软X射线多层膜设计中表面粗糙度对反射率的影响

给出了一种改进的软X射线波段的多层膜设计方法.在设计过程中,考虑了反射镜基底和各膜层之间的均方(RMS)粗糙度对反射率的影响 ;在Stearns提出的散射理论的基础上给出了粗糙界面的数学模型.文中以波长为λ=1.03nm的软X射线为例进行设计,设计结果表明 :要使波长为λ=1.03nm的多层膜的反射率大于10%,反射镜基底的均方粗糙度不应超过0.6nm.实验中选择几块表面粗糙度为 0.5nm(RMS)的熔石英平面镜作为基底来制作适用于该波长的、层对数超过70的多层膜.然后在的入射角下测量反射率,测得的值为10%,这与采用本设计方法得到的计算结果一致.该反射镜作为X射线谱仪的分光元件被应用于惯性约束聚变(ICF)的过程诊断中.     

散射法表面粗糙度测量

介绍了标量和矢量两种散射理论，并用软X射线反射率对超光滑表面进行散射测量，同时应用这两种理论计算了超光滑表面粗度均方根值，从计算结果来看，两种理论所得结果与WYKO测量结果吻合较好。     

长春光机所软X射线-极紫外波段光学研究

综述了我所软X射线-极紫外波段关键技术的研究进展。描述了软X射线-极紫外波段光源技术,研制了工作波段为6~22 nm的微流靶激光等离子体光源;介绍了光子计数成像探测器技术,研制出了有效直径为25 mm,等效像元分辨率为0.3 mm的极紫外波段探测器;开展了超光滑表面加工、检测技术的研究,研制了超光滑表面抛光机,加工出高面形精度的超光滑表面,面形精度为6 nm(RMS值),表面粗糙度达0.6 nm(RMS值);进行了软X射线-极紫外波段多层膜技术的研究,研制出13 nm处反射率为60%的多层膜反射镜,150 mm口径反射镜的反射率均匀性优于±2.5%;最后,讨论了软X射线-极紫外波段测量技术研究,研制出该波段反射率计,其测量范围为5~50 nm,光谱分辨率好于0.2 nm,测量重复性好于±1%。在上述关键技术研究基础上,研制出了极紫外波段成像仪和空间极紫外波段太阳望远镜,这些仪器在我国空间科学研究项目中发挥了作用。     

软X射线散射法检测超光滑表面粗糙度

本文概略介绍了软X射线散射法检测超光滑表面粗糙度的散射理论、测试方法及测试系统。     

软X射线多层膜反射镜的设计、制备与检测

本文提出一种图像直观、结果可靠的软X线多层膜设计方法,讨论了与软X射线多层膜制备有关的基板选择,膜厚控制等工艺问题。给出Mo/Si软X射线多层膜小角度衍射及171Å、231Å及256Å处软X射线反射率的测试结果,并对软X射线多层膜工作做了展望。     

一种处理超光滑表面对软X射线散射问题的标量模型

本文根据标量散射理论建立了一种能在σ/λ≈1条件下描述较高散射水平的标量散射模型;讨论了这一模型在低散射水平下与矢量散射模型的统一性;并给出了处理超光滑表面对软X射线散射问题所必须的几个实用数学关系。     

使用气体靶激光等离子体光源的软X射线反射率计

建立了一台使用气体靶激光等离子体光源的软X射线反射率计,并给出了使用该反射率计测量软X射线多层膜反射率的方法.与金属靶等离子体光源相比,由于使用了气体靶等离子体光源,该反射率计具有低碎屑、可长期连续运行等优点.针对单色仪的二级光谱对反射率测量结果产生的影响,提出了修正方法.并用此方法对实测的工作波长为17.1nm软X射线多层膜的反射率曲线进行了修正.     

类镍钽软X射线激光用多层膜反射镜的研制

设计并制备了工作波长为4.48 nm类镍钽软X射线激光用多层膜反射镜。选择C r/C、C r/Sc为多层膜材料对,模拟了多层膜非理想界面对多层膜反射率的影响。采用直流磁控溅射技术在超光滑硅基片上制备了C r/C、C r/Sc多层膜。利用X射线衍射仪测量了多层膜结构,在德国Bessy II同步辐射上测量了多层膜的反射率,C r/C,C r/Sc多层膜峰值反射率分别为7.50%,6.12%。     

软X光多层膜反射镜的研究

本文介绍了软X光多层膜反射镜的发展过程和应用前景。讨论了软X光多层膜计算的衍射动力学理论和薄膜光学理论。设计了周期和非周期多层膜系。用磁控溅射制备了171Å21层周期和17层非周期Mo/Si结构反射镜。用电子束蒸发制备了256Å21层周期Mo/Si结构反射镜。对所制样品进行了X光小角衍射实验,俄歇电子能谱分析和反射率测试,并对实验结果进行了一些讨论。     

