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采用电沉积法制备超级电容器用钽基(RuO_2/MnO_2)·n H_2O复合薄膜电极材料,制定钽箔基体的预处理方法、复合溶液主盐的配置比例、电沉积参数和热处理参数。重点研究了初始沉积液中Mn~(7+)与Ru~(3+)摩尔浓度比以及不同热处理参数对((RuO_2/MnO_2)·n H_2O复合薄膜附着力与电学性能的影响。借助扫描电镜、X射线衍射仪对薄膜的形貌和物相分析,用电化学工作站对该复合薄膜电化学性能进行测量。实验结果表明,当初始沉积液中Mn~(7+)与Ru~(3+)摩尔比为3:1,热处理温度为250℃,时间为2.5h,所制备出的复合电极薄膜具有较好的附着力和较高的比电容,分别为14.8MPa与418F/g。该复合薄膜在不同扫描速率下的循环伏安图具有高度可逆的氧化和还原曲线,说明其具有很明显的电容特性,是一种较为理想的RuO_2基复合薄膜。 相似文献
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本文较详细地介绍一种溶剂型热固性丙烯酸酯压敏粘合剂及其聚酰亚胺薄膜、聚萘酯薄膜、聚酯薄膜、聚丙烯薄膜以及聚芳酰胺纤维纸和牛皮纸等六种压敏粘带的制备、性能。重点讨论一些原材料的用量比以及工艺条件等因素对制品性能的影响。 相似文献
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采用射频磁控溅射法制备钴酸锂正极薄膜,通过对溅射功率的研究,制备出不需要进行退火处理仍具有60μAh/(cm2·μm)的比容量的正极薄膜.采用×射线衍射(XRD)和扫描电子显微镜(SEM)对钴酸锂薄膜的结构和形貌进行了研究,并分析了其对钴酸锂薄膜正极性能的影响.结果表明不同功率制备的钴酸锂薄膜具有不同的结晶取向和结晶度,其对正极薄膜的性能有具有决定性的影响,适合的功率下制备的钴酸锂薄膜在不退火处理的情况下仍具有较高的容量和较好的循环性能.同时研究了采用磁控溅射的铝薄膜作为集流体,代替铂或金等贵金属薄膜集流体,大幅减低了薄膜电池正极的制备成本. 相似文献
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Jae-Hyung Kim Joon-Hyung Lee Young-Woo Heo Jeong-Joo Kim Ju-O Park 《Journal of Electroceramics》2009,23(2-4):169-174
In this study, effects of oxygen pressure in the sputtering ambient on the preferential orientation and resultant surface morphology of ITO films grown by RF magnetron sputtering were investigated. ITO film grown with pure Ar gas shows a preferential (400) plane orientation parallel to the substrate surface and a sawteeth-shaped rough surface. ITO film grown in the sputtering ambient of Ar and oxygen mixtures shows a preferential (222) plane orientation and a flat and smooth surface. The differences in the growth rate, surface morphology, and roughness between the preferentially orientated films were discussed in terms of the surface energy of planes. The electrical and optical properties of the films were examined. 相似文献
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A. L. Kholkin K. G. Brooks D. V. Taylor S. Hiboux N. Setter 《Integrated ferroelectrics》2013,141(1-4):525-533
Abstract The self-polarization effect is investigated in Pb(Zr,Ti)O3 (PZT) thin films deposited by sol-gel and magnetron sputtering techniques. The effective piezoelectric coefficient of as-grown films, which is proportional to their initial polarization (self-polarization), is measured by a sensitive interferometric technique as a function of the annealing temperature, PZT composition, film thickness and bottom electrode material. The results indicate that the films are self-polarized by an internal bias field upon cooling through the phase transition temperature. It is suggested that a built-in field of a Schottky barrier between the PZT film and the bottom electrode is responsible for the observed effect. Self-polarization of the films is found to be very stable and in some cases to be as high as 90% of that produced by the subsequent room temperature poling. This property is very useful for piezoelectric and pyroelectric applications of PZT films since the poling procedure can be avoided. The properties of self-polarization are found to be similar for the films produced by sol-gel and sputtering techniques, suggesting that the same mechanism is operative in both cases. 相似文献
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Ni65Co35薄膜各向异性磁电阻性能的研究 总被引:2,自引:0,他引:2
选用Ni65Co35合金靶材,利用射频磁控溅射的方法成膜,采用四控针法测量磁电阻率,分别研究了溅射工艺参数(工艺气压、偏压、功率、基片温度等)对薄膜电阻性能的影响,并对影响的机理作了理论上的分析;另外还对Ni65Co35薄膜的热处理动力学进行了研究,求取了激活能。研究结果表明,溅射工艺参数对Ni65Co35薄膜的电阻力有较大的影响,适当的溅射参数能有效地提高磁电阻率;Ni65Co35薄膜退火处理后 相似文献
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Takeo Hyodo Anja Bieberle-Hütter Joshua L. Hertz Harry L. Tuller 《Journal of Electroceramics》2006,17(2-4):695-699
Preparation of macroporous gadolinia-doped ceria (CGO) films was attempted by r.f. magnetron sputtering. A polymethylmethacrylate
(PMMA) microsphere film was fabricated as a template on a Pt-coated silicon substrate by dripping a PMMA microsphere aqueous
dispersion onto the substrate. CGO was deposited onto the PMMA microspheres by sputtering; the PMMA microspheres were found
to shrink during the sputtering, and thus the CGO also coated the surface of PMMA microspheres beneath the top layer of the
film. Films (ca. 1.5 μm thick) consisting of three dimensional arrays of hollow CGO microspheres (ca. 700 nm in diameter)
with large porosity were obtained after annealing the CGO/PMMA microsphere composite film. 相似文献
