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1.
The relative densities of SiCl n (n = 0–2) in SiCl4 radio frequency (rf) glow discharge plasma are measured by mass spectrometry. The effects of discharge parameters, i.e., rf power, discharge pressure, substrate temperature, and SiCl4 flow rate on the relative densities of SiCl n (n = 0–2) are investigated in detail. An optimum configuration of discharge parameters (low rf power, high discharge pressure, low substrate temperature, and low flow rate), which enhanced the formation of SiCl n (n = 0–2) radicals, is searched by a great deal of measurements and discussions. In the optimum configuration of discharge parameters, we measure the spatial distribution of SiCl n (n = 0–2) radicals in the most optimized plasma parameters. The experimental results reveal that Si and SiCl may be the dominant precursors in forming the thin film.  相似文献   

2.
We investigate the characteristics and noise performance of rf Superconducting Quantum Interference Devices (SQUIDs) by solving the corresponding Langevin equations numerically and optimizing the model parameters with respect to noise energy. After introducing the basic concepts of the numerical simulations, we give a detailed discussion of the performance of the SQUID as a function of all relevant parameters. The best performance is obtained in the crossover region between the dispersive and dissipative regimes, characterized by an inductance parameter β L ≡2π LI 0/Φ 0≈1; L is the loop inductance, I 0 the critical current of the Josephson junction, and Φ 0 the flux quantum. In this regime, the lowest (intrinsic) values of noise energy are a factor of about 2 above previous estimates based on analytical approaches. However, several other analytical predictions, such as the inverse proportionality of the noise energy on the tank circuit quality factor and the square of the coupling coefficient between the tank circuit and the SQUID loop, could not be well reproduced. The optimized intrinsic noise energy of the rf SQUID is superior to that of the dc SQUID at all temperatures. Although for technologically achievable parameters this advantage shrinks, particularly at low thermal fluctuation levels, we give examples for realistic parameters that lead to a noise energy comparable to that of the dc SQUID even in this regime.   相似文献   

3.
The development of sealed XeCl (λ∼308 nm), KrCl (λ∼222 nm), and XeI (λ∼253 nm) excilamps excited by a capacitive rf discharge is reported. It is shown that highly efficient emission of exciplex molecules is achieved under capacitive discharge excitation and the emitter has a simple design. An average emission power of 3W was obtained with a ∼12% efficiency and the lifetime of the sealed excilamps was longer than 1000 h. Pis’ma Zh. Tekh. Fiz. 25, 27–32 (November 12, 1999)  相似文献   

4.
The self-consistent problem of a an intermediate-pressure rf capacitive discharge in a long strip line is analyzed with allowance for heating of the gas. Steady-state distributions of the discharge parameters along the line are derived. It is shown that the discharge burns in certain regions, whose lengths and locations depend on the amplitude of the applied voltage. Pis’ma Zh. Tekh. Fiz. 23, 64–70 (January 26, 1997)  相似文献   

5.
It was demonstrated experimentally that macroparticles may undergo levitation and form ordered structures in an rf induction discharge plasma. The experiments were carried out using 1.87 μm melamine formaldehyde particles in neon at a pressure of 25–500 Pa. The generator frequency was 100 MHz. Pis’ma Zh. Tekh. Fiz. 24, 62–68 (October 12, 1998)  相似文献   

6.
It is shown that GaN layers can be grown on (100)-and (111)-oriented porous single-crystal GaAs substrates by molecular-beam epitaxy with plasma activation of the nitrogen by an rf electron cyclotron resonance discharge. The resulting undoped epitaxial layers possessed ntype conductivity with a carrier concentration ∼1018. Data obtained by scanning electron microscopy and cathodoluminescence indicate that at thicknesses ∼2000 Å, continuous layers of the cubic GaN modification are obtained regardless of the substrate orientation. Pis’ma Zh. Tekh. Fiz. 25, 3–9 (January 12, 1999)  相似文献   