PMMA材料制作X射线组合透镜技术研究

给出了基于衍射理论的评价X射线聚焦组合透镜三维聚焦性能的理论方法.利用该理论方法分析得出X射线组合透镜的聚焦性能与透镜的工作波长、透镜材料、单元透镜数量及凹面半径等参数之间的关系.用LIGA技术中的软X射线光刻方法制作了PMMA材料X射线组合透镜.该组合透镜由40个平凹折射单元依次排列而成,相邻的两透镜单元彼此相切,凹面半径分别为200 μm,400 μm,500 μm,600 μm,700 μm.此外,X射线组合透镜的表面粗糙度测试结果表明,粗糙度均方根值小于50 nm.     

同步辐射超光滑X光学元件的加工工艺及检测技术的研究

综述了该领域的研究现状,发展水平,以及同步辐射光学元件的特点;对超光滑表面的加工工艺及检测技术进行了归纳总结;详细阐述了本人所承担的中国科学院高能物理所同步辐射光束线的关键部件一超环面反射镜的加工与检测的研究。用户反馈的信息表明其性能优于美国生产的同类产品,标志着在该领域,我们已接近或达到国外先近水平。     

An experimental method for calibration of the plasmon mean free path

Transmission electron microscopy specimens in the form of elongated, conical needles were made using a dual‐beam focused ion beam system, allowing the specimen thickness to be geometrically determined for a range of thickness values. From the same samples electron energy loss maps were acquired and the plasmon mean free path (λ) for inelastic scattering was determined experimentally from the measured values of specimen thickness. To test the method λ was determined for Ni (174 ± 17 nm), α‐Al₂O₃ (143 ± 14 nm), Si (199 ± 20 nm) and amorphous SiO₂ (238 ± 12 nm), and compared both to experimental values of λ taken from the literature and to calculated values. The calculated values of λ significantly underestimate the true sample thickness for high accelerating voltages (300 kV) and large collection angles. A linear dependence of λ on thickness was confirmed for t/λ < 0.5–0.6, but this method also provides an approach for calibrating λ at sample thicknesses for which multiple scattering occurs, thus expanding the thickness range over which electron energy loss spectroscopy can be used to determine the absolute sample thickness (t/λ > 0.6). The experimental method proposed in this contribution offers a means to calibrate λ for any type of material or phase that can be milled using a focused ion beam system.     

Varying SiO2 thickness of core–shell noble-grains on a gradient sensing plate to enhance field Raman scattering

This study demonstrates a strong surface-enhanced Raman scattering (SERS) of crystal violet (CV) dye by using SiO₂ shell/Ag core nanoparticle in gradient-size surface plate. The excitation of CV dye can be enhanced by the localized surface plasmons of Ag core/shell SiO₂ grains due to electromagnetic (EM) enhancement induced. For SERS resonance, the change of dielectric environment of grains results in red shift and magnification of spectra in varying SiO₂ thickness. Herein, the enhanced SERS conducted the core/shell grain with an SiO₂ thickness of 8.7 nm to magnify the intensity about 83 %-fold that is a direct evidence in enhanced charge transport and mutative dielectric environment.

软X线—真空紫外AI2O3光电二极管的研究

Al₂O₃光电二极管由于光谱响应波段较宽,性能稳定,经稀有气体电离室定标后,常用作软X线-真空紫外波段的光谱辐射传递标堆探测器。描述我们研制的Al₂O₃光电二极管的结构原理及Al₂O₃光阴极制备工艺,讨论性能测试方法与装置,给出测试结果。     

软X射线掠入射金属光栅闪耀特性的校正傅里叶展开微分法分析

在有限电导率光栅的微分理论中引入校正傅里叶展开方法,改善了计算收敛性。运用改进后的微分理论对软X射线波段掠入射金属光栅的闪耀特性做了数值分析,通过详细考察三角槽形、正弦槽形和矩形镀金光栅的软X射线-1级衍射效率对光栅结构参数和入射光状态参数的响应程度,给出了一种在使用和制作工艺上都能够接受的光栅技术指标。结果表明,作为闪耀波长为10.33 nm的软X射线波段掠入射镀金光栅,采用81°入射的刻线密度为1 200 l/mm,倾斜角为2°,顶角大于120°的三角槽形光栅较为合适,其效率可达到50%以上。同时,得到了一些优化软X射线波段掠入射金属光栅设计的新结论。     

