InP基HEMTs器件16参数小信号模型（英文）

针对InAlAs/InGaAsInP基HEMTs提出了一种16参数小信号拓扑结构.拓扑结构中引入栅源电阻(R_(gs))表征短栅沟间距引起的栅泄漏电流效应.另外还引入输出跨导(gds)和漏延迟(τ_(ds))描述漏端电压对沟道电流的影响以及漏源电容(C_(ds))引起的相位变化,从而提高了S_(22)参数拟合精度.外围寄生参数通过open和short拓扑结构计算得出,本征部分利用去除外围寄生参数后的Y参数计算得出,最终模型参数值经过优化以达到最佳拟合状态而确定.结果表明,s参数和频率特性的仿真值与测试数据拟合程度很好,R_(gs)和τ_(ds)的引入降低了模型误差.准确合适的InP基HEMTs小信号模型对于高频电路设计非常重要.     

太赫兹InP HEMT器件的建模

采用减小栅长(Lg)的方法可以显著提高磷化铟基高电子迁移率晶体管(InP HEMT)器件的直流和微波性能,并使器件的工作频率上升到太赫兹频段。采用T形栅工艺制备了70 nm栅长的InP HEMT器件,器件的直流跨导达到了2.87 S/mm,截止频率ft和最大振荡频率fmax分别为230 GHz和310 GHz。对器件的寄生参数进行了提取和去嵌入,得到了器件的本征S参数。采用经典的9参数模型拓扑结构对器件进行了小信号建模,模型仿真与测试结果拟合良好。针对电流的短沟道效应,采用电流分段的方法来拟合I-V曲线,取得了较好的拟合结果。最后采用Angelov模型对器件的电容进行建模,并最终建立了器件的大信号模型。     

一种紧凑的GaN高电子迁移率晶体管大信号模型拓扑

GaN高电子迁移率晶体管（HEMT）以其复杂的器件特性使其大信号建模变得十分困难,尽管EEHEMT、Angelov等模型结构曾经成功应用于GaAs HEMT/MESFET的大信号模型,但当它们被用于GaN HEMT建模时却不再准确和完备.面向GaN HEMT器件的大信号模型,本文提出了一种紧凑的模型拓扑,此模型拓扑综合了GaN HEMT器件的直流电压-电流（I-V）特性、非线性电容、寄生参数、栅延迟漏延迟与电流崩塌、自热效应以及噪声等特性.经验证此模型拓扑在仿真中具有很好的收敛性,适用于GaN HEMT器件的大信号模型的建立,满足GaN基微波电路设计对器件模型的需求.     

一种新的AlGaN/GaN HEMT小信号模型与提参方法

为得到GaN HEMT器件的小信号等效电路,在传统的GaAs HEMT小信号模型的基础上引入了反应栅漏电流的反馈电阻Rlgs,Rlgd,并在此基础上引入分布式设计对小信号等效电路模型进一步改进,建立了19元件(20参数)的小信号等效电路拓扑结构.根据此模型提供了一套稳定的直接提参方法,结果表明新的模型系统具有简单、适应频率、偏压范围广、稳定性好和精度高等特点.相比于传统的集总模型能适应更高的频率范围,对器件品质和测量环境要求不高,有更强的稳定性.     

InAlAs/InGaAs/InP基PHEMTs小信号建模及低噪声应用

利用改进的小信号模型对采用100nmInAlAs/InGaAs/InP工艺设计实现的PHEMTs器件进行建模, 并设计实现了一款W波段单片低噪声放大器进行信号模型的验证。为了进一步改善信号模型低频S参数拟合差的精度, 该小信号模型考虑了栅源和栅漏二极管微分电阻, 在等效电路拓扑中分别用Rfs和Rfd表示.为了验证模型的可行性, 基于该信号模型研制了W波段低噪声放大器单片.在片测试结果表明:最大小信号增益为14.4dB@92.5GHz, 3dB带宽为25GHz@85-110GHz.而且, 该放大器也表现出了良好的噪声特性, 在88GHz处噪声系数为4.1dB, 相关增益为13.8dB.与同频段其他芯片相比, 该放大器单片具有宽3dB带宽和高的单级增益.     

