应用于硅微谐振式传感器的等精度频率计设计

针对传统频率测量中存在的弊端,利用等精度测频原理,采用现场可编程门阵列(FPGA)设计实现了等精度频率计。通过FPGA对同步门的控制,使被测信号和标准信号在闸门时间内同步,消除了量化误差,提高了测量精度,实现了在整个测试频段内测量精度不随被测信号频率的高低而发生变化,即实现了等精度测量。实验证明:采用该频率计测量标准信号频率的相对误差数量级为10-6,测量谐振式传感器在温漂下的输出频率的变化稳定在±1 Hz,而且实现了谐振式传感器在红外辐射下频率的动态跟踪。     

基于FPGA的数字频率计设计

该文运用VHDL硬件描述语言进行数字频率计设计,频率计主要通过闸门控制电路产生计数周期为1s,清零周期为0.5s,2s为一个周期的测量信号频率。并通过计数器记录频率值,最后通过数码显示电路显示被测信号频率值。该文设计一个6位频率计,可以测量1~999999Hz的信号频率。     

谈谈单片机测频系统的实现

这里介绍一下如何用单片机来实现频率的精确测定方法。所谓频率,就是在单位时间内检测到的脉冲数。检测脉冲数的方法便是我们测量频率的传统方法,将其称之为"电子计数测频法";而另一种方法是通过准确测量被测信号的周期来测量其频率,将其称之为"同步周期测频法"。下面我分别为大家介绍这两种方法。一、电子计数法测频法图1为传统数字频率计,它采取直接测频法,测频率时将频率信号接在A端,高精度晶体振荡器接在B端,利用电子计数器严格按照式f=N/T所表达     

基于STC12C5A60S2的高频高精度频率计的设计

基于传统测频原理的频率计的测量精度随被测信号频率的变化而变化。针对这一缺陷,提出了一种基于等精度测量原理的频率计设计方案。选用单时钟/机器周期的单片机STC12C5A60S2,其克服了普通8051单片机测频上限频率低的缺陷,从而满足了对高频信号进行测频的要求。该频率计具有电路结构简单、成本低和测频精度高等特点,适合测量高频小信号。     

用选通门匹配方法提高计数式频率计的测量精度

计数式频率计的选通门一般与被测信号是不相关的。被测信号频率由选通门中出现的信号脉冲数确定 ,误差为± 1个脉冲。当被测信号频率较低时 ,需要很宽的选通门才能得到较高的测量精度。文中提出使用匹配选通门提高低频信号频率测量精度。匹配选通门是微移动标准选通门的前沿和后沿使之与被测信号脉冲对齐的控制信号。用频率计内部高频时钟测量匹配选通门宽度 ,计算被测信号频率。当信号频率大于 5Hz,频率计内部时钟频率为 2 0 MHz,选通门宽度为 1s时 ,相对误差小于 5× 10 -6。     

基于FPGA的高精度频率计

为了满足硬件工程师对高精度和高带宽测频仪器的需求,设计一种基于FPGA的高精度频率计。频率计包括外围的电压跟随电路和串口通信电路以及FPGA上的分频器模块、频率计量模块和串口通信模块,并使用Altera公司的Cyclone Ⅳ芯片作为控制核心。首先待测信号经过电压跟随器的稳压和隔离,然后将稳压信号接入分频器模块,分频器模块会把频率信号以1 kHz为界限分为低频和高频信号,并对低频信号和高频信号分别采用周期测频法和脉冲计数法测频。测量的频率数据可实时通过串口上传至上位机。经过测试,频率计能够实现1 Hz的精度、200 MHz的测频带宽以及多通道检测。     

基于430单片机的简易频率计设计

为精确测量信号的频率、周期等电参数,设计了一种以MSP430F149单片机为控制核心,外接1602显示屏的简易频率计,可以用于测量信号的频率、周期以及方波的占空比和脉宽时间。该频率计利用单片机的定时器A捕捉相邻上升、下降沿。通过处理对应时刻的TAR值,计算得出频率、周期等电参量,并在1602上显示。经过测试,该系统简洁方便、功能多样,频率测量误差低于0.1%,达到设计的指标,信号频率的测量范围为1 Hz¹ MHz,可用于测量小信号,能够满足实际要求,可投入实际测量中使用。     

