环境气氛对类金刚石薄膜摩擦学行为的影响

用射频等离子体化学气相沉积法(RF-PECVD)制备了含氢类金刚石薄膜(DLC).采用表面轮廓仪和纳米压痕仪分别测量膜的厚度和硬度.通过控制摩擦环境气氛对DLC薄膜和钢球对磨的摩擦系数进行了系统研究.利用光学显微镜和扫描电镜(SEM)分析了磨痕及磨斑的形貌,对DLC薄膜在不同气氛下的摩擦现象进行了表征和解释.结果表明,DLC薄膜的摩擦学行为与气氛中的O2、H2O和N2有关,其中N2的存在是DLC薄膜具有超低摩擦系数的重要原因.     

中频磁控溅射沉积DLC/TiAlN复合薄膜的结构与性能研究

采用中频非平衡磁控溅射沉积工艺,并施加霍尔离子源辅助沉积,在高速钢W18Cr4V及单晶硅基体上制备了梯度过渡的DIE/TiAlN复合薄膜.利用扫描电镜(SEM)、X射线光电子能谱仪(XPS)、显微硬度计、摩擦磨损仪等分析检测仪器对DLC/TiAlN复合薄膜的表面形貌、晶体结构、显微硬度、耐磨性等性能进行了检测分析.实验及分析结果表明:DLC/TrAlN薄膜平均膜厚为1.1μm,由于薄膜中的Al含量较多,使得复合薄膜的表面比DLC薄膜的表面要粗糙一些;通过对复合薄膜表层的XPS分析可知,ID/IG为2.63.由XPS深层剖析可知,DLC/TiAlN薄膜表层结构与DLC薄膜基本相同,里层则与TiAlN薄膜相似.在梯度过渡膜中,复合膜层之间的界面呈现为渐变过程,结合的非常好.DLC/TiAlN薄膜的显微硬度为2030 HV左右.与DLC薄膜显微硬度接近,低于TiAlN薄膜的显微硬度.但是DLC/TiAlN薄膜的耐磨性要好于TiAlN薄膜和DLC薄膜;DLC/TiAlN薄膜的耐腐蚀性能略好于DLC薄膜.     

基体温度对中频脉冲非平衡磁控溅射技术沉积类金刚石薄膜结构与性能的影响

利用中频脉冲非平衡磁控溅射技术在不同的基体温度下制备了类金刚石(DLC)薄膜,采用Raman光谱、X射线光电子能谱(XPS)、纳米压痕测试仪、椭偏仪对所制备DLC薄膜的微观结构、机械性能、光学性能进行了分析。Raman光谱和XPS结果表明,当基体温度由50℃增加到100℃时,DLC薄膜中的sp3杂化键的含量随基体温度的升高而增加,当基体温度超过100℃时,DLC薄膜中的sp3杂化键的含量随基体温度的升高而减少。纳米压痕测试表明,DLC薄膜的纳米硬度随基体温度的增加先增加而后减小,基体温度为100℃时制备的薄膜的纳米硬度最大。椭偏仪测试表明,类金刚石薄膜的折射率同样随基体温度的增加先增加而后减小,基体温度为100℃时制备的薄膜的折射率最大。以上结果说明基体温度对DLC薄膜中的sp3杂化键的含量有很大的影响,DLC薄膜的纳米硬度、折射率随薄膜中的sp3杂化键的含量的变化而变化。     

NiTi合金生物医用材料表面镀类金刚石薄膜的性能研究

用脉冲电弧离子镀技术在NiTi合金生物材料表面沉积了类金刚石(DLC)薄膜.研究分析结果表明制备的DLC薄膜是四面体非晶碳薄膜;随着DLC薄膜厚度的增加,薄膜的表面粗糙度增加,薄膜中sp3的含量减少;随着sp3含量的增加,薄膜的纳米硬度升高;划痕实验表明临界载荷大于0.9 N.研究得出与NiTi合金相比,DLC薄膜能够有效地降低摩擦系数和磨损.DLC薄膜的摩擦系数主要与薄膜的硬度及薄膜中sp3的含量有关,DLC薄膜的磨损主要是轻微的磨粒磨损及疲劳磨损.     

