精密测头技术的演变与发展趋势

本文从历史发展角度考察了精密测头技术的发展,分析了触发式测头、扫描式测头和非接触式光学测头的特点和应用范围,给出了最新测头案例,并对市场上存在的几种测头进行了性能比较,最后论述了精密测头技术的发展趋势。高精度、高效率、高集成化、多功能、数字化以及发展非接触测头是今后精密测头的发展方向。     

基于多色集合的三坐标测头规划方法研究

为了提高三坐标测量中测头选择的智能化和测头可达性分析的效率,提出了基于多色集合理论的测头规划方法。针对不同的被测几何要素,制定了测头"可达性判定规则";利用色多集合理论建立了测头选择与测头可达性分析相关模型,给出了基于多色集合的"测头规划算法";实现了测头类型的选择及测头角度的确定。经实例验证,表明该方法可靠、有效。     

OMNI Sip三维万向测头

测头是坐标测量机的关键部件，直接关系到测量机的工作效率和测量精度。坐标测量机测头按测量方式可分为接触式和非接触式两大类。接触式测头又可分为机械式、电气式和光电式；非接触式测头则包括光学显微镜测头和电视扫描测头等。本文介绍的瑞士Sip公司生产的OMNISip三维万向测头属于接触式光电测头。一、工作原理OMNISip三维万向测头（见图1）可在空间以任一方向进行探测。测头的设计遵循了以下计量原则：①测头无内部摩擦；②对探测方向无限制；③无非线性轴向运动。测头本身就可看作是一台微型测量机。测头内有一个可向任意方向运…     

接触式测头测量中测头半径补偿的研究

数据测量是逆向工程的关键技术。采用接触式测头测量时，由于测头半径的影响，测量得到的坐标数据并不是测头所触及的表面点的坐标，而是测头中心的坐标，使得测量产生了误差。对于测头半径的影响而产生的误差进行了分析研究，提出了几种测头半径补偿的方法。     

产品上的光线——蔡司推出可调色阶的白光测头

<正>色阶白光测头可以通过非接触的方式捕捉工件形状。色阶白光测头一般用于测量表面敏感、反光、对比度差且很难用其他光学测头测量的工件。现在蔡司推出拥有Dot Scan色阶白光测头的ZEISS ACCURA多测头测量机,这是市场上首次推出的装在旋转测座上的白光测头。进行测量时,可换成其他的接触测头或光学测     

虚拟齿轮测量中心测头系统可视化建模

通过对虚拟齿轮测量中心测头可视化实现方法进行研究,分析了测头信号的采集原理和测头结构,确定了测头的参数化结构模型。在VC++6.0基础上采用数据库检索和3DMAX建模方法,生成不同参数的3DS格式测头模型,并利用数据库检索调用测头模型文件,最终在虚拟齿轮测量中心加载显示实际效果图。     

测头圆度对齿轮极坐标测量法精度影响的分析

采用极坐标法测量圆柱齿轮的渐开线齿廓偏差时,圆球测头与齿廓的接触点在测头球面上不断变化,圆球测头的圆度误差会影响测量的精度.为此,用椭圆形球测头模拟圆球测头的圆度误差,提出了一种可以计算椭圆形球测头本身产生的测量误差的计算方法.采用该方法对不同类型的测头,在测量不同规格齿轮时产生的测量误差进行了计算和分析,归纳和总结了椭圆形球测头在多种情况下产生的测量误差的大小和变化规律.     

微纳米三坐标测量机测头的研究进展

根据微纳米三维测量的发展和研究现状,首先归纳了三维微纳米测头的技术要求并进行分类,然后对国内外微纳米CMM测头的研究进展进行了介绍和比较,指出了各种类型测头需要解决的问题。针对这些测头的局限性,探讨了正在研究的新型三维谐振触发方法和触发测头。最后对微纳米三坐标测头的研究与开发趋势进行了总结和展望。     

纳米精度在位测量系统测头误差校正方法

针对超精密机床两轴联动接触式在位测量过程中测头误差影响测量精度的问题,提出了一种测头半径误差及形状误差校正方法。进行了在位测量实验,比较分析了测头误差未校正、测头半径误差校正及测头形状误差校正三种情况的测量结果,并分别与Taylor Hobson PGI840离线测量结果进行对比,以验证测头形状误差校正方法的有效性。测头形状误差校正后,面形精度PV值由420nm变为370nm,与离线测量PV值380nm的差值为10nm。结果表明,该在位测量系统测头误差校正方法有效,能够提高在位测量精度。     

套装式双片簧三维模拟测头的研制

本文介绍了三维模拟测头的套装式双片簧结构，结构尺寸设计及影响精度的因素，并对测头的精度进行了分析，还介绍了它的测量电路。该测头采用套装式双片簧结构较三层楼式双片簧结构精度高、结构紧凑、体积小巧。它可用于三坐标测量机上作发讯测头，又可作三维测微测头     

大气电场仪标定系统的设计与仿真

文章介绍了大气电场仪的标定原理及意义,采用 ANSYS软件对大气电场仪标定系统进行仿真分析,依次分析了板间距离、探头位置和电场边缘效应对静电场环境的影响,为标定系统的设计提供了可靠的依据.     

