Imaging Si nanoparticles embedded in SiO(2) layers by (S)TEM-EELS

Fabrication of systems in which Si nanoparticles are embedded in a thin silica layer is today mature for non-volatile memory and opto-electronics applications. The control of the different parameters (position, size and density) of the nanoparticles population is a key point to optimize the properties of such systems. A review of dedicated transmission electron microscopy (TEM) methods, which can be used to measure these parameters, is presented with an emphasis on those relying on electron energy-loss spectroscopy (EELS). Defocused bright-field imaging can be used in order to determine topographic information of a whole assembly of nanoparticles, but it is not efficient for looking at individual nanoparticles. High-resolution electron imaging or dark-field imaging can be of help in the case of crystalline particles but they always provide underestimated values of the nanocrystals population. EELS imaging in the low-energy-loss domain around the Si plasmon peak, which gives rise to strong signals, is the only way to visualize all Si nanoparticles within a silica film and to perform reliable size and density measurements. Two complementary types of experiments are investigated and discussed more extensively: direct imaging with a transmission electron microscope equipped with an imaging filter (EFTEM) and indirect imaging from spectrum-imaging data acquired with a scanning transmission electron microscope equipped with a spectrometer (STEM-PEELS). The direct image (EFTEM) and indirect set of spectra (STEM-PEELS) are processed in order to deliver images where the contribution of the silica matrix is minimized. The contrast of the resulting images can be enhanced with adapted numerical filters for further morphometric analysis. The two methods give equivalent results, with an easier access for EFTEM and the possibility of a more detailed study of the EELS signatures in the case of STEM-PEELS. Irradiation damage in such systems is also discussed.     

Novel carbon nanosheets as support for ultrahigh-resolution structural analysis of nanoparticles

The resolution in transmission electron microscopy (TEM) has reached values as low as 0.08 nm. However, these values are not accessible for very small objects in the size range of a few nanometers or lower, as they have to be placed on some support, which contributes to the overall electron-scattering signal, thereby blurring the contrast. Here, we report on the use of nanosheets made from cross-linked aromatic self-assembled monolayers as TEM sample supports. When transferred onto a copper grid, a single 1.6-nm-thick nanosheet can cover the grid and is free standing within the micron-sized openings. Despite its thinness, the sheet is stable under the impact of the electron beam. Micrographs taken from nanoclusters onto these nanosheets show highly increased contrast in comparison to the images taken from amorphous carbon supports. In scanning transmission electron microscopy with nanosheet support, a size analysis of sub-nanometer Au clusters was performed and single Au atoms were resolved.     

STEM nanodiffraction technique for structural analysis of CoPt nanoparticles

Studying the structure of nanoparticles as a function of their size requires a correlation between the image and the diffraction pattern of single nanoparticles. Nanobeam diffraction technique is generally used but requires long and tedious TEM investigations, particularly when nanoparticles are randomly oriented on an amorphous substrate. We bring a new development to this structural study by controlling the nanoprobe of the Bright and Dark Field STEM (BF/DF STEM) modes of the TEM. The particularity of our experiment is to make the STEM nanoprobe parallel (probe size 1 nm and convergence angle <1 mrad) using a fine tuning of the focal lengths of the microscope illumination lenses. The accurate control of the beam position offered by this technique allowed us to obtain diffraction patterns of many single nanoparticles selected in the digital STEM image. By means of this technique, we demonstrate size effects on the order-disorder transition temperature in CoPt nanoparticles when their size is smaller than 3 nm.     

On the interpretation of the forbidden spots observed in the electron diffraction patterns of flat Au triangular nanoparticles

In many cases nanostructures present forbidden spots in their electron diffraction patterns when they are observed by transmission electron microscopy (TEM). To interpret their TEM and high resolution transmission electron microscopy (HRTEM) images properly, an understanding of the origin of these spots is necessary. In this work we comment on the origin of the forbidden spots observed in the [111] and [112] electron diffraction patterns of flat gold triangular nanoparticles. The forbidden spots were successfully indexed as corresponding to the first laue Zone (FOLZ) and the HRTEM images presented a contrast produced by the interference of the zero-order Laue zone (ZOLZ) and FOLZ spots. We discuss the use of the forbidden spots in the study of the structure of nanoparticles and show that they are related to the shape and incompleteness of layers in the very thin particles.     