电压对中频脉冲非平衡磁控溅射类金刚石薄膜结构与性能的影响

制备参数对类金刚石(DLC)薄膜的性能和结构有显著影响。利用中频脉冲非平衡磁控溅射新技术制备了DLC薄膜,采用Raman光谱、X射线光电子能谱仪、纳米压痕仪、光谱型椭偏仪研究了溅射电压对DLC薄膜微观结构、力学性能和光学性能的影响。结果表明:当溅射电压由550 V增加到750 V时,DLC薄膜中sp3杂化碳含量随溅射电压的增加而增加,当溅射电压超过750 V时,薄膜中sp3杂化碳含量随溅射电压的增加而减少;DLC薄膜的纳米硬度、折射率均随溅射电压的增加先增加而后减小,溅射电压为750 V时制备薄膜的纳米硬度及折射率最大。     

锗掺杂类金刚石薄膜特性研究

为了降低类金刚石(DLC)薄膜的应力,使用脉冲真空电弧离子镀(PVAD)和电子束热蒸发相结合的复合沉积技术,在Si基底上制备了一系列不同锗含量(原子百分比)的Ge-DLC薄膜样片,研究了锗含量对DLC薄膜光学特性和力学特性的影响。研究结果表明:在1~5μm波段,当锗掺杂含量小于25%时,对DLC薄膜光学常数的影响不大;随着Ge含量的增加,DLC薄膜的折射率和消光系数都略微增大。随着DLC薄膜中Ge含量的增加,薄膜的内应力和硬度均有所降低。当DLC薄膜中Ge含量约为8%时,Ge-DLC薄膜的内应力从6.3降至3.0 GPa,而硬度仅从3875减小为3640 kgf/mm2,几乎保持不变。硅基底上单面沉积Ge的含量为8%的DLC薄膜在红外3~5μm波段的透过率峰值约为63.15%。     

汽车发动机用ZL114合金表面涂层制备与性能研究

以Cr作为中间过渡层,采用磁控溅射的方法在ZL114合金表面制备了类金刚石(DLC)硬质涂层,对比分析了母材与涂层的硬度、耐蚀性能和干/湿摩擦学性能。结果表明:在ZL114合金表面制备了Cr过渡层厚度约为2μm、表面DLC涂层约为10μm的Cr-DLC涂层;Cr-DLC涂层具有DLC薄膜的特性,显微硬度和纳米硬度分别为母材的3.73倍和3.96倍;Cr-DLC涂层的腐蚀倾向和腐蚀速率都要小于ZL114合金母材,ZL114合金表面沉积Cr-DLC涂层后耐腐蚀性能得到提高;母材和Cr-DLC涂层在湿摩擦条件下的摩擦系数和磨损率低于干摩擦条件下,且干/湿摩擦条件下Cr-DLC涂层的磨损率都要低于ZL114合金母材;Cr-DLC涂层在湿摩擦(3.5%NaCl溶液)条件下仍然具有较好的耐磨性。     

不锈钢、铝、铜合金表面超厚类金刚石薄膜的制备及其摩擦学性能研究

为了提高不锈钢、铝、铜合金的使用寿命及应用范围,采用等离子体增强化学气相沉积技术在3种不同基底上沉积超厚类金刚石(DLC)薄膜(28.3μm)。利用扫描电子显微镜、原子力显微镜、纳米压痕仪、划痕仪、球-盘摩擦试验机等表征方法对沉积在不锈钢、铝、铜合金表面上的超厚DLC薄膜进行性能测试分析。结果表明:铜合金基底上的超厚DLC薄膜由于其内应力过大出现部分剥落,不锈钢、铝合金基底上所制备的超厚DLC薄膜结构致密、膜基结合界面良好;不锈钢、铝、铜合金与碳的晶格不匹配性依次变大导致超厚DLC薄膜硬度与结合力依次变差。摩擦学性能测试表明,2 N载荷下摩擦系数可低至0.15,磨损率在(5.641～6.575)×10-7mm3/(N·m)范围内小幅度变化; 10 N载荷下铜合金基底上的超厚DLC薄膜因其内应力较大并且分布不均匀造成摩擦系数的急剧升高,薄膜被磨穿。铝合金上的超厚DLC薄膜磨损率最低,为3.204×10-7mm3/(N·m)。     

微波ECR等离子体源离子注入法制备DLC薄膜

用微波ECR等离子体源离子注入 (PSII)法 ,在硅片 ( 10 0 )上制备了类金刚石 (DLC)薄膜 ,工作气体采用CH4气体 ,研究了不同的气体流量对薄膜的影响。对制备的DLC薄膜 ,用拉曼光谱、FT IR光谱、AFM以及纳米压痕等手段对化学成分、化学键结构、表面形貌以及硬度等进行了表征     

脉冲真空弧源沉积类金刚石薄膜耐磨特性研究

本文利用脉冲真空弧源沉积技术在Cr17Ni14Cu4不锈钢和Si(100)基体上制备了类金刚石(DLC)薄膜,研究在不同基体偏压下,DLC薄膜的结构与性能.采用拉曼光谱和X射线光电子能谱(XPS)研究DLC薄膜的原子结合状态,利用CSEM销盘摩擦磨损试验机研究其耐磨性,利用HXD1000B显微硬度仪测试其显微硬度,并采用压痕法评价其结合力.研究结果表明:DLC薄膜与基体结合牢固.随着基体偏压的提高,DLC薄膜内sp3键含量增大,薄膜硬度提高.Cr17Ni14Cu4不锈钢表面沉积DLC薄膜后,耐磨性大幅度提高,本文探讨了DLC薄膜的耐磨机理.     