基于单片机的等精度频率计设计

本文采用单片机AT89C52作为系统控制单元,辅以适当的软、硬件资源完成以单片机为核心的等精度频率计设计。通过单片机对同步门的控制,使被测信号和标准信号在闸门时间内同步测量,为了提高精度,将传统的测频功能转为测周期,采用多周期同步测量技术,实现了等精度测量。等精度频率测量方法消除了量化误差,可以在整个测试频段内保持高精度不变,其精度不会因被测信号频率的高低而发生变化。     

基于CPLD的等精度频率计的设计

在电子领域中,测频是经常要用到的。但是传统频率计在测频时有很多缺点。本设计采用等精度测频、测周期的数字频率计的设计方案,选用单片机为核心,通过编程实现了闸门预制信号、同步控制、数据运算处理和实时显示的功能,并利用可编程逻辑器件CPLD(Complex Programmable Logic Device)的在线编程,实现了频率计的逻辑控制、计数等功能。本设计克服了传统频率计随着被测频率的改变而改变的缺点,在整个频率区域都能保持恒定的测试精度。     

多功能频率计

一、总体方案设计1.计数法测量周期原理此多功能电子频率计能测量信号周期Tx,频率是周期的倒数,通过计算可间接测得待测信号的频率fx。具体原理如下:设输入信号为正弦波fx,波形如图1所示。fx经整形后得fu,fu经M分频后得     

一种超磁致伸缩材料和声表面波谐振器构成的复合磁传感器

设计了一种新的超磁致伸缩材料和声表面波谐振器构成的复合磁传感器.该传感器将超磁致伸缩材料在磁场中产生的应力应变传递到声表面波谐振器上,改变其谐振频率,通过对谐振频率的检测进行磁场测量.该传感器可以用于静态和动态磁场测量,并且可用作无源、无线磁传感器.主要分析了该结构用于静态磁场测量的原理,给出了实验结果.传感器谐振频率的变化对于静态磁场变化的灵敏度可达132 Hz/Oe,谐振频率测量分辨率在1 Hz时,磁场测量分辨率可达10-7T数量级.     

MEMS石英振梁高增益谐振电路的设计与分析

介绍了一种基于新型高阻抗QVBA的高增益谐振电路设计和谐振电路的分析测试实验。利用阻抗分析仪4294A测得石英振梁的等效参数,对石英振梁的电气特性进行分析,发现高阻抗石英振梁起振比普通晶振需要更高增益。基于双门振荡电路,利用运算放大器在开环系统中具有无限增益的理论,提高谐振电路的驱动能力。同时采用谐波抑制网络,指出谐波抑制网络可以抑制无用的频率避免传感器输出信号出现泛音频率,并提高谐振电路的稳频速度。考虑电噪声对输出波形质量的影响,在电路的输入部分采用滤波电容,并在电路的输出部分采用反向器整形,使电路输出标准的方波信号。最后利用安捷伦DSO5012A型号示波器和频率计对高增益谐振电路和石英振梁组成的谐振系统进行测试,测试结果表明本文设计的谐振电路与石英振梁组成的谐振系统可以输出标准的方波信号,输出频率精度达到10-5 kHz,在振动稳定以后频率变化小于0.1 Hz,无泛音频率出现,对研究高精度MEMS加速度计传感器具有重要意义。     

—种超磁致伸缩材料和声表面波谐振器构成的复合磁传感器

设计了一种新的超磁致伸缩材料和声表面波谐振器构成的复合磁传感器．该传感器将超磁致伸缩材料在磁场中产生的应力应变传递到声表面波谐振器上，改变其谐振频率，通过对谐振频率的检测进行磁场测量．该传感器可以用于静态和动态磁场测量，并且可用作无源、无线磁传感器．主要分析了该结构用于静态磁场测量的原理，给出了实验结果．传感器谐振频率的变化对于静态磁场变化的灵敏度可达132Hz／Oe，谐振频率测量分辨率在1Hz时，磁场测量分辨率可达10^-7T数量级．     

Terfenol-D/SAW谐振器/Terfenol-D复合磁传感器

设计了一种由超磁致伸缩材料Terfenol-D和SAW谐振器构成的复合磁传感器,在磁场作用下,Terfenol-D沿长度方向伸缩,并将应力应变传递至SAW谐振器,使其产生应变,造成谐振频率改变,通过测量SAW谐振器谐振频率的变化来测量磁场强度.分析了该磁传感器的传感原理,建立了该复合磁传感器的静态模型,对弹性敏感元件进行了受力分析,根据压磁方程和受力平衡得到该磁传感器的静态特性.实验结果表明:该复合磁传感器灵敏度可达341.6Hz/Oe,较Terfenol-D/SAW谐振器结构灵敏度提高了3倍;测量谐振频率的分辨率为1Hz,SAW谐振器频率稳定度为0.1×10-6时,该磁传感器对磁场的分辨率为10-6T.     