Correlation of the orientation of stacked aragonite platelets in nacre and their connection via mineral bridges

In this work, we studied the correlation of the orientation of stacked aragonite platelets of Haliotis laevigata nacre, using selected area diffraction (SAD) in transmission electron microscopy (TEM). From the position of the center of Laue circle (COLC) within the diffraction patterns the tilt angles of the investigated platelets relatively to a reference platelet (oriented in zone axis) are determined. The strong correlation of the platelets supports the existence of mineral bridges, which connect the stacked platelets and enable a transfer of the platelet orientation during growth. Electron tomography and subsequent reconstruction of the obtained data yield information about the shape of the mineral bridges. The crystalline structure of the material within the mineral bridges was investigated by high resolution TEM (HRTEM).     

Electron microscopy localization and characterization of functionalized composite organic-inorganic SERS nanoparticles on leukemia cells

We demonstrate the use of electron microscopy as a powerful characterization tool to identify and locate antibody-conjugated composite organic-inorganic nanoparticle (COINs) surface enhanced Raman scattering (SERS) nanoparticles on cells. U937 leukemia cells labeled with antibody CD54-conjugated COINs were characterized in their native, hydrated state using wet scanning electron microscopy (SEM) and in their dehydrated state using high-resolution SEM. In both cases, the backscattered electron (BSE) detector was used to detect and identify the silver constituents in COINs due to its high sensitivity to atomic number variations within a specimen. The imaging and analytical capabilities in the SEM were further complemented by higher resolution transmission electron microscopy (TEM) images and scanning Auger electron spectroscopy (AES) data to give reliable and high-resolution information about nanoparticles and their binding to cell surface antigens.     

Advances in TEM orientation microscopy by combination of dark-field conical scanning and improved image matching

A new approach to automatic TEM‐based orientation microscopy is presented, which is based on a combination of the techniques of dark-field conical scanning and improved image matching, and a diffraction pattern simulation method. For indexing, a full experimental diffraction pattern is compared to all possible pre-calculated diffraction patterns for the given structure by image matching. In order to speed up this relatively calculation-intensive algorithm, polar transformation and, most important, circular projection that increase the speed of pattern indexing by a factor of about 50 are proposed. A microstructure of submicron scale and crystallographic orientations in nanocrystalline materials are measured successfully. It is proposed that the taken approach of dark-field conical scanning and improved image matching may be, in principle, better suited for TEM-based orientation microscopy than serial orientation mapping.     

Statistical analysis of atom probe data: Detecting the early stages of solute clustering and/or co-segregation

Statistical analysis of atom probe data has improved dramatically in the last decade and it is now possible to determine the size, the number density and the composition of individual clusters or precipitates such as those formed in reactor pressure vessel (RPV) steels during irradiation. However, the characterisation of the onset of clustering or co-segregation is more difficult and has traditionally focused on the use of composition frequency distributions (for detecting clustering) and contingency tables (for detecting co-segregation).     

A formula for the image intensity of phase objects in Zernike mode

I present an analytical expression for the image intensity of a phase object visualized in Zernike phase contrast mode. The formula is valid for periodic and non-periodic weak and strong objects, and accounts for the effects of finite illumination. The expression provided is intended as a generalization of the standard reference formula given in the Born and Wolf [Principles of Optics, sixth ed., Pergamon Press, New York, 1980, p. 427] textbook as well as of the formalism employed to evaluate imaging doses in Zernike mode [M. Malac, M. Beleggia, R. Egerton, Y. Zhu, Ultramicroscopy 108 (2008) 126]. I illustrate the usefulness of the improved expression by means of three examples: a sinusoidal phase grating, a Gaussian object, and a phase step. The optimal Zernike phase angle yielding maximum image contrast is found to be object-dependent and not necessarily equal to pi/2. Phase plate optimization criteria are derived and presented for two of the examples considered.     

