激光外差干涉的非线性误差补偿

为了补偿用激光外差干涉法进行纳米测量产生的非线性误差,进行了非线性误差补偿的实验研究。根据镀膜实体角锥棱镜反射光的偏振特性,推导出当激光器出射光束存在偏振椭圆化时,测量角锥棱镜以运动方向为轴线的轴向旋转对非线性误差一次谐波的影响模型。分析表明,测量角锥棱镜以其运动方向为轴线的轴向旋转会减小非线性误差一次谐波。实验显示,当测量角锥棱镜轴向旋转角从0°增加到100°时,非线性误差从3.48 nm减小到1.39 nm,实现了非线性误差一次谐波减小为原来的40%。该方法避免了现有的非线性误差补偿方法光路系统和电路系统复杂的缺点,系统实现很简单。     

Optical parts and the nonlinearity in heterodyne interferometers

The nonlinearity of heterodyne interferometers is caused not only by polarization ellipticity or nonorthogonality of the laser beams. The imperfect optical parts can also contribute. Our experiments show that the nonlinearity of heterodyne interferometers can be serious even when perfect optical parts are used. Also it will be shown how to examine and distinguish between the errors experimentally. Moreover, an interesting approach was found to decrease the nonlinearity for heterodyne interferometers.     

A frequency domain method for the measurement of nonlinearity in heterodyne interferometry

This paper presents a method for the measurement of nonlinearity in heterodyne interferometry which utilizes the frequency spectrum of the output of the photodetector for the direct measurement of the magnitudes of the first and second harmonic nonlinearities. The underlying theory and the experimental technique are discussed. Results showing the application of this technique for the determination of the influence of the azimuthal alignments of the polarization beamsplitter, the analyzer and measurement retroreflector are presented. The applicability of the technique to the in situ optimization of an interferometer system is demonstrated. It is shown that using this technique an interferometer system can be optimized to reduce the first-harmonic nonlinearity to below 0.5 nm p-p and the second harmonic nonlinearity to 2 nm p-p. This method is contrasted with other methods and the advantages conferred by the elimination of an external reference and the phase measuring electronics are highlighted.     

Depth discrimination in scanned heterodyne microscope systems

The optical transfer function of several scanning microscope systems is derived, using a physically intuitive approach. The technique allows a wide range of systems to be modelled with only minor modifications to the basic formulation. The results are then used to determine the response of various scanning microscopes for objects both in and out of the focal plane. The possibility of performing extended-focus phase imaging in heterodyne microscopes by scanning the sample along the optical axis is also examined. This mode of operation should allow measurements of minute topographical and phase variations on tilted or warped samples with the same lateral resolution as would be obtained when the sample is in focus throughout the entire scan.     

A differential interferometric heterodyne encoder with 30 picometer periodic nonlinearity and sub-nanometer stability

A differential interferometric heterodyne encoder with spatially separated input beams was developed to minimize periodic nonlinearities resulting from polarization mixing. The laser beams with different frequencies were delivered by two polarization-maintaining fibers to the encoder head. Under laboratory conditions this encoder demonstrated a system stability of 38 pm (standard deviation) and 100 pm over 30 s and 1 h respectively. In a comparison measurement with a differential heterodyne interferometer, this encoder showed periodic nonlinearities of less than 30pm without any additional correction.     

四自由度同步外差干涉测量系统设计

针对多自由度测量技术中存在的测量范围有限、精度低和阿贝误差等问题,设计了一种大行程、高精度、可溯源、四自由度同时测量的外差干涉测量系统。采用碘稳频532 nm固体激光器作为测量仪光源,结合光纤耦合技术对双频光进行空间分离。使用差分波前传感技术实现位移、俯仰角和偏转角的同步检测,并采用楔面棱镜测量直线度的变化。该测量系统可以抑制双频光混叠引起的非线性误差,行程范围为6 m,位移分辨率为0.13 nm,俯仰角和偏转角分辨率为0.026 μrad,直线度分辨率为14.88 nm,测量结果具有可溯源性。     

A simple technique for observing periodic nonlinearities in Michelson interferometers

We describe a simple, convenient method for measuring nonlinearities in displacement-measuring Michelson interferometers. Nonlinearities with a spatial periodicity of one optical fringe are a well-known source of error in precision interferometry. Our experimental technique for observing these errors is most immediately applicable to commercial interferometer systems for which the cube-corner retroreflectors can be attached directly to the faces of a beamsplitter cube, creating a monolithic interferometer optic with excellent noise immunity. The optical path difference in this bolted-together interferometer can be changed slightly by rotating the interferometer relative to an external laser. It should be noted that the basic principle described here—generating small path differences through a rotation of the optics relative to the laser—may itself be a source of significant errors in certain length measurements. The validity of our method has been demonstrated by measuring optical mixing errors of calculable magnitude. We describe a matrix method suitable for modeling optical mixing errors in both single-pass and double-pass (plane mirror) interferometers. Also, we report experimental measurements of periodic nonlinearities for two representative interferometers and conclude that, in the majority of engineering metrology applications, these errors are of only minor importance.     

