Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement

Piezoelectric actuators that are used in atomic force microscopes (AFM) have undesirable properties. The nonlinear and hysteretic characteristics of piezoelectric actuators introduce geometric deformations in the reconstructed AFM images. Due to these deformations, the quantitative interpretation of the absolute dimensions of surface features is difficult and often not accurate.A real-time measuring ‘Nano-metrological Atomic Force Microscope’ system equipped with an ultra-high resolution three-axis laser interferometer system is developed, in which the undesirable properties of piezoelectric actuators are compensated completely. Using this AFM and a one-dimensional (1D) grating reference standard with pitches of 240 nm, which is one of the widely used reference standards as nano-metrological lateral scales, the influences of nonlinear and hysteretic characteristics of piezoelectric actuators on image reconstruction and lateral dimension measurement are examined and compared quantitatively among three different measurement methods. The three measurement methods are: (1) the relative movement between probe tip and sample is controlled and measured directly by voltage signals applied on the XYZ scanner, the nonlinear and hysteretic characteristics of piezoelectric actuators are not compensated; (2) the relative movement between probe tip and sample is controlled by voltage signals applied on the XYZ scanner, but it is measured accurately by interferometers; (3) the relative movement between probe tip and sample in lateral directions are both controlled and measured accurately by interferometers. According to the comparison results, an accurate displacement control system is key to reduce the influences of undesirable properties of piezoelectric actuators and the developed AFM system with three-axis laser interferometer system is proved to eliminate the nonlinear and hysteretic characteristics of piezoelectric actuators completely.     

Optimization of piezoelectric bimorph actuators with active damping for static and dynamic loads

The paper considers optimal design problems in the context of active damping. More specifically, we are interested in controlling the tip-deflection of a cantilever beam subjected to static and time-harmonic loading on its free extreme. First, the thickness profile of a piezoelectric bimorph actuator is optimized and second, the width profile. In the thickness study, formulation and results depend on whether the electric field or the applied voltage is kept constant. For the latter case we propose a differentiable model that connects electric field and piezo-actuator thickness to include electric field breakdown. Results are presented for both design variable cases, for static as well as for dynamic excitation for single frequency and frequency intervals. The major part of this research was performed while A. Donoso was a visiting researcher at the Department of Mechanical Engineering, Technical University of Denmark.     

压电纤维复合材料层合壳的非线性动力学研究

本文对横向激励作用下的1-3型压电纤维复合材料层合壳进行了非线性动力学分析,并研究了压电特性对结构振动响应的影响.首先建立了压电纤维复合材料层合壳的非线性动力学方程,并且在已知的几何结构和材料特性基础上考虑了电场属性.然后根据位移边界条件,选择合适的振型函数,通过Galerkin方法将运动控制方程转化成两自由度的非线性常微分方程.通过数值模拟方法分析了横向激励和压电系数对压电纤维复合材料层合壳非线性振动特性的影响.通过波形图、三维相图、庞加莱图和分叉图等来研究壳体不同类型的周期和混沌运动.结果表明,外激励作用下结构存在复杂的非线性振动响应,同时压电参数对层合壳结构振动响应具有很强的调节作用.     

Fabrication of piezoelectric multilayer thin-film actuators

In this study, we fabricated multilayer ceramics (MLCs) composed of multilayered Pb(Zr,Ti)O₃ (PZT) piezoelectric thin films with internal electrodes and evaluated their dielectric and piezoelectric properties. The stack of PZT ferroelectric layers (550 nm) and SrRuO₃ (SRO, 80 nm) electrodes were alternatively deposited on Pt/Ti-coated silicon-on-insulator substrates by radio-frequency magnetron sputtering. The MLCs composed of one, three, and five PZT layers were fabricated by the alternate sputtering deposition of PZT ferroelectric layers and SRO electrodes through the movable shadow mask. The capacitances of MLCs were proportionally increased with the number of PZT layers, while their relative dielectric constants were almost same among the each MLC. The MLCs exhibited symmetric and saturated P–E hysteresis loops similar to the conventional PZT thin films. We estimated that the piezoelectric properties of MLCs by FEM simulation, and confirmed that the effective transverse piezoelectric coefficients (d _31,eff ) increased with the number of PZT layers. The piezoelectric coefficients calculated to be d _31,eff  = ?2964 pC/N at 25 PZT layers, which is much higher than those of conventional single-layer piezoelectric thin films.     