A procedure to analyze surface profiles of the protein molecules visualized by quick-freeze deep-etch replica electron microscopy

Quick-freeze deep-etch replica electron microscopy gives high contrast snapshots of individual protein molecules under physiological conditions in vitro or in situ. The images show delicate internal pattern, possibly reflecting the rotary-shadowed surface profile of the molecule. As a step to build the new system for the "Structural analysis of single molecules", we propose a procedure to quantitatively characterize the structural property of individual molecules; e.g. conformational type and precise view-angle of the molecules, if the crystallographic structure of the target molecule is available. This paper presents a framework to determine the observed face of the protein molecule by analyzing the surface profile of individual molecules visualized in freeze-replica specimens. A comprehensive set of rotary-shadowed views of the protein molecule was artificially generated from the available atomic coordinates using light-rendering software. Exploiting new mathematical morphology-based image filter, characteristic features were extracted from each image and stored as template. Similar features were extracted from the true replica image and the most likely projection angle and the conformation of the observed particle were determined by quantitative comparison with a set of archived images. The performance and the robustness of the procedure were examined with myosin head structure in defined configuration for actual application.     

Maximum diameter of the rod-shaped specimen for transmission electron microtomography without the "missing wedge"

In our recent study, the complete rotation of a rod-shaped specimen during transmission electron microscopy (TEM) has been successfully carried out, yielding a truly quantitative three-dimensional (3D) structure of a ZrO(2)/polymer nano-composite. This result allows the further development of transmission electron microtomography (TEMT) for materials science. The diameter of the rod-shaped specimen was about 150 nm, which may not be statistically large enough to evaluate structural parameters, e.g., volume fraction of Zr nano-particles. Thus, it is preferable to image rods with larger diameters in 3D. In this study, several rod-shaped specimens whose diameters ranged from 150 to 530 nm were subjected to the "distortion-free TEMT". The maximum diameters, l, observable under 200 and 300 kV-TEMTs were, respectively, 460-470 and 600-670 nm (corresponding the maximum relative diameters, l/lambda (lambda: mean free path), were ca. 2.2 and 2.7-3.0).     

Determination of chromium valence over the range Cr(0)–Cr(VI) by electron energy loss spectroscopy

Chromium is a redox active 3d transition metal with a wide range of valences (−2 to +6) that control the geochemistry and toxicity of the element. Therefore, techniques that measure Cr valence are important bio/geochemical tools. Until now, all established methods to determine Cr valence were bulk techniques with many specific to a single, or at best, only a few oxidation state(s). We report an electron energy loss spectroscopy (EELS) technique along with an extensive suite of affined reference spectra that together, unlike other methods, can determine Cr valence (or at least constrain the possible valences) at high-spatial resolution (tens-of-nanometer scale) across a wide valence range, Cr(0)–Cr(VI). Fine structure of Cr-L_2,3 edges was parametrized by measurement of the chemical shift of the L₃ edge and the ratio of integrated intensity under the L₃ and L₂ edges. These two parameterizations were correlated to Cr valence and also the dⁿ orbital configuration which has a large influence on L-edge fine structure. We demonstrate that it is not possible to unambiguously determine Cr valence from only one fine-structure parameterization which is the method employed to determine metal valence by nearly all previous EELS studies. Rather, multiple fine-structure parameterizations must be used together if the full range of possible Cr valences is considered. However even with two parameterizations, there are limitations. For example, distinguishing Cr(IV) from Cr(III) is problematic and it may be difficult to distinguish low-spin Cr(II) from Cr(III). Nevertheless, when Cr is known to be divalent, low- and high-spin dⁿ orbital configurations can be readily distinguished.     

Limits to the spatial, energy and momentum resolution of electron energy-loss spectroscopy

We discuss various factors that determine the performance of electron energy-loss spectroscopy (EELS) and energy-filtered (EFTEM) imaging in a transmission electron microscope. Some of these factors are instrumental and have undergone substantial improvement in recent years, including the development of electron monochromators and aberration correctors. Others, such as radiation damage, delocalization of inelastic scattering and beam broadening in the specimen, derive from basic physics and are likely to remain as limitations. To aid the experimentalist, analytical expressions are given for beam broadening, delocalization length, energy broadening due to core-hole and excited-electron lifetimes, and for the momentum resolution in angle-resolved EELS.     

