in a freeform surface plastic injection mold steel PDS5 on a CNC machining center. The design and manufacture of a grinding tool holder has been accomplished in this study. The optimal surface grinding parameters were determined using Taguchi’s orthogonal array method for plastic injection molding steel PDS5 on a machining center. The optimal surface grinding parameters for the plastic injection mold steel PDS5 were the combination of an abrasive material of PA Al₂O₃, a grinding speed of 18000 rpm, a grinding depth of 20 μm, and a feed of 50 mm/min. The surface roughness R_a of the specimen can be improved from about 1.60 μm to 0.35 μm by using the optimal parameters for surface grinding. Surface roughness R_a can be further improved from about 0.343 μm to 0.06 μm by using the ball burnishing process with the optimal burnishing parameters. Applying the optimal surface grinding and burnishing parameters sequentially to a fine-milled freeform surface mold insert, the surface roughness R_a of freeform surface region on the tested part can be improved from about 2.15 μm to 0.07 μm.     

An experimental study of particulate retention by microporous membranes in liquid filtration

A theoretical study on particulate retention by microporous membrane filters during liquid filtration has been investigated. A model to predict particle retention using a multi-layer concept for filter retention by sieving and using flow resistance for cake filtration was developed to predict particle retention as a function of particle diameter and particle loading. Filter efficiency for the 0.45 μm rated membranes predicted 99.95% for the particle diameter of 0.453 μm. Filter efficiency by sieving model decreased with increased particle loading on the filter. After substantial particle loading, filter efficiency was found to increase with increased particle loading due to the combined effect of sieving and cake filtration. Theoretical particle retention modeling showed good agreement with experimental results.     

Erosive smoothing of abrasive slurry-jet micro-machined channels in glass,PMMA, and sintered ceramics: Experiments and roughness model

Abrasive slurry jet micro-machining (ASJM) was used to machine channels in glass, PMMA, zirconium tin titanate, and aluminum nitride. The channel roughness was measured as a function of the ASJM process parameters particle size, dose, impact velocity, and impact angle. The steady-state roughness of the channels was reached relatively quickly for typical ASJM abrasive flow rates. The roughness of channels having depth-to-width aspect ratios up to about 0.25 could be reduced by approximately 35% compared to the roughest channel by decreasing particle impact velocity and angle. However, machining at such conditions reduced the specific erosion rate by 64% on average. It was therefore quicker to post-blast reference channels (225 nm average root mean square (R_rms) roughness) using process parameters selected for peak removal. It was also found that the roughness of reference channels could be reduced by about 78% by post-blasting using 3 μm diameter silicon carbide particles at 15° jet incidence. The smoothest post-blasted channels had an R_rms roughness of about 23 nm in glass, PMMA, and zirconium tin titanate, and 170 nm in aluminum nitride. Computational fluid dynamics was used to predict the particle impact conditions that were used in a model to predict the steady-state roughness due to ductile erosion with an average error of 12%.     

An analytical model of the material removal rate between elastic and elastic-plastic deformation for a polishing process

This paper develops an analytical model for the material removal rate during specimen polishing. The model is based on the micro-contact elastic mechanics, micro-contact elastic-plastic mechanics and abrasive wear theory. The micro-contact elastic mechanics between the pad-specimen surfaces used the Greenwood and Williamson elastic model. The micro-contact elastic-plastic mechanics between specimen and particle, as well as the micro-contact elastic mechanics between particle and pad, are also analyzed. The cross-sectional area of the worn groove in the specimen is considered as trapezoidal area. A close-form solution of material removal rate from the specimen surface is the function of average diameter of slurry particles, pressure, the specimen/pad sliding velocity, Equivalent Young’s modulus, RMS roughness of the pad, and volume concentration of the slurry particle.     

Studies on Recharging of Abrasives in Abrasive Water Jet Machining

The objective of this work is to find the effect of the recharging of local garnet abrasives (origin: southern India) while cutting aluminium using abrasive water jet machining. The influence of the specially formulated optimised abrasive test sample, pressure, traverse rate, and abrasive flowrate, on the American Foundrymen’s Society fineness number, depth of cut, top and bottom kerf width, kerf taper, and surface roughness are studied. The performance of the test sample has been compared with that of commercial grade abrasive with mesh size 80. Additionally, recharging studies are carried out after screening out particles of less than 90 μm. These tests help to determine the optimum recharging required.     

Effect of SiC Particle Size on Wear Properties of Al2O3·SiO2/SiC/Mg Hybrid Metal Matrix Composites

The aim of this study was to investigate the effect of SiC particle size on the wear properties of magnesium-based hybrid metal matrix composites (MMCs) reinforced with Saffil short fibers and SiC particles. Hybrid MMCs with different SiC particle sizes of 1, 7, and 20 μm, respectively, were fabricated by the squeeze infiltration process. The volume fractions of Saffil short fibers and SiC particles in the hybrid composites were 15 and 5%, respectively. Wear tests were carried out using a ball-on-disk against a steel ball under the dry sliding condition. The test results showed that the composite with large-sized SiC particles had an improved wear resistance compared with the smaller sized particles.     