Resonant Magnetic Field Sensor With Frequency Output

This paper presents a novel type of resonant magnetic field sensor exploiting the Lorentz force and providing a frequency output. The mechanical resonator, a cantilever structure, is embedded as the frequency-determining element in an electrical oscillator. By generating an electrical current proportional to the position of the cantilever, a Lorentz force acting like an additional equivalent spring is exerted on the cantilever in the presence of a magnetic field. Thus, the oscillation frequency of the system, which is a function of the resonator's equivalent spring constant, is modulated by the magnetic field to be measured. The resonant magnetic field sensor is fabricated using an industrial CMOS process, followed by a two-mask micromachining sequence to release the cantilever structure. The characterized devices show a sensitivity of 60 kHz/Tesla at their resonance frequency$f_0= 175~ kHz$and a short-term frequency stability of 0.025 Hz, which corresponds to a resolution below 1$~mu T$. The devices can thus be used for Earth magnetic field applications, such as an electronic compass. The novel resonant magnetic field sensor benefits from an efficient continuous offset cancellation technique, which consist in evaluating the frequency difference measured with and without excitation current as output signal. 1676     

A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors

A closed-loop circuit is developed in this work for tracking the resonant frequency of silicon microcantilever mass sensors. The proposed closed-loop system is mainly based on a phase-locked loop (PLL) circuit. To lock onto the resonant frequency of the resonator, an actuation signal generated from a voltage-controlled oscillator is fed back to the input reference signal of the cantilever sensor. In addition to the PLL circuit, an instrumentation amplifier and an active low-pass filter are connected to the system for gaining the cantilever output signal and transforming a rectangular PLL output signal into a sinusoidal signal used for sensor actuation, respectively. To demonstrate the functionality of the system, a self-sensing silicon cantilever resonator with a built-in piezoresistive Wheatstone bridge is fabricated and integrated with the circuit. A piezoactuator is employed to actuate the cantilever into resonance. From the measurement results, the integrated closed-loop system is successfully employed to characterize a 9.4 kHz cantilever sensor under ambient temperature cross-sensitivity yielding a sensor temperature coefficient of ?32.8 ppm/°C. In addition to it, the sensor was also exposed to exhaled human breath condensates and e-cigarette aerosols to test the sensor sensitivity obtained from mass-loading effects. With a high frequency stability (i.e., a frequency deviation as low as 0.02 Hz), this developed system is intended to support the miniaturization of the instrumentation modules for cantilever-based nanoparticle detectors (CANTORs).     

Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor

A novel MEMS-based cantilever sensor with slender geometry is designed and fabricated to be implemented for determining personal exposure to carbon engineered nanoparticles (NPs). The function principle of the sensor is detecting the cumulative mass of NPs deposited on the cantilever surface as a shift in its resonant frequency. A self-sensing method with an integrated full Wheatstone bridge on the cantilever as a piezoresistive strain gauge is introduced for signal readout replacing optical sensing method. For trapping NPs to the cantilever surface, an electrostatic field is used. The calculated equivalent mass-induced resonant frequency shift due to NPs sampling is measured to be 11.78?±?0.01?ng. The proposed sensor exhibits a mass sensitivity of 8.33?Hz/ng, a quality factor of 1,230.68?±?78.67, and a temperature coefficient of the resonant frequency (TC _f ) of ?28.6?ppm/°C. These results and analysis indicate that miniaturized sensors based on self-sensing piezoresistive microcantilever can offer the performance to fulfill the requirements of real-time monitoring of NPs-exposed personnel.     

一种新型SOI高声压噪声传感器研制

简介了一种新型绝缘体上硅(SOI)高声压噪声传感器.主要对提升噪声传感器关键指标的感声膜结构的设计过程进行了仿真和计算,利用ANSYS软件对设计尺寸进行了模拟仿真.对设计的噪声传感器进行了频响以及线性度测试:在高声压级135～200 dB动态范围内的线性度小于1％,频率响应为20～100000 Hz;工作温度范围在-40～260℃,传感器的输出为标准电压信号,可组成被动式声测量阵列,用于测量高声压级的噪声信号.