Vertical cavity surface-emitting laser with an AlGaAs/AlAs Braggreflector

The letter elucidates the room temperature pulsed operation of a vertical cavity surface-emitting laser with an electrically conductive AlGaAs/AlAs distributed Bragg reflector (DBR). The maximum reflectivity of a DBR grown by MOCVD was 96% at 0.88 μm wavelength. The threshold current of 30 μm diameter devices was 200 mA under room temperature pulsed condition, which is the lowest value for such a broad area structure     

垂直腔面发射激光器及其进展

1　引　　言　　光电子技术在网络、存储器等方面的应用与多媒体信息社会的发展息息相关 ,对信息社会的发展始终起着至关重要的作用。在世界范围内的信息基础设施配置中 ,人们对以光纤通信为代表的光电子技术寄予厚望。瞬间传送处理图像等大规模信息技术愈益重要 ,在并行传递空间信息的超并行光传输系统、连接多台计算机或LSI芯片的并行光互连及光并行信息处理系统中 ,新兴的并行光电子技术起主导作用。要实现充分利用光的并行性的系统 ,大规模地进行二维集成化的并行光器件十分重要。为适应这种需求 ,人们开始探索一种新型结构的半导体激…     

New GaAlAs-GaAs surface-emitting laser diodes with lateral pumping structure

We have fabricated a new GaAlAs/GaAs surface-emitting laser diode with lateral pumping structure. With this structure, the thickness of the active layer can be increased beyond the electron diffusion length, and also both current and light confinement can be incorporated. The lowest threshold current was 180 mA. The far-field pattern shows stable double lobes with an FWHM of 39°. By reducing the size of the mesa, making the wall of the mesa vertical and using the GaAlAs/GaAs quarter-wave stack for the mirror, further improvement can be expected.     

Vertical external-cavity surface-emitting laser for dual-wavelength generation

We report an optically pumped vertical external-cavity surface-emitting laser that is designed for emission at two wavelengths simultaneously. Single transverse mode continuous-wave (CW) operation is demonstrated at the wavelengths of 984 and 1042 nm. The device produces a CW optical power of 140 mW for the 984-nm component and 115 mW for the 1042-nm component, exhibiting over 10% efficiency. At a high pump power, self-pulsation of the components appeared on top of the CW-mode components. The maximum total output of 1 W was obtained at the pump power of 9 W.     

YAG laser operation by semiconductor laser pumping

Yttrium aluminum garnet (YAG) laser operation has been achieved using a single gallium arsenide laser diode as the pump. Repetition rates of 200 pulses per second have been achieved in initial experiments. Compared to flashlamp pumping, semiconductor laser pumping requires less. than 5 percent of the light energy to accomplish YAG lasing. Extraordinary repeatability of laser output, pulse to pulse, has been obtained.     

Vertical-cavity surface-emitting laser active regions for enhanced performance with optical pumping

We have developed an improved active region design for optically pumped vertical-cavity surface-emitting lasers. The design makes use of carrier-blocking layers to segment the absorber and promote uniform carrier populations in the quantum wells with pump efficiencies near 75%. A model to calculate the carrier distribution in the active region and a design methodology are presented along with a metric to describe the carrier uniformity in the quantum wells. Experimental verification of the performance improvements shows an over 50% reduction in device thresholds and an increase of 20/spl deg/C in maximum operating temperatures.     

超低阈值横向腔光子晶体面发射激光器

首次在无DBR结构的商业外延波导晶片上实现了电泵横向腔光子晶体面发射激光器(LC-PCSEL)。深孔刻蚀技术使光子晶体深达2.6μm,穿透有源区,对有源区的模式直接调制。通过较小区域的光子晶体与FP腔的融合集成,利用带边模式Γ2-1的横向振荡垂直输出特性,室温下获得了1553.8 nm的面发射激光,线宽0.4 nm。超低阈值电流密度为667 A/cm2,纵向和横向的远场发散角分别为7.5°和5.5°。LC-PCSEL的设计为电注入面发射激光器的研制提供了新的思路,为该类激光器的批量生产提供了可能。     

