烧结NdFeB磁体表面沉积Ni膜及其耐腐蚀性

为改善烧结钕铁硼(NdFeB)磁体的耐腐蚀性能,在磁体表面用磁控溅射方法制备了Ni薄膜。利用扫描电子显微镜(SEM)观察了Ni薄膜的组织形貌,利用电化学测试、中性盐雾试验(NSS)测试了镀膜样品的耐腐蚀性能,研究了溅射功率和负偏压对Ni薄膜组织结构、电化学性能和中性盐雾环境下耐腐蚀性能的影响。结果表明:Ni薄膜的厚度和致密性是影响其耐腐蚀性能的关键因素;随溅射功率增大,Ni薄膜厚度增大,但晶粒尺寸变大、致密性降低,耐腐蚀性能先升高后降低;加负偏压后,Ni薄膜厚度有所减小,但膜层表面更加光滑、组织更加致密均匀,因此镀膜样品耐腐蚀性能有所提高;在溅射功率为100~120 W、负偏压为150 V条件下制备的磁控溅射镀Ni样品具有最好的耐腐蚀性能。     

Mg-3Sn合金表面高导热耐腐蚀SiC_x涂层研究

高导热耐腐蚀涂层在轻质镁合金散热器件中的应用具有重要的意义。研究了Mg-3Sn合金表面磁控溅射SiC薄膜的组织结构、导热及耐腐蚀性能。结果表明,Mg-3Sn镁合金表面磁控溅射SiCx薄膜为非晶态。相对于经盐雾实验后的Mg-3Sn合金基体,在25和100℃条件下,经SiCx涂覆的Mg-3Sn材料腐蚀后的热导率分别提高23和16W/(m.K),且具有良好的耐腐蚀性能。     

制备工艺参数对镁合金表面沉积TiCN薄膜耐蚀性的影响

采用射频磁控溅射法在AZ31镁合金表面沉积TiCN薄膜,研究了制备工艺参数对TiCN薄膜耐腐蚀性能的影响。结果表明,在Ti靶功率50W,C靶功率50W,N2流量20sccm,溅射时间4.5h条件下,镀TiCN薄膜的镁合金基体具有最佳的耐蚀性,其在3.5%(质量分数)NaCl溶液中的腐蚀电流密度为1.664×10-6 A/cm2,比同等条件下纯镁合金基体的腐蚀电流密度(1.785×10-5 A/cm2)下降了1个数量级。     

溅射沉积技术的发展及其现状

论述了溅射沉积薄膜技术的发展历程及其目前的研究应用状况.二极溅射应用于薄膜制备,揭开了溅射沉积技术的序幕,磁控溅射促使溅射沉积技术进入实质的工业化应用,并通过控制磁控靶磁场的分布方式和增加磁控靶数量,进一步发展为非平衡磁控溅射、多靶闭合式非平衡磁控溅射等,拓宽了应用范围.射频、脉冲电源尤其是脉冲电源在溅射技术中的使用极大地延伸了溅射沉积技术的应用范围.     

磁控溅射镀膜技术的发展

磁控溅射由于其显著的优点应用日趋广泛,成为工业镀膜生产中最主要的技术之一,相应的溅射技术与也取得了进一步的发展.非平衡磁控溅射改善了沉积室内等离子体的分布,提高了膜层质量;中频和脉冲磁控溅射可有效避免反应溅射时的迟滞现象,消除靶中毒和打弧问题,提高制备化合物薄膜的稳定性和沉积速率;改进的磁控溅射靶的设计可获得较高的靶材利用率;高速溅射和自溅射为溅射镀膜技术开辟了新的应用领域.     

