用于声化学的复合换能器的研究

设计了一种夹心式纵弯复合振动模式超声换能器,该换能器由纵向夹心式压电超声换能器与弯曲正六边形薄板组成。采用有限元方法,对一定几何尺寸边界自由的正六边形薄板进行模态分析,得到中心位移最大的某一模态,设计以该模态的频率作为共振频率的纵弯复合模式换能器。当复合振动系统振动模式的共振频率与纵向换能器的共振频率以及正六边形薄板弯曲振动的共振频率一致时,复合振动系统具有较高的有效机电耦和系数,系统声辐射能力较强;频率的理论与测量值的误差可能是设计纵向换能器时未考虑预应力螺栓、前后盖板的形状以及横向振动的影响,材料参数的取值与实际值有误差。弯曲振动的正六边形薄板的几何尺寸大,将会增大复合振动系统声波的辐射面积,因此可以改善局部空化腐蚀问题,并且可以提高槽内声场的均匀性,从而可以提高声化学产率;实验结果表明,换能器的共振频率测试值与设计值基本吻合。     

A cylindrical traveling wave ultrasonic motor using a circumferential composite transducer

This paper intends to present and verify a new idea for constructing traveling wave ultrasonic motors that may effectively avoid the drawbacks of conventional traveling wave motors using bonded PZT plates as the exciting elements. In the configuration of the motor's stator, a composite sandwich type transducer is used to excite a traveling wave in a cylinder with two cantilevers as the coupling bridges between the transducer and the cylinder. The design process of the stator is described using the FEM modal analysis method, and the establishment of traveling wave on the cylindrical stator was simulated by FEM transient analysis. To verify the theoretical analysis results, a laser Doppler scanner was employed to test the mode shapes of a prototype stator excited by the longitudinal and bending vibrations respectively. Finally, to validate the design idea, a prototype motor was fabricated and tested; the typical output features are no-load speed of 156 rpm and maximum torque of 0.75 N·m under exciting voltages of 70 V(rms) applied to excite the longitudinal vibration of the transducer and 200 V(rms) applied to excite the bending vibration.     

A silicon electrostatic ultrasonic transducer

An electric ultrasonic transducer is developed by using a silicon IC process. Design considerations are first presented to obtain high sensitivity and the desired frequency responses in air. The measured transmitter sensitivity is 19.1 dB (0 dB=1 μbar/V) at a point 50 cm away from the devices, when the devices are operated at 150 kHz. The receiving sensitivity is 0.47 mV/Pa in the 10-130-kHz range, with bias voltages as low as 30 V. An electronic sector scanning operation is also achieved by time-sequentially driving seven elements arranged in a linear array on the same chip. The results should be helpful in the design of phased-array transducers integrated with electronic scanning circuits     

复合共鸣腔Janus宽带换能器

提出了一种复合共鸣腔Janus换能器设计思想.在Janus-Helmholtz换能器基础上,增加Janus-Hammer Bell的圆环谐振模态,利用换能器三种工作模态的互相耦合,有效拓宽了换能器的工作频带.同时换能器整体采用溢流设计,实现内外静水压力平衡,适用于深水工作.文章首先介绍了复合共鸣腔的工作原理,给出了圆环...     

Fabrication and characterization of piezoelectric micromachined ultrasonic transducers with thick composite PZT films

Ferroelectric microelectromechanical systems (MEMS) has been a growing area of research in past decades, in which ferroelectric films are combined with silicon technology for a variety of applications, such as piezo-electric micromachined ultrasonic transducers (pMUTs), which represent a new approach to ultrasound detection and generation. For ultrasound-radiating applications, thicker PZT films are preferred because generative force and response speed of the diaphragm-type transducers increase with increasing film thickness. However, integration of 4- to 20-microm thick PZT films on silicon wafer, either the deposition or the patterning, is still a bottleneck in the micromachining process. This paper reports on a diaphragm-type pMUT. A composite coating technique based on chemical solution deposition and high-energy ball milled powder has been used to fabricate thick PZT films. Micromachining of the pMUTs using such thick films has been investigated. The fabricated pMUT with crack-free PZT films up to 7-microm thick was evaluated as an ultrasonic transmitter. The generated sound pressure level of up to 120 dB indicates that the fabricated pMUT has very good ultrasound-radiating performance and, therefore, can be used to compose pMUT arrays for generating ultrasound beam with high directivity in numerous applications. The pMUT arrays also have been demonstrated.     