7.
Ignition curves of rf and combined (rf+static electric field) low-pressure discharges are used to determine the electron drift velocity V dr in the range E/p≈70−2000 V/(cm·Torr) and the ratio of the longitudinal diffusion coefficient to the electron mobility D L /μ e in the range E/p≈ 1−2000 V/(cm·Torr). Pis’ma Zh. Tekh. Fiz. 24, 49–55 (April 26, 1998)  相似文献   

8.
Novel pyreno-chalcone dendrimers 1, 2, and 3 were synthesized and their ability to act as an additive in the redox couple (I/I3 ) of dye-sensitized nanocrystalline TiO2 solar cell has been tested. The redox couple doped with pyreno-chalcone dendrimer 3 gave a short circuit photocurrent density (J sc) of 7.40 mA/cm2, open circuit voltage (V oc) of 820 mV, and a fill factor of 0.51, corresponding to an overall conversion efficiency (η) of 7.89% under 40 mW/cm2 irradiation.  相似文献   

9.
It is shown that GaN films can be grown by molecular-beam epitaxy with plasma activation of the nitrogen by a magnetron rf discharge in a specially constructed coaxial source with capacitive coupling. A growth rate of ∼0.1 μm/h is obtained on GaAs and sapphire substrates, and ways are found for optimizing the design of the plasma source in order to increase the growth rate. The electrophysical and luminescence properties of undoped epitaxial films are investigated at temperatures ranging all the way to room temperature. Pis’ma Zh. Tekh. Fiz. 24, 30–35 (June 26, 1998)  相似文献   

10.
It is shown that a rapid current rise in a pulsed vacuum discharge is accompanied by enhanced compression of the current filament by its self-induced magnetic field. As a result, a constriction forms at a distance L≃1 mm from the cathode and the electron temperature increases to 102–103 eV at currents of order 1 kA. This behavior explains the observed increase in the degree of ion charge and the appearance of x-rays as the current pulse length decreases. The criterion for a rapid rise is the condition τ<L/V≃10−27 s, where τ is the characteristic current amplification time and V≃106 is the velocity of the cathode plasma. Pis’ma Zh. Tekh. Fiz. 24, 50–56 (September 26, 1998)  相似文献   

11.
It is demonstrated that an inductive rf discharge in an Xe+Cl2 mixture may be used as the active medium of an efficient, mercury-free luminescence light source. Pis’ma Zh. Tekh. Fiz. 24, 63–67 (March 26, 1998)  相似文献   

12.
We investigate the spin Hall conductivity σ xy z of a clean 2D electron gas formed in a two-subband well. We determine σ xy z as arising from the inter-subband induced spin–orbit (SO) coupling η (Calsaverini et al., Phys. Rev. B 78:155313, 2008) via a linear-response approach due to Rashba. By self-consistently calculating η for realistic wells, we find that σ xy z presents a non-monotonic (and non-universal) behavior and a sign change as the Fermi energy varies between the subband edges. Although our σ xy z is very small (i.e., ≪`` e/4π″), it is non-zero as opposed to linear-in-k SO models.  相似文献   

13.
Interference between Zeeman states corresponding to the forbidden magnetic-dipole transition ΔF=0, Δm F=2 is reported in connection with the simultaneous interaction of 62 S 1/2 cesium atoms with a resonant microwave field and an rf field which varies at twice the Larmor frequency and is directed perpendicular to a static magnetic field H 0=0.2 Oe. Pis’ma Zh. Tekh. Fiz. 24, 89–93 (July 26, 1998)  相似文献   