Near-Field Nanofluid Concentration Measurement by Rayleigh Particle Scattering Bragg Grating Evanescent Wave

We report an approach to detect near-field nanofluid concentration by scattering Bragg grating evanescent wave (EW). Since the suspended nanoparticles can enhance the scattering intensity of the EW from the thinned and tapered fiber with Bragg grating, the reflectance ratio of Bragg grating is dependent on the corresponding refractive index (RI) of the nanofluid at different nanoparticle volume fraction. A critical reflectance ratio measurement identifies the nanofluid concentration. Theory and simulation of scattering Bragg grating EW was analyzed. The scattering Bragg grating EW fiber sensing probe was designed and fabricated by the wet chemical etching method, and calibration was made by several chemical solutions without suspended nanoparticles. The example application of the nanofluid containing dispersed 40 nm SiO₂ nanoparticles demonstrates the feasibility. The reflectance ratio decreases by over 3.2% with the nanofluid concentration increasing from 0.25 wt.% to 4 wt.%, while the temperature disturbance can be negligible.     

Freeze-fracture electron microscopic and low temperature X-ray scattering studies of the effect of cryofixation upon serum low density lipoprotein structure

We report here a correlated X-ray diffraction and freeze-fracture electron microscope study of the effects of several cryofixation procedures upon human serum low density lipoprotein (LDL₂) structure. Only when the LDL₂ solutions contained 75%, by weight, glycerol were the room temperature and post cryofixation low temperature LDL₂ X-ray scattering curves indistinguishable from one another. Other cryofixation procedures, slow or rapid, with or without glycerol, resulted in differences between the room temperature and low temperature LDL₂ X-ray scattering curves, in part due to the effect of quenching upon the solvent. Freezeetching electron microscopy of the slowly cryofixed LDL₂ showed marked aggregation of the particles and an unusual morphological appearance. In contrast, after rapid cryofixation or cryofixation in the presence of glycerol, freeze-etch electron microscopy revealed well-isolated particles which had a knobby morphology. The results demonstrate that under certain conditions (in the presence of 75% glycerol) cryofixation results in minimal, if any, structural alteration of, at least, the LDL₂ lipid moiety. Further, this study underlines the more general conclusion that any high resolution structural study employing a cryofixation step must be interpreted with caution and the effect of cryofixation upon the sample structure need be evaluated by independent means.     

Extended electron energy-loss fine structure and selected-area electron diffraction studies of small palladium clusters

Extended electron energy-loss fine structure (EXELFS) and selected-area electron diffraction (SAED) techniques have both been applied to the study of the crystalline structure of Pd clusters of average diameters ranging from bulk to 24 Å. The combined use of these techniques gives complementary information about the crystalline structure of Pd clusters. Both techniques show the same lattice parameter expansion, about 4% for the smallest Pd cluster, with respect to the bulk. The EXELFS analysis performed on the Pd-M_4,5 edge shows a sizeable increase of structural disorder in the smallest cluster. SAED gives additional information about the Pd bulk sample, showing the occurrence of crystalline regions about 50 Å in diameter.     

A SMALL-ANGLE X-RAY SCATTERING STATION AT BEIJING SYNCHROTRON RADIATION FACILITY

This article presents the development and current state of a small-angle X-ray scattering station at beamline 1W2A of the Beijing Synchrotron Radiation Facility, China. The source of the beamline is introduced from a 14-pole wiggler. A triangular bending Si(111) crystal is used to horizontally focus the beam and provide a monochromatic X-ray beam (8.052 keV). A bending cylindrical mirror coated with rhodium downstream from the monochromator is used to vertically focus the beam. The X-ray beam is focused on the detector which is fixed at 30 m from the source. The focused beam size (full width at half maximum) is 1.4 × 0.2 mm² (horizontal × vertical) with a flux of 5.5 × 10¹¹ phs/s at 2.5 GeV and 250 mA. Besides the routine mode of small-angle X-ray scattering, the combination of small- and wide-angle X-ray scattering, grazing incidence small-angle X-ray scattering, and time-resolved small-angle X-ray scattering in sub-second level are also available for the users. Dependent on the measurement requirements, several detectors can be chosen for the collection of scattering signals. Furthermore, multiple sample environments, including temperature, stress-strain, and liquid sampling are available for in situ measurements. In a typical camera length of 1.5 m, the small-angle X-ray scattering resolution is about 115 nm. The steady operation of the small-angle X-ray scattering station at Beijing Synchrotron Radiation Facility not only provides the small-angle X-ray scattering beam time for users, but also promotes the development and application of these techniques in China.