压电智能结构的主动控制及压电执行器布局优化

本文对压电梁、板结构振动主动控制进行了研究,分别建立了压电悬臂梁的耦合动力学方程以及Kirchhoff假设下矩形压电薄板的耦合动力学方程,通过采用独立模态空间控制法,实现了对压电智能结构前两阶模态的主动振动控制.为提高主动控制的抑振效果,通过仿真实例分析了压电执行器在梁上的不同布局对于主动控制抑振效果的影响,得到了压电执行器粘附于悬臂梁上的最佳布局.最后实验验证了压电悬臂梁在自由振动以及模态共振下压电执行器对于悬臂梁响应控制的可行性和有效性.     

Optimization of clamped circular piezoelectric composite actuators

This paper addresses the design of clamped circular piezoceramic composite unimorph and bimorph configurations, specifically the conflicting requirements of maximum volume displacement for a prescribed bandwidth. An optimization problem is formulated that implements analytical solutions for unimorph and bimorph configurations using laminated plate theory, including the use of oppositely polarized piezoceramic patches. A range of actuator geometric parameters are studied, and bounds for volume displacement and natural frequency of optimal designs are determined and presented via design curves. In the selected design space, Pareto optimization results for unimorph and bimorph configurations show that optimal volume displacement is related to the bandwidth by a universal power law such that the product of the square of the natural frequency and the displaced volume, a “gain-bandwidth” product, is a constant. Characteristic trends are also described that are independent of the actuator radius for the Pareto optimal piezoceramic patch thickness and radius versus normalized bandwidth. The results are relevant, for example, in the design of zero-net mass-flux or synthetic jet actuators used in flow control applications.     

Design of swing arm type actuators considering thermal and dynamic characteristics

The present state of the design of swing arm actuators for optical disc drives is to obtain the highly efficient dynamic characteristics within a very compact volume. As a necessary consequence, the need of the small form factor (SFF) storage device has arisen as a major interest in the information storage technology. Due to the size constraint, the thermal stability of the optical pick-up head is important: therefore, the actuator is designed to emit the heat, which is generated by the optical pick-up, along the structural body easily. In this paper, we suggest the miniaturized swing arm type actuator that has effective heat emission quality as well as satisfies the dynamic requirements for the SFF optical disk drive (ODD). The actuator is targeted to be installed in CF-II card size drive to be competitive with flash memory or mini hard disk drive used in mobile electric devices; therefore the dimension of the actuator is required as 11.0 mm × 2.5 mm × 25.0 mm (width × height × length). Because of its small size, the dynamic requirements are severe to ensure the enough gain-margin for the system control together with satisfying the DC/AC sensitivity conditions. Moreover, due to the small size, the maximum pick-up temperature is critical in design because the system has high possibility to reach the shut-down temperature. For the operating mechanism, it uses a tracking electromagnetic (EM) circuit for the focusing motion together and the initial model is designed and promoted by the design of experiments (DOE) only considering the dynamic characteristics. New concept design is suggested based on the topology optimization method considering the thermal conductivity. Furthermore, the new design is modified by DOE to maintain the high sensitivity and to have wide control bandwidth and decreasing mass and inertia. The final design of a swing arm type actuator for SFF ODD is suggested and its dynamic characteristics are verified.     

Active control of building structures using piezoelectric actuators

Active control strategy is an innovative method for enhancing structural functionality against strong ground motions. In this paper the performance of piezoelectric actuators for active control of the seismic responses of tall buildings is investigated. Three-dimensional modeling of the building is considered where three degrees of freedom including displacements in two perpendicular horizontal directions and rotation about the vertical axis are corresponded to each floor. The piezoelectric actuators are hosted at the bottom of the columns and the controlling forces produced by actuators are considered in the equations of motion of the buildings. Linear quadratic regulator (LQR), supervisory fuzzy controller (SFC) and fuzzy logic controller (FLC) are applied in the control designs. For the numerical studies, a real 10 story building subjected to an ensemble of 20 worldwide acceleration records is considered. Since there are many possible positions for placement of piezoelectric actuators in the test building, genetic algorithm is used for finding the optimal arrangement of actuators in order to achieve maximum reduction in building responses. The comparison of the controlled and uncontrolled responses of the test building indicates that the piezoelectric actuators are able to provide considerable reductions in buildings’ seismic responses. Also the performance of the above three controllers reveals that the fuzzy controller is much more effective than the two others.     