磁控溅射工艺参数对涤纶机织物基纳米金属薄膜抗静电性能的影响

在室温条件下采用磁控溅射技术在涤纶机织物表面沉积金属薄膜,利用扫描电镜(SEM)和原子力显微镜(AFM)观察纳米金属薄膜的表面形貌,通过分别改变磁控溅射工艺参数溅射时间、溅射功率和气体压强,研究其对试样抗静电性能的影响。实验结果表明,溅射时间和溅射功率对镀金属薄膜试样的抗静电性能均影响较大,而气体压强影响相对较小。溅射时间40min、溅射功率120W、气体压强1.6Pa工艺条件下,镀Cu膜试样的抗静电性能最好;溅射时间40min、溅射功率120W、气体压强1Pa或1.6Pa工艺条件下,镀Ag膜试样的抗静电性能最好,而且镀Ag比镀Cu薄膜试样的抗静电性能更优异。     

医用镍钛合金表面多层薄膜的制备及摩擦磨损和耐腐蚀性能

采用阳极氧化技术和射频磁控溅射技术在NiTi合金表面分别制备了TiO2薄膜以及Ti/TiN/TiO2多层薄膜。借助扫描电子显微镜(SEM)、X射线衍射仪(XRD)、摩擦磨损试验仪及电化学工作站等仪器对薄膜的形貌、结构、摩擦磨损性能及耐腐蚀性能进行了研究。结果表明,NiTi合金经表面处理后,其摩擦磨损性能和耐腐蚀性能均得以不同程度的改善,其中阳极氧化和磁控溅射复合处理的NiTi合金的耐磨性和耐蚀性具有最佳的配合。     

碳纤维毡表面磁控溅射纳米铜薄膜的工艺优化

以碳纤维毡为基材,优化了采用磁控溅射技术在其表面沉积纳米铜薄膜的工艺参数。运用正交试验分析方法,选取沉积时间、溅射功率和工作压强3个参数为因素,分析了各因素对碳纤维毡的电磁屏蔽效能和导电性能的影响。实验表明:磁控溅射铜薄膜后,碳纤维毡的电磁屏蔽效能提高了116.25%,导电性能提高了45.81%。;碳纤维毡表面溅射沉积铜薄膜的最佳工艺方案为:沉积时间50min,工作压强0.4Pa,溅射功率80W。     

溅射功率对硅基哈氏合金薄膜性能的影响

以硅片为基体,采用直流磁控溅射镀膜方法,制备了不同厚度的耐腐蚀的哈氏合金薄膜。采用SEM、XPS、显微硬度等方法,研究了室温条件下,不同溅射功率的哈氏合金薄膜的表面形貌、化学组成、膜厚以及硬度等性能,分析结果表明:低功率沉积的薄膜由纳米级均匀的球形颗粒构成,表面均匀平整,随着溅射功率的升高,晶粒尺度逐渐长大,表面应力随之增大;薄膜中大部分元素都以金属态存在;提高溅射功率,发现薄膜的硬度呈先升后降趋势。磁控溅射法制备的薄膜仍具有哈氏合金原有的特性。     

AZ31镁合金表面磁控溅射Zr(Al,Ti)-SiN_x复合薄膜及其耐蚀性能

镁合金表面沉积薄膜可以提高其耐蚀性,但现有的几种沉积方法得到的膜疏松、与基体结合力差,影响了其耐腐蚀性能.为此,采用磁控溅射法在AZ31镁合金表面制备了Al,Zr,Ti膜及其与SiN_x的复合薄膜.用扫描电镜、X射线衍射、XPS研究了金属膜及其与SiNi_x复合薄膜的晶体结构、表面形貌和化学成分.结果表明:所制备的SiN_x薄膜为非晶态的富N膜;Zr膜的耐腐蚀性最好,Al膜的保护性最差;Zr-SiN_x复合薄膜比AZ31镁合金的腐蚀电流密度降低了3个数量级,Ti-SiN_x复合薄膜在阳极极化区出现了钝化.SiN_x复合薄膜的耐腐蚀性优于AZ31镁合金和单一金属膜.     