14.
F. Liu  C.S. Ren  Y.N. Wang  X.L. Qi  T.C. Ma 《Vacuum》2006,81(3):221-225
Optical emission spectroscopy has been performed for unbalanced DC magnetron sputtering of Cu in Ar atmosphere with the enhanced ionization of inductively coupled plasma. The intensities of Cu, Cu+, Ar and Ar+ lines were measured at various discharge parameters such as pressure and rf power. Both Cu and Cu+ lines intensities initially increase and then decrease with increasing pressure. At the same time, Ar line intensity increases and the Ar+ line intensity decreases with increasing pressure. With increasing rf power, all the lines intensities increase at different rates and become saturated when the rf power is greater than 700 W. The rf discharge exhibits mode jumping (E-mode to H-mode) and hysteresis phenomena. When the rf power increases to 400 W, the rf discharge mode jumps from E-mode to H-mode. When the rf power input decreases from 800 to 300 W, the rf discharge mode jumps back from H-mode to E-mode. However, during the mode change, the intensities of all lines are higher when switching from H-mode to E-mode than those when switching from E-mode to H-mode at the same rf power. In the rf power region, the ionization of Cu is significantly enhanced. The reasons of these phenomena are discussed.  相似文献   

15.
The high-energy part of the electron energy spectrum of the plasma of an asymmetric capacitive low-pressure rf discharge in air associated with electron beams near the electrodes is studied experimentally. It is found that the energy distributions obtained under different conditions contain a beam peak, both quasimonoenergetic and substantially broadened in energy. It is established on the basis of quantitative estimates that the substantial damping of the electron beam is due to the excitation of collisionally dissipative and collisionless beam-plasma instabilities. Pis’ma Zh. Tekh. Fiz. 25, 32–39 (October 12, 1999)  相似文献   

16.
This paper presents a new formula for calculating the hardness of metallic crystals, resulted from the research on the critical grain size with stable dislocations. The formula is H = 6 kG/[π(1 − ν)e η ], where H is the hardness, k the coefficient, G the shear modulus, ν the Poisson’s ratio, η a function of the radius of an atom (r) and the electron density at the atom interface (n). The formula will not only be used to testify the critical grain size with stable dislocations, but also play an important role in the understanding of mechanical properties of nanocrystalline metals.  相似文献   

17.
It is observed that “anomalous” acceleration of ions in a pulsed vacuum discharge is initiated at a certain distance from the surface of the cathode and takes place in the bulk of the cathode jet. It is established that the average ion energy increases as the length l of the discharge gap increases. Pis’ma Zh. Tekh. Fiz. 24, 66–70 (February 26, 1998)  相似文献   

18.
The load separation concept is employed to determine the mixed mode plastic η pl and hCODpl{\eta^{COD}_{pl}} factors for the tension plate with an inclined centre throughthickness crack for power law hardening materials. The separation parameters S ij are calculated from the FE computed load – plastic displacement (or COD) curves for each case. It is shown that the mixed mode plastic η pl factor is a function of both the crack angle orientation θ (or the applied elastic parameter M e ) and the strain hardening exponent.  相似文献   

19.
Electrolytic conductivities of potassium halides, KX (X = Cl, Br, I) have been investigated in 10, 20, and 30 mass% glycerol + H2O mixtures at 298.0, 308.0, and 318.0 K. The conductance data have been analyzed by the Fuoss-conductance–concentration equation in terms of the limiting molar conductance (Λ0), the association constant (K A ), and the distance of closest approach of ion (R). The association constant (K A ) tends to increase in the order: 10 mass% < 20 mass% < 30 mass% glycerol + water mixtures, while it decreases with temperature. Thermodynamic parameters ΔH 0, ΔG 0, and ΔS 0 are obtained and discussed. Also, Walden products (Λ0η) are reported. The results have been interpreted in terms of ion–solvent interactions and structural changes in the mixed solvents.  相似文献   

20.
The degradation of the surface impedanceZ = R + iX with rf power is a principal limit for measurements and applications. Such nonlinearities occur for normal conducting cavities by heating or electron loading. But superconductors show a much richer spectrum of causes for nonlinearities. The nonlinearities in the surface resistance δR ∞ γ H n and surface reactance δR ∞ α H n can be classified by the ratior = δX/δ R. This ratio differs in value, temperature, or frequency dependence for the different mechanisms, allowing a unique identification of those mechanisms. This identification is a prerequisite for an improved rf cavity design and improvement of superconducting materials.  相似文献   

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