Effect of thick DLC coating on fatigue behaviour of magnesium alloy in laboratory air and demineralised water

Rotating bending fatigue tests have been performed using Diamond‐like carbon (DLC) coated specimens of a wrought magnesium alloy, AZ80A, in laboratory air and demineralised water and the effect of DLC coating on fatigue and corrosion fatigue behaviour was studied. Three film thicknesses of 3.5 μm, 13 μm, and 25 μm (two‐layer film) were evaluated and particular attention was paid to the role of thick DLC coating. In laboratory air, the fatigue strengths of the DLC‐coated specimens were higher than that of the substrate specimen and increased with increasing film thickness. This was because hard DLC coating with good adhesion suppressed the crack initiation due to cracking of inclusions or cyclic slip deformation on the substrate surface. In demineralised water, the fatigue strength of the 3.5‐μm DLC‐coated specimen was the same as that of the substrate specimen due to the penetration of the water through pre‐existing film defects, while the 13‐μm and 25‐μm DLC‐coated specimens showed increased corrosion fatigue strength with increasing film thickness and also exhibited nearly the same fatigue strength as in laboratory air except for a few premature failed specimens, indicating a potential of thick DLC coating or two‐layer coating for complete improvement of corrosion fatigue strength in aqueous environments.     

Adhesion studies of diamond-like carbon films deposited on Ti6Al4V substrate with a silicon interlayer

Diamond-like carbon (DLC) films have proven quite advantageous in many tribological applications due to their low friction coefficient, their extreme hardness, and more recently their high adherence on different substrate materials. However, for many applications, DLC films as thick as 2 μm are required, which cause high residual stress. In order to overcome this problem, this study observed the behavior of different thicknesses of silicon interlayer between DLC films and Ti6Al4V substrates. The study also analyzed the relation of growth parameters to the mechanical properties of DLC films. Silicon and DLC films were grown by using a rf-PECVD at 13.56 MHz with silane and methane atmospheres, respectively. The contribution of an interlayer thickness to the adhesion between the DLC films and Ti6Al4V substrate was evaluated by using a micro-scratch technique. The hardness and friction coefficient were evaluated by using microindentation and lateral force microscopy (LFM), respectively. Raman scattering spectroscopy was used to characterize the film quality. A correlation was found between the intrinsic stress and adhesion of DLC film and the parameters of the silicon interlayer growth. The addition of a silicon interlayer successfully reduced intrinsic stress of the films, even as measured by using a perfilometry technique.     

DLC膜厚度对镁基表面DLC/MAO复合膜层性能的影响

采用线性离子束沉积技术于AZ80镁合金微弧氧化(MAO)陶瓷层表面沉积不同厚度的类金刚石碳(DLC)膜,形成DLC/MAO复合膜层。对比研究4种膜基系统的表面结构特征、力学性能以及摩擦学性能差异。结果表明:随DLC膜厚度增加,复合膜层表面微孔数量减少,孔径减小,但凹凸不平趋势增加,且DLC膜表面颗粒特征更加明显,表现为DLC-80min/MAO/AZ80膜基系统具有最小的表面粗糙度,最大的硬度H、弹性模量E及H/E值;不同厚度DLC/MAO/AZ80膜基系统平均摩擦因数较MAO/AZ80显著降低;DLC膜厚度增加导致3种复合膜基系统的表面微观结构改变,使得摩擦因数与磨痕形貌存在差异;各膜基系统表面磨痕处均形成了Fe的转移层,由于表层DLC膜"裸露"的大量C对磨损界面具有很好的润滑作用,而使得镁合金基体获得有效保护。     

Optimisation of diamond-like carbon films by unbalanced magnetron sputtering for infrared transmission enhancement

Diamond-like carbon (DLC) films have potential applications in infrared transmission enhancement. Reducing or eliminating mechanical stress and optical absorption of DLC is important in such applications because relatively thick films are necessary. In this work, DLC was deposited in an unbalanced magnetron sputtering (UBMS) system. Mechanical and optical properties of the DLC films were analysed. Thick DLC films were deposited which satisfied applications for the infrared windows at 3–5 and 8–10 μm. At optimised conditions, the stress in the DLC films decreased with increasing thickness, approaching 1 GPa. For single side DLC coated silicon substrate, about 69% transmittance was achieved at wavelengths near 5 μm, close to the theoretical value for non-absorbing DLC material. Other properties such as surface roughness, wetting angle, and stability were also studied, which showed that the DLC films produced in the UBMS system were excellent for infrared transmission enhancement applications in tough environments.     