Mechanical and corrosion properties of Al/Ti film on magnesium alloy AZ31B

Preparation of titanium film on magnesium substrate faces a challenge due to non-Fickian inter-diffusion between titanium and magnesium. Aluminum can build a bridge between titanium and magnesium. Al/Ti duplex coatings were deposited on magnesium alloy AZ31B using magnetron sputtering (MS). The low temperature diffusion bonding behavior of the Mg/Al/Ti coating was investigated through SEM and its affiliated EDS. The phase structure and critical load of the coatings were examined by means of XRD and scratch tests, respectively. The results demonstrated that the bonding strength was significantly improved after a post heat treatment (HT) at a temperature of 210°C. The diffusion mechanism of the interfaces of Mg/Al and Al/Ti in the coating was discussed based on the analysis of formation energy of vacancies and diffusion rates. The Al/Ti dual layer enhanced the corrosion resistance of the alloy. And the HT process further increased the corrosion resistance of the coated alloy. This result implies that a post HT at a lower temperature after MS is an effective approach to enhance the bonding strength and corrosion resistance of the Al/Ti film on Mg alloys.     

Nd对AZ91镁合金显微组织和耐腐蚀性能的影响

用金相显微镜、扫描电镜和静态质量损失法对AZ91-xNd镁合金(x=1.1%,1.4%,1.9%)的微观组织和腐蚀性能进行表征,研究了Nd对AZ9l镁合金显微组织和耐腐蚀性能的影响.结果表明:稀土Nd的添加明显细化了合金的组织,使半连续网状β(Mgl7Al12)相变为细小的长条状,且分布更加均匀.在合金中还生成了颗粒状...     

The effect of PVD coatings on the wear behaviour of magnesium alloys

In this study, AlN/TiN was coated on magnesium alloys using physical vapour deposition (PVD) technique of DC magnetron sputtering, and the influence of the coating on the wear behaviour of the alloys was examined. A physical vapour deposition system for coating processes, a reciprocating wear system for wear tests, a universal hardness equipment for hardness measurement, a X-ray diffractometer (XRD) for compositional analysis of the coating, and a scanning electron microscopy (SEM) for surface examinations were used. It was determined that the wear resistance of the magnesium alloys can be increased by PVD coatings. However, small structural defects which could arise from the coating process or substrate were observed in the coating layers.     

Laser cladding of Zr-based coating on AZ91D magnesium alloy for improvement of wear and corrosion resistance

To improve the wear and corrosion resistance of AZ91D magnesium alloy, Zr-based coating made of Zr powder was fabricated on AZ91D magnesium alloy by laser cladding. The microstructure of the coating was characterized by XRD, SEM and TEM techniques. The wear resistance of the coating was evaluated under dry sliding wear test condition at room temperature. The corrosion resistance of the coating was tested in simulated body fluid. The results show that the coating mainly consists of Zr, zirconium oxides and Zr aluminides. The coating exhibits excellent wear resistance due to the high microhardness of the coating. The main wear mechanism of the coating and the AZ91D sample are different, the former is abrasive wear and the latter is adhesive wear. The coating compared to AZ91D magnesium alloy exhibits good corrosion resistance because of the good corrosion resistance of Zr, zirconium oxides and Zr aluminides in the coating.     

AZ31镁合金基材非平衡磁控溅射镀膜工艺研究

采用中频孪生靶非平衡磁控溅射技术在AZ31镁合金基底上制备出氮化硅薄膜。利用傅里叶变换红外光谱仪、电子探针、X射线衍射仪等研究了氮气流量比率对氮化硅薄膜的成分、微观结构的影响。通过对薄膜力学性能和抗腐蚀性能的检测分析了氮化硅薄膜对AZ31镁合金基底表面改性的作用。结果表明:中频孪生非平衡磁控溅射技术制备的薄膜为非晶态富N氮化硅。随着氮气流量比率的增加,薄膜的沉积速率降低,Si含量减少。在AZ31镁合金基底上制备氮化硅薄膜有效提高了基底的力学性能和抗腐蚀性能,显微硬度得到显著提高,腐蚀电流密度降低了3个数量级,并且薄膜与基底之间的结合力良好。     

