A methodology and model for the pull-in parameters of electrostaticactuators

This paper presents a generalized model for the pull-in phenomenon in electrostatic actuators with a single input, either charge or voltage. The pull-in phenomenon of a general electrostatic actuator with a single input is represented by an algebraic equation referred to as the pull-in equation. This equation directly yields the pull-in parameters, namely, the pull-in voltage or pull-in charge and the pull-in displacement. The model presented here permits the analysis of a wide range of cases, including nonlinear mechanical effects as well as various nonlinear, nonideal, and parasitic electrical effects. In some of the cases, an analytic solution is derived, which provides physical insight into how the pull-in parameters depend upon the design and properties of the actuator. The pull-in equation can also yield rapid numerical solutions, allowing interactive and optimal design. The model is then utilized to analyze analytically the case of a Duffing spring, previously analyzed numerically by Hung and Senturia, and captures the variations of the pull-in parameters in the continuum between a perfectly linear spring and a cubic spring. Several other case studies are described and analyzed using the pull-in equation, including parallel-plate and tilted-plate (torsion) actuators taking into account the fringing field capacitance, feedback and parasitic capacitance, trapped charges, an external force, and large displacements     

Experimental verification of a design methodology for torsion actuators based on a rapid pull-in solver

In this work, an experimental and theoretical study of the effect of various geometrical parameters on the electromechanical response and pull-in parameters of torsion actuators is presented. A lumped two-degrees-of-freedom (L2DOF) pull-in model that takes into account the bending/torsion coupling, previously proposed for cantilever suspended actuators, is tailored for the torsion actuators under study. This model is shown to better capture the measured pull-in parameters than previously proposed lumped single-degree-of-freedom (L1DOF) models. The measurements were conducted on torsion actuators with various shapes, fabricated on silicon-on-insulator (SOI) wafers using deep reactive ion etching (DRIE) and flip-chip bonding. Furthermore, a novel rapid solver, for extracting the pull-in parameters of the L2DOF model of the torsion actuators, is proposed. The proposed solver is based on a Newton-Raphson scheme and the recently presented DIPIE algorithm and is shown to be /spl sim/10 times faster than the prevalent voltage iterations based solvers. The rapid and more accurate pull-in extraction of the proposed approach renders it as a tool for extensive analysis and design optimization of torsion actuators.     

Influence of van der Waals force on the pull-in parameters of cantilever type nanoscale electrostatic actuators

In this paper, the influence of the van der Waals force on two main parameters describing an instability point of cantilever type nanomechanical switches, which are the pull-in voltage and deflection are investigated by using a distributed parameter model. The fringing field effect is also taken into account. The nonlinear differential equation of the model is transformed into the integral form by using the Green’s function of the cantilever beam. The integral equation is solved analytically by assuming an appropriate shape function for the beam deflection. The detachment length and the minimum initial gap of the cantilever type switches are given, which are the basic design parameters for NEMS switches. The pull-in parameters of micromechanical electrostatic actuators are also investigated as a special case of our study by neglecting the van der Waals force.     

Dynamic pull-in of parallel-plate and torsional electrostatic MEMS actuators

An analysis of the dynamic characteristics of pull-in for parallel-plate and torsional electrostatic actuators is presented. Traditionally, the analysis for pull-in has been done using quasi-static assumptions. However, it was recently shown experimentally that a step input can cause a decrease in the voltage required for pull-in to occur. We propose an energy-based solution for the step voltage required for pull-in that predicts the experimentally observed decrease in the pull-in voltage. We then use similar energy techniques to explore pull-in due to an actuation signal that is modulated depending on the sign of the velocity of the plate (i.e., modulated at the instantaneous mechanical resonant frequency). For this type of actuation signal, significant reductions in the pull-in voltage can theoretically be achieved without changing the stiffness of the structure. This analysis is significant to both parallel-plate and torsional electrostatic microelectromechanical systems (MEMS) switching structures where a reduced operating voltage without sacrificing stiffness is desired, as well as electrostatic MEMS oscillators where pull-in due to dynamic effects needs to be avoided.     