Improvement of adhesion of DLC coating on nitinol substrate by hybrid ion beam deposition technique

Diamond-like carbon (DLC) films were prepared for a protective coating on nitinol substrate by hybrid ion beam deposition technique with an acetelene as a source of hydrocarbon ions. An amorphous silicon (a-Si) interlayer was deposited on the substrates to ensure better adhesion of the DLC films followed by Ar ion beam treatment. The film thickness increased with increase in ion gun anode voltage. The residual stresses in the DLC films decreased with increase in ion gun anode voltage and film thickness, while the stress values were independent of the radio frequency (RF) bias voltage. The adhesion of the DLC film was improved by surface treatment with argon ion beam for longer time and by increasing the thickness of a-Si interlayer.     

绿色气相缓蚀剂的复配及其缓蚀性能研究

目的 为解决单组分绿色气相缓蚀剂缓蚀性能差的问题,复配一种绿色复合气相缓蚀剂,探究其对碳钢和黄铜金属试样的缓蚀作用。方法 采用腐蚀质量损失、接触角、电化学等试验测试分析复合气相缓蚀剂对碳钢、黄铜的缓蚀效果与成膜耐久性。结果 复合气相缓蚀剂对10号钢、H62黄铜的缓蚀效率分别为84.71%、91.67%,缓蚀性能显著优于单组分气相缓蚀剂;复合气相缓蚀剂在10号钢、H62黄铜表面均形成了缓蚀膜,H62黄铜表面形成的缓蚀膜较10号钢的更具耐久性。结论 与单组分气相缓蚀剂相比,该复合气相缓蚀剂对碳钢、黄铜均具备良好的缓蚀作用,为绿色气相缓蚀剂的防锈包装应用提供支撑。     

Microstructure of interface for high-adhesion DLC film on metal substrates by plasma-based ion implantation

The diamond-like carbon (DLC) film was prepared on various metal substrates with a plasma-based ion implantation and deposition using superimposed RF and negative high-voltage pulses. The adhesion strength of DLC film was enhanced above the epoxy resin strength by implantation of carbon ions or mixed ions of carbon and silicon to the substrate surface before DLC deposition. In order to clarify the mechanism for improvement in adhesive strength, the microstructure of an interface between DLC film and substrate was examined in detail by transmission electron microscopy (TEM) observations in combination with EDS analysis. As a result, the enhancement in adhesion strength of DLC film by C ion implantation resulted from the formation of amorphous-like phase in the ion-implanted region of substrate, the production of carbon-component graded interface, the destruction of the oxide layer on the top surface of substrate, and the reduction of residual stress in DLC film by ion implantation during the deposition. The production of stress-free DLC film allowed us to demonstrate a supra-thick DLC film of more than 400 μm in thickness.     

Investigation on preparation and properties of thick DLC film in medium-frequency dual-magnetron sputtering

Chromium-doped DLC film of about 6 μm in thickness was deposited using a medium-frequency dual-magnetron sputtering. The basic condition was Cr and C target powers in a range of 2-5 kW and substrate bias voltage held at −100 V in unipolar mode. Surface morphology, microstructure, hardness, adhesion, and friction property were investigated for the DLC film to be used as protective coating in industrial applications such as cutting tools, forming dies, etc. The thick DLC film with graded and multilayered structure exhibited some advisable properties: Vickers hardness was 1560 kg/mm² at 250 g; adhesion was 52 N (L_c), a majority of film maintained at the end stage of scratch test; friction coefficient was 0.09, maintained in a long sliding endurance.     

Study of diamond-like carbon films on LiNbO3

Diamond-like carbon (DLC) films have been successfully deposited on Y-cut LiNbO₃ substrates using the plasma enhanced CVD technique. A thin interlayer of SiC between the DLC films and the LiNbO₃ is necessary to ensure a good adhesion of the DLC films to the LiNbO₃ substrate. The physical properties and structural network of the DLC films have been investigated in detail. It is observed that the film hardness is increased with increasing the film thickness, as is the adhesion of the DLC films to the LiNbO₃ substrates. The effect of accelerating surface acoustic wave by the DLC films has been confirmed.     

钎剂保护法WC／Cu基钎涂层的制备及其性能

目前,比较成熟的钎涂工艺基本上采用真空或气保护的方法,而仅以钎剂作保护实现钎涂加工的方法鲜有报道。为此,采用钎剂作保护,通过炉中钎焊的方法在Q235A钢表面制备了WC／Cu复合材料耐磨涂层,并通过组织观察和力学性能测试考察了钎涂层的性能。结果表明,使用粉状铜基钎料在大气环境下焊出的涂层气孔、渣孔等缺陷情况为：当涂层厚度...