Das Saugvermögen von Pumpen: Untersuchung verschiedener Meßverfahren im Grobvakuumbereich

The term pumping speed of a vacuum pump denotes the volume flow rate of gas removed by the pump. In a measurement of the pumping speed it has to be taken into account that the volume of a quantity of gas depends on pressure and temperature. The present article presents a critical investigation of two different procedures for measuring the pumping speed in the rough vacuum regime: In the first procedure, gas flows continuously through the test dome and the pump under investigation. The pumping speed is obtained from the stationary values of throughput and pressure in the test dome. This procedure is well established, technical details are described in various standards. In the second procedure, a large vessel with known volume is evacuated by the pump, and the pumping speed is derived from the pressure decrease with time. In order to avoid disturbances by thermal effects, the vessel may be pumped only during short time intervals with intermediate waiting for thermal equilibrium. The second procedure offers instrumental advantages and its practices are described in a new DIN standard. The physical basis and technical aspects of both procedures including disturbing thermal and other effects are investigated. If applied correctly at inlet pressures in the rough vacuum range, both procedures are expected to yield the same values of the pumping speed. Comparative measurements at a diaphragm pump confirm this expected behaviour within the experimental uncertainty of about 3% (2σ).     

Experimental Study of Oil‐Free Claw Vacuum Pump Characteristics

Experimental study of pumping characteristics of a pilot model of a claw single‐stage vacuum pump with identical rotors was carried out. The curves of pumping speed vs. pressure at different rotary speed and the ultimate pressure at different rotors speed were determined on a test unit. Indicator pressure diagrams in working chambers of claw vacuum pump were obtained with the help of special sensors. Thus, an experimental data bank concerning the pumping characteristics of claw vacuum pump was created. It may be used for estimation of mathematical model adequacy and further development of the pump design.     

高压液体流量标准装置研制

为解决民用飞机高压液压油流量计校准问题,研制了高压液压油流量标准装置,标准装置采用高压柱塞泵提供流量源,通过变频调速和比例控制阀配合调节的方法实现流量装置的流量和压力宽范围调节,标准装置以活塞式体积管作为主标准器,实现了高压条件下的流量计校准。利用该标准装置对圆柱齿轮流量计在变压工况下进行校准试验,高压工况下流量计仪表系数与常压工况相差超过5%,证明开展高压变压下流量计计量性能及修正方法研究的重要性,该标准装置的建成为高压下流量计校准及计量性能研究提供了有效的手段,具有很高的实用价值。     

INRIM continuous expansion system as high vacuum primary standard for gas pressure measurements below 9 × 10 Pa

The continuous expansion system can be considered the state of the art for pressure measurement in the ultra high vacuum range. In the last years, at INRIM, a new continuous expansion system was designed, assembled and characterized. The system is the high vacuum primary standard in the pressure range from 1 × 10⁻⁶ Pa to 9 × 10⁻² Pa with relative standard uncertainty ranging from 2.1% at 1 × 10⁻⁶ Pa down to 0.4% at 9 × 10⁻² Pa. The system is based on the passing of a measured gas flow through a fixed and known conductance. The gas flow is generated and measured by a primary gas flowmeter based on the constant-pressure-variable-volume method.In the first part of the paper both a correction for the effect of transitional flow through the orifice and a new analytical evaluation of orifice conductance are presented. In the second part the accuracy of the system and the pressure uncertainty evaluation are described.     

新型吸气剂泵真空测试系统的搭建与实验研究

烧结型非蒸散吸气剂泵HV800(意大利SAES公司生产)具有抽速大、抽气容量高、安装维护简单等优点,可能适用于EAST托卡马克偏滤器抽气,提高该区域粒子排出能力。本文搭建了一套极限真空5.1×10^-7Pa、具备抽速定量标定的真空测试系统,对HV800开展了对氘气抽速的标定实验。研究结果表明在偏滤器工作气压下,平均抽速可达240 L/s。经评估HV800应用于EAST的初步方案,偏滤器区域会增加5×10⁴L/s抽速,并可连续运行20 h以上,是有效提高EAST偏滤器粒子排出能力的可行选择。     

Comparison of the high vacuum standard parameters computed from two models

The paper presents the results of analyses of the high vacuum standard obtained with the use of two models: traditional and the new, so-called ‘global’. It was found that the assumptions used in the traditional approach i.e. uniform and cosine gas flux density distribution at the orifice plane and the uniform distributions of the gas flux on the calibration and pumping chamber walls, are not fully fulfilled. These effects cause the effective pumping speed calculated with both models to differ and the relative difference equals 4×10⁻⁴. Additionally it was found that the uncertainty of the vacuum standard due to the orifice dimensions measurements being imprecisely computed using the global model is twice smaller taking into account the gas beaming effect.     

