共查询到17条相似文献,搜索用时 62 毫秒
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数字闭环石英挠性加速度计可以有效地解决传统模拟式加速度计在模数转换中引起的精度损失问题,而数字式加速度计的精度主要取决于差动电容检测环节。阐述了数字式加速度计的工作原理,重点设计了差动电容检测方法,利用单载波调制与数字自相关解调技术构建完整的数字式加速度计信号检测方案。搭建数字式加速度计原理样机,对其进行0 g/1 g稳定性测试,得到数字式加速度计0 g/1 g零偏稳定性分别为17.595 0 g、19.363 7 g、20.715 3 g。测试结果表明,当前的数字式加速度计精度达到了模拟式加速度计精度量级,有效验证了该方案的可行性及正确性。 相似文献
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提出了一种基于微纳光栅泰伯效应的微光机电系统(MOEMS)加速度计,通过Comsol软件对加速度计结构和光栅结构参数进行优化,使其在20g量程范围内获得较大的结构灵敏度和衍射效应灵敏度,同时通过仿真分析了该结构的交叉轴串扰情况。由于受外界温度起伏影响,双层光栅结构间距受热膨胀系数的影响产生相对位移。为了减小由于温度起伏对光栅加速度计零偏的影响,采用温度闭环反馈控制技术将加速度计温度变化控制在±10 mK范围内。经实验测试,加速度计零偏稳定性达3.7μg,相较于无温控情况提升了近7倍。最终实现光栅MOEMS加速度计的灵敏度达5.23 V/g,线性相关系数为99.9%,分辨率达286.8μg。 相似文献
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为了消除传统电模拟法引入的激励信号对力矩器驱动模块造成的影响,提出了一种在数字闭环加速度计系统反馈回路数模转换器输入端叠加一个激励信号来测试系统带宽的方法.通过对该方法的电激励模型进行分析,表明在带宽测试时系统反馈回路D/A输入端叠加激励信号可以等效为外界输入的加速度.搭建测试平台测试系统带宽,实验表明,用该方法测得的数字闭环加速度计系统带宽与传统机械振动法的测试结果相接近.该方法未增加其它电路,降低了系统的复杂度,消除了电模拟法外加激励信号源对力矩器驱动模块的影响.此外,该方法操作快速简单、便于在线测试,可满足大多数数字闭环加速度计的带宽测试要求. 相似文献
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阐述了光纤光栅传感器的波长移动检测技术的发展现状,分析各种检测技术的原理和性能,并对增益光纤在FBG传感网络有源检测中的应用进行探讨。 相似文献
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精密工作台光栅定位测量与控制系统的设计 总被引:2,自引:0,他引:2
定位测量与控制系统是精密仪器中的一个重要组成部分,特别是对高精度的仪器尤为重要.精密工作台光栅定位测量与控制系统是一种包括激光干涉仪、光栅、线纹尺、感应同步器、磁栅及码盘等多个元器件组成的精确的定位测量与控制系统系统. 相似文献
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本文报道一种电容式闭环微加速度计的低噪声、开关电容CMOS接口电路。采用相同电极分时复用的方法,从而避免电容敏感与静电力反馈的馈通现象。并设计PID电路保证真空封装的高Q值加速度计的闭环稳定性及动态响应特性。整体电路结构只需单端放大器,传输门和电容。测试结果显示,接口电路工作在±5V条件下,整体微加速度计具有±3g满量程,非线性0.05%,800Hz带宽,刻度因子为1.2V/g,噪声密度为0.8μg/ 。芯片采用2um 双金属双多晶N阱CMOS工艺加工,芯片面积15.2 mm2。测试结果证明,本文电路达到高精度微加速度计系统设计要求,可以应用到地震监测、石油勘探等领域中。 相似文献
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This paper reports a low noise switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer.The time division multiplexing of the same electrode is adopted to avoid the strong feedthrough between capacitance sensing and electrostatic force feedback.A PID controller is designed to ensure the stability and dynamic response of a high Q closed-loop accelerometer with a vacuum package.The architecture only requires single ended operational amplifiers,transmission gates and capacitors.Test results show that a full scale acceleration of±3 g,non-linearity of 0.05%and signal bandwidth of 1000 Hz are achieved.The complete module operates from a±5 V supply and has a measured sensitivity of 1.2 V/g with a noise of floor of 0.8μg/(Hz)1/2 in closed-loop.The chip is fabricated in the 2μm two-metal and two-poly n-well CMOS process with an area of 15.2 mm2.These results prove that this circuit is suitable for high performance micro-accelerometer applications like seismic detection and oil exploration. 相似文献