用于SPM技术的多维纳米定位系统

扫描探针显微术是微观表面探测的关键技术,而多维定位系统是其重要组成部分.介绍了扫描探针显微技术中典型纳米级定位系统的结构、组成及其驱动技术,如压电驱动、静电驱动以及磁悬浮驱动等,分析了柔性支承微动机构的设计,并对本领域的研究热点和发展方向进行了总结和探讨.     

An insert for a helium cryostat for experiments with a tip near the surface of a sample in superfluid helium

The design of an insert for an optical helium cryostat intended for experiments with a tip near the surface of a sample in superfluid helium is described. A piezoelectric drive used in the design is based on a bimorphous piezoceramic plate for precisely bringing a standard probe of a tunneling microscope to a sample and “softly” touching its surface with the probe tip. The insert was used in an experiment with a GaAs-AlGaAs semiconductor heterostructure with a pair of tunneling-coupled quantum wells. The possibility is demonstrated of creating a lateral potential trap in the plane of quantum wells for quasi-two-dimensional indirect excitons owing to a nonuniform distribution of the electric field in the sample near the tip.     

Quasi in situ scanning force microscope with an automatic operated reaction chamber

We describe the design and performance of a quasi in situ scanning force microscope with an automatic operated reaction chamber. The design provides a repetitive hermetically sealed sample environment for successive processing. The reaction chamber is based on a combination of a flexure-guided cover, a piezo-positioning system and a force applicator system. An axial force seals the cover against the reactor enabling flow-through applications at low pressure, ambient pressure, or elevated pressure. The position stability of the sample relative to the probe is characterized and a full automated operation of the instrument is explored by the alignment of an ABC terblock copolymer thin film undergoing solvent vapor annealing in the presence of a high electric field. Due to the high electric field strength and the sharp scanning force microscope tip it is impossible to perform in situ scanning in the presence of the electric field.     

示波器探头的选择与校准

本文以常用的无源电压探头为例，论述了无源电压探头的工作原理，频率特性，探头的选择以及探头的正确使用方法和探头的校准。     

Tunneling/shear force microscopy using piezoelectric tuning forks for characterization of topography and local electric surface properties

Characterization of novel nanoelectronic structures and materials requires advanced and high-resolution diagnostic methods. In this article new approach for high sensitivity measurements of electric surface properties using scanning probe microscopy is presented. In this procedure topography and tunneling current flowing between the metallic tip and the surface are observed simultaneously. In our design piezoelectric tuning fork equipped with metallic tip in shear force microscope is used.     

V-shaped metal-oxide-semiconductor transistor probe with nano tip for surface electric properties

We design and fabricate a V-shaped metal-oxide-semiconductor (MOS) transistor probe with the focused-ion-beam (FIB) nano tip to measure surface electric properties. The V-shaped structure is selected for its better lateral stiffness, and the specific dimensions are determined using the parallel beam approximation (PBA). The deposition conditions for the nano tip are also investigated for better tip sharpness. The high working frequency of the MOS transistor improves the scanning speed and the high sensitivity reduces the additional equipment required. The detection properties of the device are investigated with PZT poling patterns. The measured results show well-defined patterns, promising that the device can detect surface electric properties with high sensitivity and high working frequency.     

刀具自动定位的安全性与可靠性

主要介绍应用压电传感器的逆压电效应,以及光电探头工作操作的安全性与可靠性.分析了压电传感器与光电探头接收装置的工作原理;并阐述了如何将压电传感器的光电扫描法寻找光电探头来进行定位,以及在机械加工中如何自动测试刀具、夹具的位置,并且自动定位使刀具的工作更加安全、可靠.     

Multichannel Langmuir probe for turbulence study in Heliotron J

New multichannel Langmuir probe system was developed and installed to Heliotron J. The objective of the new probe is to characterize basic turbulence property and the resulting transport in advanced helical configuration. The probe developed here consists of four sets of triple probe and one pin for floating potential measurement. Initial experiments in neutral beam heating plasma were conducted and fluctuation profile of radial and poloidal electric fields and Reynolds stress were estimated. For precise evaluation of the electric fields and Reynolds stress, a technique to compensate radial change of tilt angle between probe array and magnetic surface was proposed and applied to the initial results obtained in edge region of Heliotron J where the complicated magnetic structure exists.