激光外差干涉中声光器件的非均匀声场特性

针对声光晶体内部的声波反射使晶体内声场分布不均匀,影响衍射效率和衍射光场分布,降低激光外差干涉效率的现象,以不改变声光设备为前提提出了光切趾方法.以TeO2晶体为基底,理论分析声光器件的声场分布、体光栅衬度及其对衍射光效率的影响.提出非均匀光栅衬度模型,并利用光切趾法控制空间声场非均匀分布.通过理论仿真结合实验测量,证...     

An alternative method for measuring small displacements with differential phase difference of dual-prism and heterodyne interferometry

This study proposes an optical method for measuring small displacements. In this method, two semispherical prisms are used as test apparatuses. Because testing lights inside the prisms are at polarization angles, the phase difference can be differentially magnified twice and the measurement resolution can be greatly increased. Furthermore, using common-path heterodyne interferometery ensures that this method is simple to implement, high accurate, and high stability against the vibration of the surrounding environment. The capability of this method was demonstrated with a sensitivity of 42.92°/mm and a resolution of 23.29 nm.     

超精密外差利特罗式光栅干涉仪位移测量系统

开展了扫描干涉光刻机工作台超精密位移测量的实验研究,以提高扫描干涉光刻机的环境鲁棒性。针对扫描干涉光刻机工作台位移测量精度,提出了新型高环境鲁棒性外差利特罗式光栅干涉仪测量系统。介绍了系统测量原理,设计了测量系统,提出了基于Elden公式的系统死程误差建模方法。设计制造了尺寸仅为48mm×48mm×18mm的光栅干涉仪。基于误差模型计算了死程误差,计算结果表明:对于1.52mm死程的光栅干涉仪,宽松的环境波动指标(温度波动为0.01℃、压力梯度为±7.5Pa、相对湿度波动为1.5%、CO2含量波动为±50×10-6)仅引起±0.05nm的死程误差。最后,设计了基于商用双频激光平面镜干涉仪的测量比对系统,开展了光栅干涉仪原理验证实验和测并量稳定性实验。原理验证实验表明:光栅干涉仪原理正确且系统分辨率达0.41nm。测量稳定性实验表明:常规实验室环境下,环境波动引起的死程误差为7.59nm(3σ)@0.9Hz1~10Hz,优于同等环境条件下平面镜干涉仪的31.11nm(3σ)@0.9Hz1~10Hz。实验结果显示系统具有很高的环境鲁棒性。     

声光式外差干涉仪的光路设计与分析

制造业的发展迫切需要对高速加工过程中的物体进行测量和定位,利用声光调制法实现外差干涉能产生较高的频差可以实现高速测量.文中对声光式外差干涉仪的光路设计进行了分析,提出了空间分离一级衍射光和零级衍射光的一种方案,并且对光拍频的接收,光路的调整进行了分析,实验结果证明该实验系统可以用于外差干涉测量.     

Investigation on the spindle thermal displacement and its compensation of precision cutter grinders

The axial performance of cutter grinders will have direct effects on the precision of ground cutters. Therefore, error elimination will be beneficial for the precision improvement of cutter grinders. One of the main axial error sources is the spindle thermal displacement.General cutter grinders are not equipped with the cooling systems, because of their relative lower rotating frequencies (<8000 rpm), small working range and slower thermal gradient. On condition without cooling, there will be obvious thermal errors at the beginning hours of operations or the restarting of machines. That will cause materials waste and lower working efficiency.In this investigation, an efficient measurement system and the compensation mechanism have been established for the minimization of thermal displacements. About 80% of the thermal displacement can be reduced and the thermal displacement error becomes less than 5 μm. With this solution, the precision of cutter grinders can be improved.     