Structural response of composite plates equipped with piezoelectric actuators

We propose the modelling of piezoelectric elements perfectly bonded on an elastic structure. The study aims at predicting the static and dynamic (vibration) electromechanical responses of the structure. The model is mostly based on the kinematic assumption of the Love–Kirchhoff thin plate theory including shear function with a quadratic variation of the electric potential along the thickness direction of the piezoelectric parts. A variational formulation of piezoelectricity leads to the equations of motion for an elastic plate equipped with piezoelectric elements. An important feature of the present investigation is that the stiffness and inertial contributions of the piezoelectric patch is not neglected. Moreover, the numerical simulations demonstrate the influence of the actuator position on the global and local responses of the elastic plate for two situations (i) bilayer and (ii) sandwich configurations. A number of benchmark tests are considered in order to characterize the plate deformation when applying an electric potential to the piezoelectric patch faces. Plate vibration problem is also presented and the frequencies for the axial and flexural modes are obtained. The spectra of vibration for the plate with a time-dependent electric potential are computed.     

锥齿轮传动系统的非线性动力学行为

主要研究了锥齿轮传动转子系统的非线性动力学行为.在滑动轴承或挤压油膜阻尼器中,油膜力是齿轮传动转子系统非线性的一个重要来源,并且与轴承的结构参数、转子的转速和作用力等多个因素有关.首先在刚性转子、齿轮不脱啮等假设条件下,考虑了锥齿轮间的广义位移约束关系,建立在非线性油膜力作用下锥齿轮传动的多转子耦合系统动力学模型.由于油膜力具有强非线性特性,因此采用数值分析方法,结合系统的稳态响应、Poincaré映射和分叉图等多种手段分析系统的动力学行为.通过初步研究得到如下结论:对于不平衡锥齿轮传动的转子系统,在低转速时转子轴心的运动与转速同步;随着转速的增加系统出现2倍周期运动等复杂的分叉现象.这些振动特征可以为这类系统的动力学设计、结构参数优化和运动状态监测等提供必要的理论依据.     

Automatic calculation for bending of rigid-plastic beams under dynamic loading

Rigid-plastic stepped beams under impulsive or dynamic pressure loading are considered. The ends of the beam are simply supported, clamped or free. Permanent deflections of the beam are found by the method of mode form motions. For automatic calculation of the deflections a FORTRAN packet of programs DINOPT is put together. Three examples which demonstrate the facilities of this packet are given.     

压电复合材料悬臂板1∶3内共振的非线性动力学分析

本文以飞行器机翼为工程背景,将机翼简化为悬臂板模型,在应用经典板理论和Hamilton原理建立横向和面内激励共同作用下压电复合材料悬臂板的无量纲非线性偏微分方程的基础上,利用Galerkin方法将系统离散为两自由度的非线性常微分方程.然后考虑主参数共振-1∶3内共振,运用多尺度法将两自由度的系统控制方程进行摄动分析,推导出四维平均方程.基于四阶Runge-Kutta法,使用MATLAB软件研究了横向外激励幅值和压电参数项对压电复合材料悬臂板非线性动力学行为的影响.结果表明,系统存在周期和混沌运动,所得结论对实际工程具有指导意义.     

压电作动器的动态迟滞建模与H∞鲁棒控制

压电作动器具有率相关动态迟滞非线性特性,给传统建模和控制技术提出了挑战.本文针对压电作动器,提出了一种基于Bouc-Wen的Hammerstein率相关迟滞非线性模型,其中Bouc-Wen模型和线性动态模块分别用于描述系统的静态迟滞非线性特性和率相关特性.同时,构造了一个基于Bouc-Wen模型的迟滞补偿器,将迟滞补偿器与被控对象串联使系统线性化;并建立了不确定性系统模型,提出了一种H∞鲁棒跟踪控制方案,可以实现给定频率范围内单频率和复合频率参考信号的良好跟踪.实验结果表明,所建动态模型具有良好的泛化能力,跟踪控制相对误差小于8%,证明了所提出方法的有效性.     

