激光三角法改进的显微镜快速自动对焦方法

为了满足TFT-LCD显微镜光学检测系统在工业上的需求,基于激光三角测距法提出一种改进的显微镜快速自动对焦方式,并建立了光路数学模型。该方法在可见光光路中加入一路808 nm波长的激光,激光光束在被检测物体表面反射后经过一系列光学器件投射在CCD相机上形成一个半圆光斑。以对焦完成时CCD上的光斑半径最小为基准,给出了离焦量与光斑信息探测量之间的数学模型关系,实时控制PZT进行自动调焦。根据给定的数学模型,利用高斯曲线拟合对光斑中心进行定位并计算离焦量,实现对实时控制压电陶瓷的自动对焦。在50倍物镜下的实验结果表明:实际测量值与理论值有很好的线性度,在±30μm的对焦平面上对焦重复定位精度可达到0.2μm,对焦时间在0.26 s。与传统的显微镜对焦方法相比,该方法有较高的精度、较好的线性度和更高速等优点,可满足工业光学检测的需求。     

TFT-LCD面板光学检测自动聚焦算法研究与比较

针对当前TFT-LCD玻璃基板在线检测过程中存在的显微图像对焦模糊问题,对基于图像处理的自动调焦方法在TFT-LCD玻璃基板检测中的应用进行了研究。基于对TFT-LCD液晶面板的光学检测,重点介绍了目前较为常用的、具有代表性的几种基于图像处理的清晰度评价算法,并从算法的单峰性、无偏性、灵敏性以及计算量等方面进行了比较与分析,提出了一种粗细调相结合的复合自动对焦方法,分别选取斜边缘检测算子和梯度滤波器算子作为调焦粗搜索和精搜索阶段的对焦评价算子。实验结果表明:使用调焦行程为15步的全局搜索算法,传统单一算法耗时2.18s,得到图像的清晰度评价函数值为46.78;粗细调相结合的复合自动对焦方法时间仅为1.41s,得到图像的清晰度评价函数值为52.49。该方法不仅对焦精度高,有较大的对焦范围,还能保证高的计算效率。     

热成像系统自适应自动对焦算法

为了实现不同环境下热成像系统的准确对焦,本文针对现有自动对焦算法存在的问题开展研究,提出了一种热成像系统自适应自动对焦算法。通过对比实验系统采集图像的梯度算子评价函数曲线,确定最优最大梯度和清晰度评价函数,并以某一复杂场景为例,说明了最佳对焦位置搜索、对焦窗口选择和图像清晰度评价的具体实现方案。对多个复杂场景的自动对焦实验表明,本文提出的热成像系统自适应自动对焦算法能够有效解决复杂场景目标的准确对焦问题。     

三星NX10可换镜头相机

“单电相机”是指可更换镜头的非单反类相机。兰星NX10是历史上第一款配备APS—C画幅图像传感器的单电相机．具有快速自动对焦系统和1460万像素APS—C画幅CMOS图像传感器．搭配丁最新DRIMe II Pro图像处理器和先进的对比度自动对焦技术。     

尼康D5000

高清摄像功能、11点自动对焦 作为入门级的数码单反相机,尼康D5000的到来又给摄影爱好者带来了更多的选择。它搭载了27英寸23万像素翻转式显示屏,是尼康首款运用翻转屏的单反相机,这一设计还方便了LiveView实时取景功能的操作。尼康D5000配备1230万像素CMOS传感器,同时加入了11点自动对焦功能,能提供出色的主体识别功能。D5000还带有脸部侦测的场景识别系统,可优化曝光和自动对焦性能,获得更佳成像品质。     

数码显微镜自动对焦算法

目前数码显微镜中常用的自动对焦方法分为主动式自动对焦和被动式自动对焦。主动式自动对焦依赖特定的传感器或者测距设备,通过主动发出光波并且接收反射回来的光波判断物体与对焦装置的距离,从而达到对焦目的;被动式自动对焦通过分析每个位置图像信息来判断对焦方向以及对焦位置,以达到对焦目的。被动式自动对焦由于其对结构的要求简单、成本较低,是数码显微镜最常用的自动对焦方法。主要介绍了应用于数码显微镜的自动对焦算法,简述了主动式与被动式自动对焦的原理以及发展方向,重点介绍了被动式自动对焦方法中的对焦深度法,分析了对焦深度法的两大关键技术,即清晰度评价函数及其对焦搜索算法。     

基于图像评价的显微镜自动对焦方法

针对显微镜观测动态平面目标时的自动对焦需求，提出一种基于图像清晰度评价的显微镜静/动态自动对焦方法。首先，根据对聚焦-失焦图像特征的分析，建立加权Tenengrad评价函数评估方法和图像分块对焦窗口模式。其次，针对搜索过程中的局部极大值问题，利用模拟退火理论建立对焦搜索模型。最后，为了对动态图像进行评价，利用图像模糊法来判断动态无参考图像失焦水平。在此基础上，形成了静态调焦模型，动态失焦检测与实时对焦模型。通过搭建显微镜自动对焦实验平台，结果表明：该静态调焦模型能够使显微镜快速准确地静态自动调焦，动态失焦检测和实时对焦模型能够使显微镜满足在动态观测下离焦检测和实时调焦的要求。     

TFT-LCD面板光学检测自动对焦系统设计

针对TFT-LCD面板尺寸大、厚度薄、光透过率高的特性,建立了基于激光三角测距法的自动对焦系统.采用光学回路和机械结构设计,对激光光斑中心位置准确求取以及自动对焦原理等算法进行了研究.首先,根据激光三角法测距原理进行了光学回路设计,并以纳米定位平台作为微小行程对焦驱动轴.其次,通过分析光斑图像特性,调节相机快门调整曝光...     

基于CCD图像处理的视度和视差自动检测系统

为了实现对视度和视差的客观检测,提高自动化检测程度,设计了一种基于CCD图像处理的视度和视差自动检测系统。对CCD视度和视差检测原理公式进行了推导,通过分析发现需要测量成像最清晰时CCD光敏面的位置。为此,构建了像面可调的CCD摄像系统和图像采集与处理系统,采用扫描求解图像像素灰度值梯度的方法,实现图像清晰度测量和边缘提取;同时利用视频图像清晰度峰值搜索法,通过控制电机带动CCD光敏面朝图像最大清晰位置运动,实现CCD摄像系统的自动对焦,并完成对成像最清晰时CCD光敏面位置的测量。最后通过对装备视度和视差实际检测,表明视度检测不确定度在0.15 D以内,视差不确定度在0.3分以内,与传统方法相比,检测结果客观准确,自动化程度得到了提高。     

基于功率谱的遥感相机自动调焦算法研究与实现

应用图像处理法针对线阵CCD推扫成像的遥感相机进行自动调焦研究.推扫成像的线阵CCD相机在任意时刻所拍摄的景物都是不同的,这就给对焦评价函数的选取增加了难度.用功率谱的方法对任意景物在空间频域进行分析表明,功率谱对于自然景物具有一定的不变性.由此建立了基于功率谱的对焦评价函数,并采用DSP FPGA的高速硬件系统方案实现自动调焦的算法.一系列的调焦实验表明,系统有较好的自动调焦性能,基于功率谱的对焦评价函数是可行的.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

A method for calculating the center position of collimated light

It is a key problem to accurately calculate beam spots＇ center of measuring the warp by using a collimated laser. A new method, named double geometrical center method （DGCM）, is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device （CCD） is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What＇s more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.