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A cycle bridge detection method, which uses a piezoresistive triaxial accelerometer, has been described innovatively. This method just uses eight resistors to form a cycle detection bridge, which can detect the signal of the three directions for real time. It breaks the law of the ordinary independent Wheatstone bridge detection method, which uses at least 12 resistors and each four resistors connected as a Wheatstone bridge to detect the output signal from a specific direction. In order to verify the feasibility of this method, the modeling and simulating of the sensor structure have been conducted by ANSYS, then the dual cycle bridge detection method and independent Wheatstone bridge detection method are compared, the result shows that the former method can improve the sensitivity of the sensor effectively. The sensitivity of the x, y-axis used in the former method is two times that of the sensor used in the latter method, and the sensitivity of the z-axis is four times. At the same time, it can also reduce the cross-axis coupling degree of the sensor used in the dual cycle bridge detection method. In addition, a signal amplifier circuit and adder circuit have been provided, Finally, the test result of the "eight-beams/mass" triaxial accelerometer, which is based on the dual cycle bridge detection method and the related circuits, have been provided. The results of the test and the theoretical analysis are consistent, on the whole. 相似文献
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论证了一种基于SOI片上工艺的,通过光强差分测量加速度的微光机电系统(MOEMS)加速度计。器件主要结构为较大悬浮质量块对称两端加工出两面V型反射镜。系统整个微机械结构在细直弹性梁支撑下,因受惯性力作用V型镜发生位移改变,从而将引入系统中的光信号进行差分反射。最后,通过外部光电探测器测量出各通路光纤的光强信号来测算加速度值。片上微加工所得的器件经实验测量得到了:7.77×10-2 μm的结构灵敏度,1.38 kHz谐振频率,3.73 mV/g器件灵敏度和0.987的线性度。 相似文献
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This paper describes the design,simulation,processing and test result of a high sensitivity accelerometer based on the piezoresistive effect which uses an overlay bridge detection method.The structure of this accelerometer is supersymmetric "mass-beams".This accelerometer has 8 beams,where two varistors are put in the two ends.Four varistors compose a Wheatstone bridge and the output voltages of the 4 Wheatstone bridges have been superimposed as the final output voltage.The sensitivity of the accelerometer can be improved effectively by these clever methods. A simplified mathematical model has been created to analyze the mechanical properties of the sensor,then the finite element modeling and simulation have been used to verify the feasibility of the accelerometer.The results show that the sensitivity of the accelerometer is 1.1381 m V/g,which is about four times larger than that of the single bridge accelerometers and series bridge sensor.The bandwidth is 0-1000 Hz which is equal to that of the single bridge accelerometers and the series bridge sensor.The comparison reveals that the new overlay detection bridge method can improve the sensitivity of the sensor in the same bandwidth.Meanwhile,this method provides an effective method to improve the sensitivity of piezoresistive sensors. 相似文献
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设计并实现了一种能够对阵地安全实施多点监测的光纤光栅综合传感系统。从部队阵地安全监测的实际需要出发,提出光纤光栅传感技术在此方面的应用设想。叙述了光纤光栅传感技术的基本原理,提出基于ARM9的F-P滤波器光信号解调方案,选取以S3C2410A微处理器为控制核心,设计了解调系统的各组成模块。针对应用场合的特殊性,指出其封装方面的具体要求,采用多路复用和循环扫描的方式实现大范围多参数监测。通过分析相关实验数据,获取了该系统对阵地重点区域温度和应变监测的效果。针对实际应用中存在的不足提出了光纤光栅传感技术应用于 相似文献