Improved equivalent circuit and analytical model for amorphoussilicon solar cells and modules

An improved equivalent circuit for hydrogenated amorphous silicon (a-Si:H) solar cells and modules is presented. It is based on the classic combination of a diode with an exponential current-voltage characteristic, of a photocurrent source plus a new term representing additional recombination losses in the i-layer of the device. This model/equivalent circuit matches the I(V) curves of a-Si:H cells over an illumination range of six orders of magnitude. The model clearly separates effects related to the technology of the device (series and parallel resistance) and effects related to the physics of the p-i-n junction (recombination losses). It also allows an effective μτ product in the i-layer of the device to be determined, characterizing its state of degradation     

High mobility tri-layer a-Si:H thin-film transistors with ultrathinactive layer

We show that hydrogenated amorphous silicon thin-film transistors (a-Si:H TFT's) with active layer thickness of 13 nm perform better for display applications than devices with thicker 50-nm active layers. A direct comparison of a-Si:H TFT's fabricated using an i-stopper TFT structure shows that ultrathin active layers significantly improve the device characteristics. For a 5-μm channel length TFT, the linear region (V_DS=0.1 V) and saturation region mobilities increase from 0.4 cm²/V·s and 0.7 cm²/V·s for a 50-nm thick active layer a-Si:H device to 0.7 cm²/V·s and 1.2 cm²/V·s for a 13-nm thick active layer a-Si:H layer device fabricated with otherwise identical geometry and processing     

A physical-based analytical turn-on model of polysilicon thin-filmtransistors for circuit simulation

A physical-based analytical current model of poly-Si thin film transistors (TFT's) for circuit simulation is presented. The model includes the barrier potential at grain boundaries, drain induced grain barrier lowering (DIGBL), temperature dependence, and the kink effect. The basic equation in the model has an analytic form for implementation in circuit simulators. The model has simple relationships between model parameters and device or material parameters. In addition to the current model, a capacitance model based on the current model is presented. Comparisons between the model and measured results show excellent agreement over wide ranges of operating voltages and for devices with different channel lengths     

A short-channel DC SPICE model for polysilicon thin-filmtransistors including temperature effects

A semi-empirical analytical model for the DC characteristics of both n- and p-channel polysilicon thin-film transistors is described. The model is suitable for implementation in a SPICE circuit simulator. Our semi-empirical approach results in a physically based model with a minimum of parameters, which are readily related to the device structure and fabrication process. The intrinsic DC model describes all four regimes of operation: leakage, subthreshold, above threshold, and kink. The effects of temperature and channel length are also included in the short-channel model     

Dependence of thin film transistor characteristics on thedeposition conditions of silicon nitride and amorphous silicon

The systematic relation between thin film transistors' (TFT's) characteristics and the deposition conditions of amorphous silicon nitride (a-SiN) films and hydrogenated amorphous silicon (a-Si:H) films is investigated. It is observed that field effect mobility μ_FE and threshold voltage V_th of the TFT's strongly depend on the deposition conditions of these films. The maximum μ_FE of 0.88 cm²/V·s is obtained for the TFT of which a-SiN film is deposited at a pressure of 85 Pa. This phenomenon is due to the variation of the interface states density between a-Si:H film and a-SiN film     

Fully self-aligned tri-layer a-Si:H thin-film transistors withdeposited doped contact layer

We demonstrate a new self-aligned TFT process for hydrogenated amorphous silicon thin-film transistors (a-Si:H TFTs). Two backside exposure photolithography steps are used to fabricate fully self-aligned tri-layer TFTs with deposited n⁺ contacts. Since no critical data alignment is required, this simple process is well suited to fabrication of short channel TFTs. We have fabricated fully self-aligned tri-layer a-Si:H TFTs with excellent device performance, and contact overlaps <1 μm. For a 20-μm channel length TFT with an a-Si:H thickness of 13 nm, the linear region (V_DS=0.1 V) and saturation region (V_DS=25 V) extrinsic mobility values are both 1.2 cm²/V-s, the off currents are <1 pA, and the on/off current ratio is >10⁷     

Improvement of the reliability of amorphous silicon transistors byconduction-band tail width reduction