A new design methodology of electrostrictive actuators for bio-inspired robotics

At present advanced robotics concepts require new and more suitable components to be exploited, especially in the fields of the biomimetic and soft robotics. In this sense, the actuation system represents one of the most limiting factors for the realization of robots with bio-inspired features and performances.This paper presents a new soft actuators based on electroactive polymers (EAPs) technology. The actuator is composed of a pre-stretched silicone film sputtered with a very thin gold film on both sides, working as electrodes. A particular folded geometry, implemented through an innovative fabrication process, allows to exploit the electrostrictive effect and to develop soft actuators suitable in many applications where softness and flexibility are necessary. The manufactured prototypes were developed on the basis of a parametric model that takes into account all geometric parameters and material characteristics. The proposed model is useful to estimate the performances of the actuator and to improve them.     

A scaling model for electrowetting-on-dielectric microfluidic actuators

A hydrodynamic scaling model of droplet actuation in an electrowetting-on-dielectric (EWD) actuator is presented that takes into account the effects of contact angle hysteresis, drag from the filler fluid, drag from the solid walls, and change in the actuation force while a droplet traverses a neighboring electrode. Based on this model, the threshold voltage, V _T, for droplet actuation is estimated as a function of the filler medium of a scaled device. It is shown that scaling models of droplet splitting and liquid dispensing all show a similar scaling dependence on [t/ε_r(d/L)]^1/2, where t is insulator thickness and d/L is the aspect ratio of the device. It is also determined that reliable operation of a EWD actuator is possible as long as the device is operated within the limits of the Lippmann–Young equation. The upper limit on applied voltage, V _sat, corresponds to contact-angle saturation. The minimum 3-electrode splitting voltages as a function of aspect ratio d/L < 1 for an oil medium are less than V _sat. However, for an air medium the minimum voltage for 3-electrode droplet splitting exceeds V _sat for d/L ≥ 0.4. EWD actuators were fabricated to operate with droplets down to 35pl. Reasonable scaling results were achieved.

On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources

This study considers the dynamic response of electrostatic actuators with multiple degrees of freedom that are driven by multiple voltage sources. The critical values of the applied voltages beyond which the dynamic response becomes unstable are investigated. A methodology for extracting a lower bound for this dynamic pull-in voltage is proposed. This lower bound is based on the stable and unstable static response of the system, and can be rapidly extracted because it does not require time integration of momentum equations. As example problems, the dynamic pull-in of two prevalent electrostatic actuators is analyzed.     

Casimir effect on the pull-in parameters of nanometer switches

Casimir effect on the critical pull-in gap and pull-in voltage of nanoelectromechanical switches is studied. An approximate analytical expression of the critical pull-in gap with Casimir force is presented by the perturbation theory. The corresponding pull-in parameters are computed numerically, from which one can notice the nonlinear effect of Casimir force on the pull-in parameters. The detachment length has been presented, which increases with increasing thickness of the beam.This work was supported by the Distinguished Young Scholar Fund of NSFC (Grant No. 10225209), key project from the Chinese Academy of Sciences (Grant No. KJCX2-SW-L2) and National 973 Project (No. G1999033103).     

Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage

In this paper, a novel method has been developed to control the pull-in voltage of the fixed-fixed and cantilever MEM actuators and measure the residual stress in the fixed-fixed model using of the piezoelectric layers that have been located on the upper and lower surfaces of actuator. In the developed model, the tensile or compressive residual stresses, fringing-field and axial stress effects in the fixed-fixed end type micro-electro-mechanical systems actuator have been considered. The non-linear governing differential equations of the MEM actuators have been derived by considering the piezoelectric layers and mentioned effects. The results show that due to different applied voltage to the piezoelectric layers, the pull-in voltage can be controlled and in the fixed-fixed type the unknown value of the residual stress can be obtained.     