基于相控外差干涉技术的纳米定位方法的研究

针对工业领域和计量界对定位精度要求的提高,提出了一种基于迈克尔逊干涉仪反向特性的定位控制方法。该方法采用相位锁定控制和外差干涉技术来完成位置测量和控制。在严格控制实验环境条件下,得到了步距值为5 nm的双向步进位移。步距值的不确定度为8×10-9 nm,位移重复性误差小于1 nm。该定位方法的测量尺寸可直接溯源至长度标准,并且采用光电步进相移法可克服压电陶瓷的非线性和蠕变的机械缺陷。该方法在系统环境控制条件下适用于毫米行程位移,可应用于纳米计量和超精密加工等领域。     

基于外差干涉技术测量液体费尔德常数的实验研究

为了准确测量液体的费尔德常数,设计搭建了一套外差干涉实验系统,主要包括Mach-Zehnder干涉光路、声光调制器(AOM)及锁相放大器。葡萄糖溶液测量结果显示,其费尔德常数随其浓度的增加而有变化的趋势。此外,加正与负磁场所测得的费尔德常数并不相等,其原因是加正磁场造成葡萄糖分子的形变与加负磁场所造成葡萄糖分子的形变不同,形变大其费尔德常数也就越大。蔗糖溶液测量结果发现,在加正与负磁场时所得的费尔德常数没有明显变化,其原因是蔗糖水解时产生了右旋葡萄糖和左旋果糖,使得形变效应相互抵消。     

光学外差干涉法检测微弱超声振动的研究

设计一个具有较高检测灵敏度的光学外差干涉系统,用于检测微弱超声振动信号。采用相干性高的线偏振光作为光源,提高有效干涉强度;利用光阑消除光学噪声,有效控制回授光对光路的影响;以1级光作为参照,使光路调节简单易行。用主频为62.42KHz、幅值为74V的方波信号激励超声探头作为振动信号源,测得振动信号频率和幅值分别为62.38KHz和76.4mV。结果表明该系统能满足微弱超声振动检测要求。     

Precise and versatile systems for dilatometric measurement of solid materials

An interferometric dilatometer has been developed which uses a double path high-sensitivity interferometer and specimen supporting systems. Usual interferometric dilatometers require polished specimens, but the present system does not need any special specimen preparation. The system, therefore, provides measurement facilities for various shapes and dimensions of materials such as thin wires, slender rods, etc. The interferometric system incorporates self-compensation for optical misalignment and a resolution of 1 nm can be achieved by using an ac fringe detecting system.     

Validation of a single fibre-fed heterodyne laser interferometer with nanometre uncertainty

In this paper the validation of a fiber-fed heterodyne laser interferometer with nanometre uncertainty is presented. The achievable displacement measurement uncertainty is investigated for different polarisation maintaining fibres used in these interferometers. Measurement results are shown for both a range of m as well as a range of 300 mm. It is shown that a (selected) PM-fibre with an extinction ratio of 1:1650 and the use of an external reference allows realising a fibre-fed laser interferometer able to measure displacements with the same uncertainty as a laser interferometer system without fibre. Tests were performed with fibres ranging in length up to 50 m.     

激光外差探测对振动目标多普勒频谱成像

提出了采用激光外差技术探测振动目标,获取目标多普勒频谱图像,实现目标轮廓识别的方法。基于相位变化给出了目标振动形成外差信号的光电流模型;用扫描振镜控制激光光束方向实现对目标点扫描;通过振镜驱动电压触发数据采集卡,实现扫描与采集同步。利用频谱展宽占有比例的信号处理方式处理振动目标形成的多普勒频谱,简化了数据处理方式,有效消除了单个峰值噪声对信号的影响。实验中以5 MHz采样率测得两个目标在不同位置的特征频谱,得到了它的频谱展宽占有比例曲线;选取不同频谱展宽占有比例形成多普勒频谱图像,指出频谱展宽占有比例在0.7到0.9时能够形成良好的振动图像。文中结果证实了利用频谱展宽占有比例的数据处理方式探测振动目标是有效的,利用外差技术获取振动频谱图像是可行的。     

Measurement of large internal diameters with a compact apparatus based on dual-wavelength heterodyne interferometer

This paper presents a new method for measuring large internal diameters of 3∼20 m with submillimeter resolution. The method is based on a novel dual-wavelength heterodyne interferometer for absolute distance measurement and a new positioning method for aligning the laser beams with the diameter of the bore to be measured. The compact apparatus and convenience of operation in situ are the distinguishing features of this method. Preliminary experimental results of the prototype of the apparatus proved the feasibility of this method.     

用激光外差技术高精度测量目标速度

搭建了外差探测实验平台,分别选用漫反射目标及类简谐运动模型作匀转速运动及变速运动的测量目标,应用激光外差探测技术实现了对匀转速运动及变速运动物体的速度测量.在匀转速测量过程中,同时采用外差探测法和振幅调制法测量了漫反射目标正负两个方向转动的速度,共得到133组不同的转速结果.通过调整实验系统,亦实现了对类简谐运动目标的...