We present theoretical and experimental evidence showing that bias induced threshold voltage degradation of a-Si:H transistors is reduced by decreasing the width of the conduction-band tail. We show that transistors which are made using a thick (0.5 μm) a-Si:H layer possess a narrower conduction-band tail compared to transistors made using thin (0.05 μm) a-Si:H layers. We find that bias-induced threshold voltage degradation decreases by a factor of two for thick-layered TFTs compared with conventional, thin-layered TFTs. Finally, we present device design guidelines for improving the reliability of a-Si:H TFTs including several possible device designs for achieving further improvements in the reliability of a-Si:H TFTs     

Fully coupled electrothermal mixed-mode device simulation of SiGeHBT circuits

It is well known that for the design and simulation of state-of-the-art circuits thermal effects like self-heating and coupling between individual devices must be taken into account. As compact models for modern or experimental devices are not readily available, a mixed-mode device simulator capable of thermal simulation is a valuable source of information, Considering self-heating and coupling effects results in a very complex equation system which can only be solved using sophisticated techniques. We present a fully coupled electrothermal mixed-mode simulation of an SiGe HBT circuit using the design of the μA709 operational amplifier. By investigating the influence of self-heating effects on the device behavior we demonstrate that the consideration of a simple power dissipation model instead of the lattice heat flow equation is a very good approximation of the more computation time consuming solution of the lattice heat flow equation     

Inverse staggered poly-Si and amorphous Si double structure TFT'sfor LCD panels with peripheral driver circuits integration

Inverse staggered polycrystalline silicon (poly-Si) and hydrogenated amorphous silicon (a-Si:H) double structure thin-film transistors (TFT's) are fabricated based on the conventional a-Si:H TFT process on a single glass substrate. After depositing a thin (20 nm) a-Si:H using the plasma CVD technique at 300°C, Ar⁺ and XeCl (300 mJ/cm²) lasers are irradiated successively, and then a thick a-Si:H (200 nm) and n⁺ Si layers are deposited again. The field effect mobilities of 10 and 0.5 cm ²/V·s are obtained for the laser annealed poly-Si and the a-Si:H (without annealing) TFT's, respectively     

Deep-submicrometer DC-to-RF SOI MOSFET macro-model

We present a submicrometer RF fully depleted SOI MOSFET macro-model based on a complete extrinsic small-signal equivalent circuit and an improved CAD model for the intrinsic device. The delay propagation effects in the channel are modeled by splitting the intrinsic transistor into a series of shorter transistors, for each of which a quasistatic device model can be used. Since the intrinsic device model is charge-based, our RF SOI MOSFET model can be used in both small and large-signal analyses. The model has been validated for frequencies up to 40 GHz and effective channel lengths down to 0.16 μm     

A high-performance thin-film transistor with a vertical offsetstructure

In this study, we propose a novel device structure combined with conventional hydrogenated amorphous silicon (a-Si:H) for the source and drain regions and microcrystalline silicon (μc-Si:H) for the channel region to obtain a high-performance thin-film transistor (TFT). This is a vertical a-Si:H offset structure used to suppress OFF-state current to a small value which is comparable to the conventional a-Si:H TFTs with a much higher drivability. The fabrication process is simple, low temperature (⩽300°C), and low cost, with a potential for high reliability     

Linear dynamic self-heating in SOI MOSFETs

A model for small-signal dynamic self-heating is derived for the general case of a two-port device and then specialized to the case of an SOI MOSFET. The model is fitted to measured data for an SOI MOSFET and shown to accurately describe the frequency dependence of the self-heating. For this device, three time constants of 0.25 μs, 17 ns, and 90 ps adequately characterize the thermal response, showing that self-heating effects are active over a very wide frequency range     

DC self-heating effects modelling in SOI and bulk FinFETs

DC thermal effects modelling for nanometric silicon-on-insulator (SOI) and bulk fin-shaped field-effect transistors (FinFETs) is presented. Among other features, the model incorporates self-heating effects (SHEs), velocity saturation and short-channel effects. SHEs are analysed in depth by means of thermal resistances, which are determined through an equivalent thermal circuit, accounting for the degraded thermal conductivity of the ultrathin films within the device. Once the thermal resistance for single-fin devices has been validated for different gate lengths and biases, comparing the modelled output characteristics and device temperatures with numerical simulations obtained using Sentaurus Device, the thermal model is extended by circuital analysis to multi-fin devices with multiple fingers.     

XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's

Mo-gate n-channel poly-Si thin-film transistors (TFT's) have been fabricated for the first time at a low processing temperature of 260°C. A 500-1000-A-thick a-Si:H was successfully crystallized by XeCl excimer laser (308nm) annealing without heating a glass substrate. TFT's were fabricated in the crystallized Si film. The channel mobility of the TFT was 180cm²/V.s when the a-Si:H was crystallized by annealing with a laser having an energy density of 200 mJ/cm². This result shows that high-speed silicon devices can be fabricated at a low temperature using XeCl excimer laser annealing.     

Simulation of SOI devices and circuits using BSIM3SOI

A versatile SOI model derived from the BSIM3v3 bulk MOSFET model is capable of simulating partially and fully depleted devices with options for self-heating and floating body effects. The model can automatically switch between fully and partially depleted regimes. After refining body current models we for the first time present successful dc and transient device and circuit simulation of an SOI MOSFET technology with L_eff below 0.2 μm     

Thermal and package performance limitations in LDMOSFET's for RFICapplications

This paper presents a systematic study of the limitations imposed by thermal and packaging considerations on radio-frequency (RF) performance of Si bulk and silicon-on-insulator (SOI) lateral DMOSFET's (LDMOSFET's). Several bulk and SOI devices are studied with the help of measurements as well as two-dimensional device simulations incorporating electrothermal models. Model parameters are extracted and used in circuit simulators to perform RF characterization of these devices. Further, a new three-region theory for the LDMOSFET is discussed and used to evaluate the static and RF performance of the devices in a nonisothermal environment. This paper shows that the package plays an important role in RF performance of SOI and bulk devices due to self-heating effects within the device. A detailed DC and RF performance evaluation is presented. Significant drift is observed in RF performance of bulk and SOI devices due to self-heating considerations. The physical understanding of these thermal effects within the device can facilitate the design of better packages for bulk and SOI devices     

The effects of BJT self-heating on circuit behavior

This study demonstrates the circuit and device conditions under which self-heating can significantly affect bipolar junction transistor (BJT) circuit behavior. Simple quantitative measures are supplied that allow estimation of thermally induced errors in BJT small-signal parameters, based on knowledge of the transistor geometry and its Early voltage. It is shown that errors in output admittance and reverse transadmittance can be significant without much power dissipation, especially when the base and emitter driving impedances are small. Other small-signal parameters are less affected unless the power dissipation becomes significant. Thermal effects in large-signal DC analysis can be significant in precision analog circuits that depend on close transistor matching; such circuits can also exhibit long settling-time tails due to long thermal time constants. ECL (emitter-coupled logic) delay is shown to be insensitive to self-heating. These effects are demonstrated through simulations of a variety of circuits using versions of SPICE modified to include physics-based models for thermal impedance     

Electrothermal simulations in punchthrough and nonpunchthroughIGBT's

The performance of 1200 V punchthrough (PT) and nonpunchthrough (NPT) insulated gate bipolar transistors (IGBT's) is studied in detail under unclamped inductive switching (UIS) and short circuit (SC) conditions. The need for a good physics based simulator to carry out a reliability study is pointed out in the paper. Using such a finite element-based device and circuit simulator it is shown that NPT-IGBT's show a much better performance than PT-IGBTs under UIS condition. It is also shown that an NPT device has a better short circuit withstanding capability than a PT device due to the structural differences between the two devices. As there is a huge power loss within the device during these operating conditions, device self-heating is expected to have a significant impact on device characteristics. Electrothermal simulations are used to study device self-heating and it is shown that it significantly influences device performance under SC operation whereas self-heating influences the UIS performance of only the PT device with little effect on the NPT device. The study is validated by an experimental study of short circuit failure of PT IGBTs     

Analytical and experimental studies of thermal noise in MOSFET's

An analysis of the channel thermal noise in MOSFET's based on the one-dimensional charge sheet model, is presented. The analytical expression is valid in the strong, moderate, and weak inversion regions. The body effect on the device parameters relevant to the thermal noise is discussed. A measurement technique as well as experimental results of P- and N-MOSFET's of a 1.2 μm radiation hard CMOS process are presented. The calculated channel thermal noise coefficient γ as in i_d²/Δf=4kT γ g_do, agrees well with experimental data for effective device channel length as short as 1.7 μm