超声换能器环氧树脂-氧化铝匹配层研究

匹配层对超声换能器的性能起着至关重要的作用,寻找合适的匹配层材料是换能器设计中的关键步骤。提出了一种基于环氧树脂-氧化铝复合材料的匹配层材料。首先,测试了不同配比的环氧树脂-氧化铝复合材料的声学性能,对比了其声学特性,并确定了材料的最佳配比。其次,研制了相应的换能器,分析该匹配层对换能器性能的影响,通过脉冲-回波方法测试了其性能参数。最后,基于四分之一波长匹配层原理对匹配层的厚度进行了优化。结果显示,环氧树脂中加入质量分数为 60%的氧化铝粉末的匹配层对换能器的改善效果最佳,该方案减小了换能器接收回波的拖尾,接收回波的幅值提高至 1 136 mV(+104%),-6 dB带宽达到 49.679%(+107%)。结果表明,氧化铝-环氧树脂混合材料可以提升换能器的声学性能,是较为理想的匹配层材料,在高频超声换能器的设计与应用中具有很好的应用前景。     

KNN/BNT composite lead-free films for high-frequency ultrasonic transducer applications

Lead-free K(0.5)Na(0.5)NbO(3)/Bi(0.5)Na(0.5)TiO(3) (KNN/ BNT) films have been fabricated by a composite sol-gel technique. Crystalline KNN fine powder was dispersed in the BNT precursor solution to form a composite slurry which was then spin-coated onto a platinum-buffered Si substrate. Repeated layering and vacuum infiltration were applied to produce 5-μm-thick dense composite film. By optimizing the sintering temperature, the films exhibited good dielectric and ferroelectric properties comparable to PZT films. A 193-MHz high-frequency ultrasonic transducer fabricated from this composite film showed a -6-dB bandwidth of approximately 34%. A tungsten wire phantom was imaged to demonstrate the capability of the transducer.     

A new focusing ultrasonic transducer and two foci acoustic lens for acoustic microscopy

The textured piezoelectric film of a new organic-based material produced by vapor deposition was used as an active element of a focusing ultrasonic transducer. The transducer exhibits near theoretical lateral and axial resolution, unipolar pulse response to a step voltage, and 30 dB insertion losses in an octave frequency band. The transducer is acoustically transparent over a wide frequency range and can be fabricated on a concave spherical surface of the standard acoustic lens. The resulting double transducer and two foci acoustic lens are capable of improving the quality of the surface structure imaging or of being used in continuous wave reflection acoustic microscopy.     

A surface micromachined electrostatic ultrasonic air transducer

Airborne ultrasound has many applications such as, ranging, nondestructive evaluation, gas flow measurement, and acoustic microscopy. This paper investigates the generation and detection of ultrasound in air at a few MHz. Conventional plane piston lead zirconium titanate (PZT) based transducers perform poorly for this application due to the lack of proper matching layer materials. Electrostatic, or capacitive, transducers promise higher efficiency and broader bandwidth performance. The device structure in this work consists of a capacitor where one plate is a circular silicon nitride membrane coated with gold and the other is a rigid silicon substrate. By applying a voltage between the membrane and the silicon substrate, an electrostatic force is exerted on the membrane which sets it in motion, thus generating a sound wave in air. Presented here is an electrical equivalent circuit model for electrostatic transducers which is based on the early work of Mason (1942). The electrostatic transducers were designed and constructed for operation at 1.8 and 4.6 MHz. The transducers were fabricated using standard micromachining techniques. An optical interferometer was used to measure the peak displacement of the 1.8 MHz electrostatic transducer at 230 Å/V. A transmit-receive system was built using two electrostatic transducers. The system had a signal to noise ratio of 34 dB at a transducer separation of 1 cm. Each transducer had a 3-dB bandwidth of 20%, and a one-way insertion loss of 26 dB. There is excellent agreement between the measured device performance and theoretical predictions     

A capacitance ultrasonic transducer for high-temperature applications

This paper introduces a novel ultrasonic capacitance transducer for operation at elevated gas temperatures of several hundred degrees Celsius. The transducer design is based on a metallic membrane foil and a backplate made of an electrically conducting substrate coated with an insulation layer. Guidelines are given for selecting suitable materials for the membrane foil, the backplate substrate, and the coating. Manufacturing techniques applied for fabrication of different transducer types are described in detail. Transducers tested were composed of titanium substrates with insulation layers of silicon nitride or of silicon substrates with silicon oxide coatings. Experimental setup and test procedures are described. Results of transducer characterization and performance tests at elevated temperatures are presented and discussed. Transducer functionality is proven for air temperatures of up to 500 degrees C.     

Radial vibration of the composite ultrasonic transducer of piezoelectric and metal rings

The radial composite ultrasonic transducer of a piezoelectric ceramic ring and a metal ring is studied. The radial vibrations of a piezoelectric ceramic ring polarized in the thickness direction and a metal ring are analyzed and their electromechanical equivalent circuits are obtained. On the basis of the electromechanical equivalent circuits of the piezoelectric and the metal ring and the radial boundary conditions, the total electromechanical equivalent circuit for the composite ultrasonic transducer is also obtained. The resonance frequency and anti-resonance frequency equations of the composite ultrasonic transducer are given. Some radial composite ultrasonic transducers are designed and manufactured and their resonance and anti-resonance frequencies are measured. Experiments show that the measured resonance frequencies are in a good agreement with the theoretical results.     

基于单片机控制的超声换能器频率跟踪

根据超声波压电换能器在谐振状态下工作电流最大的特点,针对因负载变化或扰动导致超声压电换能器工作频率偏离固有频率的问题,设计了由单片机组成的A/D转换器及其输入输出电路组成的共振频率单闭环跟踪系统.在软件的支持下,改变单片机输出给超声功率电源的PWM波的频率,使A/D转换采集到换能器的负载电流的分流值达到最大,从而保证了超声换能器工作在最佳谐振状态.该文对设计方案的硬件和软件部分作了较为详细的分析,并给出部分硬件原理图.设计方案应用在超声乳化装置上时,实测误差低于0.5%.     