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制备条件对Fe-Ta-N薄膜的结构和软磁性能的影响 总被引:1,自引:0,他引:1
应用射频磁控溅射法制备了Fe-Ta-N薄膜,系统地研究了制备工艺地Fe-Ta-N薄膜结构和软磁性能的影响,首先,制备了不同钽含量的薄膜,发现(Fe89.5Ta10.5)-N薄膜具有很好的软磁性能,氮分压P(N2)=5%时,矫顽力获得最小值,Hc=14A/m。此时,样品呈现纳米晶结构,晶粒尺寸D≤10∧-8m,并且,钽掺杂能抑制铁氮化合物的生成,使薄膜在高氮分压范围内具有高的饱和磁化强度,Ms=1242kA/m。其次,考察了热处理对(F89.5Ta10.5)-N薄膜结构和磁性能的影响,P(N2)=5%时,沉积态薄膜为非晶结构,矫顽力很大;在热处理过程中,薄膜逐渐晶化,400℃热处理后,晶化度达到40%,形成纳米晶结构,矫顽力迅速减小,最后,比较了不同溅射功率和总气压对(Fe89.5Ta10.5)-N薄膜结构和磁性能的影响,发现薄膜可在较大的溅射功率和总气压范围内保持优异的软磁性能,是非常适于工业生产的薄膜磁头材料。 相似文献
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Jae-Hyeong Lee 《Journal of Electroceramics》2009,23(2-4):512-518
Highly conducting and transparent aluminum doped zinc oxide (ZnO:Al) thin films have been deposited on polyimide substrate by r.f. magnetron sputtering at room temperature. The influence of sputter pressure and thickness on the structural, electrical, and optical properties of ZnO:Al films deposited on polyimide substrate is reported. The crystallinity and degree of orientation was increased by decreasing the sputter pressure. For higher sputtering pressures an increase on the resistivity was observed due to a decrease on the mobility and the carrier concentration. As the film thickness was increased, the crystallite sizes were increased, but the average transmittance in the wavelength range of the visible spectrum was decreased. The electrical performances of the ZnO:Al films deposited on glass substrates are slightly worse than the ones of the films deposited on polyimide substrates with same thickness. The lowest resistivity of 8.6?×?10?4 Ω cm can be obtained for films deposited on glass substrate with the thickness of 800 nm. 相似文献
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Arun Patil Vaishali Patil Ji-Won Choi Hyun-Jai Kim Bong-Hee Cho Seok-Jin Yoon 《Journal of Electroceramics》2009,23(2-4):230-235
Low cost anode materials having a high electrochemical efficiency have been critical in the success of thin film batteries that are applicable in ubiquitous environments as a portable energy source. Nichrome thin films are ideally suited for use in hybrid assemblies but their applications include precision integrated circuits in fields of telecommunications, instrumentation, power supplies, military and medical equipment where low noise and good power dissipation are required. With such a wide spectrum of applications, it is important to understand the electric behavior of the Nichrome alloy thin films by their microstructure. In this work, nanocrystalline films of nickel chromium alloys were deposited on alumina substrate by radio frequency (RF) magnetron sputtering technology. High purity nickel and chromium sputtering target were used for the deposition. First, aluminum was deposited on ceramic substrate acts as a current collector and over that NiCr was deposited by RF sputtering method. Both the layers were analyzed for structural and electrical properties using X-ray diffraction (XRD), energy dispersive X-ray analysis (EDS), atomic force microscopy (AFM), scanning electron microscopy (SEM) and cyclic voltammetry. The XRD peak confirms that deposited NiCr and Aluminum have tetragonal and cubic structures, respectively. The crystallite size was determined by full width at half maximum of XRD peaks. Structure, composition and the properties of the film are the major focus of this paper. Composition ratio between nickel and chrome obtained by EDS is 1:1. Particle size and microstructure of the film have been studied by SEM and AFM. Electrochemical properties of the films were analyzed. Reaction mechanism for the insertion and excretion is reported. After Lithium insertion and extraction the effect on the surface and structure of the thin film has been studied. The composition of equilibrium phases of NiCr as useful as attracting anode for the thin film battery. Nichrome on aluminum thin films as an anode has been attracted because it provides practical advantages including low cost production and competitive electrical performance. 相似文献
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采用射频磁控溅射法在Si(100)基片上沉积了不同氮分压和不同厚度的(Fe70.6Co29.4)88.2Al11.8-ON薄膜,研究了膜厚对5%氮分压沉积的薄膜静态与动态磁性的影响。当FeCoAlON薄膜的厚度较小时,薄膜表现出面内单轴磁各向异性,当薄膜厚度增加到210 nm时,薄膜出现了条形畴。动态磁性研究显示,对于面内单轴磁各向异性以及条形畴结构的FeCoAlON薄膜,都表现出优异的高频响应。特别地,对于具有条形畴结构的FeCoAlON薄膜,其磁谱曲线表现为多峰共振的特点。 相似文献