共查询到17条相似文献,搜索用时 125 毫秒
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本文提出一种图像直观、结果可靠的软X线多层膜设计方法,讨论了与软X射线多层膜制备有关的基板选择,膜厚控制等工艺问题。给出Mo/Si软X射线多层膜小角度衍射及171Å、231Å及256Å处软X射线反射率的测试结果,并对软X射线多层膜工作做了展望。 相似文献
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对软X射线与界面相互作用的规律进行初步研究,给出了软X射线界面散射的一级近似一般理论推导,从中给出了粗糙界面软X射线的散射传输特性,表明在粗糙表面上软X射线的镜向反射系数,需要做与粗糙度有关的数学修正。作为形式上的一种方法,本文还给出了粗糙表面对软X射线全反射的动力学模型,以及一维软X射线散射测量粗糙度原理。通过实验测量了λ=243Å,256Å时具有超光滑表面的Mo,Si样品之反射率和λ=44.6Å时石英超光滑样品的反射率。采用镀碘化铯的方法,使“真空紫外-软X光反射率计”的可测量短波长从200Å降至10Å.对44.6Å进行了散射测量,可以明显看到软X射线的非正常反射现象;还对积分散射测粗糙度方法进行了初步研究。最后给出了X线聚焦装置的理论公式和设计实例。 相似文献
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用透射光栅谱仪测量多层膜的反射特性 总被引:1,自引:1,他引:0
软X射线多层膜是当前应用光学和工程光学的研究热点之一,反射率是其性能和膜层质量最直观的参数,它的测量对了解多层膜性能和改进多层膜制备工艺具有重要意义。本文介绍采用带有前置光学系统的大面积透射光栅光谱仪分光,让软X射线多层膜反射+1级或-1级软X射线,用国产的SIOFM型X射线胶片接受软X射线,通过测量可定性地判断多层膜制备质量,为改进多层膜制备工艺提供重要的参考依据。 相似文献
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本文概述了我所12年(1978~1990)来在软X射线成像望远镜和同步辐射光束线以及短波段光学中有关单元技术研究的发展现状。指出了限制软X射线光学技术发展的主要问题,提出发展软X射线成像和同步辐射反射光学技术应开展的主要研究工作。 相似文献
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软X射线激光多层膜均匀性控制技术 总被引:1,自引:1,他引:0
软X射线激光技术在近年来得以较快的发展,而多层膜是其不可缺少的一项基础技术,软X射线激光多层膜本身的要求使得多层膜的结构性需达到很高的水平.现就软X射线激光多层膜的均匀性控制技术进行研究,以期得到更加精确的膜层结构. 相似文献
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本文主要介绍软X射线等离子体光源、多层膜软X射线反射镜和软X射线显微镜。高强度的实验室用软X射线等离子体光源较之同步辐射具有体积小、造价低、光束大和单位脉冲光通量高等优点。最近发展的多层镀膜用于软X射线正入射光学元件,可以得到比掠入射光学元件好得多的分辨率。软X射线显微镜提供了生物样品分析的一种新工具,它填补了常用的光学显微镜和电子显微镜之间的空隙。 相似文献
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使用本实验室研制的整体平行束软X光透镜作为准直器和电子枪软X光源相配,作成了平行束软X光源,用此平行束软X光源进行了深亚微米X射线光刻实验。刻出了1.0μm~0.2μm的线条。文中对实验装置和光刻结果作了简要的介绍。 相似文献
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A compact Schwarzschild soft X-ray microscope using a laser-produced plasma soft X-ray source has been developed. The laser-produced plasma source, which is small but of high brilliance, has made it possible to use the soft X-ray microscope in a small laboratory. The microscope is composed of a Schwarzschild objective and a grazing incidence mirror condenser. Image contrast for biological specimens in soft X-ray regions is investigated briefly. It is possible to observe the fine structures of a thin specimen at a wavelength of 15 nm; at this wavelength high-contrast images of biological specimens have been obtained with a single laser shot of pulse width of 8 ns at a resolution of 0·3 μm. The resolution of the system is limited by the detector. 相似文献
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Mayer M Grévent C Szeghalmi A Knez M Weigand M Rehbein S Schneider G Baretzky B Schütz G 《Ultramicroscopy》2011,111(12):1706-1711
Best resolutions in X-ray focusing are obtained to date by using diffractive lenses called Fresnel zone plates (FZPs). Their further improvement is nevertheless hindered by fundamental limitations in the employed manufacturing techniques. Here, we show a novel method to fabricate FZPs based on multilayer deposition with atomic layer deposition (ALD) and subsequent sectioning with focused ion beam (FIB). For the first time a multilayer FZP working in the soft X-ray range was prepared and could achieve the best resolution obtained so far for multilayer FZPs by resolving features below 39 nm in size in a scanning soft X-ray microscope. The new technique presents high potential for high resolution microscopy in both the soft and hard X-ray range. 相似文献
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Reale L Bonfigli F Lai A Flora F Poma A Albertano P Bellezza S Montereali RM Faenov A Pikuz T Almaviva S Vincenti MA Francucci M Gaudio P Martellucci S Richetta M 《Microscopy research and technique》2008,71(12):839-848
A lithium fluoride (LiF) crystal has been utilized as a new soft X-ray detector to image different biological samples at a high spatial resolution. This new type of image detector for X-ray microscopy has many interesting properties: high resolution (nanometer scale), permanent storage of images, the ability to clear the image and reuse the LiF crystal, and high contrast with greater dynamic range. Cells of the unicellular green algae Chlamydomonas dysosmos and Chlorella sorokiniana, and pollen grains of Olea europea have been used as biological materials for imaging. The biological samples were imaged on LiF crystals by using the soft X-ray contact microscopy and contact micro-radiography techniques. The laser plasma soft X-ray source was generated using a Nd:YAG/Glass laser focused on a solid target. The X-ray energy range for image acquisition was in the water-window spectral range for single shot contact microscopy of very thin biological samples (single cells) and around 1 keV for multishots microradiography. The main aim of this article is to highlight the possibility of using a LiF crystal as a detector for the biological imaging using soft X-ray radiation and to demonstrate its ability to visualize the microstructure within living cells. 相似文献
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在有限电导率光栅的微分理论中引入校正傅里叶展开方法,改善了计算收敛性。运用改进后的微分理论对软X射线波段掠入射金属光栅的闪耀特性做了数值分析,通过详细考察三角槽形、正弦槽形和矩形镀金光栅的软X射线-1级衍射效率对光栅结构参数和入射光状态参数的响应程度,给出了一种在使用和制作工艺上都能够接受的光栅技术指标。结果表明,作为闪耀波长为10.33 nm的软X射线波段掠入射镀金光栅,采用81°入射的刻线密度为1 200 l/mm,倾斜角为2°,顶角大于120°的三角槽形光栅较为合适,其效率可达到50%以上。同时,得到了一些优化软X射线波段掠入射金属光栅设计的新结论。 相似文献