Improvement electrical properties of sol–gel derived lead zirconate titanate thick films for ultrasonic transducer application

In this work, a fabrication process of piezoelectric PZT [Pb(Zr_0.52Ti_0.48)O₃] thick films up to 60 μm deposited on silicon and aluminum substrates is reported. Crystalline spherical modified PZT powder about 300 nm in diameter was used as filler. PZT polymeric precursor produced by Chemat Inc. was used as the matrix material. Spinning films were annealed at 700 °C for one hour in the furnace in air. The thickness of the thick films was measured using a scanning electron microscope (SEM). Compared with previous piezoelectric PZT composite films, the modified piezoelectric thick films exhibit better dielectric properties. The dielectric constant is over 780 and dielectric loss is 0.04 at 1 KHz. Using a PiezoCAD model, the high frequency transducer was designed and fabricated. It showed a bandwidth of 75% at 40 MHz.     

一种超声料位仪换能器

本文叙述了一种用于空气中测量料位的换能器，它向纵向振子为策动源，台阶补偿高阶弯曲板为辐射面，并为发收两用型。 该换能器具有高指向性、低机械Ｑｍ值和高灵敏度的特点，已成功用于量程为２０ｍ煤仓的煤位检测。     

Hybrid transducer type ultrasonic motor

A type of ultrasonic motor whose stator is composed of a torsional vibrator and multilayered piezoelectric actuators is proposed and has been fabricated for trial. The stator is operated at the resonance frequency of the torsional vibration. The vibrator generates the mechanical output force and the actuators control the frictional force. The construction provides for arbitrary Lissajous's figures at the contacting surface and contributes to large mechanical output power with high efficiency and bidirectional motion. It also gives greater freedom of design. The prototype motor produced a maximum torque of 7 kg-cm and a maximum efficiency of 33%     

一种超声手术刀推挽激励换能器的研究

设计了一种超声手术刀用的新型推挽激励换能器。它是在夹心式单晶堆压电超声换能器的经典构造基础上,把原先激励一组压电陶瓷晶片堆的方式,改为同时施加反相激励的前后两组晶堆。利用有限元方法,对该推挽激励换能器进行模态分析和频率响应分析。在相同大小的电压激励下,相对单晶堆换能器,推挽激励换能器可以获得更高的工作带宽和机电耦合系数,提高了换能器的电声转换效率。按照仿真结果加工推挽激励换能器,实现良好的动力学和电学特性,满足设计要求。     

High-frequency ultrasonic transducer fabricated with lead-free piezoelectric single crystal

High-frequency (25 MHz) ultrasonic transducers with Na(0.5)Bi(0.5)TiO(3)-BaTiO(3) (NBT-BT) lead-free piezoelectric single crystal as the active elements are fabricated and characterized. The impedance measurement reveals that the poled [001]-oriented NBT-BT single crystal exhibits a high thickness electromechanical coefficient k(t) of 0.52 and a low clamped dielectric constant of 80. The -6-dB bandwidth of the transducer is 46.16% and the insertion loss at the center frequency is -31.89 dB. The good performance of the transducer indicates that the NBT-BT single crystal would be a promising lead-free material for ultrasonic transducer applications.     

圆台型自聚焦超声压电换能器研究

对圆台型自聚焦超声压电换能器辐射声场分布进行了数值计算,分析了圆台换能器几何参数小端半径b、大端半径a以及高度h对轴向声场以及焦平面声场分布的影响。结果表明:圆台型自聚焦超声换能器轴向声场为振荡分布,声强平均值较高,存在一组最佳参数对应于最佳的聚焦效果,而径向声场分布比较均匀,焦平面有效半径小,受参数影响较小。     

A 200-kHz ultrasonic transducer coupled to the air with a radiating membrane

The development of a 200-kHz air ultrasonic transducer that consists of a piezoceramic disc and metal housing, the latter acting as a radiating membrane, is discussed. Theoretical analysis of the axially symmetric transducer structure is based upon the finite-element method. Calculations of the resonance frequencies, corresponding transducer deformations and input electrical admittance are performed using triangular ring elements with six degrees of freedom. Measured values on experimentally built transducers show good agreement with theory.     

铁电驻极体空气耦合声换能器的研制

基于多孔聚丙烯铁电驻极体薄膜系统研制了平面型和球型聚焦空气耦合超声波换能器。平面型换能器孔径为20mm,两个球型聚焦换能器的孔径和焦距分别为20mm和35mm、30mm和40mm。使用激光干涉仪测得了三个换能器作为发射器工作时的带宽和谐振频率,并且将在脉冲回波模式下测得的换能器作为接收机工作时的响应与激光干涉仪测试结果进行比较。最后选择孔径为20mm的球型聚焦换能器,在脉冲回波模式下对不同直径孔的聚乙烯阶梯楔进行扫描成像。