A model of magnetostrictive actuators for active vibration control

One of the most frequent applications of magnetostrictive actuator technology is the active structural vibration control (AVC). Magnetostrictive actuators (MAs) can deliver high-output forces and can be driven at high frequencies. These characteristics make them suitable for a variety of vibration control applications. The use of this technology, however, requires an accurate knowledge of the dynamics of such actuators. Several models are available in the literature. However, their use in control applications, characterized by high dynamics, is often limited by nonlinearities and complexity of the model. To overcome this difficulty, the paper introduces a linear model of magnetostrictive actuators that is valid in a range of frequencies below 2 kHz. The assumptions supporting the linearity of the system are discussed and the theoretical model is presented. Finally the model is validated through experimental tests carried out on two different magnetostrictive actuators.     

A hybrid model for rate-dependent hysteresis in piezoelectric actuators

A hybrid model is proposed in this paper to describe the static nonlinear and dynamic characteristics of rate-dependent hysteresis in piezoelectric actuators. In this model, a neural network based submodel is implemented to approximate the static nonlinear characteristic of the hysteresis while a submodel with the first-order differential operators is constructed to describe the dynamic behavior of the hysteresis. In this paper, a special hysteretic operator is proposed to extract the hysteretic feature of the hysteresis. Then, an expanded input space with such special hysteretic operator is constructed. Based on the constructed expanded input space, the neural network can be implemented to approximate the hysteresis phenomenon. The submodel to describe the dynamics is a sum of the weighted first-order differential operators. Finally, the experimental results of applying the proposed method to the modeling of hysteresis in a piezoelectric actuator are also presented.     

A model and methodology for hardware-software codesign

A behavioral model of a class of mixed hardware-software systems is presented. A codesign methodology for such systems is defined. The methodology includes hardware-software partitioning, behavioral synthesis, software compilation, and demonstration on a testbed consisting of a commercial central processing unit (CPU), field-programmable gate arrays, and programmable interconnections. Design examples that illustrate how certain characteristics of system behavior and constraints suggest hardware or software implementation are presented     

一种面向AADL架构的模型测试方法

鉴于模型在软件系统开发中日趋重要的地位和AADL模型在嵌入式软件建模中的良好应用前景,为了在嵌入式软件系统开发前期保证AADL模型的质量,提出了一种基于模型测试的AADL架构验证方法;该方法应用马尔可夫链描述AADL架构的行为,然后根据得到的马尔可夫链模型以及系统设计要求标准生成相应的测试用例和测试预言,并通过测试用例执行输出和期望值的比较判断AADL模型的正确性,实现对系统AADL模型的测试;最后通过案例分析证明了该方法的有效性。     

Analytical approach and numerical /spl alpha/-lines method for pull-in hyper-surface extraction of electrostatic actuators with multiple uncoupled voltage sources

This work presents a systematic analysis of electrostatic actuators driven by multiple uncoupled voltage sources. The use of multiple uncoupled voltage sources has the potential of enriching the electromechanical response of electrostatically actuated deformable elements. This in turn may enable novel MEMS devices with improved and even new capabilities. It is therefore important to develop methods for analyzing this class of actuators. Pull-in is an inherent instability phenomenon that emanates from the nonlinear nature of the electromechanical coupling in electrostatic actuators. The character of pull-in in actuators with multiple uncoupled voltage sources is studied, and new insights regarding pull-in are presented. An analytical method for extracting the pull-in hyper-surface by directly solving the voltage-free K-N pull-in equations derived here, is proposed. Solving simple but interesting example problems illustrate these new insights. In addition, a novel /spl alpha/-lines numerical method for extracting the pull-in hyper-surface of general electrostatic actuators is presented and illustrated. This /spl alpha/-lines method is motivated by new features of pull-in, that are exhibited only in electrostatic actuators with multiple uncoupled voltage sources. This numerical method permits the analysis of electrostatic actuators that could not have been analyzed by using current methods.     

Analytical dynamic model for suspension with PZT actuators

Modern hard disk drive uses voice coil motor to move its actuator across spinning disk to access data stored on disk surfaces. To achieve higher area density with narrow tracks, piezoelectric (PZT) ceramics are deployed as secondary actuator in many high capacity drives to increase servo control bandwidth for better positioning accuracy. Piezoelectric secondary stage actuators, often called dual stage actuator or DSA, integrated on suspensions are discussed in this paper. An analytic model is presented to derive a secondary order equation of motion relating suspension dynamics to key suspension and PZT geometric parameters, material properties and voltage applied to PZT. DSA DC gain is then obtained from the equation of motion. By introducing a suspension configuration without PZT installed, the DSA DC gain is then further linked to suspension dynamics parameters. With the equation of motion and DSA DC gain model, design directions for higher stroke and tradeoffs for dynamics and robustness are discussed.     