The effect of PVD coatings on the corrosion behaviour of AZ91 magnesium alloy

In this study, multilayered AlN (AlN + AlN + AlN) and AlN + TiN were coated on AZ91 magnesium alloy using physical vapour deposition (PVD) technique of DC magnetron sputtering, and the influence of the coatings on the corrosion behaviour of the AZ91 alloy was examined. A PVD system for coating processes, a potentiostat for electrochemical corrosion tests, X-ray difractometer for compositional analysis of the coatings, and scanning electron microscopy for surface examinations were used. It was determined that PVD coatings deposited on AZ91 magnesium alloy increased the corrosion resistance of the alloy, and AlN + AlN + AlN coating increased the corrosion resistance much more than AlN + TiN coating. However, it was observed that, in the coating layers, small structural defects e.g., pores, pinholes, cracks that could arise from the coating process or substrate and get the ability of protection from corrosion worsened were present.     

镁合金表面喷铝防腐蚀层的微观组织分析

在AZ91D镁合金表面热喷铝，用以提高其表面的耐腐蚀性能。采用SEM，EPMA等方法对AZ91D表面喷铝扩散层的组织进行了仔细的观察与分析，发现在防腐蚀层上有大量的Mg17Al12相存在，且呈决状及非连续片状分布。经显微硬度测定，喷铝层硬度较镁合金基体高；腐蚀后这种相凸出于基体，比镁合金基体有较好的耐腐蚀性能。     

Improvement on the Corrosion Resistance of AZ91D Magnesium Alloy by Aluminum Diffusion Coating

By combination of magnetron sputtering deposition and vacuum annealing, an aluminum diffusion coating was prepared on the substrate of AZ91D alloy to improve its corrosion resistance. The microstructure and composition of the diffusion coating was investigated by scanning electron microscopy and X-ray diffraction. The diffusion coating was mainly comprised of β phase-Al12Mg17. The continuous immersion test in 3.5 wt pct neutral NaCl solution indicated that the specimen with diffusion coating had better corrosion resistance compared with the bare AZ91D alloy specimen. The potentiodynamic polarization measurement indicated that the diffusion coating could function as an effectively protective layer to reduce the corrosion rate of AZ91D alloy when exposed to 3.5 wt pct NaCl solution.     

溅射方式对氧化铌涂层微观结构与性能的影响

分别采用射频溅射和射频反应溅射方式在AZ31镁合金表面制备了氧化铌涂层,并利用扫描电子显微镜、X射线衍射仪、X射线光电子能谱仪、多功能材料表面性能试验仪和电化学工作站对比研究了两种涂层的微观形貌、物相组成、附着力和耐腐蚀性能。研究结果表明,两种涂层都呈非晶柱状结构,铌的价态为Nb⁵⁺,对AZ31镁合金的腐蚀保护率达93%以上;与射频溅射沉积的氧化铌涂层相比,射频反应溅射沉积的氧化铌涂层的表面致密性和耐蚀性能更强,附着力提高约7.4倍。     

物理气相沉积在镁合金表面防护领域的研究现状

镁合金表面耐腐蚀性能、耐磨性能较差,物理气相沉积(PVD)镀膜技术是一种提高镁合金表面性能的有效方法。总结了PVD镀膜防腐蚀层和耐磨层的特性,分析了涂层耐腐蚀耐磨的机理和存在的不足。综述了镁合金表面PVD膜层的研究进展,阐述了物理气相沉积技术对镁合金的表面改性的应用现状,并对该技术在镁合金上的发展进行了概括,指出了目前PVD技术在镁合金表面防护领域的新前景,为今后PVD技术对镁合金表面防护的研究与发展提供了相关参考。