垂直腔面发射激光器的内调制特性

面向芯片原子钟(Chip Scale Atomic Clock,CSAC)的垂直腔面发射激光器(Vertical Cavity Surface-Emitting Laser,VCSEL)通过微波调制产生具有特定光频差的相干激光,与原子作用后的跃迁谱线频率作为参考标准,最终可获取高精度的频率信号。因此,垂直腔面发射激光器在芯片原子钟系统中至关重要。介绍了VCSEL激光器的内调制原理,搭建了其内调制特性实验测试平台,开展了激光器对射频调制响应特性研究,记录了激光器边带信号随着注入电流和射频输出功率的变化情况,并分析了射频调制对激光器边带信号的影响特性以及Bogatov现象引起的边带不对称现象。实验结果显示:当射频信号频率为3.41734 GHz,注入电流为1.2 mA,射频输出功率为3.5 dBm时,可获得优化的高频调制光谱,为芯片原子钟提供优质的光源。     

自聚焦棒外腔单频半导体激光器

本文提出了用振幅耦合因子描述激光器谐振腔与自聚焦棒光波导结构的差异及耦合腔的衍射损耗;讨论了自聚焦棒相对激光器作微小偏移对振幅耦合因子的影响.对自聚焦棒外腔半导体激光器的选模理论进行了实验验证.实现了单纵模运转,其边模抑制比大于35dB,线宽小于21MHz,最大的波长调谐范围为11nm.     

A novel vertical-cavity surface-emitting laser with semiconductor/superlattice distributed bragg reflectors

Taking into account the tunneling effect of the superlattice, the authors present for the first time a vertical-cavity surface-emitting laser with AlAs[GaAs-AlAs] semiconductor/superlattice distributed Bragg reflectors (DBRs). The structure of a 19-period-AlAs (73.3 nm)-18.5-pair [GaAs (3.0 nm)-AlAs (0.7 nm)] DBR was grown on an n-GaAs [100] substrate by molecular beam epitaxy, and the device was fabricated by using a modified technique of proton implantation. It was found from the experiments that the peak reflectivity of the DBR is as high as 99.7%, the central wavelength is at about 840 nm, and the reflection bandwidth is wide up to 90 nm. A 20/spl times/20 /spl mu/m/sup 2/ square mesa on the top of the DBR was made by the wet chemical etching method to measure the series resistance of the devices. It can be seen that more than a third of them are within 20-30 /spl Omega/ that lead to ideal optical characteristics, low dissipated power, and reliability-some of the most important factors for the devices to be used in a number of applications in the future.     

Single-mode operation from an external cavity controlledvertical-cavity surface-emitting laser

Single-mode operation from an index-guided vertical-cavity surface-emitting laser (VCSEL) has been achieved by using a fiber Bragg grating (FBG) as an external selective wavelength reflector. The spectral characteristics of the external cavity controlled VCSEL under static and dynamic conditions have been studied. The FBG provided stable single mode operation under pseudorandom modulation with a sidemode suppression ratio of ~30 dB from 500 Mb/s up to 4 Gb/s at room temperature     

双波长可调外腔半导体激光器

提出了一种基于体布拉格光栅（VBG）和横向啁啾体布拉格光栅（TCVBG）组合的双光栅外腔半导体激光器,该外腔半导体激光器采用反射率15%的体光栅和反射率17%的啁啾体布拉格光栅作为反馈元件和模式选择元件,实现特定波长的选择和调谐,实验研究了外腔激光器的功率-电流特性、光谱特性和波长调谐特性。实验结果表明:双光栅外腔半导体激光器最大输出功率为1.96 W,斜率效率为0.94 W/A,外腔效率达到78%。输出光谱为双波长,一个波长为808.6 nm,另一个波长连续可调,通过改变横向啁啾体光栅的位置,该波长可从800 nm调谐至815 nm,可调范围达15 nm,在整个可调范围内两个波长的谱线宽度（FWHM）均小于0.3 nm。     

Continuously tuned external cavity semiconductor laser

Continuous tuning (no mode hops) of a grating-tuned external-cavity semiconductor laser by rotation of the grating about a carefully selected point is analyzed and demonstrated using a laser containing a prism beam expander. The analysis predicts the continuous tuning range as a function of pivot-point position and is used to select the point for maximum continuous tuning range. Because dispersive optical elements in the cavity were found to limit the continuous tuning range, the model was modified to include dispersion to first order. The dispersion correction improved the maximum observed tuning range of the 1300-nm-wavelength laser from 600 GHz to nearly 3000 GHz. Details of the cavity and mechanical design as well as pivot-point tolerances are also included     