压电作动器在基于声辐射模态的ASAC中的应用

控制作动器的选取和设计是实现主动结构声学控制的关键一环。利用压电材料的逆压电效应,选择矩形压电片作为控制作动器应用于基于声辐射模态的主动结构声学控制中,提出了基于声辐射模态的压电作动器主动控制策略,并得到了最佳控制电压的获取方法。以简支板为例,通过压电作动器控制效果分析,揭示了压电作动器控制的内在规律;通过与单点力控制效果的比较分析,验证了压电作动器控制策略的优越性。     

Active noise control of flexible linkage mechanism with piezoelectric actuators

An active noise control method for flexible linkage mechanism systems with piezoelectric actuators and strain gauge sensors is studied. By employing a set of wave number transformations on the original equations of motion of the flexible linkage mechanisms, a new set of equations of motion is obtained, in which the unknown variables can describe the structural acoustic radiation level of the mechanism system directly. On the basis of the new equations, the active noise control of the flexible linkage mechanism system with piezoelectric actuators is discussed. Firstly, the optimal control forces are determined based on the optimal control theory. Secondly, the controller of the system that consists of the output feedback and the disturbance feed-forward control laws is presented. Simulations show that the method presented in this paper is valid.     

三相电动执行机构智能控制器的设计

介绍了基于ADuC813单片机和ATT7028A三相电能芯片开发设计的三相电动执行机构智能控制器的系统组成和工作原理;并着重介绍了硬件构成及实现方法,对提高可靠性和稳定性所采用的可靠性设计技术和电磁兼容设计技术;通过软件实现了智能控制器的自诊断和自保护功能。     

Effects of applied electric field and microchannel wetted perimeter on electroosmotic velocity

Parameters which affect electroosmotic flow (EOF) behavior need to be determined for characterizing flow in miniature biological and chemical experimental processes. Several parameters like buffer pH, ionic concentration, applied electric field and channel dimensions influence the magnitude of the electroosmotic flow. We conducted numerical and experimental investigations to determine the impact of electric field strength and wetted microchannel perimeter on EOF in straight microchannels of rectangular cross-section. Deviation from theoretical behavior was also investigated. In the numerical model, we solved the continuity and Navier–Stokes equations for the fluid flow and the Gauss law equation for the electric field. Computational results were validated against experimental data for PDMS-glass channels of different wetted perimeters over a range of applied electric fields. Results show that increasing the applied electric field at constant wetted perimeter caused the electroosmotic mobility, the ratio of electroosmotic velocity to applied electric field, to increase nonlinearly. It was also found that increasing the wetted perimeter at constant applied electric field decreased the electroosmotic flow. These findings will be useful in determining the optimum value of the electric field required to produce a desired electroosmotic flow rate in a channel of a particular dimension. Alternately, these will also be useful in determining the optimum channel dimensions to provide a desired electroosmotic flow rate at a specified value of the electric field.     

Temperature distribution in nano-devices under a strong magnetic field

The thermoelectric and thermomagnetic phenomena of two-dimensional electron gases at low temperatures are numerically examined using the finite-difference method. The temperature and the voltage are calculated from transport equations describing thermoelectric and thermomagnetic effects. The results demonstrate that a magnetic field distorts equipotential lines and generates an uneven distribution of the temperature, which can cause inhomogeneous heating of experimental systems. In particular, a part of the system is found to be colder than the temperature of the heat baths.     

外加磁场下磁性液丝的稳定性分析

对处于外加轴向磁场的影响下的磁性液丝进行数学模拟,研究其稳定性。考虑了磁场的作用,对液丝的长波理论模型进行必要的修正。研究了不同条件下磁性液丝的变化发展过程和受力情况,揭示了外加磁场的作用。结果表明：外加磁场减缓了磁性液丝的破裂过程,磁场力类似于非牛顿流体中的弹性行为,在一定程度上抵消了毛细管力。随着初始磁场强度和磁化率的增大,磁场力逐渐增大。当磁场力显著增大时,液丝的变化发展过程被完全阻碍。