Das Vakuumsystem der TOSKA-Spulentestanlage

Plasma confinement in fusion reactors requires large magnetic fields which are generated by superconducting solenoids. The coils of the future reactor ITER have a size of some 18 m × 10 m. Their construction is a technical challenge: the body of the coil suffers from large mechanical forces, originating from the magnetic field, as well as substantial thermal stress resulting from the cooling to 4.2 K. Nevertheless, the coils are required to be absolutely vacuum tight since no loss of the refrigerant helium is permissible. In the Research Center Karlsruhe (FZK) prototype coils are tested in operation under high vacuum conditions. The test chamber has a volume of 170 m³. It is pumped by an oil diffusion pump with a nominal pumping speed of 16 000 l/s. As fore and roughing pumps, a combination of Roots and rotating vane pump are employed. The available effective pumping speed of the oil diffusion pump has been measured by two different procedures: via the resulting equilibrium pressure in case of an injected stationary gas flow, and via the time-dependent decrease of pressure during pump-down. The measurements give an effective pumping speed of some 2 000 l/s. The main reason for the small pumping speed (as compared to the nominal value) is the small conductances of the inserted vacuum components and baffles. When the heating power of the oil diffusion pump is reduced to one half, the pumping speed decreases only slightly, whereas the maximum throughput decreases to one third.     

High vacuum side channel pump working against atmosphere

The OnTool™ Booster vacuum pump consists of side channel and Holweck pump stages. This pump achieves 10⁻³ Pa final pressure and exhausts against atmosphere. Research is done on side channel pump stages. It shows the ways to increase the compression and pumping speed while simultaneously reducing size and power consumption.The influences of a backing pump on the power consumption, the form and number of rotor blades on the performance of side channel pump stages have been investigated. It was shown that the power consumption of the pump at final pressure drops from 1150 W to less than 150 W, if a backing pump is used. The properties of double-flow and single-flow side channel stages were compared to each other. It was shown that double-flow stages have a higher pumping speed and a lower compression than single-flow stages.As a result of the investigation the compression and pumping speed of side channel pump stages are increased significantly at reduced power consumption.     

Scroll Geometry of Scroll Vacuum Pump

The influence of the end part of the scroll on the pumping characteristics and indicated power of the oil free scroll vacuum pump is considered. With the help of developed mathematical model of the scroll pump dependence of pumping speed on the inlet pressure at different curvature radii of the scroll end part and compression duration is obtained. The influence of compression duration on the ultimate pressure and delivery rate is examined. Dependence of the indicated power on the inlet pressure at different number of scroll wraps and compression duration is calculated.     

New Turbomolecular Pump with Central Opening for Free Axial Access. Eine neue Turbomolekularpumpe mit zentraler Öffnung für freien axialen Zugang

Standard turbomolecular pumps show typically one annular active intake area on the high vacuum flange side (single‐flow pumps). The central circular part of the inlet of the compressor turbine is blind for pumping. The new design proposes a central opening of a turbomolecular pump all along the axis. This central bore can be used e.g. for mounting of feed throughs, manipulators, windows or for coupling to further vacuum devices, in particular also for enclosing tube‐like vacuum systems. This design allows a multi‐use of a pumping port at a vacuum vessel without reducing there the pumping speed. Moreover, the new design is ideal for axial or radial differential pumping arrangements as e.g. needed for all gas jet like set‐ups or other pressure reduction stages.     

非蒸散型吸气剂泵在真空计量中的应用研究

本文简要阐述了非蒸散型吸气剂(NEG)泵的吸气机理,着重介绍了NEG泵在超高/极高真空标准、静态膨胀法真空标准等真空计量标准中的最新应用结果。结果表明:利用NEG泵在室温下获得了10-10Pa的XHV;利用NEG泵将超高/极高真空标准校准下限延伸到了10-10Pa量级;利用NEG泵将静态膨胀法真空标准的校准下限延伸到了10-7Pa量级。最后还对用NEG泵延伸固定流导法微流量标准测量下限的可行性进行了分析。     

玻璃破碎新鲜表面吸气特性及其诱导下快速抽气新方法研究

高真空获得及维持技术对微纳材料制备、微电子设备制造、真空电子器件工艺优化等领域的科学研究及工业应用至关重要。文章面向高真空获得及维持过程中吸气材料吸气机理解析及寻优材料替代之关键科学问题,致力于克服传统高真空技术维持高真空状态能耗高、传统高真空获得方法依赖于昂贵设备和复杂操作等缺陷,提出了一种基于玻璃破碎新鲜表面诱发高真空获得及压力下限突破的新方法;文章首先开展了吸气成分及分压力测试实验及最大有效抽速实验研究。实验结果表明新鲜玻璃破碎表面具备吸气效应;解析玻璃新鲜表面吸附的主要气体成分及分压力变化,剖析出主要吸附气体组分为氢气和氮气;定量评估了新方法的抽气能力,利用蒙特卡洛方法仿真分析了泵出口管道的传输概率,获得新方法的最大有效抽速。相比现有真空获得和维持技术,文章所提出的新方法具有易激活、材料性价比高、抽速可观等优势,有助于为狭小空间高真空获得及维持提供新型技术途径及应用有效性参考。

     

天然气工作级标准装置的能力提升

介绍了国家石油天然气大流量计量站武汉分站工作级标准装置的组成、测量原理、量值溯源方式以及装置校准能力提升的关键措施,并对其不确定度进行评定.重点分析了"绝压+差压测量"的不确定度,实验法评定压缩因子比值的不确定度,以及标准涡轮流量计修正不确定度.利用传递比较法对评定的不确定度进行了验证,结果表明,该标准装置的不确定度为...     