Analytical model of electrostatic actuators for micro gas pumps

We analytically predict the performance of electrostatic actuators for diaphragm micro gas pumps by combining energy minimization and the analytical solution for membrane deformation under uniform pressure. The tangential strain of the membrane is considered in the calculation of membrane deflection. Models for both single- and double-cavity pumps are established to define the restriction of the upper cavity on the membrane during actuation. The shape lines of the membrane in a double-cavity structure are demonstrated under different voltages. The influence of dielectric thickness and cavity geometry on pumping consequence is also discussed. In accordance with other simulation results on diaphragm displacement and chamber pressure rise, an electrostatic diaphragm micro gas pump with a relatively thin dielectric layer and a cavity of comparatively small depth and radius suitably generates high pressure rise. Furthermore, a double-cavity structure enhances pressure rise for the restriction of the upper cavity on the membrane during deformation.

     

Analytical model of electrostatic actuators for micro gas pumps

We analytically predict the performance of electrostatic actuators for diaphragm micro gas pumps by combining energy minimization and the analytical solution for membrane deformation under uniform pressure. The tangential strain of the membrane is considered in the calculation of membrane deflection. Models for both single- and double-cavity pumps are established to define the restriction of the upper cavity on the membrane during actuation. The shape lines of the membrane in a double-cavity structure are demonstrated under different voltages. The influence of dielectric thickness and cavity geometry on pumping consequence is also discussed. In accordance with other simulation results on diaphragm displacement and chamber pressure rise, an electrostatic diaphragm micro gas pump with a relatively thin dielectric layer and a cavity of comparatively small depth and radius suitably generates high pressure rise. Furthermore, a double-cavity structure enhances pressure rise for the restriction of the upper cavity on the membrane during deformation.     

An improved analytical model for static pull-in voltage of a flexured MEMS switch

Microsystem Technologies - This paper presents the design of low-k meander based MEMS shunt capacitive switch with beam perforations. A closed form model to accurately calculate the pull-in voltage...     

A team-oriented design methodology for mixed model assembly systems

Team-oriented approaches are widely being used in modern real life assembly systems, as are other modern systems. In this paper, first the literature of single and mixed model assembly line balancing, which plays an important role for the design of assembly systems, is reviewed. The associated literature matrixes reveal that team-oriented approaches do not have an intensive research area. Second, a team-oriented mathematical programming model for creating assembly teams (physical stations) in mixed model assembly lines is devised. Owing to the fact that this model is NP hard, a scheduling based heuristic algorithm is developed. The mixed model assembly line design methodology, which includes a team-oriented algorithm as a step, is proposed. Both model sequencing and worker transfer systems are included in the methodology. The algorithms for each step of the methodology are also coded by using MATLAB and MS Excel is used as the user interface. Furthermore, the presented methodology was applied in a chosen segment of a real life mixed model tractor assembly system.     

Key design parameters of a few types of electro-hydrostatic actuators for humanoid robots

To overcome the tradeoff between the bandwidth and force-to-weight ratio of the backdrivable actuators, actuation by electro-hydrostatic actuators (EHA) is effective. Based on the idea, we developed the adult size, humanoid robot ‘Hydra’, whose joints are driven by EHA. In its development, a critical problem was the insufficient force of the available lightweight and backdrivable EHA. In this paper, we present our approach to enhance their maximum force while keeping them small, lightweight and backdrivable. We first analyze the behavior of EHA and show that the maximum force is enabled on the balance between the viscous loss and the internal leakage loss. We also show that miniaturization of the actuator moves the system to the internal leakage loss dominant side, and to encounter this, reduction of the internal gap, maintain of the fluid viscosity, and full utilization of the space to enlarge the pressure receiving surface are effective. The mechanical design process and experimental evaluation on each of these three aspects are detailed.