磨粒流研抛伺服阀阀芯喷嘴的冲蚀磨损分析

为了研究固液两相磨粒流对伺服阀阀芯喷嘴的研抛性能,从冲蚀磨损的角度对比分析了不同磨粒硬度下的磨粒流研抛效果。利用计算流体力学方法,求解分析了磨粒流研抛伺服阀阀芯喷嘴时流场中的冲蚀磨损特性,采用电子显微镜以及扫描电镜仪检测伺服阀阀芯喷嘴零件经磨粒流研抛前后的表面粗糙度和表面形貌。实验结果表明:采用碳化硅磨粒和白刚玉磨粒加工后的伺服阀阀芯喷嘴主干通道、交叉孔以及小孔区域的粗糙度分别由1.1μm、0.823μm、0.743μm降低为0.735μm、0.721μm、0.571μm和1μm、0.747μm、0.696μm。在本试验中碳化硅磨粒的加工效果优于白刚玉磨粒,即具有高磨粒硬度的磨粒研抛效果好。检测结果显示,磨粒流研抛技术可有效改善伺服阀阀芯喷嘴的表面质量;提高磨粒硬度可提高磨粒流的研抛效果;伺服阀阀芯喷嘴的交叉孔以及小孔区域的表面质量要高于主干通道的表面质量。     

The effects of particle size and volume fraction of Al2O3 on electronic thermal conductivity of α-Al2O3 particulate reinforced aluminum composites (Al/Al2O3MMC)

The effects of particle size and volume fraction of Al₂O₃ on the thermal conductivity properties of α-Al₂O₃ particulate reinforced aluminum composites (Al/Al₂O₃MMC) are investigated herein. It is found that the thermal conductivity of composites is higher with an Al₂O₃ particle size of 15 μm than with a particle size of 30 μm. The increase in the thermal conductivity could be due to the greater stability of thermal conductive paths with smaller Al₂O₃ particles.     

离心压缩机内固粒运动规律与冲蚀磨损的数值模拟

针对离心压缩机叶轮的冲蚀磨损问题,利用FLUENT中离散相模型、质量冲蚀率模型,对压缩机内部不同粒径的固体颗粒的运行轨迹、运动速度、偏聚浓度及造成的叶片冲蚀率的分布进行了数值模拟。结果表明:粒径为5~20μm的绝大部分的固体颗粒流经大叶片压力面附近流道;固体颗粒在运动到叶片前缘过程中速度迅速升高,在压力面腹侧会有所减小,后缘处重新升高;大叶片后缘根部固体颗粒浓度高、运行速度快,冲蚀磨损严重,且固体颗粒直径越大对大叶片压力面造成的冲蚀磨损越严重。     

Determination of Optimal Ball-Burnishing Parameters for Plastic Injection Moulding Steel

The objective of this study is to determine the optimal plane ball-burnishing parameters for plastic injection moulding steel PDS5 on a machining centre by utilising the Taguchi’s orthogonal array method. The design and manufacture of a burnishing tool are described. Four burnishing parameters, namely the ball material, burnishing speed, burnishing force and feed, were selected as the experimental factors in Taguchi’s design of experiments to determine the optimal burnishing parameters which have the dominant influence on surface roughness. The optimal burnishing parameters were found after carrying out the experiments specified by Taguchi’s L18 orthogonal table, by the analysis of variation, and by a full factorial experiment. The optimal plane burnishing parameters for the plastic injection moulding steel PDS5 were a combination of a tungsten carbide ball, a burnishing speed of 200 mm/min, a burnishing force of 300 N and a feed of 40 μm. The surface roughness Ra of the specimen can be improved from about 1 μm to 0.07 μm by using the optimal burnishing parameters for plane burnishing.     

Vacuum suction aid for microlens array formation using LIGA-like process

Microlens array fabrication using a vacuum suction process combed with the LIGA-like process is presented in this paper. The circular patterned array was designed on a photomask and transferred onto a substrate using photoresist patterning. Electroforming technology was used to convert the photoresist patterns into a metallic molds with an array of nozzles. Liquid JSR resist was spun onto the substrate joining the metallic mold to remove microlens array under vacuum conditions. The exposure energy and vacuum pressure were essential parameters in the microlens array manufacturing process. Microlens arrays with 50 μm in diameter at -50 cm-Hg vacuum pressure and 100 μm in diameter at -60 cm-Hg vacuum pressure were successfully formed. The produced microlens arrays presented smooth measured surface profiles coincident with the optical lens geometry.     

硅晶片化学机械抛光材料去除机制与模型

通过分析软质层的形成、作用以及纳米磨料的自身变形对材料去除的影响，改进了CMP过程的接触力学模型；分析了纳米磨料自身变形量对磨料嵌入硅晶片基体材料的深度的影响，以及纳米磨料硬度对抛光表面粗糙度的影响。结果表明：软质层的存在增加了单个纳米磨料所去除材料的体积，且对基体材料有保护作用，减小了纳米磨料嵌入基体材料的深度；纳米磨料的自身变形抵消了纳米磨料嵌入基体材料的切削深度，从而也决定了抛光表面的粗糙度；纳米磨料的自身变形量与纳米磨料的硬度有关，硬度低的纳米磨料自身变形量大，因而切削深度小，抛光后表面的粗糙度值低。