Formation of pentacene wetting layer on the SiO2 surface and charge trap in the wetting layer

We studied the early-stage growth of vacuum-evaporated pentacene film on a native SiO(2) surface using atomic force microscopy and in-situ spectroscopic ellipsometry. Pentacene deposition prompted an immediate change in the ellipsometry spectra, but atomic force microscopy images of the early stage films did not show a pentacene-related morphology other than the decrease in the surface roughness. This suggested that a thin pentacene wetting layer was formed by pentacene molecules lying on the surface before the crystalline islands nucleated. Growth simulation based on the in situ spectroscopic ellipsometry spectra supported this conclusion. Scanning capacitance microscopy measurement indicated the existence of trapped charges in the SiO(2) and pentacene wetting layer.     

Atomic force microscopy characterization of the chemical contrast of nanoscale patterns fabricated by electron beam lithography on polyethylene glycol oxide thin films

The present paper shows that atomic force microscopy (AFM) imaging of friction force and phase lag in ambient air can be used to characterize the chemical contrast induced by electron beam (EB) irradiation on polyethylene glycol oxide (PEO) surface. Time-of-flight secondary emission mass spectroscopy measurements showed that the EB irradiation generates chemical contrast on PEO surface by decreasing the ether bond density. The AFM measurements showed smaller phase lag and lower friction and adhesive forces on the EB irradiated PEO surface, as compared to the non-irradiated PEO surface. While the chemical contrast in friction force had a linear dependence on the EB irradiation dose, the dependence of the chemical contrast in the phase lag was strongly non-linear. As the friction and adhesive forces depended on the AFM probe hydrophilicity and air humidity, the contrast in friction and adhesive forces is ascribed to different capillary condensation of ambient water vapour at the AFM tip contact with the EB irradiated and non-irradiated PEO surfaces, respectively.     

Morphological investigations of cells that adhered to the irregular patterned polydimethylsiloxane (PDMS) surface without reagents

Polydimethylsiloxane (PDMS) surface consisting irregular pattern was investigated to develop cell-based biochip using PDMS. PDMS surface was modified with nano- and micro-combined patterns using surface deformation technology. Hydrophobicity of nano-patterned PDMS surface was sustained. Nevertheless it has irregular patterns consisting of micro- and nano-patterns. According to atomic force microscopy (AFM), scanning electron microscopy (SEM) and confocal microscopy results by immunostaining method, human mammary epithelial cells (HMEC) adhered well on irregularly patterned surface without any reagents such as gelatin and collagen, compared to commercial culture dish. It implies PDMS material can be utilized as template for cell-based biochip without any reagents.     

The fabrication and preservation of nanostructures on silicon wafers with a native oxide layer

This study used nano‐oxidation lithography to create oxidized circular nanostructures on a silicon wafer with a native oxide layer (NOL). We also investigated the impact of wet etching on the size of circular oxidized nanostructures and examined how the method and duration of preservation affect them. Experimental results show that the height and width of oxidized circular nanostructures increase proportionally with applied voltage. After wet etching, an increase in applied voltage resulted in a marked increase in the width of the circular nanostructures, a decrease in the inner diameter, and little variation in height. We further demonstrated that in a moist environment, the oxidation process continues, resulting in a further increase in height and width. During the initial stages of preservation, these changes occurred rapidly; however, the increase was negligible after 30 days. We propose the concept of reaction area (RA) ratio to explain the above phenomenon and provide evidence to support these claims. Our results led us to a simple and yet effective method of preserving oxidized circular nanostructures, called the electrostatic patch preservation (EPP) method, to overcome problems associated with changes in size occurring during the preservation of silicon nanostructure molds. SCANNING 34: 347–356, 2012. © 2012 Wiley Periodicals, Inc.