分子泵对Xe气抽速的测试

在不同Xe气流量下测量了F-400／3500和F-250／1500分子泵对Xe气的抽速，指出分子泵对Xe气的抽速是其对N2抽速的0．6～0．8倍。这一折算系数和泵的型号有关，和泵口真空度也相关。     

Kenngrößen von Turbo‐Molekularpumpen

Graphs of “high‐vacuum pressure as a function of backing pressure” (“p_HV versus p_VV”) and “compression as a function of backing pressure” (“K versus p_VV”) are presented in this article. The performance of any turbomolecular pump can be fully and reliably evaluated with the aid of these graphs. Until now these graphs have only seldom been shown in catalogs. The catalogs generally lack the so‐called “limit lines” (“Q as a function of p_{VV, Kmax}”). For a prescribed gas throughput Q, the limit line indicates what minimum pressure must be generated by the backing pump at the fore‐line port of the turbomolecular pump so that a stable pressure exists at the high‐vacuum side of the turbomolecular pump. Using the gas‐type‐specific limit line and the corresponding, usually well‐documented pumping‐speed curve, one can already describe the functional proficiency and performance of a selected combination of turbomolecular pump plus backing pump in an approximate manner – but not yet completely. In this article we also indicate analytical functions which excellently describe the pressure dependence of the compression and pumping speed.     

涡轮分子增压泵的研究现状与进展

综述了涡轮分子增压泵的研究现状与进展。涡轮分子增压泵是一种动量传输型真空泵，它的出口压力范围可达1000Pa，通过计算流体动力学方法(CFD法)和直接模拟蒙特卡罗法(DSMC)可以模拟计算抽气通道内气体的流动，这两种互补的方法可以研究从粘滞流到分子流的全部抽速曲线，从而指导新型涡轮分子增压泵的设计。     

Wasserstoff in Hochvakuumsystemen mit Turbomolekularpumpen bei verschiedenen Vorpumpen

The combination of diaphragm pumps with wide‐range turbomolecular pumps constitutes a small but powerful oil‐free high vacuum pumping system. Turbomolecular pumps show gas dependent compression ratios, the lowest for hydrogen. Thus, the high vacuum can be governed by the hydrogen partial pressure. In the present investigation the residual gas composition of a turbomolecular pump and different backing pumps shows no improvement if diaphragm pumps with low ultimate pressure are replaced by rotary vane or Roots pumps. In this case the ultimate pressure in the high vacuum chamber is basically determined by the ratio of outgassing to pumping speed and not by the product of compression ratio and backing pressure. However, the hydrogen partial pressure increased if the ultimate pressure of the diaphragm pump was raised. At a backing pressure of 0.5 mbar the high vacuum reached a stable value not improvable by reduction in backing pressure.     

A new generation of getter‐coated sputter ion pumps for XHV applications

A new concept of sputtered ion getter pump is presented. The body of this pump is internally coated by a getter thin film constituted by a layer of TiZrV together with a protective covering of palladium, according to a technology that CERN (European Center for Nuclear Research) licensed us. TiZrV is a well‐known alloy able to pump getterable gases such as hydrogen, oxygen, nitrogen, carbon monoxide and dioxide. With the exception of H², the sorption of these gases is not reversible and it causes a progressive contamination of the bulk of the material. With the addition of the palladium overlayer, the pumping action is limited to hydrogen and carbon monoxide, but the lifetime of the film is strongly enhanced, thanks to the possibility of an unlimited number of thermal activations, which restore the initial performances of the film. An innovative sputter ion pump design, optimized for both pumping speed in ultra high vacuum and getter film sputtering, will be introduced. Moreover, pumping speed measurements and ultimate pressure data, obtained after a relatively short bake‐out at temperature lower than standard procedures, will be reported.     

镀膜设备真空系统主泵的配置

真空系统是真空镀膜设备的主要组成部分,其主泵的选择对真空性能影响很大,真空镀膜设备的发展要求真空性能清洁无油,动态抽速大.传统的以油扩散泵为主泵的设备不能满足要求,本文叙述了油扩散泵、分子泵及低温泵的特点及北京北仪创新真空技术有限责任公司开发以分子泵及低温泵为真空系统主泵的镀膜设备情况.     

Pumping speed measurement of turbomolecular pumps by a quasistationary pump-down method

The pumping speed of a turbomolecular pump is usually measured by injecting a stationary known gas flow via a standardised test dome into the pump and measuring the equilibrium pressure in the test dome. The ratio of gas throughput and pressure is just the pumping speed. In practice, the pressure can be conveniently and accurately measured, whereas the convenient and accurate throughput measurement is a challenging experimental problem. The present paper reports on a new method for measuring the pumping speed in which the throughput is generated by the pumping down of a vessel via an orifice. From the decrease of vessel pressure with time, and from known vessel volume, the throughput can be directly and accurately derived. Exploring measurements by the new method in fact give high accuracy, systematical error sources are practically negligible.