InAlAs/InGaAs/InP基PHEMTs小信号建模及低噪声应用（英文）

利用改进的小信号模型对采用100nmInAlAs/InGaAs/InP工艺设计实现的PHEMTs器件进行建模,并设计实现了一款W波段单片低噪声放大器进行信号模型的验证。为了进一步改善信号模型低频S参数拟合差的精度,该小信号模型考虑了栅源和栅漏二极管微分电阻,在等效电路拓扑中分别用Rfs和Rfd表示.为了验证模型的可行性,基于该信号模型研制了W波段低噪声放大器单片.在片测试结果表明:最大小信号增益为14.4dB@92.5GHz,3dB带宽为25GHz@85-110GHz.而且,该放大器也表现出了良好的噪声特性,在88GHz处噪声系数为4.1dB,相关增益为13.8dB.与同频段其他芯片相比,该放大器单片具有宽3dB带宽和高的单级增益.     

一种新型的基于SOI MOSFET 衬底模型提取方法

衬底寄生网络建模和参数提取,对RF SOI MOSFET器件输出特性的模拟有着非常重要的影响。考虑BOX层引入的体区和Si衬底隔离,将源、体和衬底短接接地,测试栅、漏二端口S参数的传统测试结构,无法准确区分衬底网络影响。文章提出一种改进的测试结构,通过把SOI MOSFET的漏和源短接为信号输出端、栅为信号输入端,测试栅、漏/源短接二端口S参数的方法,把衬底寄生在二端口S参数中直接体现出来,并开发出一种解析提取衬底网络模型参数的方法,支持SOI MOSFET衬底网络模型的精确建立。采用该方法对一组不同栅指数目的SOI MOSFET进行建模,测量和模型仿真所得S参数在20GHz频段范围内得到很好吻合。     

一种基于BSIM-CMG的FinFET变容管模型

提出了一种适用于FinFET变容管的建模方法.在BSIM-CMG的基础上,模型采用衬底模型和外围寄生模型来表征变容管的射频寄生效应.提出了具体的参数提取方法,将测试的S参数导入到安捷伦IC-CAP建模软件提取参数,测试结构引入高频寄生采用(open+ short)去嵌方法进行去嵌.通过调节模型参数拟合测试曲线得到FinFET变容管模型.该模型可精确表述FinFET变容管全工作区域特性,解决传统MOS变容管模型无法准确描述三维FinFET器件变容特性的问题.模型和模型参数提取方法采用20个硅鳍、16个栅指、158 nm栅长、578 nm栅宽的FinFET变容管进行建模验证,模型仿真和测试所得C-V,R-V和S参数特性吻合良好.     

一种新的AlGaN/GaN HEMT小信号模型与提参方法

为得到GaN HEMT器件的小信号等效电路,在传统的GaAs HEMT小信号模型的基础上引入了反应栅漏电流的反馈电阻RIgs,RIgd,并在此基础上引入分布式设计对小信号等效电路模型进一步改进,建立了19元件（20参数）的小信号等效电路拓扑结构．根据此模型提供了一套稳定的直接提参方法,结果表明新的模型系统具有简单、适应频率、偏压范围广、稳定性好和精度高等特点．相比于传统的集总模型能适应更高的频率范围,对器件品质和测量环境要求不高,有更强的稳定性．     

微波功率SiC MESFET小信号等效电路建模研究

在传统GaAs MESFET器件小信号模型基础上提出一种更适合SiC MESFET器件的小信号等效电路模型.该模型在引入了与栅压相关的输入电导后,明显改善了S11的拟合精度.提出直接利用cold FET反向栅压偏置下的S参数,通过曲线拟合和外插技术提取SiC MESFET小信号等效电路寄生参数的方法.该模型应用于国内SiCMESFET工艺线,在O.5～18GHz范围内S参数的仿真值和实测值非常吻合.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.