Spatially singlemode broad-area semiconductor laser with planar external cavity

A broad-area laser diode combined with a planar external waveguide cavity operates in the fundamental mode and reshapes the output emission into a circular 15/spl deg/ beam. A 500 /spl mu/m-long by 40 /spl mu/m-wide laser diode with uncoated facets coupled with the uncoated ModeReShaper (MRS) planar chip has a coupling efficiency of /spl sim/40% and stabilised the fundamental mode at drive currents up to three-times threshold.     

50-GHz passively mode-locked surface-emitting semiconductor laser with 100-mW average output power

We have developed a passively mode-locked optically-pumped vertical-external-cavity surface-emitting semiconductor laser (VECSEL) which delivers up to 100 mW of average output power at a repetition rate of 50 GHz in nearly transform-limited 3.3-ps pulses at a wavelength around 960 nm. The high-repetition-rate passive mode locking was achieved with a low-saturation-fluence semiconductor saturable absorber mirror (SESAM) incorporating a single layer of quantum-dots. The output power within a nearly diffraction-limited beam was maximized using a gain structure with a low thermal impedance soldered to a diamond heat spreader. In addition, we systematically optimized the laser resonator to accommodate for the strong thermal lens caused by the optical pumping. We measured the thermal lens dioptric power and present a numerical model which is in good agreement with the measurements and is useful for optimizing resonator designs. The experimental setup is very versatile and its design and construction are discussed in detail.     

Dynamic regimes of the dual-wavelength vertical external cavity surface-emitting laser

The stability of the stationary state and periodic oscillations of the radiation intensity of the dual-wavelength vertical external cavity surface-emitting laser is analyzed. It is demonstrated that the stationary state is always stable for the laser with independent active areas that contain quantum dots of different depths. A map of dynamic regimes with the values of parameters that correspond to the cw lasing, periodic oscillations of intensity, and complicated dynamics (quasi-periodic or chaotic regimes) is constructed for the laser with coupled active areas. The dynamics of the laser radiation in the quasi-periodic regime is numerically simulated. It is demonstrated that relatively slow variations in the amplitude with characteristic times of several or several tens of microseconds are typical of the short laser pulses that are formed at time intervals of tens of picoseconds. The period of the pulse train is approximately equal to the round-trip time of the external laser cavity.     

Characteristics of a high-speed passively mode-locked surface-emitting semiconductor InGaAs laser diode

We have studied the performance of the recently demonstrated high-speed passively mode-locked 980-nm vertical cavity diode lasers (pulsewidth down to /spl tau//sub p//spl sim/15 ps, repetition rate up to 15 GHz) by investigating the dynamics of the saturable p-i-n multiple quantum well InGaAs absorber. The impact of the absorber on the noise characteristics of these new compact short pulse sources is also reported.     

Fabrication of high-packing-density vertical cavity surface-emitting laser arrays using selective oxidation

We describe the nearly-planar processing of two-dimensional vertical cavity laser arrays based on the selective conversion of AlAs to Al/sub x/O/sub y/. The individual lasers of 8/spl times/8 and 2/spl times/2 arrays are defined by native Al/sub x/O/sub y/ to achieve 4-/spl mu/m square active regions on 12-/spl mu/m center-to-center spacings. Interelement thermal coupling is characterized along with the optical mode structure.     

梯形衬底大光腔可见光AlGaAs半导体激光器

采用液相外延技术,试制了梯形衬底大光腔(LOC)可见光AlGaAs半导体激光器。其波长为717.2～770.0nm,室温(298K)连续工作阈值电流为300mA,在1.5倍阈值时可实现单纵模、基横模工作。本文给出了器件的一些电学和光学特性.     

High-power surface emitting semiconductor laser with extended vertical compound cavity

Novel, electrically pumped, vertical compound cavity InGaAs lasers emitting at 980 nm are described. These have generated 1 W continuous-wave multimode and 0.5 W continuous-wave in a fundamental TEM/sub 00/ mode and single frequency, with 90% coupling efficiency into a singlemode fibre.